JP2000058881A - Light receiving circuit - Google Patents

Light receiving circuit

Info

Publication number
JP2000058881A
JP2000058881A JP10220333A JP22033398A JP2000058881A JP 2000058881 A JP2000058881 A JP 2000058881A JP 10220333 A JP10220333 A JP 10220333A JP 22033398 A JP22033398 A JP 22033398A JP 2000058881 A JP2000058881 A JP 2000058881A
Authority
JP
Japan
Prior art keywords
light receiving
receiving element
preamplifier
carrier
receiving circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10220333A
Other languages
Japanese (ja)
Inventor
Nobukazu Yoshizawa
伸和 吉沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP10220333A priority Critical patent/JP2000058881A/en
Publication of JP2000058881A publication Critical patent/JP2000058881A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance

Abstract

PROBLEM TO BE SOLVED: To suppress deterioration in band characteristics of a light receiving circuit by connecting the anode or cathode of a light receiving element directly with the signal input pad of a preamplifier chip through extremely short wire bonding and limiting the parasitic inductance component to one point while shortening the connection length thereby reducing the parasitic inductance component. SOLUTION: A chip of a preamplifier 3 is mounted closely to a light receiving element in 1 flush with the plane of carrier 2 mounting the light receiving element. Since the light receiving element is connected directly with the signal input pad of the preamplifier chip through extremely short wire bonding 15, parasitic inductance is limited to one point and self inductance itself is decreased resulting in enhancement of frequency characteristic.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は広帯域用光半導体素
子装置に関し、特にプリアンプを内蔵した受光回路に関
するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a broadband optical semiconductor device, and more particularly to a light receiving circuit having a built-in preamplifier.

【0002】[0002]

【従来の技術】近年、幹線系、加入者系を問わず光通信
システムにおいては高ビットレート化が要求されてお
り、これに適応できる高速対応の光送受信デバイスの開
発がなされている。受光素子をモジュール化するには、
受光素子とプリアンプチップのマウント方法ならびにこ
れらの素子間における接続方法によって、周波数特性や
S/N等の性能が大きく左右されるため、その実装方法
に十分に工夫を払う必要がある。
2. Description of the Related Art In recent years, high bit rates have been demanded in optical communication systems irrespective of trunk systems and subscriber systems, and high-speed compatible optical transmitting and receiving devices have been developed that can meet this requirement. To make the light receiving element modular,
The performance such as frequency characteristics and S / N greatly depends on the mounting method of the light receiving element and the preamplifier chip and the connection method between these elements. Therefore, it is necessary to pay sufficient attention to the mounting method.

【0003】1.3μmや1.55μmの光波長が主に
用いられる光通信システムにおいては、受光素子の受光
特性と受光素子による光電変換電流を電圧に変換するプ
リアンプの増幅特性のそれぞれを最適化するために、現
状のデバイス技術では、受光素子にはInGaAs、プ
リアンプにはSiのように異なる材料によって個々のデ
バイスを製造し、いわゆるハイブリッド集積の技術によ
ってそれらをモジュール化することによって用いてい
る。
In an optical communication system in which light wavelengths of 1.3 μm and 1.55 μm are mainly used, the light receiving characteristic of a light receiving element and the amplification characteristic of a preamplifier for converting a photoelectric conversion current by the light receiving element into a voltage are optimized. For this purpose, in the current device technology, individual devices are manufactured from different materials such as InGaAs for the light receiving element and Si for the preamplifier, and are used by modularizing them by a so-called hybrid integration technology.

【0004】従来のハイブリッド集積構造の受光回路を
図3に示す。信号光を受光素子に導く光ファイバ100
と受光素子1とこの受光素子のみを搭載するキャリヤ2
とプリアンプ3とで主要な部品は構成されており、受光
素子の受光面は必ず光ファイバの光軸に対して垂直な面
に実装される必要があるため、受光素子のみを搭載した
キャリヤ2は受光素子を接着した面を垂直にして立て、
プリアンプ3のチップはキャリヤ2が接着されている基
板面に、その裏面を接着して設けられている。必要に応
じて用いられる光ファイバの出力光を受光面に集光する
ためのレンズは図中では省略してある。受光素子1、キ
ャリヤ2及びプリアンプ3の間の電気的な接続は、受光
素子1から出力される信号が、一旦、受光素子のみを搭
載するキャリヤ2のキャリヤ電極パタン8に受光素子−
キャリヤ接続ボンディングワイヤ13を介して接続さ
れ、キャリヤからプリアンプへはさらに異なるボンディ
ングワイヤの、キャリヤ−プリアンプ接続ボンディング
ワイヤ14によって接続されている。
FIG. 3 shows a conventional light receiving circuit having a hybrid integrated structure. Optical fiber 100 for guiding signal light to light receiving element
, Light receiving element 1 and carrier 2 on which only this light receiving element is mounted
And the preamplifier 3 constitute the main components, and the light receiving surface of the light receiving element must be mounted on a surface perpendicular to the optical axis of the optical fiber. Make the surface with the light-receiving element adhered vertically,
The chip of the preamplifier 3 is provided on a substrate surface to which the carrier 2 is adhered, with its back surface adhered. A lens for condensing the output light of the optical fiber used as necessary on the light receiving surface is omitted in the drawing. The electrical connection between the light receiving element 1, the carrier 2 and the preamplifier 3 is such that the signal output from the light receiving element 1 is once applied to the carrier electrode pattern 8 of the carrier 2 on which only the light receiving element is mounted.
The connection is made via a carrier connection bonding wire 13 and from the carrier to the preamplifier by a different bonding wire, a carrier-preamplifier connection bonding wire 14.

【0005】このため、接続ワイヤが2本に、更に受光
素子を搭載したキャリヤ2上のキャリヤ電極パターン8
及びキャリヤ電極パタン9が加わって、素子とプリアン
プとの間に寄生のインダクタンスが増大し、受光回路の
帯域特性の劣化、あるいは高周波にピーキングが発生す
るなどの原因となった。
[0005] For this reason, the carrier electrode pattern 8 on the carrier 2 on which two connecting wires and the light receiving element are mounted is further provided.
In addition, the addition of the carrier electrode pattern 9 increases the parasitic inductance between the element and the preamplifier, causing deterioration of the band characteristics of the light receiving circuit or peaking at high frequencies.

【0006】例えば、受光素子とプリアンプとの間を、
通常使用される太さ約30μmφの結線用ワイヤを用い
た場合、従来構造の場合では接続距離は5mm以上にな
り、ワイヤ自身のインダクタンスは5nH以上となる。
そのため2〜3GHz程度に帯域が制限されてしまう。
また、受光素子とプリアンプの接続距離が長いため、受
光素子とプリアンプの間でインピーダンス不整合による
信号の反射を生じ、周波数帯域が制限されることにな
る。
[0006] For example, between the light receiving element and the preamplifier,
When a connection wire having a thickness of about 30 μmφ, which is generally used, is used, in the case of the conventional structure, the connection distance is 5 mm or more, and the inductance of the wire itself is 5 nH or more.
Therefore, the band is limited to about 2 to 3 GHz.
Further, since the connection distance between the light receiving element and the preamplifier is long, signal reflection occurs due to impedance mismatch between the light receiving element and the preamplifier, and the frequency band is limited.

【0007】[0007]

【発明が解決しようとする課題】本発明は、このような
従来の実装方法に基づく受光回路の帯域特性の劣化を、
実装形態を改良することで回避しようとするものであ
る。
SUMMARY OF THE INVENTION According to the present invention, the deterioration of the band characteristic of the light receiving circuit based on such a conventional mounting method is described.
This is intended to be avoided by improving the implementation.

【0008】[0008]

【課題を解決するための手段】本発明は、受光素子を搭
載したキャリヤ上の受光素子を搭載した面と同一の平面
に、プリアンプのチップを受光素子に近接して搭載し、
受光素子のアノード又はカソードとプリアンプチップの
信号入力パッドとを極めて短い単一のワイヤボンディン
グによって直接接続することを特徴とする受光回路であ
る。
According to the present invention, a preamplifier chip is mounted in the same plane as a surface on which a light receiving element is mounted on a carrier on which the light receiving element is mounted, in the vicinity of the light receiving element.
This is a light receiving circuit characterized in that the anode or cathode of the light receiving element is directly connected to the signal input pad of the preamplifier chip by a single wire bonding that is extremely short.

【0009】[0009]

【発明の実施の形態】本発明の実施の形態について図面
を参照して詳細に説明する。
Embodiments of the present invention will be described in detail with reference to the drawings.

【0010】図1は本発明の一つの実施の形態の構成を
示す図で、受光素子1の受光面に光を導く光ファイバ及
び受光面に集光するためのレンズは従来例の図3同様で
あるため省略してある。
FIG. 1 is a diagram showing the configuration of one embodiment of the present invention. An optical fiber for guiding light to a light receiving surface of a light receiving element 1 and a lens for condensing light on the light receiving surface are the same as those in FIG. Therefore, it is omitted.

【0011】光信号を電気信号に変換する受光素子1
が、直方体のセラミック製のキャリヤ2に金属接着さ
れ、受光素子1と同じ平面に電気信号を増幅するプリア
ンプ3が同様に接着されている。受光素子1並びにプリ
アンプ3が接着されるキャリヤ2のこの面は、受光素子
1が水平に置かれた光ファイバ出射光を受光するため、
光ファイバの垂直な光出射端面に正立して、水平面に鉛
直に設置されている。また、キャリヤ2の表面にはキャ
リヤ電極パタン8〜12、および、素子の接着に必要な
金属膜のパタンが、素子接着前に予めメッキ等によって
形成されている。
Light receiving element 1 for converting an optical signal into an electric signal
However, a preamplifier 3 for amplifying an electric signal is similarly adhered to the same plane as the light receiving element 1 by metal bonding to a rectangular parallelepiped ceramic carrier 2. This surface of the carrier 2 to which the light receiving element 1 and the preamplifier 3 are adhered receives light emitted from an optical fiber on which the light receiving element 1 is placed horizontally.
The optical fiber is installed upright on a vertical light emitting end face and vertically on a horizontal plane. Further, on the surface of the carrier 2, carrier electrode patterns 8 to 12 and a metal film pattern necessary for bonding the elements are formed by plating or the like before bonding the elements.

【0012】受光素子1のアノードまたはカソードと、
プリアンプ入力パッド4が受光素子−プリアンプ接続ボ
ンディングワイヤ15によって電気的に直接接続されて
いる。アノード/カソードの接続の違いは、キャリヤ電
極パタン8に接続される、受光素子の逆バイアスが負電
源の場合は受光素子のアノードと、受光素子の逆バイア
スが正電源の場合には受光素子のカソードと接続するこ
とになる。受光素子1で変換された受光電流はプリアン
プ3によって増幅され、プリアンプの出力信号はプリア
ンプ出力パッド5からキャリヤ電極パタン10及び11
へ出力される。プリアンプ3の電源は、キャリヤに設け
られたキャリヤ電極パタン9及び12からプリアンプV
ccパッド6及びプリアンプVeeパッド7へと供給さ
れる。
An anode or a cathode of the light receiving element 1;
The preamplifier input pad 4 is electrically directly connected by a light receiving element-preamplifier connection bonding wire 15. The difference between the anode / cathode connection is that the anode of the light receiving element connected to the carrier electrode pattern 8 is connected to the anode of the light receiving element when the reverse bias of the light receiving element is a negative power supply, and the light receiving element is connected when the reverse bias of the light receiving element is the positive power supply. It will be connected to the cathode. The light receiving current converted by the light receiving element 1 is amplified by the preamplifier 3, and the output signal of the preamplifier is supplied from the preamplifier output pad 5 to the carrier electrode patterns 10 and 11.
Output to The power of the preamplifier 3 is supplied from the carrier electrode patterns 9 and 12 provided on the carrier to the preamplifier V.
It is supplied to the cc pad 6 and the preamplifier Vee pad 7.

【0013】この実装方法における、キャリヤ電極パタ
ン8からプリアンプ出力パッド5に至る間の等価回路を
図2に示す。受光素子1を取り巻く等価回路素子はキャ
リヤ電極パタン8のもつ等価インダクタンスと受光素子
−プリアンプ接続ボンディングワイヤ15のもつ等価イ
ンダクタンスとを中心に考えることが出来る。同様の等
価回路を、従来の実装方法である図3の場合に適用した
のが図4である。
FIG. 2 shows an equivalent circuit from the carrier electrode pattern 8 to the preamplifier output pad 5 in this mounting method. The equivalent circuit elements surrounding the light receiving element 1 can be considered mainly with the equivalent inductance of the carrier electrode pattern 8 and the equivalent inductance of the bonding wire 15 for connecting the light receiving element and the preamplifier. FIG. 4 shows a case where the same equivalent circuit is applied to the case of FIG. 3 which is a conventional mounting method.

【0014】両者を見比べて分かるように、受光素子1
とプリアンプ3との間に、本発明の実装方法である図1
の構造では現れないが、従来の実装方法である図3の場
合では現れる、キャリヤ−プリアンプ接続ボンディング
ワイヤ14で発生する寄生インダクタンスとキャリヤ電
極パタン9で発生する寄生インダクタンスが加わり、こ
れらが受光回路の周波数特性を劣化させるのに対し、本
発明の実装方法では、これらの浮遊インダクタンスが取
り払われ、良好な周波数特性を得られる。例えば受光素
子1とプリアンプ入力パッド4間の接続のためのワイヤ
ボンディングの長さは、受光素子、プリアンプを同一の
キャリヤ上の同一の面に、極く近接して設置することが
出来るため、従来の技術では5mmも要したものが、
0.1mm以下にもすることが出来、インダクタンスの
減少による帯域幅の増大も50倍も見込むことが出来
る。
As can be seen by comparing the two, the light receiving element 1
FIG. 1 showing a mounting method according to the present invention between FIG.
3, the parasitic inductance generated by the carrier-preamplifier connection bonding wire 14 and the parasitic inductance generated by the carrier electrode pattern 9 appearing in the case of the conventional mounting method shown in FIG. While the frequency characteristics are degraded, in the mounting method of the present invention, these stray inductances are removed, and good frequency characteristics can be obtained. For example, the length of the wire bonding for connection between the light receiving element 1 and the preamplifier input pad 4 is such that the light receiving element and the preamplifier can be placed very close to the same surface on the same carrier. The technology required 5mm,
The width can be reduced to 0.1 mm or less, and an increase in bandwidth due to a decrease in inductance can be expected to be 50 times.

【0015】本発明の実装方法を取ることによって、受
光素子には高性能のInGaAs結晶成長技術に基づく
素子を、またプリアンプチップにはSi集積回路チップ
やGaAs集積回路チップなどを、それぞれの特性を殺
さずに生かすことが出来るため、モジュールの設計の自
由度が格段に向上する。
By adopting the mounting method of the present invention, a light-receiving element can be made to have an element based on a high-performance InGaAs crystal growth technique, and a preamplifier chip can have a Si integrated circuit chip or a GaAs integrated circuit chip. Since it can be used without killing, the degree of freedom in module design is greatly improved.

【0016】[0016]

【発明の効果】従来の実装方法に基づく受光回路では、
受光素子から出力される信号は、一旦、キャリヤの電極
にボンディングワイヤで接続されるか、あるいは、キャ
リヤの電極パターンへと接続され、キャリヤからはさら
に異なるボンディングワイヤでプリアンプの入力パッド
へと接続される。このため、ワイヤボンディングが2
本、またはワイヤボンディングとキャリヤ電極のパター
ンにより受光素子とプリアンプとが接続されることにな
り、受光素子とプリアンプの間に寄生のインダクタンス
成分が2ヶ所発生する。この寄生インダクタンス成分に
より受光回路のS/Nが劣化し、また、その光電変換信
号の周波数特性に於いて、高周波の帯域が劣化したり、
あるいは高周波にピーキングが発生するなどの原因とな
った。
In the light receiving circuit based on the conventional mounting method,
The signal output from the light receiving element is once connected to the carrier electrode by a bonding wire, or connected to the carrier electrode pattern, and further connected to the preamplifier input pad by a different bonding wire from the carrier. You. For this reason, wire bonding is 2
The light receiving element and the preamplifier are connected by the pattern of the book or the wire bonding and the carrier electrode, and two parasitic inductance components occur between the light receiving element and the preamplifier. Due to this parasitic inductance component, the S / N of the light receiving circuit deteriorates, and in the frequency characteristic of the photoelectric conversion signal, the high frequency band deteriorates,
Alternatively, peaking occurred at a high frequency.

【0017】これに対して、本発明の構造に基づく受光
回路では、受光素子を搭載したキャリヤ上の受光素子を
搭載した面と同一の平面に、プリアンプのチップを受光
素子に近接して搭載し、受光素子のアノード又はカソー
ドとプリアンプチップの信号入力パッドとを極めて短い
ワイヤボンディングによって直接接続するために、寄生
インダクタンス成分が1ヶ所になり、また接続長が短小
化するために、寄生インダクタンス成分が減少すること
により、上記の問題を解決することが可能になる。
On the other hand, in the light receiving circuit based on the structure of the present invention, the chip of the preamplifier is mounted close to the light receiving element on the same plane as the light receiving element mounted on the carrier on which the light receiving element is mounted. In order to directly connect the anode or cathode of the light receiving element and the signal input pad of the preamplifier chip by extremely short wire bonding, a parasitic inductance component is provided at one place, and since the connection length is reduced, the parasitic inductance component is reduced. The reduction makes it possible to solve the above problem.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態の受光回路の構造を示す斜
視図。
FIG. 1 is a perspective view showing the structure of a light receiving circuit according to an embodiment of the present invention.

【図2】本発明の実施の形態の受光回路の等価回路。FIG. 2 is an equivalent circuit of a light receiving circuit according to the embodiment of the present invention.

【図3】従来の受光回路の構造を示す斜視図。FIG. 3 is a perspective view showing the structure of a conventional light receiving circuit.

【図4】従来の受光回路の等価回路。FIG. 4 is an equivalent circuit of a conventional light receiving circuit.

【符号の説明】[Explanation of symbols]

1 受光素子 2 キャリヤ 3 プリアンプ 4 プリアンプ入力パッド 5 プリアンプ出力パッド 6 プリアンプVccパッド 7 プリアンプVeeパッド 8〜12 キャリヤ電極パタン 13 受光素子−キャリヤ接続ボンディングワイヤ 14 キャリヤ−プリアンプ接続ボンディングワイヤ 15 受光素子−プリアンプ接続ボンディングワイヤ REFERENCE SIGNS LIST 1 light receiving element 2 carrier 3 preamplifier 4 preamplifier input pad 5 preamplifier output pad 6 preamplifier Vcc pad 7 preamplifier Vee pad 8 to 12 carrier electrode pattern 13 light receiving element-carrier connection bonding wire 14 carrier-preamplifier bonding wire 15 light receiving element-preamplifier connection Bonding wire

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 受光素子と該受光素子の光電変換信号を
増幅するプリアンプとを同一のキャリヤに搭載したこと
を特徴とする受光回路。
1. A light receiving circuit, wherein a light receiving element and a preamplifier for amplifying a photoelectric conversion signal of the light receiving element are mounted on the same carrier.
【請求項2】 受光素子と該受光素子の光電変換信号を
増幅するプリアンプとを同一のキャリヤの同一平面上に
搭載したことを特徴とする受光回路。
2. A light receiving circuit, wherein a light receiving element and a preamplifier for amplifying a photoelectric conversion signal of the light receiving element are mounted on the same carrier and on the same plane.
【請求項3】 同一のキャリヤの同一平面上に搭載した
受光素子と該受光素子の光電変換信号を増幅するプリア
ンプの信号入力パッドとを単一のワイヤボンディングに
よって接続したことを特徴とする受光回路。
3. A light receiving circuit wherein a light receiving element mounted on the same carrier on the same plane and a signal input pad of a preamplifier for amplifying a photoelectric conversion signal of the light receiving element are connected by a single wire bonding. .
【請求項4】 前記キャリヤがセラミックであることを
特徴とする前記請求項1または2または3記載の受光回
路。
4. The light receiving circuit according to claim 1, wherein said carrier is ceramic.
【請求項5】 前記受光素子がInGaAs系フォトダ
イオードであり、また前記プリアンプがSi集積回路素
子であることを特徴とする前記請求項1または2または
3記載の受光回路。
5. The light receiving circuit according to claim 1, wherein the light receiving element is an InGaAs photodiode, and the preamplifier is a Si integrated circuit element.
【請求項6】 前記受光素子がInGaAs系フォトダ
イオードであり、また前記プリアンプがGaAs集積回
路素子であることを特徴とする前記請求項1または2ま
たは3記載の受光回路。
6. The light receiving circuit according to claim 1, wherein the light receiving element is an InGaAs photodiode, and the preamplifier is a GaAs integrated circuit element.
JP10220333A 1998-08-04 1998-08-04 Light receiving circuit Pending JP2000058881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10220333A JP2000058881A (en) 1998-08-04 1998-08-04 Light receiving circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10220333A JP2000058881A (en) 1998-08-04 1998-08-04 Light receiving circuit

Publications (1)

Publication Number Publication Date
JP2000058881A true JP2000058881A (en) 2000-02-25

Family

ID=16749512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10220333A Pending JP2000058881A (en) 1998-08-04 1998-08-04 Light receiving circuit

Country Status (1)

Country Link
JP (1) JP2000058881A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003197929A (en) * 2001-12-27 2003-07-11 Mitsubishi Electric Corp Light receiving element carrier and light receiving device
US7021840B2 (en) 2002-06-25 2006-04-04 Sumitomo Electric Industries, Ltd. Optical receiver and method of manufacturing the same
US7171128B2 (en) 2001-10-25 2007-01-30 Opnext Japan, Inc. Optical signal receiving module, optical signal receiver and optical fiber communication equipment
JP2011253904A (en) * 2010-06-01 2011-12-15 Mitsubishi Electric Corp Optical reception module

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7171128B2 (en) 2001-10-25 2007-01-30 Opnext Japan, Inc. Optical signal receiving module, optical signal receiver and optical fiber communication equipment
JP2003197929A (en) * 2001-12-27 2003-07-11 Mitsubishi Electric Corp Light receiving element carrier and light receiving device
US7046936B2 (en) 2001-12-27 2006-05-16 Mitsubishi Denki Kabushiki Kaisha Light receiving element carrier and optical receiver
US7021840B2 (en) 2002-06-25 2006-04-04 Sumitomo Electric Industries, Ltd. Optical receiver and method of manufacturing the same
JP2011253904A (en) * 2010-06-01 2011-12-15 Mitsubishi Electric Corp Optical reception module

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