JP2000053238A - Substrate carrier system, substrate carrier controller substrate carrier control method, and mechanically readable record medium recording substrate carrier control program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the collision of transfer by two carrier system in a process carrier system coexisting both of a floor carrier and a ceiling carrier. SOLUTION: This is a substrate carrier system having a floor carrier means 7, a ceiling carrier means 3, a detection part 23 for detecting the position of the floor carrier means 7, an interception part 17 which intercepts the transfer of the substrate 9 between manufacturing equipment 13 and the floor carrier means 7, and a control part 21 which inputs the results detected by the detection part 23 and controls the interception action of an interception part 17 based on the detection results.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transport system, a substrate transport control device, a substrate transport control method, and a machine-readable recording medium on which a substrate transport control program is recorded. The present invention relates to a technology that is effective for semiconductor substrate transport in a coexisting semiconductor factory.

[0002]

2. Description of the Related Art Generally, the inside of a semiconductor factory is divided into rooms for respective manufacturing processes which are grouped into a same type of semiconductor manufacturing apparatus group. Therefore, the processing of a product (semiconductor substrate) proceeds while moving back and forth between rooms or between rooms. Products are transported in transport jigs. In this case, transport in the room (hereinafter, referred to as “in process”) is transported in the process, and transport between rooms (hereinafter, “between processes”) is performed. This is called inter-process transfer. Conventionally, these two transports are performed by different transport systems. In-process transfer is mainly performed on the floor. This on-floor transport is a system in which a self-propelled transport vehicle or a manual transport vehicle travels on the floor. On the other hand, ceiling transportation is used for transportation between processes. This ceiling transport is a system in which a rail is installed near the ceiling in a semiconductor factory, and transport equipment runs along the rail.

[0003] In recent years, ceiling conveyance has also been adopted as intra-process conveyance. This is because if the ceiling conveyance is possible, the number of stockers is reduced, and the cost of the stockers is reduced.
Further, since the dead space near the ceiling is used, space efficiency is improved. Therefore, development of ceiling orbit type transfer equipment for the process of hanging the product from the ceiling and directly transferring the product to the apparatus has been promoted.

[0004]

When the above-mentioned overhead track type transfer equipment is introduced into a semiconductor factory, as shown in FIG. 4, the conventional on-floor transfer and the above-mentioned overhead transfer are performed in one process when the factory is started up. Simultaneous use can occur. FIG.
(A) is a diagram illustrating a transport system in which on-floor transport and ceiling transport coexist, and (b) is a diagram viewed from a direction indicated by A in (a). The transport system shown in FIG. 4 uses both overhead transport in which the transport equipment 3 travels along the rail 1 and on-floor transport in which the transport trolley 7 travels on the floor by the operator 5. In such a transport system, it is necessary to prevent the transfer of the product from the transport device 3 traveling on the ceiling and the transfer of the product from the transport vehicle traveling on the floor from being performed at the same time due to safety problems. With the increase in the diameter of the semiconductor substrate, the total weight of the products transported by one transport device 3 is extremely heavy at about 15 kg, and the transfer from the transport vehicle 7 and the transfer from the transport device 3 overlap. Because it is very dangerous. Further, this situation is not limited to the operator 5's mistake, but can be caused sufficiently by a trouble in the control system of the transport equipment 3.

[0005] For this reason, installation of the safety cover 17 has been attempted. Usually, a load port 15 is arranged on the front surface of the semiconductor manufacturing apparatus 13. The transport jig 11 is transferred to a storage position prepared on the load port 15, and then the semiconductor substrate 9 is carried into the apparatus 13 from the transport jig 11 by, for example, a robot arm (not shown).
This load port 15 is provided with a safety cover 17 and is normally kept closed. Then, the operator 5 opens the safety cover 17 by the switch 37 at the stage of transferring the product from the transport vehicle 7.

However, although this method can call attention to the operator 5, it is impossible to completely avoid the mistake, and more complete safety measures are actually required.

[0007] Further, a transport system in which on-floor transport and overhead transport coexist can be sufficiently used not only when starting up a factory but also after starting up. For example, when the ceiling transport system stops for some reason. Furthermore, there may be a case where the operator 5 has to transfer the semiconductor substrate directly to the specific device 13 using the carrier 7 due to a sudden device trouble or a sample preparation.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an apparatus in which semiconductor substrates are transferred by ceiling transportation in an in-process transportation system in which floor transportation and ceiling transportation coexist. By providing means for preventing transfer by floor transport,
An object of the present invention is to provide a substrate transport system, a substrate transport control device, a substrate transport control method, and a machine-readable recording medium on which a substrate transport control program is recorded, which can prevent collision of transfer by two transport systems.

[0009]

In order to achieve the above-mentioned object, a first feature of the present invention is a detecting section for detecting at least one of a position on a floor and a position on a ceiling for transferring a substrate to a manufacturing apparatus. A blocking unit that blocks transfer of a substrate between the manufacturing apparatus and the on-floor transfer unit; and a control unit that inputs a result detected by the detection unit and controls a blocking operation of the blocking unit based on the detection result. And a substrate transfer control device having the following.

A second feature of the present invention is a step of detecting at least one of the position of the on-floor transfer means and the ceiling transfer means for transferring the substrate to the manufacturing apparatus, and based on the detection result, the manufacturing apparatus and the on-floor transfer means. Intercepting the substrate transfer between the means, wherein the substrate transfer of the floor transfer means and the substrate transfer of the ceiling transfer means do not collide with each other.

A third feature of the present invention is a step of detecting at least one of the position of the on-floor transfer means and the ceiling transfer means for transferring the substrate to the manufacturing apparatus, and based on the detection result, the manufacturing apparatus and the on-floor transfer means. Cutting off the substrate transfer between the means, and a machine-readable recording in which a substrate transfer control program for preventing a collision between the substrate transfer of the on-floor transfer means and the substrate transfer of the ceiling transfer means is recorded. It is a medium.

A fourth feature of the present invention resides in that on-floor transfer means for moving on a floor in a process where a plurality of manufacturing apparatuses are installed and transferring substrates between the manufacturing apparatuses, and moving near a ceiling in the process. A ceiling transfer means for transferring a substrate between the manufacturing apparatuses; a detection unit for detecting at least one of the positions of the on-floor transfer means and the ceiling transfer means; and a transfer of the substrate between the manufacturing apparatus and the on-floor transfer means. And a control unit that inputs a result detected by the detection unit and controls a blocking operation of the blocking unit based on the detection result.

Here, the manufacturing apparatus includes not only a semiconductor manufacturing apparatus that performs an LSI process such as an oxidation process, a film forming process, and a cleaning process, but also a semiconductor storage (stocker) and a semiconductor evaluation device. The on-floor transport means is a system in which a transport trolley runs on the floor in the process, and its power may be human power or battery power. The substrate is transferred between the apparatuses by moving the transfer cart. On the other hand, ceiling transfer means is a system in which transfer equipment runs along a track (for example, rail) installed near the ceiling. The transport device suspends the substrate with a wire or the like and transports the substrate between the devices. In general, the position detected by the detection unit is a transport trolley or a transport device. However, for example, the position of an operator who moves the transport trolley, a substrate to be transported, or a transport jig thereof may be detected. The detection unit detects the position of the transport trolley or the transport equipment. For example, a proximity sensor or a distance sensor may be used. Further, when detecting a substrate and its transport jig, an ID reader capable of reading an ID number attached to the substrate or the jig may be used. Further, the position can be detected also by data from a transport vehicle control unit or a transport device control unit that manages the state of the transport vehicle or the transport device. The blocking unit may be any unit that forcibly blocks the transfer of the substrate performed between the manufacturing apparatus and the on-floor transfer means, and an automatic opening / closing door or a door provided between the manufacturing apparatus and the on-floor transfer means. The open / close switch cannot be operated, and electrical connection between the manufacturing apparatus and the on-floor conveying means can be rejected. The control unit recognizes the positions of the ceiling transport unit and the on-floor transport unit, and controls the blocking unit so that the transfer of the two substrates to the same manufacturing apparatus does not collide. Specifically, for a manufacturing apparatus in which the substrate transfer is performed by the ceiling transfer unit, the transfer of the substrate between the manufacturing apparatus and the on-floor transfer unit is blocked using a blocking unit so that the substrate transfer by the floor transfer unit is not performed. You do it. Note that the machine-readable recording medium is a device capable of recording the program of the present invention, such as a semiconductor memory device such as a RAM and a ROM, a magnetic disk device, an optical disk device, a magneto-optical disk device, and a magnetic tape device. Is included.

According to the feature of the present invention, even when the in-process transfer is performed by using both the ceiling transfer means and the on-floor transfer means, the collision of the substrate transfer by the two transfer means is avoided. You. Therefore, two transport systems can be used simultaneously without any safety problems,
The productivity is improved. Further, low-cost products can be supplied.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. In the following description of the drawings, the same or similar parts as those in the above drawings are denoted by the same reference numerals.

(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
It is a diagram showing a substrate transfer system according to an embodiment of the present invention,
(A) is an outline view in the process, and (b) is a view showing the control system. FIG. 2 is a diagram viewed from the direction indicated by B in FIG. This substrate transfer system is, like the transfer system shown in FIG. 4 described above, a ceiling transfer system in which a ceiling track type transfer device (hereinafter abbreviated as “transport device”) 3 travels along the rail 1 and an operator 5 on the floor manually. It has both an on-floor transport system on which a transport vehicle (hereinafter abbreviated as “transport vehicle”) 7 travels.

The ceiling transfer system is a system in which a rail 1 is installed near a ceiling in a semiconductor factory, and a transfer device 3 runs along the rail 1. The transport device 3 transports the product by hanging it with a wire or the like. Each transport device 3 is provided with a vertical elevating mechanism (not shown). After moving to a position directly above the device 13, the product is directly transferred to the device 13 by the vertical elevating mechanism. The operation of each transport device 3 is managed by the transport device control unit 25. The transport equipment control unit 25 holds data relating to each transport equipment 3, for example, a transfer source port, a transfer destination port, an ID of a product to be transported, and the like, and controls the transport operation of each transport equipment 3 according to the data. . On the other hand, the on-floor transfer system is a system in which the transfer cart 7 runs on the floor. The transport vehicle 7 is not limited to one that runs on the floor by the operator 5, and may be a self-propelled transport vehicle that runs on battery power. The transport cart 7 carries the products, travels in the process along the floor or a rail provided on the floor, and transfers the products directly to the device 13. In some cases, the product is transported directly by the operator 5 or by a transfer mechanism (not shown) attached to the transport trolley 7.

Normally, a semiconductor substrate 9 as a product is stored in a transport jig 11 and transported. A plurality of semiconductor substrates 9 are stored in one transport jig 11. As the transport jig 11, not only the transport cassette conventionally used, but also
For example, a sealed type that protects the semiconductor substrate 9 from dust and organic contamination may be used.

At the front of each device 13, a load port 15 is provided as shown in FIG. Ceiling transfer system,
The products conveyed from the other devices 13 and the like by the on-floor conveyance system are both transferred to a predetermined position of the load port 15 (product storage position). That is, the transport jig 11 in which the product is stored moves from the transport trolley 7 in the horizontal direction and is transferred to the load port 15, and from the transport device 3 moves in the vertical direction and is transferred to the load port 15. . The load port 15 includes, for example, a robot arm (not shown), and carries the semiconductor substrate 9a into the apparatus 13 from the transport jig 11a. Further, a safety cover 17 is provided on the load port 15. The safety covers 17 are provided corresponding to the respective storage positions on the load port 15. For example, in FIG. 1 and FIG. 2, since each load port 15 has two storage positions, two safety covers 17 are also provided.

The opening / closing operation of each safety cover 17 is performed by a corresponding safety cover drive unit 19. The safety cover control unit 21 controls each safety cover driving unit 19 according to the safety cover operation signal b. That is, the safety cover control unit 21 determines the open / closed state of each safety cover 17. Detectors 23 are embedded at predetermined intervals below the floor in the process.
The detector 23 transmits a position detection signal a to the safety cover control unit 21 when the carrier 7 enters within the set distance.
Thereby, the safety cover control unit 21 recognizes the position of the transport vehicle 7. Therefore, the safety cover control unit 21 can control the opening / closing operation of each safety cover 17 according to the position of the transport vehicle 7. For example, if the safety cover 17 of the device 13 near the position of the transport vehicle 7 is sequentially closed with the movement of the transport vehicle 7, it is possible to prevent the operator 5 from erroneously transferring products from the transport vehicle 7. It becomes possible.

The opening / closing operation of the safety cover 17 is performed when all of the safety covers 1 in the process are carried out when the carriage 7 is positioned in the process.
7 may be closed, or only the safety cover 17 of the device 13 at a predetermined distance from the carrier 7 may be closed, and the other covers 17 may be open. In particular, in the case of a clean room having a downflow structure, it is desirable to close only the safety cover 17 at a predetermined distance from the transport vehicle 7 and open the other safety covers in order to prevent particles.
This is because, when the safety cover 17 is in the closed state, the airflow on the load port 15 is disturbed, and particles easily stay at the storage position.

The safety cover control section 21 does not necessarily have to be independent. For example, it may be incorporated in the system of the semiconductor manufacturing apparatus itself or the load port itself.
Further, since the present invention is applicable not only to a semiconductor manufacturing apparatus but also to a stocker (semiconductor storage), it is of course possible to incorporate the present invention into a semiconductor storage system. The opening and closing operation of the safety cover 17 is performed by
Not only when the position of the carriage is detected, but also
Can be performed while the vehicle is traveling in the process or approaching a specific device 13. Further, instead of detecting the transport trolley 7, the operator 5 who operates the transport trolley 7 or the transport jig 11 itself mounted on the transport trolley 7 may be detected.

The detector 23 does not necessarily need to be embedded under the floor, but may be arranged on the floor or embedded in a floor material. Also, it may be arranged on the side wall or ceiling in the process. Further, it may be attached to a semiconductor manufacturing apparatus (including a semiconductor storage) 13 installed in the process or a load port 15 attached to the front surface thereof. Carriage 7
A proximity sensor and a distance sensor may be used as the detector 23 for detecting the position of the position. In particular, when detecting the transport jig 11 itself, an ID reader that can read the ID number attached to the transport jig 11 may be used. When the opening and closing operation of the safety cover 17 is performed while the transport vehicle 7 is running, approaching the apparatus, or transferring a product, the transport vehicle 7 is used instead of the proximity sensor and the distance sensor.
The transport vehicle 7 may be detected based on data from a transport vehicle control unit (not shown) managed by the controller.

Although the safety cover 17 shown in FIGS. 1 and 2 is a vertically openable / closable cover, it may be a left / right openable / closable cover or a winding openable / closable cover. Also, the safety cover 17
Instead of providing an alarm, an alarm is provided on the device 13 or the load port 15 and the alarm display indicates that the operator 5
May be called for. Further, as shown in FIG. 2, when the transport vehicle 7 is configured to be connected to the load port 15 via the docking port 27 when transferring a product, the transport vehicle 7 using the docking port 27 is used.
Not allow the connection between the load port 15 and
There is also a method in which the electrical connection between the transport trolley 7 and the load port 15 is cut off to make transfer impossible.

As described above, according to the first embodiment of the present invention, even if both the overhead transport system and the on-floor transport system are used as the intra-process transport, the product transfer by the overhead transport system and the on-floor transport can be performed. Collision of product transfer by the transport system is avoided. Therefore, it is possible to use the two transport systems simultaneously without any safety problem. As a result, it is possible to start up the factory in a short time and start production of the product early. Also, even if the ceiling transfer system cannot be used entirely or partially due to troubles in the ceiling transfer system itself or unexpected equipment trouble, etc., at the semiconductor factory that performs in-process transfer by the ceiling transfer system, use the on-floor transfer system as appropriate Doing so will not reduce the factory operation rate.
As a result, the cost of the product can be reduced.

(Second Embodiment) FIG. 3 shows a second embodiment of the present invention.
It is a diagram showing a substrate transfer system according to an embodiment of the present invention,
(A) is a schematic view in a process, (b) is a figure which shows a control system. The present embodiment also includes both a ceiling transport system in which a ceiling track type transport device (transport device) 3 travels along the rail 1 and an on-floor transport system in which a manual transport vehicle (transport vehicle) 7 travels on the floor by an operator 5. ing.

As in the first embodiment, a load port 15 is provided on the front surface of the semiconductor manufacturing apparatus 13, and safety covers 17 are provided corresponding to the storage positions. The opening / closing operation of each safety cover 17 is performed by the corresponding safety cover drive unit 19a. The safety cover control unit 21 controls each safety cover driving unit 19a based on the safety cover operation signal e to determine the open / close state of each safety cover 17.

The detector 23 is provided at a predetermined interval under the floor in the process.
a is embedded. This detector 23 a
The position detection signal c is transmitted to the safety cover control unit 21 and the safety cover release control unit 31. The safety cover control unit 21 recognizes the position of the carriage 7 by receiving the position detection signal c from the detector 23a. Then, the safety cover driving unit 19
a to control the opening and closing operation of each safety cover 17
Perform according to the position of. For example, the safety covers 17 of the specific device 13 close to the position of the transport vehicle 7 are sequentially closed with the movement of the transport vehicle 7, or when the transport vehicle 7 is located in the process, all the safety covers 17 in the process are used. May be closed.

Further, the detector 23a transmits the read code obtained from the detected part 35 to the transport vehicle ID calculating part 29. The detected part 35 is attached to the carrier 7
And a bar code, for example. The transport vehicle ID calculation units 29 provided corresponding to the detectors 23a respectively input the codes from the detected unit 35 and convert the codes into transport vehicle IDs. The safety cover release control unit 31 inputs the position detection result c from the detector 23a and the transport vehicle ID from the transport vehicle ID calculation unit 29, and recognizes the ID of the transport vehicle 7 whose position has been detected. On the other hand, the safety cover release control unit 31 transmits the ID of each carrier 7 and the data of the transfer source and the transfer destination (hereinafter, referred to as the transfer destination).
A transport vehicle data storage unit 33 for storing transport vehicle data (referred to as “transport vehicle data”) is provided. The transport source or destination port (reserve) of the detected transport vehicle 7 is referred to by referring to the transport vehicle data g. Position). If the recognized storage position is present in the process of traveling of the transport trolley 7, the safety cover release control unit 31 releases the safety cover to the safety cover drive unit 19a that opens and closes the safety cover 17 corresponding to the storage position. Transmit the signal h. When the safety cover release signal h is input, the safety cover driving unit 19a releases the closing operation of the safety cover 17, and brings the safety cover 17 into the open state. Therefore, the device 1 close to the position of the transport vehicle 7
The third safety cover 17 can be sequentially closed with the movement of the carrier 7 and only the corresponding safety cover 17 can be opened if there is a transfer position. That is, the safety cover 1 at the storage position of the transfer target
Since only 7 is in the open state, mistakes in product transfer by the transport trolley 7 are avoided.

The safety cover 17 at the storage position of the object to be transferred
Opening / closing operation of the safety cover 17 other than the above may be performed by closing all the safety covers 17 in the process when the transport vehicle 7 is located in the process, or the safety cover of the device 13 located at a predetermined distance from the transport vehicle 7. 17 may be closed and the other covers 17 may be open.

The safety cover control unit 21, the transport vehicle ID calculation unit 29, the safety cover release control unit 31, and the transport vehicle data storage unit 33 do not necessarily have to be independent. It may be incorporated in the system of the device 13 itself or the load port 15 itself. Further, since the present invention is applicable not only to the semiconductor manufacturing apparatus 13 but also to a stocker (semiconductor storage), it is of course possible to incorporate the present invention into a semiconductor storage system. The opening and closing operation of the safety cover 17 can be performed not only when the position of the transport vehicle 7 is detected, but also while the transport vehicle 7 is traveling in a process or approaching a specific device 13. Further, instead of detecting the transport vehicle 7, the operator 5 who operates the transport vehicle 7 and the transport jig 1 mounted on the transport vehicle 7
1 itself may be detected. Further, a specific transport trolley 7, a specific operator 5, or a specific transport jig 11 may be detected.

The detector 23 does not necessarily need to be embedded under the floor, but may be arranged on the floor or embedded in a floor material. Also, it may be arranged on the side wall or ceiling in the process. Further, it may be attached to a semiconductor manufacturing apparatus (including a semiconductor storage) 13 installed in the process or a load port 15 attached to the front surface thereof. Detector 23
As a, an ID reading device capable of reading a code of the detected portion 35 such as a bar code may be used. Further, instead of using the detector 23a and the detected portion 35, the transport vehicle 7 can be detected based on data from a transport vehicle control unit (not shown) managed by the transport vehicle 7.

The safety cover 17 may be any of a top-bottom opening / closing cover, a right-left opening / closing cover, and a take-up opening / closing cover. Further, instead of providing the safety cover 17, an alarm may be provided in the device 13 or the load port 15 to alert the operator 5 by displaying the alarm. Further, when the transport cart 7 is connected to the load port 15 via the docking port 27 at the time of product transfer, connection of the transport cart 7 and the load port 15 by the docking port 27 is not permitted. Alternatively, the electrical connection between the carriage 7 and the load port 15 may be cut off to make transfer impossible.

As described above, according to the second embodiment of the present invention, even if both the overhead transport system and the on-floor transport system are used as the intra-process transport, the product transfer by the overhead transport system and the Collision of product transfer by the transport system is avoided. Further, since the product can be transferred only to the transfer destination and the transfer source in the on-floor transfer system, the product transfer by the on-floor transfer system is surely performed to the correct transfer source or the transfer destination. Therefore,
It is possible to use two transport systems at the same time without any safety problems. As a result, it is possible to start up the factory in a short time and start production of the product early.
Also, even if the ceiling transfer system cannot be used entirely or partially due to troubles in the ceiling transfer system itself or unexpected equipment trouble, etc., at the semiconductor factory that performs in-process transfer by the ceiling transfer system, use the on-floor transfer system as appropriate Doing so will not reduce the factory operation rate. As a result, the cost of the product can be reduced.

(Other Embodiments) As described above, the present invention has been described by the first embodiment and the second embodiment. However, the description and drawings which constitute a part of this disclosure describe the present invention. It is not to be understood as limiting.
From this disclosure, various alternative embodiments, examples, and operation techniques will be apparent to those skilled in the art.

For example, in the above-described first and second embodiments, the opening / closing operation of the safety cover 17 is controlled based on the position of the transport carriage 7, but is controlled based on the position of the transport equipment 3 of the ceiling transport system. Opening / closing control may be performed. For example, the safety cover 17 at the storage position of the product to be transferred of the transport device 3 may be closed. The opening / closing operation of the safety cover 17 is performed not only when the position of the transport device 3 is detected but also when the specific device 1 is running on the rail 1.
3 can be performed while approaching the sky or transferring to a specific device 13. The detection of the transport device 3 may use a proximity sensor, a distance sensor, or the like, as in the first and second embodiments. Further, the detection of the transport device 3 may be performed based on data from the transport device control unit 25.

As described above, it should be understood that the present invention includes various embodiments and the like not described herein. Accordingly, the present invention is limited only by the matters specifying the invention according to the claims that are reasonable from this disclosure.

[0038]

According to the present invention, even if both the overhead transport system and the floor transport system are used as the intra-process transport,
It is possible to use two transport systems at the same time without any safety problems. This will speed up factory startup,
The productivity of the factory line can be improved. Therefore, the production cost of the product can be reduced.

[Brief description of the drawings]

FIG. 1 is a view showing a substrate transfer system according to a first embodiment of the present invention, wherein FIG.
(B) is a diagram showing the control system.

FIG. 2 is a diagram viewed from a direction indicated by B in FIG. 1 (a).

FIGS. 3A and 3B are diagrams illustrating a substrate transfer system according to a second embodiment of the present invention, wherein FIG. 3A is a schematic view in a process and FIG. 3B is a diagram illustrating a control system.

4A is a diagram illustrating a transport system in which on-floor transport and ceiling transport coexist, and FIG. 4B is a diagram viewed from a direction indicated by A in FIG. 4A.

[Explanation of symbols]

 Reference Signs List 1 rail 3 transfer equipment 5 operator 7 transfer trolley 9 product (semiconductor substrate) 11 transport jig 13 semiconductor manufacturing equipment 15 load port 17 safety cover 19 safety cover drive unit 21 safety cover control unit 23 detector 25 transfer equipment control unit 27 docking Port 29 Transporting vehicle ID calculating unit 31 Safety cover release control unit 33 Transporting vehicle data storage unit 35 Detected unit 37 Switch

Claims (8)

[Claims] A detecting unit configured to detect at least one of a position on a floor and a unit on a ceiling for transferring a substrate to the manufacturing apparatus; a block unit configured to block transfer of a substrate between the manufacturing apparatus and the unit on the floor; A control unit for inputting a result detected by the detection unit and controlling a blocking operation of the blocking unit based on the detection result. Detecting a position of at least one of an on-floor transfer means and a ceiling transfer means for transferring the substrate to the manufacturing apparatus; and transferring the substrate between the manufacturing apparatus and the on-floor transfer means based on the detection result. And c. Interrupting the transfer of the substrate by the on-floor transfer means and the transfer of the substrate by the ceiling transfer means so as not to collide with each other. Detecting a position of at least one of an on-floor transfer means and a ceiling transfer means for transferring the substrate to the manufacturing apparatus; and transferring the substrate between the manufacturing apparatus and the on-floor transfer means based on the detection result. A machine readable recording medium in which a substrate transfer control program is recorded, wherein the substrate transfer of the floor transfer means does not collide with the substrate transfer of the ceiling transfer means. 4. An on-floor transfer means for moving on a floor in a process in which a plurality of manufacturing devices are installed and transferring a substrate between the manufacturing devices, and moving near a ceiling in the process, and connecting between the manufacturing devices. A ceiling transport unit that transports the substrate, a detection unit that detects at least one position of the floor transport unit and the ceiling transport unit, and a blocking unit that blocks substrate transfer between the manufacturing apparatus and the floor transport unit. A substrate transfer system, comprising: a control unit that inputs a result detected by the detection unit and controls a blocking operation of the blocking unit based on the detection result. 5. The substrate transport according to claim 4, wherein the control unit controls the blocking unit so that the substrate transfer of the floor transport unit does not collide with the substrate transfer of the ceiling transport unit. system. 6. The control unit controls the blocking unit so as to block transfer of a substrate between the on-floor transfer unit and the manufacturing apparatus within a predetermined distance from the on-floor transfer unit. Item 6. The substrate transfer system according to Item 5. 7. The control unit, when the on-floor transfer unit transfers a substrate to a previously specified manufacturing apparatus, the control unit controls the substrate transfer so as not to interrupt the transfer of the substrate between the manufacturing apparatus and the on-floor transfer unit. 6. The substrate transport system according to claim 5, wherein the interrupting unit is controlled. 8. The control unit, when the ceiling transfer unit transfers a substrate to a previously specified manufacturing apparatus, the control unit controls the substrate transfer between the manufacturing apparatus and the on-floor transfer unit to be cut off. 5. The substrate transport system according to claim 4, wherein the interrupting unit is controlled.