JP2000058565A - Position correcting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent contact abrasion between a sucking path member and a rotary stage as well as the fluctuation of suction force, by arranging the sucking path member and rotary stage having a suction hole in a manner that they are not in contact with each other with a void therebetween. SOLUTION: A rotary stage 11 is provided with a rotary shaft 16 which is held freely rotatably on a frame 14 by a rolling bearing 15 and a suction hole 13 to suck a pellet 1 on a rotary central shaft thereof respectively. A belt 18 is wound around a pulley 17 fixed on the end of the rotary shaft 16 so as to give a rotating force thereto, and the quantity of rotation of a motor is controlled to adjust the rotary angular position of the rotary shaft 16. A sucking path member 21 screwed in the supporting bracket 14A of the frame 14 is inserted in a hollow part 16A which is provided on the rotary central shaft of the rotary shaft 16 in the rotary stage 11. A vacuum pressure supplied to a suction hole 21B of the sucking path member 21 is regulated by means of small void in the midway to the suction hole 13 of the rotary stage 11. Therefore, the leakage of vacuum pressure in the clearance between the sucking path member 21 and hollow part 16A can be eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position correcting device for correcting the position of an article placed on a rotary stage in the rotational direction.

[0002]

2. Description of the Related Art Conventionally, using a pellet bonding apparatus or the like,
In order to correct the positional deviation of the pellets taken out of the wafering unit on the wafer stage in the rotational direction, a position correcting device as described in JP-A-7-201897 is used.

[0003] As shown in FIG.
A rotary stage 2 having a suction hole 2A for sucking a semiconductor pellet 1 is provided on a gantry 3 and supported rotatably on a bush 4, and a belt 7 is wound around a pulley 6 fixed to a rotary shaft 5 of the rotary stage 2 to rotate the rotary force. And rotating stage 2
Is adjustable. Then, the vacuum supply pipe 8 connected to the vacuum source is connected to the base 3, the bush 4, and the suction path provided in the rotary shaft 5, and the vacuum pressure supplied to the suction hole 5A of the rotary shaft 5 is applied to the rotary stage 2. It is made to affect the suction hole 2A. As a result, the pellet 1 is attracted to the rotary stage 2, and the rotational position shift can be corrected by adjusting the rotational angle position of the rotary stage 2.

[0004]

In the prior art, the bush 4 is used as a bearing of the rotary stage 2 in order to prevent leakage of the vacuum pressure supplied to the rotary shaft 5 of the rotary stage 2. However, the bush 4 gradually wears due to the rotation of the rotary stage 2, the vacuum pressure supplied to the rotary shaft 5 gradually leaks, and as a result, the suction force of the rotary stage 2 gradually decreases. As a result, the rotating stage 2 cannot stably suck the pellets 1, and when the rotating stage 2 rotates, the pellets 1 sucked to the rotating stage 2 are displaced, and there is a possibility that the bonding accuracy may be reduced.

An object of the present invention is to provide a position correcting device,
An object of the present invention is to prevent contact abrasion between a suction path member, which exerts a vacuum force on a suction hole of a rotary stage, and the rotary stage, and to prevent fluctuation of the suction force of the rotary stage due to wear between the two.

[0006]

According to a first aspect of the present invention, a rotary stage having a suction hole is rotatably supported.
In a position correction device for applying a vacuum pressure supplied to a suction hole of a suction path member connected to a vacuum source to a suction hole of a rotary stage, the suction path member and the rotary stage are arranged in a non-contact manner via a gap. It is like that.

According to a second aspect of the present invention, in the first aspect of the present invention, the vacuum pressure applied to the suction hole of the rotary stage is further adjusted by adjusting a gap between the suction path member and the rotary stage. Is provided.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the rotary stage is further supported by a rolling bearing.

The present invention described in claim 4 provides the invention according to claims 1 to 3.
Further, in the present invention according to any one of the above, the suction path member is disposed through the suction hole of the rotary stage, the suction path member and the suction work position below the surface level of the rotary stage,
Means for switching and moving to a thrust position above the surface level of the rotary stage.

[0010]

According to the first aspect of the present invention, the following operations are provided. Since the rotation path and the suction path member that exerts a vacuum force on the suction hole of the rotation stage are arranged in a non-contact manner through a gap,
No contact wear occurs between them. Therefore, there is no leak of vacuum pressure due to wear between the two, and it is possible to prevent fluctuations in the attraction force of the rotary stage. This makes it possible to stably adsorb an article to be adsorbed such as a pellet, and prevent the pellet or the like adsorbed on the rotary stage from being displaced.

According to the second aspect of the present invention, the following operations are provided. By adjusting the gap between the suction path member and the rotary stage to be small, the vacuum pressure leaking from the gap can be reduced as much as possible.

The vacuum pressure acting on the suction holes of the rotary stage increases as the above-mentioned gap becomes smaller, as long as the vacuum pressure applied to the suction path member is the same. Therefore, by adjusting the gap amount between the suction path member and the rotary stage, it is possible to adjust the suction force generated in the suction holes of the rotary stage. This means that it is possible to cope in a short time when the kind of pellet or the like changes and it is necessary to adjust the suction force to be generated in the suction hole of the rotary stage.

According to the third aspect of the present invention, the following operations are provided. Since the rotary stage is supported by rolling bearings, the durability of the bearing is greatly improved as compared with the case where the rotary stage is supported by a sliding bearing such as a bush, and rattling of the rotary stage due to bearing wear can be prevented over a long period of time. Therefore, it is possible to prevent the displacement of the pellet or the like due to the backlash of the rotary stage for a long time.

Since the rotating stage is supported by rolling bearings, the durability of the bearing is greatly improved as described above, and the rattling of the rotating stage due to bearing wear can be prevented for a long period of time. The frequency of the inspection and the frequency of the replacement work of the position correcting device when the backlash exceeds the allowable value can be reduced, and the burden on the operator due to the periodic inspection and the replacement work can be reduced. Further, it is possible to avoid a decrease in productivity due to the stoppage of the apparatus due to the periodic inspection and replacement work.

According to the present invention, there is provided the following operation. By switching and moving the suction path member between a suction operation position lower than the surface level of the rotary stage and a thrusting position above the surface level, the suction operation and the thrusting operation of the pellets and the like are performed by a single device configuration. It is possible,
The device configuration can be simplified.

[0016]

FIG. 1 is a schematic diagram showing a first embodiment, FIG. 2 is a schematic diagram showing a second embodiment, and FIG. 3 is a schematic diagram showing a conventional example.

(First Embodiment) (FIG. 1) The position correcting device 10 is used in, for example, a pellet bonding device described in Japanese Patent Application Laid-Open No. 7-201897, and a position for taking out a pellet from a wafering unit and a position on a substrate. It is arranged between the pellet bonding position. That is, the pellet 1 is taken out from the wafering unit by the suction nozzle of the pellet take-out arm, and the pellet 1 is mounted on the position correcting device 10 to correct the rotational displacement of the pellet 1, and the pellet 1 after the position correction is removed. The pickup is picked up by a suction nozzle of a pellet supply arm and can be bonded to a substrate. At this time, the position correcting device 10 includes a rotary stage 11 and a suction path member 21, as shown in FIG.

The rotary stage 11 has a rotary shaft 16 rotatably supported by a rolling bearing 15 on a gantry 14 and has a suction hole 13 for sucking the pellet 1 on a center axis of its rotation. And the rotating stage 11
The belt 1 is attached to a pulley 17 fixed to the end of the rotating shaft 16.
8, a rotational force is applied, and its rotational angle position can be adjusted by controlling the rotation amount of a motor (not shown).

The rotary stage 11 is configured such that a male screw portion 21A of a round bar-shaped suction path member 21 is screwed to a support bracket 14A integral with the gantry 14, and can be locked by a lock nut 22. The suction path member 21 is connected to a vacuum supply pipe 23 connected to a vacuum source, and a suction hole 21 for transmitting vacuum pressure.
B is drilled.

Here, the support bracket 14A of the gantry 14
Is inserted into a hollow portion 16A provided on the rotation center axis of the rotation shaft 16 of the rotation stage 11. Then, the distal end surface of the suction path member 21 and the hollow portion 1
6A, the side surface of the suction path member 21 and the hollow portion 1
6A, the suction path member 21
And the rotating shaft 16 of the rotating stage 11 are arranged in non-contact. As a result, the vacuum pressure supplied to the suction holes 21B of the suction path member 21 is applied to the suction holes 13 of the rotary stage 11 through the above-described minute gaps. The vacuum pressure supplied to the suction hole 21B of the suction path member 21 is such that even if the vacuum pressure leaks from the minute gap between the suction path member 21 and the hollow portion 16A, the pellet 1 is not removed by the suction hole 13 of the rotary stage 11. The vacuum pressure is set to a level that does not interfere with the suction.

In the position correcting device 10, the screw portion 21 A of the suction path member 21 is
By changing the screwing position, the amount of air gap between the distal end surface of the suction path member 21 and the ceiling surface of the hollow portion 16A is adjusted, and the vacuum pressure applied to the suction holes 13 of the rotary stage 11 is reduced. Adjustable. Thereby, the suction path member 21
Leakage of vacuum pressure from the gap between the air gap and the hollow portion 16A can be minimized, and the vacuum pressure to be applied to the suction holes 13 of the rotary stage 11 can be adjusted in a short time in accordance with the type of pellet.

The procedure for adjusting the gap between the front end surface of the suction path member 21 and the ceiling surface of the hollow portion 16A by changing the screwing position of the suction path member 21 is described in, for example, the following (a) or (b). ).

(A) The tip end surface of the suction path member 21 is
The suction path member 21 is screwed to a position where the suction path member A reaches the ceiling surface. Next, the rotary stage 11 is manually rotated while the suction path member 21 is gradually rotated in the reverse direction. When the rotary stage 11 is rotated without resistance, the suction path member 21 is fixed. At this time, if the belt 18 is removed, a change in the rotation resistance of the rotary stage 11 can be easily understood.
The suction path member 21 is fixed by tightening the lock nut 22.

(B) The rotary stage 11 is rotated at a constant speed by a motor. The suction path member 21 is screwed in little by little, and a change in the rotation speed of the motor at this time is detected by a speed detector provided in the motor. At the screwing position which is returned by a predetermined amount from the position where the rotation speed of the motor is lowered, the suction path member 2
Fix 1

Therefore, the position correcting device 10 is used as follows. (1) Adjust the screwing position of the suction path member 21 to the support bracket 14A of the gantry 14 according to the type of the pellet 1,
Appropriate vacuum pressure can be applied to the suction holes 13 of the rotary stage 11.

(2) The pellet 1 taken out by the suction nozzle of the pellet take-out arm is placed on the rotary stage 11,
The pellet 1 is sucked by the vacuum pressure applied to the suction hole 13 of the rotary stage 11 from the suction path member 21.

(3) The rotary stage 11 is rotated at an appropriate angle to correct the positional deviation of the pellet 1 in the rotation direction.

(4) The pellet 1 whose position has been corrected in the above (3) is picked up and bonded by the suction nozzle of the pellet supply arm.

According to this embodiment, the following operations are provided. Since the suction path member 21 for applying a vacuum force to the suction hole 13 of the rotary stage 11 and the rotary stage 11 are arranged in a non-contact manner through a gap, no contact wear occurs between them. Therefore, there is no leakage of vacuum pressure due to wear between the two,
Variations in the suction force of the rotating stage 11 can be prevented. Thereby, the pellet 1 can be stably adsorbed, and the rotating stage 1
It is possible to prevent the displacement of the pellet 1 adsorbed by the pellet 1 and to maintain stable bonding accuracy.

By adjusting the gap between the suction path member 21 and the rotary stage 11 to be small, the vacuum pressure leaking from this gap can be minimized.

The vacuum pressure acting on the suction holes 13 of the rotary stage 11 increases as the above-mentioned gap becomes smaller if the vacuum pressure applied to the suction path member 21 is the same. Therefore, the suction force generated in the suction holes 13 of the rotary stage 11 can be adjusted by adjusting the gap amount between the suction path member 21 and the rotary stage 11. This is because the type of pellet 1 changes,
This means that when it is necessary to adjust the suction force to be generated in the suction holes 13 of the rotary stage 11, it can be dealt with in a short time.

Since the rotating stage 11 is supported by the rolling bearing 15, the bearing durability is greatly improved as compared with the case where the rotating stage 11 is supported by a sliding bearing such as a bush, and the rotating stage 11 is loose due to bearing wear over a long period of time. Sticking can be prevented.
Therefore, the pellet 1 due to the rattling of the rotary stage 11
Can be prevented for a long time, and stable bonding accuracy can be maintained.

Since the rotating stage 11 is supported by the rolling bearings 15, the durability of the bearing is greatly improved as described above, and the rattling of the rotating stage 11 due to bearing wear can be prevented for a long period of time. The frequency of the regular check for rattling and the frequency of replacement work of the position correcting device when the rattling exceeds the allowable value can be reduced, and the burden on the operator involved in the periodic check and replacement work can be reduced. Further, it is possible to avoid a decrease in productivity due to the stoppage of the apparatus due to the periodic inspection and replacement work.

In the suction passage member 21, the diameter of the external thread portion 21A is made larger than the diameter of the portion of the rotary stage 11 that enters the hollow portion 16A, so that the suction passage member 21 Support bracket 14 from below
A can be screwed into the female screw portion of the suction path member 21. After the assembly of the rotation mechanism and the like around the rotary stage 11 is completed at the time of assembling the position correcting device 10,
Can be assembled, and assembling of the position correcting device 10 can be easily performed as compared with the case where the suction path member 21 is assembled from the upper side of the gantry 14.

(Second Embodiment) (FIG. 2) The second embodiment is different from the first embodiment in that the ceiling of a hollow portion 16A provided on the rotating shaft 16 of the rotary stage 11 is removed, and the suction path member 21 is removed. The suction passage member 21 is supported by a bearing 14B provided on a support bracket 14A so that the suction passage member 21 can be moved up and down while being disposed through the suction hole 13A formed by the hollow portion 16A. A cam 31 is used as a driving source for the vertical movement of the suction path member 21, and the cam 31 and the suction path member 2 are used.
1 and a cam follower 32 at the base end thereof.

In the second embodiment, the rotation position of the cam 31 is adjusted, and the distal end surface of the suction path member 21 is set slightly below the pellet mounting surface (surface) of the rotary stage 11, and the mounting is performed. A minute gap is formed between the bottom surface of the semiconductor pellet 1 placed on the surface and the tip end surface of the suction path member 21, and the gap can be adjusted by changing the rotation angle of the cam 31. Things.

Further, in the second embodiment, the cam 31
As a result, the suction path member 21 is moved to the suction work position below the level of the pellet mounting surface of the rotary stage 11 and the rotary stage 1
It is also conceivable to make it possible to switch to a push-up position above the level of the pellet mounting surface 1 so that the pick-up operation of the pellet 1 after correcting the pellet position can be performed efficiently. That is, first, the tip surface of the suction path member 21 is positioned slightly below the pellet mounting surface of the rotary stage 11 by the cam 31. Immediately after being transported for position correction, the semiconductor pellet 1 is suction-held on the rotary stage 11 by the suction force of the suction path member 21. Thereafter, a predetermined position correcting operation is performed. When the position correcting operation is completed, the cam 31 rotates again to raise the suction path member 21 and push the semiconductor pellet 1 upward from the stage surface. The suction nozzle 100 that has been waiting picks up the pellet pushed up by the suction path member 21.

Therefore, according to the second embodiment, the suction path member 21 is switched between the suction operation position below the pellet mounting surface level of the rotary stage 11 and the push-up position above the mounting surface level. Thus, the adsorption operation and the pushing-up operation of the pellet 1 can be performed together with a single device configuration, and the device configuration can be simplified. Further, since the suction path member 21 performs the pushing-up operation of the pellet 1,
Even when the pellet 1 is in close contact with the pellet mounting surface of the rotary stage 11, it can be reliably peeled off, and a pickup error by the suction nozzle 100 can be prevented.

The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and the design can be changed without departing from the scope of the present invention. The present invention is also included in the present invention. For example, the present invention is not limited to using semiconductor pellets as position-correcting articles, but can be widely applied to position correction of general articles.

In the embodiment of the present invention, the bearing for supporting the rotary stage is not limited to a rolling bearing, but may be an air bearing or the like.

In the embodiment of the present invention, the means for adjusting the gap between the suction path member and the rotary stage includes:
It is not limited to a screw, a cam, or the like. Further, the suction path member cannot be moved relative to the rotation stage in order to adjust the gap between the suction path member and the rotation stage. It may be used by fixing the gap.

In the embodiment of the present invention, the suction path member may be fixed to a gantry, and the hollow rotary shaft of the rotary stage may be rotatably supported around the suction path member via a rolling bearing. Also in this case, the suction path member and the hollow rotary shaft of the rotary stage are arranged in a non-contact manner via a gap.

[0043]

As described above, according to the present invention, in the position correcting apparatus, contact abrasion between the suction path member exerting a vacuum force on the suction hole of the rotary stage and the rotary stage is prevented, and wear between the two is reduced. It is possible to prevent the fluctuation of the suction force of the rotating stage caused by the fluctuation.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment.

FIG. 2 is a schematic diagram showing a second embodiment.

FIG. 3 is a schematic view showing a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Position correction apparatus 11 Rotation stage 13, 13A Suction hole 15 Rolling bearing 21 Suction path member 21A Male screw part (gap amount adjustment means) 21B Suction hole 31 Cam (gap amount adjustment means) (switching movement means)

Claims (4)

[Claims] 1. A position correcting device for rotatably supporting a rotary stage having a suction hole and applying a vacuum pressure supplied to a suction hole of a suction path member connected to a vacuum source to the suction hole of the rotary stage. A position correcting device, wherein a suction path member and a rotary stage are arranged in a non-contact manner via a gap. 2. The position correcting apparatus according to claim 1, further comprising means for adjusting a gap between the suction path member and the rotary stage to adjust a vacuum pressure applied to a suction hole of the rotary stage. 3. The position correcting device according to claim 1, wherein said rotary stage is supported by a rolling bearing. 4. The suction path member is disposed so as to penetrate through a suction hole of a rotary stage. The position correcting device according to any one of claims 1 to 3, further comprising means for enabling switching movement.