JP2000053232A - Roller hearth kiln - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide RHK having a position judgment device for a material to be heated high in stability and easy in repairing and adjustment. SOLUTION: RHK is provided with a detection roller 30s which is rotationally supported about an axial center with one end positioned outside a kiln body 14 in a prescribed position of a plurality of rollers 30 and driven and rotated by the fractional force with carried base board 10, a sensor sleeve 78 and a sensor 82 which are functioned as rotation detectors for detecting the rotation of one end of the detection roller 30s outside the kiln body 14, and a controller 84 which judges the board 10 as reaching the detection position based on the detected rotation. The detection roller 30s provided between a plurality of the rollers 30 for carrying the board 10 is driven and rotated by the frictional force generated by brought in contact with the board 10 so that the position of the board 10 can be judged by detecting the rotation one end of the detection roller 30s positioned outside the kiln body 14 by the sensor 82.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a roller hearth
The present invention relates to a kiln, and more particularly to a technique for detecting a movement of an object to be heated in a furnace.

[0002]

2. Description of the Related Art In the process of supporting a plurality of objects to be heated and sequentially transporting the objects in one direction, the plurality of objects to be heated are arranged in parallel with each other as one of tunnel-type heating devices in which heat treatment is performed. A so-called roller hearth kiln (hereinafter referred to as RHK) that supports a plurality of objects to be heated and sequentially conveys the plurality of objects to be heated by a plurality of rollers each of which is driven to rotate around an axis.
It has been known. Such an RHK has the advantage that the object to be heated is less likely to be contaminated because there is no sliding inside the furnace body as in the case of conveying by a mesh belt, and no dust can be generated therewith. In particular, when the roller is made of ceramics, the object to be heated is not brought into contact with the metal in the furnace, so that the contamination is further suppressed. Therefore, it is particularly suitably used as a firing furnace for a heated object which is desired to be heat-treated under a high degree of cleanliness.

For example, on a glass substrate represented by soda lime glass or a ceramic substrate represented by alumina, a metal or inorganic material is melted by a glass bond component, or the material itself is softened or melted, or By sintering
There is known a substrate including a film forming material to which a film having a predetermined function is fixed. Fluorescent display tube (VF
D) Anode substrate, plasma display panel (P
DP) substrate, plasma addressed liquid crystal display (PA)
LC) plasma switching substrate, display device substrate such as field emission display (FED) substrate, thick film wiring substrate, or thermal printer.
This is a substrate for an electronic device such as a head or an image sensor. Such electronic device substrates generally have a thickness of 500 to 650 to anneal the substrate itself or to form a film of a functional material using a glass material as a binder.
(° C.) heat treatment is performed, and on a ceramic substrate, for example, 500 to 500 to form a film of a functional material using a glass material as a binder, or to form a film of a functional material using melting of an interface of a metal material itself. Heat treatment of about 900 (℃) is performed. If contamination occurs in the course of these heat treatments, the desired function of the formed film cannot be obtained, so that a high degree of cleanliness is required for the firing furnace.

[0004]

By the way, the RHK includes a shutter device for dividing the furnace chamber into a plurality of heating chambers, an exhaust or air supply device for adjusting the atmosphere in the furnace chamber, and an RHK for heating the object to be heated. A speed changing device or the like for changing (or temporarily stopping) the conveying speed is provided, and these are operated according to the position of the object to be conveyed sequentially so that a desired object can be provided to the object to be heated. Heat treatment is performed. On the other hand, the transport force for transporting the object to be heated placed on the roller in the one direction is such that the rotational force of the roller is transmitted to the object to be heated by friction between the roller and the object to be heated. Generated by for that reason,
It is difficult to avoid the occurrence of transport unevenness due to a slip between the rollers and the object to be heated due to a difference in peripheral speed between the plurality of rollers. From these facts, it is difficult for RHK to manage the heat treatment of the object to be heated with the lapse of time from the time of injection, so that when the object to be heated arrives at a predetermined position, the above-described devices are surely operated. To be activated, a detection device for detecting its position is essential. In particular, when the control is stopped during the heating process due to an emergency stop, a power failure, or the like, if the position of the object to be heated cannot be detected, the management based on the elapsed time after that is more difficult. Also,
If the above-mentioned transport unevenness is remarkable, damage may occur due to interference between sequentially heated objects to be heated.
The above-described detection device is also required to detect the transport state and adjust the interval between the objects to be heated.

Conventionally, as the above-mentioned device for detecting the position of the object to be heated, for example, an optical sensor or a contact sensor has been used. However, in the optical sensor, when the light emitted from the detection hole provided in the furnace wall is received outside the furnace chamber, the light is blocked by the heated object. It detects that it has reached the stop position. Therefore, since the distance between the object to be heated and the sensor is long, there is a problem that it is difficult to adjust the sensor and lack stability over time. Moreover,
The object to be heated cannot be detected by receiving red or infrared light generated by heating, or when an organic compound is contained in the inside or surface of the object to be heated, decomposition generated by heating The sensitivity of the sensor may be changed by the gas, or the detection hole closed by glass or the like may become cloudy and malfunction. On the other hand, in the case of a contact-type sensor, a contact portion that is brought into contact with an object to be heated is arranged in the furnace chamber, and the contact is detected by a detection mechanism provided outside the furnace chamber. For this reason, since the contact part is provided in the furnace chamber where the temperature is high, it is necessary to form the contact part with ceramics having high heat resistance, so that the processing is difficult, and at the same time, the repair or recovery when the contact part is damaged is performed. Requires a lot of time. In addition, since the contact portion is locally brought into contact with the object to be heated, there is a problem that the contact mark and the wear mark are remarkably shown on the object to be heated.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an RHK provided with a device for determining a position of a heated object which has high stability and is easy to repair and adjust. Is to do.

[0007]

SUMMARY OF THE INVENTION In order to achieve the above object, the gist of the present invention is to transport an object to be heated in one direction while supporting an object to be heated by a plurality of rollers as described above. RHK of the type that performs heat treatment in the process,
(a) at a predetermined position between the plurality of rollers, one end is rotatably supported around an axis with the one end located outside the furnace chamber, and is driven to rotate according to a frictional force between the conveyed object and the object to be heated. A detection roller, (b) a rotation detection device that detects rotation of one end of the detection roller outside the furnace chamber, and (c) the rotation detection device based on the rotation of the detection roller detected by the rotation detection device. Position determining means for determining that the object to be heated has reached a predetermined position.

[0008]

In this manner, the object to be heated to be conveyed to the RHK is supported at a predetermined position between the plurality of rollers so as to be rotatable around the axis with one end positioned outside the furnace chamber. A detection roller that is driven to rotate according to a frictional force between the detection roller, a rotation detection device that detects the rotation of one end of the detection roller outside the furnace chamber, and a rotation of the detection roller that is detected by the rotation detection device. Position determining means for determining that the object to be heated has reached a predetermined position. Therefore, the detection roller provided between the plurality of rollers for transporting the object to be heated, when brought into contact with the object to be conveyed, since it is driven and rotated according to the frictional force therebetween, The rotation of one end of the detecting roller positioned outside the furnace chamber is detected by a rotation detecting device provided outside the furnace chamber, and the object to be heated is detected by the position determining means based on the rotation of the detecting roller. It is determined that it has reached the position where it contacts the roller. At this time, since the rotation detecting device is provided outside the furnace chamber and detects the rotation of one end of the detection roller located outside the furnace chamber, measurement accuracy may be reduced due to heat inside the furnace chamber. In addition, repairs do not become difficult in the event of a failure. Further, since the detection roller is provided between the plurality of rollers such that one end is located outside the furnace chamber, when the roller is damaged, it can be easily replaced from outside the furnace chamber by pulling out from one end side or the like. Therefore, it is possible to obtain the RHK including the device for determining the position of the object to be heated, which has high stability and is easy to repair and adjust.

The above-mentioned rotation detecting device may detect any one of rotation start, rotation end, and rotation amount of the detection roller. When detecting rotation start,
When the leading end of the object to be heated in the transport direction has reached above the detection roller, it is determined by the position determining means that the object has reached the predetermined position. When the rear end passes over the detection roller, the position determining means determines that the predetermined position has been reached. Further, when the rotation amount is detected, when the leading end in the transport direction of the object to be heated advances ahead of the detection roller by a distance corresponding to a predetermined rotation amount, the predetermined position is determined by the position determination means. Is reached.

[0010]

In another preferred embodiment of the present invention, (a-1) the detection roller is provided at a position rearward of a front end of the object to be heated at the predetermined position in the conveying direction. With this configuration, the predetermined position at which the arrival of the object to be heated is to be detected is provided at a position where the weight of the object to be heated sufficiently acts on the roller for detection, so that the roller for detection is reliably rotated. Occurrence of detection omission is suppressed.

[0011] Preferably, the detection roller includes:
A plurality of rotation detection devices and a position determination unit are provided corresponding to each of the plurality of positions to be simultaneously driven and rotated by the object to be heated positioned at the predetermined position. With this configuration, since a plurality of detection rollers that are simultaneously driven and rotated when the object to be heated reaches a predetermined position are provided for each of the predetermined positions, only one detection roller is provided. Occurrence of detection omission due to damage or a failure of the rotation detection device is suppressed as compared with the case where it is provided.

Preferably, the RHK includes: (d) a pressing device for pressing one end of the detection roller in the axial direction toward the other, and (e) the detection roller is damaged. And a damage detecting device that detects the damage by detecting that the one end is moved toward the other according to the pressing force of the pressing device. With this configuration, the RHK includes a pressing device that presses one end of the detection roller in the axial direction toward the other, and a pressing device that presses the detection roller according to the pressing force of the pressing device when the detection roller is broken. A breakage detecting device is provided for detecting breakage by detecting that one end has been moved toward the other end. Therefore, when the detection roller is damaged, since one end is always pressed toward the other end by the pressing device,
One end is moved to the other end according to the pressing force, and the movement is detected by the damage detection device, whereby the damage is detected. Therefore, since the damage of the detection roller is suitably detected, the roller can be repaired immediately, so that it is possible to prevent the heating process from being performed in a state where the position of the object to be heated cannot be detected due to the damage. .

Here, preferably, the RHK is (f)
The apparatus further includes a detection roller rotation driving device that rotates the detection roller around its axis independently at a peripheral speed different from that of the plurality of rollers positioned adjacent thereto. With this configuration, the RHK is provided with a detection roller rotation driving device that rotates the detection roller around its axis independently at a different peripheral speed from the plurality of rollers for transporting the object to be heated. Can be Therefore, the detection roller is always rotated at a peripheral speed different from that of the plurality of rollers by the detection roller rotation driving device, but when a frictional force is applied to the object to be heated, the transport of the roller is performed. The roller is rotated at a peripheral speed corresponding to the speed, that is, at a peripheral speed similar to that of a plurality of rollers positioned adjacent to the front or rear in the transport direction. Therefore, since the detection roller is rotated even during a period in which no frictional force acts between the detection roller and the object to be heated, a temperature distribution occurs in the circumferential direction in the high-temperature furnace chamber, and thus, the warping and The occurrence of breakage is suitably suppressed. At this time, since the peripheral speed of the detecting roller by the detecting roller driving device is set to a value different from that of the plurality of rollers located adjacent to each other, frictional force between the roller and the object to be heated is set. Is applied, the peripheral speed is changed. Therefore, regardless of which rotation direction is set when the frictional force is not applied, the detecting roller is driven by the frictional force between the detection roller and the object to be heated. It is easily recognized that the rotation has been performed by the action of.
That is, the above-mentioned “detection of rotation” includes such a change in rotation speed.

Preferably, the RHK is (g) provided so as to be thermally divided and arranged in the one direction so as to sequentially heat-treat each of the plurality of objects to be heated. A plurality of heating sections that are thermally controlled, and (h) a transport device that sequentially transports the object to be heated to a plurality of stop positions provided for each of the heating sections, wherein the detection roller includes a plurality of the detection rollers. It is provided at each of the stop positions. With this configuration, the RHK includes a plurality of heating sections which are provided in a line in one direction and are thermally divided so as to sequentially perform heat treatment on each of the plurality of objects to be heated, and each of the heating sections is soaked and controlled. A transport device for sequentially transporting the object to be heated to a plurality of stop positions provided for each of the plurality of heating sections; and the detection roller is provided at each of the plurality of stop positions. Therefore, the plurality of objects to be heated are uniformly heated in each of the plurality of heating sections in the process of being sequentially conveyed in one direction in the course of the heat treatment. At this time, in each of the plurality of heating sections, each stop position is set. Is rotated by the action of frictional force between the detection roller and the object to be heated. Accordingly, based on the rotation, the detection device detects that the object to be heated has reached the stop position, so that the object to be heated can be stopped at the set stop position. Thereby, in the case where the object to be heated is heat-treated while being soaked for each of the plurality of heating sections in order to minimize the temperature variation in the object to be heated, as high a soaking state as possible is obtained. The object to be heated can be stopped at the stop position set so that the temperature of the object to be heated can be further reduced.

As described above, for example, in the case of heat-treating a substrate or the like containing a film forming material, the temperature variation in the substrate is reduced as much as possible. Even when heat treatment is performed at a temperature equal to or higher than the strain point, local changes in dimensions within the substrate, that is, distortion of the formed pattern are reduced as much as possible. Even with a fine pattern or a large substrate, the production yield can be dramatically improved. When a thick-film dielectric layer, a partition-like dielectric layer, a thick-film resistance layer, an electrode layer, and an inorganic coloring pigment layer are provided on the surface of the substrate, glass that functions as a bond component in those thick films The degree of melting and softening becomes uniform, and the degree of melting and sintering of the metal-metal oxide system becomes uniform,
Variations in withstand voltage quality, height and width dimensions of barrier ribs, resistance values, discharge quality, optical filter characteristics, and the like are suitably reduced, and the production yield is dramatically increased even for large substrates. Furthermore, as described above, as a result of reducing the variation in the resistance value, the management load of the process and the process such as trimming are reduced or the load is reduced.

Incidentally, in recent years, a substrate including the above-mentioned film forming material has been designed to be multilayered and miniaturized, such as conductors, resistors, and dielectrics, formed on the surface thereof. It is necessary to manufacture substrates having relatively large dimensions as the display area becomes larger. Therefore, a display device substrate is required to form a fine pattern over a large dimension, and in the electronic device substrate, quality is secured by reducing a pattern space given to a film for generating a function. Therefore, uniformity of the film is further required. However, since the effect on the quality brought by the firing of the substrate becomes larger as the size becomes larger as described above, the variation thereof becomes a constraint on the product design, or has been a factor that reduces the product yield. .

For example, if there is a dimensional change due to expansion or contraction of the substrate material itself due to the heat treatment, it becomes difficult to align the patterns between firings performed after patterning the film having a function. In the resistance layer, variations in the resistance value, in the dielectric layer, variations in the withstand voltage and variations in the thickness due to non-uniformity of the residual ratio, and in the conductor layer, variations in conduction resistance, wire bonding properties, sputtering properties, etc. growing. As the pattern becomes finer or the substrate becomes larger, it becomes more difficult to maintain the coincidence of alignment between the patterns and the uniformity of the layer quality, and there is a disadvantage that the product yield is reduced at an accelerated rate. Therefore, for example, a PD for forming a large display device of 40 inches or more.
Taking the P substrate as an example, there are the following factors that lower the yield. That is, the dimensional accuracy of each layer of the multilayer structure forming a large number of cells cannot be ensured, the height and width of the barrier vary, the resistance of the resistive cell varies, and the dielectric layer has resistance. Variations in voltage and overall dimensional variations include deviations when the front and rear plates are combined to form discharge cells. Such problems include the melting or sintering of metals and inorganic materials contained in thick films, glass bond components which are reduced to fix functional components, or softening or melting of glass components themselves in dielectrics. Since it is considered that the state is caused by a local difference in the substrate, it is desired that the temperature distribution in the substrate be as uniform as possible during the heat treatment.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the drawings. In the following description,
The dimensional ratios and the like of each part are not necessarily drawn accurately.

FIG. 1 shows a continuous furnace type RH in which baking is performed in the process of sequentially transporting a substrate 10 in one direction according to an embodiment of the present invention.
It is a figure showing composition of K12. In the figure, RHK12
Is provided with tunnel-shaped furnace bodies 14a and 14b through which the substrate 10 is sequentially transferred (hereinafter, simply referred to as furnace body 14 when not particularly distinguished). In the furnace body 14a,
Along the longitudinal direction, the substrate 10 is heated to the highest processing temperature, and in the process, a preheating zone (preheating section) for burning and removing a binder (resin) contained in a film formed on the substrate 10 in the process. 16, heating zone (heating unit) for holding substrate 10 at its maximum processing temperature for a predetermined time
And a slow cooling zone (slow cooling section) 20 for gradually cooling the substrate 10. Further, the substrate 10 that has been sequentially heat-treated in the preheating zone 16 to the annealing zone 20 and cooled to a certain temperature is placed in the furnace body 14b.
Cooling zone (cooling section) for further cooling to around normal temperature
22 are provided. The furnace body 14 has an inner wall (not shown) made of, for example, heat-resistant glass such as β-spodumene crystallized glass.

The RHK 12 has a first transfer device 2 which is independently driven along the furnace body 14 and outside thereof.
4. A plurality of second transfer devices 26a, 26b, to 26f (hereinafter, simply referred to as a second transfer device 26 unless otherwise specified), and a third transfer device 28 transfer the substrate 10 in the furnace body 14. Are arranged in series. Also,
FIG. 2 is a sectional view taken along the longitudinal direction of the furnace body 14 and passing through the center in the width direction of the furnace body 14, and FIGS.
RHK1 as shown in sections -a to ee, respectively.
2, a plurality of rollers 30 that are parallel to each other and are arranged at substantially equal intervals on one plane extending in the horizontal direction are provided to pass through the furnace body 14 in the width direction. These plural rollers 30
Are rotatably supported around their respective axes, and are rotationally driven by the first to third transfer devices 24, 26, and 28 in a predetermined rotation direction and rotation speed. The substrate 10 to be subjected to the baking treatment is placed on a plurality of rollers 30 in the furnace body 14 as shown in FIG. 2, and the plurality of rollers 30 are driven to rotate clockwise in the figure. As a result, it is conveyed rightward as shown by arrow F in FIG.

The plurality of rollers 30 have sufficient heat resistance so that softening deformation such as creep is unlikely to occur even at the firing temperature of the substrate 10 to such an extent that the transfer of the substrate 10 is not hindered. And a ceramic roller made of, for example, a cylindrical alumina ceramic. As shown in FIG. 3 (a), a pair of bearings 32, 32 is provided for each roller 30 outside the side wall constituting the furnace body 14, and a rotatable member provided coaxially with the roller 30 is provided on the pair of bearings. The shafts 34a and 34b are rotatably supported, respectively. The plurality of pairs of rotating shafts 34a and 34b
Are arranged in parallel with each other such that the axial direction coincides with the longitudinal direction and the horizontal direction. As will be described later, a chain 36 or a timing belt (hereinafter simply referred to as a chain 36) is hung on one of the rotating shafts 34a, and is rotated by the chain 36. Each of the plurality of rollers 30 is supported by the pair of rotating shafts 34a and 34b so as to be relatively non-rotatable while being sandwiched from both sides, and is rotated with the rotation of the one rotating shaft 34a. The roller 3
0 is a consumable that has sufficient heat resistance and a long life, but is gradually deformed or has reduced mechanical strength;
For example, by removing one of the bearings 32, the bearing 32 is pulled out in the left-right direction in FIG.

Returning to FIG. 1, the first transfer device 24
It is provided at a position corresponding to the preheating zone 16 and the heating zone 18. The preheating zone 16 includes, for example, four drive sections 38a, 38b, 3 arranged in the transport direction of the substrate 10.
8c and 38d (hereinafter simply referred to as a drive section 38 unless otherwise specified), and the heating zone 18
Similarly, for example, two drive sections 40a, 4
0b (hereinafter simply referred to as a drive section 40 unless otherwise specified). In each drive section 38, 40,
A plurality of line shafts 42 provided on one axis
a, 42b, to 42e (hereinafter simply referred to as a line shaft 42 when not particularly distinguished) and a plurality of miter gears 44a, 44b, to 44f (hereinafter simply referred to as miter gears unless otherwise distinguished). 44) are provided at regular intervals along the longitudinal direction of the furnace body 14a. A continuously driven motor 46 with a speed reducer is provided below the furnace body 14a in the vicinity of the drive section 38a, and its rotation is transmitted to a miter gear 44a via a chain 48, and Is transmitted to another miter gear 44 via the line shaft 42. Therefore, the entire first transport device 24 is integrally driven by the rotation of the motor 46 being transmitted to all the drive sections 38 and 40.

FIG. 4 is an enlarged view showing the essential parts of the first transport device 24 and the second transport device 26 arranged vertically in a state where the intermediate portion is omitted. The drive section shown in FIG. 3
Parts corresponding to 8a and 40b are shown in the upper and middle rows, respectively. The miter gear 44a of the first transfer device 24 corresponding to the drive section 38a has the axial direction
And a driven shaft 52a whose axis is perpendicular to the longitudinal direction of the furnace body 14 (perpendicular to the plane of the drawing). Therefore, when the rotation of the motor 46 provided in the vicinity of the drive section 38a in FIG. 1 is transmitted to the miter gear 44a by the chain 48 and the driving shaft 50a is rotated in the direction of the arrow, the driving shaft 50a The line shaft 42a connected via the coupling 54 is rotated in the same direction as the driving shaft 50a, and the driven shaft 52a is rotated, for example, in the direction of the arrow in the figure. In the drive sections 38b, 38c, to 40a which are omitted in the drawing,
The line shafts 42a, 42b, to 42e are connected to the driving shafts 50 of the miter gears 44b, 44c, to 44e through couplings (not shown) similar to the coupling 54, and the rotation of the driving shaft 50 Accordingly, the driven shafts 52 provided for each of them are rotated.

On the other hand, a miter gear 44f corresponding to the drive section 40b shown in the middle part of FIG. 4, that is, a miter gear 44 provided at the right end of the first transfer device 24.
As for f, one end of a driving shaft 50f is connected to the line shaft 42e via a one-way coupling 56. A motor 58 with a reduction gear is provided at the other end of the driving shaft 50f, and a one-way motor is provided at the other end.
They are connected via a coupling 60. These one-way couplings 56 and 60 transmit only the rotation of the line shaft 42e and the motor 58 in the direction of the arrow in the figure to the miter gear 44f, respectively. In synchronization with the drive timing of the device 26, the device 26 is intermittently driven at a rotation speed higher than that of the line shaft 42. Therefore, the motor 58
Is stopped, the rotation of the line shaft 42e is transmitted to the driving shaft 50f via the one-way coupling 56,
While the one-way coupling 60 is slid, the rotation thereof is transmitted to the driving shaft 50f via the one-way coupling 60 while the motor 58 is being driven, so that the one-way coupling 56 is slid.

Of the plurality of pairs of rotating shafts 34a and 34b provided on the side of the furnace body 20, one of the rotating shafts 34a corresponding to each of the rollers 30 is provided with one of the plurality of miter shafts. A plurality of gears 44 are provided below each of the gears 44 and are provided for each of the drive sections 38 and 40; Each of the plurality of rotary shafts 34 has, for example, a sprocket 62 or a pulley (hereinafter, simply referred to as a sprocket 62) fitted at one end thereof so as to be relatively non-rotatable. However, in each of the drive sections 38 and 40, the sprocket 62 is not attached to one rotating shaft 34s located, for example, near the front end of the substrate 10 in the transport direction.

The plurality of sprockets 62 and the driven shaft 5
For example, a chain 36 or a timing belt or the like (hereinafter, simply referred to as a chain 36) extends between the drive sections 38 and 40 for each of the drive sections 38 and 40. Therefore, when the motor 46 is driven to rotate, the rotation of the driven shaft 52 is transmitted via the chain 36 and the sprocket 62, and each of the plurality of rotation shafts 34 has a similar rotation in the direction indicated by the arrow in the drawing. A plurality of rollers 30 which are simultaneously rotated with a speed and a direction, and which are supported so as to be relatively non-rotatable, are driven to rotate in one direction. By rotating the plurality of rollers 30 in the same direction as described above, the substrate 10 placed thereon is transported at a speed corresponding to the rotation speed. Further, since the driven shafts 52 of the plurality of miter gears 44 are substantially interconnected by the line shaft 42 as described above, a plurality of driven shafts 52 provided in each of the plurality of drive sections 38 and 40 are provided. The rollers 30 are rotated simultaneously. Thus, the substrate 10 placed on the roller 30 is continuously transported in one direction by the first transport device 24 at a first transport speed of, for example, about 300 (mm / min).

At this time, since the rotation of the driven shaft 52 is not transmitted to the rotating shaft 34s without the sprocket 62, the rollers 3 supported by the rotating shaft 34s are not transmitted.
From 0 s, a force in the transport direction does not act on the substrate 10. However, the distance between the rollers 30 is, for example, about 150 (mm) over the entire RHK 12, and is sufficiently shorter than the length of the substrate 10 in the transport direction.
Even if some of the rollers 30 cannot contribute to the conveyance for every 8, there is no problem in the conveyance of the substrate 10. The drive section 40b
Also, the substrate 10 is transported at the first transport speed while the motor 58 is not driven.
During the driving of the second transport speed (for example, the slow cooling zone 20 described later) of about 5000 (mm / min),
(The same transport speed as described above).

Returning to FIG. 1, the plurality of second transfer devices 26 are provided at positions corresponding to the slow cooling zone 20, and the slow cooling zone 20 is, for example, 6 lines arranged in the transfer direction of the substrate 10. Drive sections 64a, 64b, to 64f (hereinafter, simply referred to as drive sections 64 unless otherwise distinguished). The second transfer device 26 is provided for each drive section 64, and as shown in the lower section of FIG. 4 for the drive section 64b, the motors 66a, 66b,... 66f (hereinafter simply referred to as a motor 66 unless otherwise specified).
The plurality of rotation shafts 34 are provided below the motor 66 in the same manner as the first transport device 24.
The rotation of the output shaft 68 is transmitted through the chain 36 and the sprocket 62 to rotate in the same direction. In each of the drive sections 64, similarly to the drive sections 38 and 40 described above, the sprocket 62 is not fitted at a position near the front end in the transport direction of the substrate 10 and is driven by the motor 66 to rotate. Rotating shaft 3
4s are provided. Further, the motor 66 is configured to be capable of not only driving the output shaft 68 to rotate in the normal direction shown by the arrow in the drawing, but also to rotate in the reverse direction so as to be alternately driven to rotate in the normal direction and the reverse direction. I have. At the time of forward rotation, the roller 30 is rotated rightward in the drawing, and the substrate 10 is transported toward the cooling zone 22 at a second transport speed of, for example, about 5000 (mm / min). Are alternately rotated in the left-right direction, and the substrate 10 is reciprocated in the transport direction and the opposite direction at a lower third transport speed of, for example, about 1300 (mm / min).

Returning to FIG. 1, the third transfer device 28, not shown in FIG. 4, reduces the number of miter gears 44 in the first transfer device 24 in accordance with the length of the furnace body 14b. Is inverted in the longitudinal direction.
That is, the drive section 70 having the same configuration as the drive section 40b
a, a drive section 70b having the same configuration as the drive section 38b,
And a drive section 70c having the same configuration as the drive section 38a. Therefore, the rotation of the motor with reduction gear 72 provided below the furnace body 14b is transmitted to the miter gears 44i, 44h, and 44g via the chain 74, the line shafts 42g, and 42f, so that the respective Roller 3 provided in drive section 70
0 is rotated. Further, in the drive section 70a adjacent to the slow cooling zone 20, similarly to the drive section 40b, the rotation of the motor 76 with the speed reducer is transmitted via the one-way coupling, so that the roller 30 belonging thereto is intermittently driven. It is driven at a speed higher than the other rollers 30, that is, at a speed synchronized with the second transport device 26. Therefore, in the preheating zone 16, the heating zone 18, and the cooling zone 22 in which the first transport device 24 and the third transport device 28 are provided, the roller 30 is continuously rotated to
Are transported continuously, while the rollers 30 are rotated intermittently in the slow cooling zone 20 in which the second transporting device 26 is provided, and the substrate 10 is transported intermittently.

FIG. 5 is a diagram for explaining the function of the rotary shaft 34s without the above-mentioned sprocket 62 by taking the drive section 64 as an example. In the figure, the rotating shaft 34s is positioned so as to protrude in the axial direction from the other rotating shaft 34 having the sprocket 62, and a sensor sleeve 78 is provided at an end located outside the furnace body 14. Is the rotating shaft 3
It is attached so that it cannot rotate relative to 4s. The sensor sleeve 78 is made of, for example, an easily processed metal such as iron or aluminum. A plurality of flat blades 80 functioning as, for example, a reflector are provided on the outer peripheral surface of a cylindrical base. Are provided in the radial direction by welding or the like at regular intervals of about 30 °. Further, in the vicinity of the sensor sleeve 78, for example, a sensor 8 comprising a reflection type photoelectric switch or the like in which a light emitter and a light receiver are integrally formed.
2 are provided and the sensor sleeve 78
Light such as infrared rays is constantly emitted toward the camera. For this reason, when the sensor sleeve 78 is rotated around its axis, the incident angle of the light emitted from the light projector to the blade 80 changes with the rotation, so that the incident angle becomes constant. Each time, the reflected light is directed toward and intermittently incident on the light receiver of the sensor 82. The light receiving signal of the sensor 82 is input to the control device 84. For example, the light receiving signal generated by the repetition of the ON signal (at the time of light reception) and the OFF signal (at the time of non-light reception) is set in advance as described later. By being processed in accordance with a predetermined procedure, the rotation axis 3
4s is detected to be rotated, or the rotation axis 34 is determined by the number of intermittent incidences or the lapse of time from the start of incidence.
The number of rotations of s will be detected.

The rotation shaft 3 whose rotation is detected in this manner is
4s does not include the sprocket 62 or the like as described above, so that a plurality of other rotating shafts 34 and the rollers 30 connected thereto are transported by the motor 66 in order to transport the substrate 10 as shown by arrows in the figure. When rotated as shown in A, the rotation shaft 34s is not rotated, and the roller 30s connected thereto is not rotated. However, when the substrate 10 is fed in the transport direction shown by the arrow F and reaches a position where it comes into contact with the rollers 30s as shown by the dashed line in the figure, the rollers 30s are moved to one point in the figure according to the frictional force acting between them. It is rotated as shown by the dashed line B. At this time, the rotation speed of the roller 30s is the same as that of the other roller 3 whose peripheral speed on the outer peripheral surface is in the vicinity.
This is a speed that matches the peripheral speed of zero. That is, as shown in the figure, when the outer diameter of the roller 30s is substantially equal to that of the other rollers 30, the rotation speed is also substantially equal. As a result, the sensor sleeve 78 connected to the roller 30s is rotated, so that the light receiving signal of the reflected light is sent from the sensor 82 to the control device 84 as described above,
The control device 84 determines the position of the tip 10a of the substrate 10 (that is, the substrate position) based on the start of rotation and the amount of rotation of the roller 30s. The roller 30s is a detection roller provided for detecting the substrate position in this manner,
The start of rotation and the number of rotations are detected by a sensor sleeve 78, a sensor 82, and the like provided outside the furnace body 14, and the position of the substrate 10 is determined. Therefore, in the present embodiment, the substrate position is detected based on the direct contact between the detection roller 30s and the substrate 10, but the roller 30s receives the entire lower surface of the substrate 10 and is rotated by the driven rotation. As a result, there is almost no sliding between them, so that there is no contact mark on the substrate 10 due to local contact or sliding. Also, the sensor sleeve 7
Since the sensor 8 and the sensor 82 are provided outside the furnace body 14, they are not required to have such high heat resistance.

Note that, as shown in FIG.
The position detection roller 30s is composed of a plurality of sections.
Provided for each of the drive sections 38, 40, 64, 70
The substrate 10 to be transported is, for example,
The position is detected in the section. As shown in FIG.
In addition, for example, the tip of the substrate 10 or
Is the detection position S corresponding to the position of the rear end._AOr stop position S
_B, S_CIs set. On the other hand, as mentioned earlier,
30 s before each drive section in the transport direction of the substrate 10.
Although it is located near the edge, as shown in the figure,
The position is the detection position S _AAnd stop position S_BBehind
is there. For example, the axis of the roller 30s and the detection position S_ASome
Is the stop position S_BIs the circle of the roller 30s
Set to a value equal to the circumference. Therefore, in this embodiment,
Is the amount determined by the distance △ x / circumference (for example, once)
Is detected by the sensor 82.
Based on this, the substrate 10_AOr S_BTo
It is determined that it has been reached. However, the stop position S_CAfter
As described above, the method of transporting the substrate 10 in the drive section 64
Is provided to reciprocate back and forth
Stop position S_BAnd the transport direction of the substrate 10
Roller 30s reverses by an amount corresponding to the difference from the length dimension
When rotated, the rear end of the substrate moves to its stop position S_CTo
It is determined that it has been reached.

When it is determined that the substrate 10 has reached the predetermined position in this way, the control device 84 controls the rotation of the motor 66 to stop the substrate 10, for example, as described later. Alternatively, reciprocating movement is performed in each drive section 64, the electromagnetic valve 102 is opened and closed to adjust the atmosphere in the heating chamber R, and furthermore, the carry-in interval of the substrate 10 from the drive section 38a is adjusted. 5 shows a case where the motor 66 is positioned below the roller 30 for the sake of convenience of description, but when the motor 66 is positioned above as shown in FIG. There is no problem in detecting the rotation of the roller 30s, and a similar function can be obtained. Also,
The rotating shaft 34s and the roller 32s provided in the drive sections 38, 40, 70, etc. are similarly configured, and the rotation is detected and the position of the substrate 10 is similarly determined. In the present embodiment, the roller 30 s corresponds to a detection roller, and the sensor sleeve 78 and the sensor 82 constitute a rotation detecting device.

Returning to FIGS. 1, 2 and 3, for example, as shown in these figures, the preheating zone 16 includes a plurality of temperature detectors TC for detecting the temperature in the preheating zone 16. Are provided vertically at three positions in the width direction at the center in the longitudinal direction for each of the drive sections 38, and the furnace body 14 is provided.
A plurality of heaters H are formed on the upper and lower sides of the furnace 14 and independently controlled for each of the zones. Four heaters H are provided for each drive section 38 in the longitudinal direction and the width direction of the furnace body 14, respectively. ing. Fig. 6 (a) shows drive section 3
As schematically shown in FIG. 8a, a total of 16 divided into four in the feed direction F of the substrate 10 and the longitudinal direction of the roller 30 (not shown) orthogonal to the feed direction F for each drive section 38
Set of heaters H ₁₁₁₁ , H ₁₁₁₂ , to H ₁₁₄₄ (drive section 38
b, 38c and 38d respectively have H _{1211 to} H ₁₂₄₄ and H
_{1311 to} H ₁₃₄₄ and H _{1411 to} H ₁₄₄₄ are provided.
4 and a heater H ₁₁₂₁
A position between H _{11 31,} the heater _{H 1122, H 1123, H 1132} ,
And position between H _1133, a heater H ₁₁₂₄ and at positions between the H ₁₁₃₄ temperature detector TC _111, TC _112, TC _11
3 (Each drive section 38b, 38c, 38d has TC
_{121 ~TC 123, TC 13 1 ~TC} 133, TC 141 ~TC
₁₄₃ ). As illustrated in FIG. 2 with a portion above drive section 38a, each temperature detector TC
The heater H is connected to the control device 84, and the output of the heater H is controlled according to the temperature signal detected by the temperature detector TC.

As shown in FIG. 2, the preheating zone 16 is provided with an air supply pipe 86 above the inlet of a drive section 38a on the inlet side of the furnace body 14a,
An exhaust pipe 88 is provided on the front side in the transport direction of the substrate 10 of 8b, 38c, 38d. The air supply pipe 86 and the exhaust pipe 88 are made of, for example, the same alumina ceramic as the roller 30, and are provided so as to penetrate in the width direction of the furnace body 14. The air supply pipe 86 has an air supply pipe 90 provided on the side of the furnace body 14 at both ends.
And supplies a gas (for example, air) guided from a gas supply source (not shown) into the furnace body 14. The exhaust pipe 88 is connected at both ends to exhaust pipes 92 provided on the side of the furnace body 14, and the gas supplied into the furnace body 14 is subjected to a plurality of exhaust pipes in the process of flowing through the inside. It is sucked in from 88 and discharged from the outlet 94. These air supply pipes 86 and exhaust pipes 88 are respectively shown in FIG.
(B), a round nozzle 96 or a long nozzle 98 is provided at a plurality of positions.

The heating zone 18 has a plurality of temperature detectors TC for detecting the temperature in the heating zone 18.
Are provided vertically at three positions in the longitudinal direction and the width direction of the furnace body 14 for each drive section 40, and form a plurality of zones on the upper side, the lower side, and the upper side of the furnace body 14; H that is controlled independently
In each of the drive sections 40, four zones are provided in the longitudinal direction of the furnace body 14 and six zones including one zone in the upper part on both sides in the width direction. That is, as shown in FIG. 6B, a total of 16 heaters H ₂₁₁₁ divided into four in the feed direction F of the substrate 10 and in the longitudinal direction of the roller 30 (not shown) orthogonal to the drive direction 40 for each drive section 40, H
₂₁₁₂ , to H ₂₁₄₄ are arranged as a pair on the upper and lower sides of the furnace body 14, and are divided into four in the feed direction F on upper side surfaces on both sides in the width direction of the furnace body 14 (ie, 4
Set) heaters _H2115 , _H2125 , ~ _H2146 (drive section 40
In b, H _{2211 to} H ₂₂₄₆ ) are arranged as a pair on both sides. Further, inside the heater H ₂₁₁₁ , between H ₂₁₁₂ and H ₂₁₁₃ , inside H ₂₁₁₄ , between H ₂₁₂₁ and H ₂₁₃₁ , H ₂₁₂₂ ,
Between H ₂₁₂₃ , H ₂₁₃₂ , H ₂₁₃₃ , between H ₂₁₂₄ and H ₂₁₃₄ ,
Nine sets of temperature detectors TC ₂₁₁₁ , TC ₂₁₁₂ , T ₂₁ are located at positions in H ₂₁₄₁ , between H ₂₁₄₂ and H _2143, and in H ₂₁₄₄ , respectively.
C ₂₁₁₃ , TC ₂₁₂₁ , TC ₂₁₂₂ , TC ₂₁₂₃ , TC ₂₁₃₁ , T
C ₂₁₃₂ , TC ₂₁₃₃ (TC ₂₂₁₁ -TC
₂₂₃₃ ) are arranged vertically.

The slow cooling zone 20 includes a plurality of shutter devices S ₁ , at regular intervals along the longitudinal direction of the furnace body 14, as shown for the drive section 64 a in FIG.
S ₂ , to S ₇ (only S ₁ and S ₂ are shown; hereinafter, simply referred to as a shutter device S unless otherwise specified), and the slow cooling zone 20 is divided into drive sections 64 a, 64 b, to 64.
a plurality of, for example, six first heating chambers R ₁ , second heating chambers R ₂ , to sixth heating chambers R ₆ (that is, a plurality of heating sections R ₆ corresponding to f). Is sometimes simply referred to as a heating chamber R). Incidentally, as shown in FIG, the shutter device S ₁ between the drive segment 40b and 64a, S ₂ is a driving segment 64a 64
b are respectively provided between the, other of the shutter device (not shown), S ₃ to S ₆ are driven classification 64b to 64
between f inter, S ₇ are respectively provided between the drive segment 64f and 70a.

The shutter device S described above, the cross-sectional structure in FIG. 2, as respectively shown easily (d-d sectional view in FIG. 2) cross-section through a shutter system S ₂ in FIG. 3 (d), for example a furnace An upper fixed shutter 100 extending downward from the upper inner wall surface in a plane perpendicular to the longitudinal direction of the body 14, a lower fixed shutter 102 extending upward from the lower inner wall surface, and are formed in a flat plate shape and provided in parallel thereto. And a rotation shutter 106 that is rotated around the axis of a rotation shaft 104 parallel to the roller 30. An air cylinder 108 for rotating the rotating shaft 104 about its axis is provided near the portion of the rotating shaft 104 protruding outside the furnace. For this reason, the shutter device S includes the air cylinder 1
08, the rotation shaft 104 is rotated, whereby the opening 110 formed between the upper and lower fixed shutters 100 and 102 is opened or closed by the rotation shutter 106, and the heating chambers R are interconnected. Communication or shielding. The upper fixed shutter 100, the lower fixed shutter 102, and the rotating shutter 106 are, for example,
Each is made of a heat-resistant glass plate made of the same material as the inner wall.

The upper fixed shutter 100 and the lower fixed shutter 102 are each composed of a pair of glass plates which are parallel to each other and have different heights. The rotating shutter 106 is provided at a position between the pair of glass plates, and extends from the rotating shaft 104. The upper fixed shutter 100 is, for example, 80 mm from the transport surface of the substrate 10 formed by the plurality of rollers 30.
(mm), and the lower fixed shutter 102 is located at a distance of about several (mm) to several tens (mm) from the transport surface. .
For example, in the case of a front plate or a rear plate for a PDP, the thickness of the substrate 10 is 10 (including the thickness of a setter (not shown) generally used for carrying the substrate 10 and transporting the inside of the furnace). mm) or less, and is sufficiently thin compared to the distance between the upper fixed shutter 100 and the transport surface, the substrate 10 can be heated without interfering with the upper fixed shutter 100 and the rotating shutter 106. It is made to pass through the opening 110 provided between R. As shown in the figure, the center distance g between the rollers 30 is 150 (m
m) The dimensions are set to be uniform.

Each drive section 64 of the slow cooling zone 20
Are controlled by the control device 84, and each heating chamber R
Temperature detectors TC for detecting the temperature of
A plurality of heaters H for heating the heating chamber R are provided in FIG.
(b) The same arrangement pattern as the heating zone 18 shown in FIG.
(The drive section 64a has a TC₃₁₁₁~ TC₃₁₃₃And H
₃₁₁₁~ H₃₁₄₆, Drive section 64b has TC₃₂₁₁~ TC₃₂₃₃
And H₃₂₁₁~ H₃₂₄₆, The drive section 64c has TC₃₃₁₁~
TC₃₃₃₃And H₃₃₁₁~ H₃₃₄₆, The driving section 64d has T
C₃₄₁₁~ TC₃₄₃₃And H₃₄₁₁~ H₃₄₄₆, Drive section 64
e is TC₃₅₁₁~ TC₃₅₃₃And H₃₅₁₁~ H₃₅₄₆, Drive
TC in section 64f₃₆₁₁~ TC₃₆₃₃And H₃₆₁₁~ H
₃₆₄₆).

In each of the heating chambers R, air supply pipes 112 for supplying cooling air from the upper and lower portions are provided on the rear side (upstream side) of the substrate 10 in the transport direction, and the cooling tubes for cooling the air are provided. An exhaust pipe 114 for discharging air from the upper portion on the front side (downstream side) in the transport direction is provided. The air supply pipe 112 and the exhaust pipe 114 are similar to the air supply pipe 86 and the exhaust pipe 88 provided in the preheating zone 16, respectively, and a round-hole nozzle 96 or a long-hole nozzle 98 is provided. It is composed of a tube made of alumina ceramics. In addition, the air supply pipe 112
The exhaust pipe 114 is connected to an air supply pipe 116 and an exhaust pipe 118 provided outside the furnace body 14, respectively. Air supply pipes 120a, 120b, to 120f provided for each of the pipes 116 (only the air supply pipes 120a are shown.
), And the gas in each heating chamber R sucked from the exhaust pipe 114 is discharged from the outlet 122. Individual air lines 12
0 is provided with solenoid valves 124a, 124b, to 124f (only the solenoid valve 124a is shown; hereinafter, simply referred to as the solenoid valve 124 unless otherwise specified), and the control device 84 supplies air into the heating chamber R. It is started and stopped and the charge is adjusted. In the drawing, air supply pipes 112, 112 provided above and below the heating chamber R, respectively.
Are connected to a common air supply pipe 120, but may be connected to separate air supply pipes 120 each having an electromagnetic valve 124 and controlled independently.

The cooling zone 22 has a temperature detector TC ₄₁ for detecting the temperature in the cooling zone 22,
TC ₄₂ and T ₄₃ are provided on the upper side at the center position in the width direction of the longitudinal center of the furnace body 14 for each drive section 70,
A plurality of cooling jackets C having a length substantially equal to the width of the furnace body 14 are provided on the upper and lower sides of the furnace body 14 in three rows in the longitudinal direction of the furnace body 14 for each drive section 70. The cooling jacket C allows the cooling water supplied from the cooling water pipe 126 shown in FIG. 1 to flow through the branch pipe 128. The upper and lower three cooling jackets C are connected to each other, and the cooling water sequentially circulated in the three cooling jackets C is shown on the opposite side surface shown in FIG. Not drained from drains. The flow rate of the cooling water supplied to the cooling jacket C is adjusted by solenoid valves 130a, 130b, 130c provided in the branch pipe 128 for each drive section 70. The temperature detector TC and the solenoid valve 130 provided in the cooling zone 22 are also provided by the control device 8.
4, the amount of cooling water flowing through the cooling jacket C is controlled based on the temperature signal detected by the temperature detector TC.

FIG. 8 shows the structure of the control device 84.
is there. Preheating zone 16, heating zone 18, slow cooling zone 2
0, and drive sections 38, 40, 6 of the cooling zone 22
4, 70 (or heating chamber R) every predetermined number in furnace body 14
Temperature detector T provided for detecting the temperature of
C₁₁₁, TC₁₁₂, ~ TC₄₃Indicates the temperature detected by
Signal and the vicinity of the rotating shaft 34s for each drive section
The sensor 82 (only one is shown) provided in the
Substrate detection signal generated when 10 is detected
The signal is converted by the multiplexer 132 at a predetermined cycle.
Divided by the A / D converter 134
After that, it is input to the arithmetic and control circuit 136. This
The arithmetic control circuit 136 is, for example, a microcomputer.
Are set by the setting unit 138.
RAM temporary storage based on various control data
While using the functions stored in the ROM in advance.
To process the input signal and output interface 140
Via the motor drive circuit MD₁To the first transfer device 24
A signal for continuous drive is supplied to a motor drive circuit MD._TwoFirst
The drive section 38b of the one transfer device 24 is
Provide signals for driving in synchronization with the driving speed.
And each heater drive circuit D₁₁₁₁, D₁₁₁₂, ~ D
₃₆₄₆To heater H₁₁₁₁, H₁₁₁₂, ~ H₃₆₄₆Drive
And a motor drive circuit MD₃₁, M
D₃₂, ~ MD₃₆To the second transfer devices 26a, 26b, to 26
supply a signal for intermittently driving the f
Drive circuit CD_S1, CD_S2, ~ CD_S7Rotating shutter 10
6 for driving air cylinders 108a, 108
b, supply a signal for driving ~ 108 g,
Motor drive circuit MD₄₁Continuously drive the third transfer device 28
The signal for operating the motor drive circuit MD₄₂To third
The driving section 70a of the feeding device 28 is driven to drive the second conveying device 26.
Supply signals for driving in synchronization with speed
And a solenoid valve drive circuit SD₁, SD_Two, SD_Three, S
D_a1, SD_a2, ~ SD_a6Solenoid valves 130a, 130b,
Drive 130c, 124a, 124b, ~ 124f
To provide a signal for

FIG. 9 shows the operation control circuit 136.
This is an example of processing, and is performed when the position of the substrate 10 is detected.
5 is a flowchart showing a processing procedure. Step S1
, The detection position is set in advance by the setting unit 138.
S_A, Stop position S_BOr S _CAnd the detection roller 30s
△ x, the diameter d of the roller 30s, and the sensor spacing
Number n of blades 80 provided at equal intervals in leave 78
Is set. In the following step S2, the blade 80
Whether the light receiving signal of the reflected light from the sensor is input from the sensor 82
It is determined whether or not. Wait until the received light signal is input.
However, the transported substrate 10 is transferred to the rollers 30s.
When this is contacted and rotated, it is integrated with the roller 30s.
The provided sensor sleeve 78 is rotated to
80 reflects light towards the receiver of sensor 82
Therefore, this determination is affirmed and the process proceeds to step S3.
In step S3, based on the number Sr of received light signal inputs,
For example, according to the equation [△ R = Sr · π · d / n],
The amount of rotation ΔR of the roller 30s, that is, the outer circumference of the roller 30s
The movement length in the circumferential direction of any one point located on the surface is
Is calculated. In the following step S4,
Is the rotation amount △ R calculated as above equal to or greater than the distance △ x?
It is determined whether or not. While this judgment is denied, step
The process returns to S2 to wait for the input of the light receiving signal.
Then, the process proceeds to step S5. In step S5
Is the front end of the substrate 10 (when the reciprocation moves backward,
(End) is the detection position S_AArrival signal indicating that the vehicle has reached
Is output, and the series of processes is terminated. Accordingly
Therefore, in the present embodiment, the control device 84
Also serves as.

As described above, the roller 30s is connected to the substrate 10
And rotated only while frictional force acts between them. Therefore, assuming that there is no slippage between the detection roller 30s and the substrate 10, in the above process, the rotation amount ΔR of the roller 30s becomes forward or backward in the transport direction of the substrate 10 during the contact. Matches the amount of movement. Therefore, since the roller 30s is rotated from the time when the front end of the substrate 10 reaches the top thereof, the distance △ x between the detection position S _A or the like and the roller 30s and the rotation amount △ R are compared to determine the rotation of the substrate 10. It is determined that the front end or the like has reached the detection position S _A or the like.

The heaters H ₁₁₁₁ , H _1112,.
H _2246, as the temperature of the furnace body 14 in the preheating zone 16 and the heating zone 18 is the predetermined temperature gradient is formed (conveying direction of the substrate 10) uniformly and longitudinally in the width direction, a heater H ₃₁₁₁ , H _{31 12,} to H _3646, the temperature of the heating chamber R of the slow cooling zone 20 is such that even at a preset temperature, respectively, the target temperature ratio or mutual each region set in advance, respectively It is controlled according to the output ratio. For example, heaters H ₁₁₁₂ , H ₁₁₁₃ , H ₁₁₂₂ , H ₁₁₂₃ , to H located at the center in the width direction of the furnace body 14.
Compared to ₃₆₄₂ , the heater H ₁₁₁₁ located at the width direction end,
The output of H ₁₁₁₄ , H ₁₁₂₁ , H ₁₁₂₄ , to H ₃₆₄₄ is increased. Further, in the longitudinal direction of the furnace body 14, the low temperature side (the rear side in the transport direction of the substrate 10 in the drive section 40 a of the preheating zone 16 and the heating zone 18, and the front side in the transport direction in the drive section 40 b and the slow cooling zone 20 of the heating zone 18). Side) heaters H ₁₁₁₁ , H ₁₁₁₂ , H ₁₁₁₃ , H
_{1114, H 1211, H 1212,} H 1213, H 1214, ~H 2116, and _{H 2241, H 2242, H 2243} , H 2244, H 2245,
H ₂₂₄₆ , H ₃₁₄₁ , H ₃₁₄₂ , H ₃₁₄₃ , H ₃₁₄₄ , H ₃₁₄₅ , H
₃₁₄₆ to H ₃₆₄₆ are heaters H ₁₁₄₁ , H located on the high temperature side (opposite side of the above) of each zone 22, 128, 130.
_{11 42} , H ₁₁₄₃ , H ₁₁₄₄ , H ₁₂₄₁ , H ₁₂₄₂ , H ₁₂₄₃ , H
_1244, to H _2146, and _{H 22 11, H 2212, H} 2213, H
₂₂₁₄ , H ₂₂₁₅ , H ₂₂₁₆ , H ₃₁₁₁ , H ₃₁₁₂ , H ₃₁₁₃ , H _31
14 , H ₃₁₁₅ , H ₃₁₁₆ , to H ₃₆₁₆ , the output is increased.

FIG. 10 is a timing chart showing the position of each substrate 10 when the substrate 10 containing the film forming material is baked using the RHK 12. FIG.
FIG. 11 is a diagram showing a temperature rise / fall curve of the substrate 10 carried at time t ₀ in FIG. 10. In FIG. 10, a dashed line indicates a boundary of each drive section 38 and the like. That is, the vertical axis represents the position in the longitudinal direction (the transport direction of the substrate 10) in the furnace body 14. A plurality of real curves drawn upward to the right each correspond to the movement of each substrate 10, and the magnitude of the inclination represents the speed of the transport speed. Hereinafter, the firing method of the substrate 10 will be described with reference to these timing charts.

First, at time t ₀ , the unfired substrate 1
0 is a preheating zone 16 according to the loading direction F shown in FIG.
Is carried in from the drive section 38 side. At this time, all the shutter devices S provided in the slow cooling zone 20 are closed,
The heating chambers R are separated from each other, and the heaters H provided in the respective zones 16, 18, and 20 of the furnace body 14 so that the substrate 10 is heated and lowered according to the temperature curve shown in FIG. Is driven by the feedback control to heat the inside of the furnace body 14a, and the electromagnetic valve 130 provided in the cooling zone 22 is driven to flow the cooling water through the cooling jacket C. The part is maintained at a preset target temperature. Also,
The motors 46 and 72 are driven to rotate the rollers 30 in the first transport device 24 and the third transport device 28 in the clockwise direction in FIG. Therefore, the loaded substrate 10 is transported toward the heating zone 18 at the first transport speed.

[0049] Then, at time t ₁ has elapsed from the time t _0, for example, about 300 seconds, the next substrate 10 is carried into the preheating zone 16, at time t ₂ has elapsed further about 300 seconds, the substrate 10 further in the following Is carried into the preheating zone 16. That is, the substrates 10 are sequentially carried into the preheating zone 16 every about 300 seconds, for example, and the front end 136 of the substrate 10 is
Is about 1500 (mm), so if the length of the substrate 10 in the transport direction is 1000 (mm), the mutual distance is 500 (mm).
It will be carried in by about. The substrate 10 sequentially loaded in this manner is transported to the end of the preheating zone 16 while being supported by the roller 30 that is being rotationally driven. Is raised to the maximum firing temperature MT. 10 and 11
This state is shown at t ₃ .

At this time, the driving section 38 of the preheating zone 16
The rotation of the detection roller 30s provided in each of the sensors is detected by the sensor 82, and based on the amount of rotation, the controller 84 sequentially determines that the sequentially loaded substrates 10 have reached the respective detection positions S _A. You. Further, the arithmetic and control circuit 136 provided in the control device 84 determines whether or not the detection time interval is maintained at a value equal to the carry-in interval, and for example, the detection time interval becomes about 4/5 of the carry-in interval. If it is shorter, the heating is stopped by temporarily stopping the loading and adjusting the loading time interval of the substrate 10 loaded into the preheating zone 16 or by temporarily stopping the first transporting device 24. The time interval for carrying the substrate 10 into the slow cooling zone 20 following the zone 18 is adjusted. That is, the transfer speed of the substrate 10 is adjusted. Incidentally, in a baking apparatus such as the RHK 12 in which the substrate 10 is transported by a plurality of rollers 30, transport speed unevenness due to slippage between the roller 30 and the substrate 10 may occur. For this reason, the transfer time interval of the substrate 10 is not always kept at the carry-in time interval, and there is a problem that the substrates 10 that follow one another sometimes come into contact with each other and are damaged. It is necessary to detect and adjust within 14.

In the subsequent heating zone 18, the substrate 10
Is maintained at the maximum firing temperature MT, and the first transport device 2
4 conveys continuously from the preheating zone 16. However, the transport speed in the heating zone 18, initially is the first transport speed in the same manner as the preheating zone 16, a position where the substrate 10 has a predetermined entering the drive segment 40b (e.g. the detection position S _A ), The motor 44 is driven to increase the speed to the second transport speed. At this time, the shutter device S ₁ is provided is opened between the heating zone 18 and the slow cooling zone 20, the second feeding section 26a for driving the roller 30 in the heating chamber R ₁ is in a predetermined second It is driven at the transport speed (that is, the transport speed similar to that of the drive section 40b). Therefore, the substrate 10 is placed in the heating zone 1
8 to the heating chamber R ₁ of the annealing zone 20, that is, the heating roller R ₁ , which is maintained at the first soaking temperature KT ₁ , and is detected by the sensor 82.
By that the ends 10a based on rotation of 0s has reached the stop position S _B as the front end of the reciprocal movement range is determined by the controller 84 in accordance with a control signal output from the controller 84 heating chamber defined for each R is the stopped at the stop position S _B. t ₄ time shows this state. In the present embodiment, the heating time from reaching the maximum firing temperature MT until transferred into the heating chamber R ₁ (so-called keep-time), for example, about 400 seconds. Thus the substrate 10 carried in the slow cooling zone 20 is at a predetermined temperature (i.e. first to sixth soaking temperature) which has been previously set in the heating chamber _{R KT 1, KT 2, ~KT} 6 , And is gradually cooled according to a step-like temperature-falling curve shown in FIG. Note that the first soaking temperature KT ₁ is several (° C.) to ten-odd more than the maximum firing temperature MT.
(° C.), which is lower by a predetermined value ΔKT, and the second soaking temperature KT ₂ , the third soaking temperature KT ₃ , to the sixth soaking temperature KT ₆ are each further lowered by a predetermined value ΔKT. Temperature.

[0052] At this time, when the substrate 10 is carried into the heating chamber R _1, the shutter device S ₁ which has been opened is closed, the motor 66a of the second feeding section 26a of the drive segment 64a is inverted driven , ranges substrate 10 is shown in FIG. 2 by a broken line in the heating chamber R ₁ along the transport direction (S _B to S
_The heat is soaked while being reciprocated in _C ). During this reciprocation, the substrate 1 is moved based on the rotation of the roller 30s.
0 is detected to reach the stop position S _B in the transport direction, the motor 66 is switched to the reverse drive, and when it is detected that the rear end in the transport direction has reached the stop position S _C , Is switched to the forward drive. In this way, when a predetermined holding time of, for example, about 180 seconds elapses, the reciprocating movement of the substrate 10 is terminated, the shutter device S ₂ is opened, and the heating chamber R ₂ where the substrate 10 continues
Conveyed inside. T ₅ time points 10 and 11 shows this state. While the substrate 10 falls completely within the heating chamber R ₂ shutter device S ₂ is closed, the similarly soaking and heating chamber R ₁ in the heating chamber R ₂ is performed, heated it became Check after cooling air is supplied from the supply pipe 112 as required in the chamber R _1, the same way soaked substrate 10 is transported followed by is performed. The time required for loading and unloading the substrate 10, that is, the time from when the shutter device S is opened to when it is closed again is, for example, about 30 seconds. Further, one cycle of the heat treatment in each heating chamber R, that is, the interval at which the shutter device S on the rear side in the transport direction is opened in order to carry in the substrate 10 sequentially, is determined by setting the substrate 1 to the preheating zone.
It is about 300 seconds which is equal to the carry-in interval of 0.

In the heating zone 18, the position judging device for the substrate 10, which is composed of the roller 30s, the sensor sleeve 78, the sensor 82, and the control device 84,
Like the preheating zone 16, the substrate 10 is made to function to maintain the transfer time interval. Since it is desired to be located in the movement range and to be reciprocated within the range, the position determination device is made to function exclusively to stop the substrate 10 at the stop positions S _B and S _C , respectively. Furthermore, slow cooling zone 2
At 0, since the heating chambers R are mutually shielded by the shutter device S as described above, the stop position S
_If not stopped at _B , interference between the shutter device S and the substrate 10 may occur, so that the necessity of substrate position determination (or position detection) is further increased. By the way, FIG.
As shown in the lower part of FIG. ₁ , the desired temperature cannot be obtained due to the influence of the set temperature of the adjacent heating chamber R before and after in the transport direction. Substrate 1 during soaking in R
In order to maintain the entire temperature at a desired temperature, it is necessary to position the substrate 10 at a position corresponding to the horizontal portion of the graph. The stop positions S _B and S _C are set within such a range.

In addition, the cooling condition in a predetermined cooling period following the maximum firing temperature MT of, for example, about 500 (° C.) or more in the temperature rise curve shown in FIG. Is an important factor above. For example, V
Substrate 10 used for FD, PDP, PALC and FED
Is made of glass having a low strain point represented by soda-lime glass, when the temperature in the substrate 10 becomes uneven and the cooling rates of the respective parts are different from each other, the size of PDPs and FEDs that make it difficult to align multi-layer thick film printing due to local changes in the thickness, or form a large number of cells by combining the thick film printing surfaces of the front plate and the rear plate In the case of using the semiconductor device, there is a portion where a cell cannot be formed due to a difference between the two, so that the larger the size is, for example, 40 inches, the lower the manufacturing yield is. FIG. 12 shows the dimensions (solid line) of the substrate 10 in the conventional firing method in which the cooling rate on the front end side in the transport direction is higher than the cooling rate on the rear end side in the transport direction.
Is shown in comparison with the dimension before firing (dashed line). Also, when a large number of thick-film printed resistors and thick-film bonding pads are provided on the substrate 10, the temperature inside the substrate 10 becomes non-uniform and the cooling rates of the respective parts are different from each other. Due to the degree of melting and softening of the glass component contained as a binder in the thick film layer having a function, and the degree of melting and sintering of the metal and inorganic material particles contained in the thick film, the resistance value and the bonding are determined. Since the suitability is affected, the manufacturing yield is acceleratedly reduced as the size of the substrate 10 increases due to variations in the resistance value of the printed resistor and the bonding suitability. Furthermore, even when a rib wall having a predetermined height is formed on the substrate 10 by laminating the dielectric layers by the thick film printing, the temperature inside the substrate 10 becomes uneven and the cooling rates of the respective parts are different from each other. Since the firing shrinkage, that is, the thickness and width of the thick film, depend on the degree of melting and softening of the glass component contained in the thick film, the substrate 1
The larger 0 is, the lower the manufacturing yield is accelerated.

Returning to FIG. 10, the heating chambers R ₁ , R ₂ ,.
When the heat treatment in the slow cooling zone is terminated by inside ₆ are sequentially held, the shutter device S ₇ is opened,
When the motor 66f and the motor 76 are driven,
Drive segment 64f and 70a are synchronously driven, the substrate 10 is unloaded from the heating chamber R ₆ in the cooling zone 22. T ₁₀ time points 10 and 11 shows this state.
Thereafter, the motor 76 of the third transfer device 28 is stopped, and the substrate 10 is transferred in the cooling zone 22 at the first transfer speed and is unloaded from the right end thereof. It is cooled rapidly at a rate of temperature decrease substantially similar to the temperature rate. T ₁₁ the time of FIG. 10 shows this state. The time required for this cooling process is, for example, about 700 seconds.
The time (t _{0 to} t ₁₁ ) from when the substrate 10 is carried into the preheating zone 16 to when the cooling is completed is, for example, about 3500 seconds (about 1 hour). As described above, the substrate 10
At a predetermined time interval of, for example, about 300 seconds.
As is apparent from FIG. 10, they are sequentially carried out of the cooling zone 22 at a predetermined time interval of about 300 seconds, which is the same as the time of carrying in. In the cooling zone 22, the rotation of the roller 30s is detected to detect the rotation of the roller 30s.
Is determined to have reached the detection position S _A , and the third transfer device 28 is controlled such that the substrate interval is maintained at an expected value.

As described above, according to the present embodiment, RHK
12 is rotatably supported around the axis with one end positioned outside the furnace body 14 at a predetermined position between the plurality of rollers 30, and is driven and rotated according to the frictional force with the substrate 10 being conveyed. The detection roller 30 s, a sensor sleeve 78 and a sensor 82 for detecting the rotation of one end of the detection roller 30 s outside the furnace body 14, and the substrate 10 based on the rotation of the roller 30 s detected by the sensor 82. And a control device 84 for determining that has reached the detection position S _A or the like. Therefore, when the detection roller 30s provided between the plurality of rollers 30 for transporting the substrate 10 is brought into contact with the substrate 10 to be transported, the detection roller 30s is driven and rotated according to the frictional force therebetween, The rotation of one end of the detection roller 30 s positioned outside the furnace body 14 is detected by a sensor 82 provided outside the furnace body 14, and based on the detection signal, the control device 84 causes the substrate 10 to rotate the detection roller 30 s. It is determined that it has reached the position where it contacts 30s. At this time, the sensor sleeve 78 and the sensor 82 are provided outside the furnace body 14 and the detection roller 30s located outside the furnace body 14
Since rotation of one end of the furnace body 14 is detected, measurement accuracy is not reduced due to heat or the like in the furnace body 14 and repair is not difficult when trouble occurs. In addition, since the detection roller 30s is provided between the plurality of rollers 30 so that one end is located outside the furnace body 14, when the roller is damaged, the detection roller 30s is easily removed from the outside of the furnace body 14 by extracting from one end side or the like. Exchangeable. Therefore, the RHK 10 provided with the position determining device for the substrate 10 which has high stability and is easy to repair and adjust.
Is obtained.

Further, since both the sensor sleeve 78 and the sensor 82 are provided at positions close to each other outside the furnace body 14, the arrangement position is low and the influence of gas and red light generated in the furnace is low. In addition, since the sensing distance of the optical sensor 82 is sufficiently short, the failure and malfunction of the sensor 82 and the detection error of reflected light are reduced, and the substrate position can be stably detected.

[0058] In the present embodiment, the detection roller 30s is provided in the rear side from the front end in the conveying direction of the substrate 10 at the detection position S _A or the like. Therefore, when the substrate 10 arrives at the detection position S _A or the like, the weight of the substrate 10 sufficiently acts on the detection roller 30s, so that the detection roller 30s is surely rotated, which may cause detection leakage. Be suppressed.

Further, in this embodiment, the RHK 12 is provided with a plurality of substrates 10 which are thermally divided so as to be sequentially arranged in one direction in order to perform a soaking process sequentially on each of the plurality of substrates 10, and each of which is soaked. Heating chambers R ₁ , R ₂ , to R ₆ and substrate 1
0 and the second transport device 26 for sequentially conveying a plurality of stop positions S _B provided for each plurality of heating chambers R is provided,
The detection roller 30s is provided with the plurality of stop positions S _B
(Strictly, slightly behind). Therefore, the plurality of substrates 10 are uniformly heated in each of the plurality of heating chambers R in the process of being sequentially transported in one direction during the heat treatment process. detection roller 3 provided in a position S _B
Os is rotated by the action of frictional force with the substrate 10. Accordingly, since the basis of the rotation detected by the configured rotation detector from the sensor sleeve 78 and sensor 82, the substrate 10 has reached its stop position S _B is determined by the control device 84, the substrate 1
0 can be stopped at the stop position S _B which are their respective set. Thereby, in the case where the substrate 10 is heat-treated while being uniformly heated for each of the plurality of heating chambers R in order to minimize the temperature variation in the substrate 10, as high a uniform temperature state as possible can be obtained. Stop position S set as follows
_Since the substrate 10 can be stopped at _B ,
The temperature variation in the inside is further suppressed.

In this embodiment, the substrate 10 is
Allowed to reciprocate along the conveying direction in the equalizing heat stroke in each heating chamber R, the stop position S _C reciprocation is also provided in the transport direction rear side in the heating chamber R. Therefore, it is reliably moved back and forth in a reciprocating movement range of the substrate 10 is set in advance to heat stroke average in each heating chamber R (between S _B to S _C) in order to further suppress the temperature fluctuation of the substrate 10.

Next, another embodiment of the present invention will be described. In the following embodiments, portions common to the above-described embodiments will be denoted by the same reference numerals and description thereof will be omitted.

FIG. 13 is a view for explaining an example of a configuration in which two detection rollers 30 s are provided in one drive section 64. In the figure, in the vicinity of the stop position S _B, behind the conveying direction F of Example as well as with the sensor sleeve 78 is detecting roller 30s mounted coaxially provided, the substrate 10 than that of the aforementioned At the position, a similar detection sleeve 30b is provided, and a detection roller 30sb which is driven by the movement of the substrate 10 is provided. Detection and stop position S _B rollers 30s and 30s
The intervals with b are Δx ₁ and Δx ₂ , respectively. Also,
For example, a sensor 82 is provided below the sensor sleeve 78, and a sensor 82b is provided below the sensor sleeve 78b. The sensor sleeve 78
The sensor b and the sensor 82b are provided in a sufficiently cold region outside the furnace body 14 similarly to the sensor sleeve 78 and the sensor 82. The light receiving signals of these sensors 82 and 82b are independently processed according to the flowchart shown in FIG.

That is, in FIG.
In S1, the setting unit 138 replaces the above-mentioned Δx with the above-mentioned value.
△ x₁And △ x_TwoAre set respectively. And
In step S3, the rotation amount ΔR is calculated respectively.
In step S4, the calculated rotation
The amount ΔR is the distance Δx in the light receiving signal of the sensor 82. ₁
In the above value, the distance △
x_TwoIt is determined whether or not the above values are obtained. Exchange
In other words, the detection rollers 30s and 30sb are arranged in their positions.
It is determined whether the rotation has been performed by an amount corresponding to the position.
In each case, while this determination is denied, the process proceeds to step S2.
Return, but if affirmative, proceed to step S5 to end the process
I do. At this time, in the present embodiment, two sensors 8
One of the processing routines for the light receiving signals of the light receiving signals 2 and 82b
In front of the substrate 10 because the substrate arrival signal is output from the
End is stop position S_BIs reached, and the control device 84 determines
Subsequent processing, such as rotation control of the motor 66, is performed.

Therefore, the detection roller 30s, the sensor
In addition to the sleeve 78 and the sensor 82, the detection roller is pivotally supported so as to be allowed to Similarly rotated at a location spaced from the stop position S _B by a distance △ x ₂ in the rear of the conveying direction F from the detected roller 30s 30 sb and furnace body 1
And a sensor 82b for detecting the rotation of the sensor sleeve 78b attached to one end of the detecting roller 30sb outside the detecting roller 30sb. If the judgment in step S4 is affirmative based on one of the light receiving signals, the sensor reaches the substrate. since but is determined, the detection roller 30s, and one is damaged 30Sb, or sensors in such cases either where one fails the 82,82B, of the substrate 10 has reached the stop position S _B Misjudgment is suitably avoided.

FIG. 14 is a view for explaining still another embodiment of the present invention. In the figure, a sensor sleeve 78 is provided on a rotation shaft 34s for rotating the detection roller 30s.
The torque limiter 142
The output shaft of the motor 144 is connected via the. As shown in the drawing, the output shaft of the motor 144 is rotated at a lower speed in a rotation direction R opposite to the rotation direction A of the roller 30 functioning as a driving roller. That is, the detecting roller 30s is rotated at a different speed from the driving roller 30 in the same driving section located adjacent thereto. Therefore, while the substrate 10 is not in contact with the detection roller 30s, the detection roller 30s is rotated in the rotation direction R of the output shaft of the motor 144,
When the substrate 10 reaches the detection roller 30s as shown by the dashed line in the figure and rotates it in the direction B shown by the dashed line in the figure, an excessive torque acts on the torque limiter 142. The rotation of the output shaft of the motor 144 is not transmitted to the rotation shaft 34s. This allows
The detection roller 30s is used for the substrate 10 as in the case where the detection roller 30s is not always rotated as in the embodiment shown in FIG.
Roller 30 for driving only according to the action of the frictional force between
It is rotated at the same rotation speed as. Therefore, it is possible to detect that the detection roller 30s has started to be rotated by the substrate 10 due to a change in which the ON / OFF repetition frequency of the light receiving signal of the sensor 82 is increased. By performing the signal processing in accordance with the flow chart shown in FIG. 7, the substrate position can be similarly determined. In the present embodiment, the torque limiter 142 and the motor 144 are used.
Corresponds to a detection roller rotation driving device.

For this reason, the detection roller 30 s is
Even during the period in which the frictional force is not applied between the roller 30 and the roller 30, the roller 144 is rotated around its axis independently by the motor 144 at a peripheral speed different from that of the roller 30 located adjacent to the roller 30. The temperature distribution is generated in the circumferential direction in the furnace body 14, and the occurrence of warpage and breakage is preferably suppressed. At this time, since the peripheral speed of the detection roller 30s is set to a value different from that of the plurality of rollers 30 that are adjacent to each other,
When a frictional force is applied to the substrate 10, the peripheral speed is changed, so that it is easily recognized that the detection roller 30s has been rotated by the effect of the frictional force with the substrate 10. You. When the rotation direction R is set to the same direction as the rotation direction B and at a lower speed, a clutch or a one-way coupling is provided in place of the torque limiter 142 so that the rotation force from the substrate 10 is reduced. During the operation of, the motor 144 can be substantially disabled and the substrate position can be determined.

FIG. 15 is a view for explaining an example of a supporting method capable of easily detecting breakage of the detecting roller 30s. FIG. 15A shows the state before the breakage, and FIG. 15B shows the state after the breakage. In the figure, the detection roller 30s is
Cone portions 146a and 146b provided at the distal ends of the pair of rotating shafts 34sa and 34sb respectively support the shafts in a state where their axes coincide with those of the rotating shafts 34sa and 34sb. One cone portion 146a is fixedly or integrally provided at the tip of the rotation shaft 34sa, while the other cone portion 146b has a through hole 148 that penetrates in the axial direction, and is connected to the rotation shaft 34sb. It is fitted from the tip side. A flange 150 having a larger diameter than other portions is provided at an intermediate portion of the rotating shaft 34sb, and a compression spring 152 is inserted between the flange 150 and the cone portion 146b to form a cone. The portion 146b is urged in a direction away from the flange 150. for that reason,
The detection roller 30s is configured such that the cone portion 146b located at one end side is directed to the cone portion 146a located at the other end side according to the urging force of the compression spring 152.
It is pressed from both ends between the cone portions 146a and 146b.

In the above supporting structure, when the detecting roller 30s breaks as shown in FIG. 15B, the pressing force from the cone 146b is not transmitted to the cone 146a on the other end, so that the compression spring The cone portion 146b moves toward the furnace body 14 according to the biasing force of 152. Therefore, the limit switch 154 provided on the side of the cone 146b is operated by the base of the cone 146b having a larger diameter than the tip side. for that reason,
By setting so that an alarm is issued by a lamp, an alarm, or the like when the limit switch 154 is operated, it is possible to easily know that the substrate position cannot be detected due to the damage of the detection roller 30s. Therefore, the danger of operating the RHK 12 in a state where the substrate cannot be detected can be easily avoided. In this embodiment, the compression spring 15
2 corresponds to a pressing device, and the cone 146b and the limit switch 154 correspond to a breakage detecting device.

FIG. 16 is a view for explaining another example of the rotation detecting mechanism of the detecting roller 30s. In the figure, a sensor sleeve 78 having a blade 80 similar to that of the above-described embodiment is fitted on the rotation shaft 34s of the detection roller 30s, but a photoelectric switch is provided near the sensor sleeve 78. A limit switch 156 is provided instead of the sensor 82. Limit switch 1
When the sensor sleeve 78 is rotated around the axis, the blade 56 is turned on and off by the blade 80, and the operation signal is sent to the control device 84. Therefore, the position of the substrate 10 can be determined based on the rotation of the detection roller 30s by processing the operation signal in the same manner as the light reception signal when the sensor 82 is provided according to the flowchart shown in FIG. it can. Also in this configuration, since the sensor sleeve 78 and the limit switch 156 are provided outside the furnace body 14 as in the case shown in FIG. 5, malfunctions and failures due to heat or the like are preferably suppressed. At the same time, they can be composed of metal parts having high workability without particularly considering heat resistance. Note that, as is clear from the above description, in this embodiment, the blade 80 does not need to reflect light, but can be intermittently brought into contact with the limit switch 156. It is preferable to use a material that does not easily wear.

While the embodiment of the present invention has been described in detail with reference to the drawings, the present invention can be embodied in still another embodiment.

For example, in the above-described embodiment, the sensor sleeve 78 provided with the blade 80 is provided at one end (strictly speaking, at the other end) for the purpose of detecting the rotation of one end of the detection roller 30s located outside the furnace body 14. Rotating shaft 34s supporting one end)
And the blade 80 intermittently causes reflected light to enter the sensor 82, or the limit switch 156 is operated intermittently. However, the detection roller 30s or the supporting roller 30s is supported. Various other rotation detection methods may be used as long as the rotation of the rotation shaft 34s can be detected outside the furnace body 14. For example, the rotation of the blade 80 may be detected in a non-contact manner by an ultrasonic sensor, a rotary encoder, a magnetic sensor, or the like, or may be detected by contact with a cam or the like. The position of the substrate may be determined based on the detection signal by detecting these by optical means or mechanical means.

In the embodiment, the detection roller 3
0s While there has been provided in the vicinity of the substrate detection position S _A and the stop position S _B, as long as the position which is rotated reliably by the substrate 10 when the substrate 10 has reached their position, detecting roller 30s May be appropriately changed, and may be provided, for example, near the rear end of the substrate 10 located at the detection position S _A.

In the embodiment, the detection roller 3
0s is provided so that the interval between the rollers (transport rollers or drive rollers) 30 actually functioning as the transport has the same size as the mutual interval between them, but the transport It may be provided in a form added between the rollers 30.

In the embodiment, the detection roller 3
Although the diameter of 0 s was the same as that of the transport roller 30,
Its diameter can be changed as appropriate. For example, if the diameter is larger than them, they are easily rotated when contacted with the substrate 10 to increase the reactivity, and conversely, if the diameter is smaller, the number of rotations during contact with the substrate 10 is increased. Therefore, there is an advantage that the position detection accuracy can be improved even when the distance Δx between the detection roller 30s and the detection position S _A or the like is small. In either case, the transfer of the substrate 10 by the transfer roller 30 is not hindered, and the substrate 10 is rotated by the substrate 10 so as to be surely rotated. It is preferable to set the height position such that one point on the outer peripheral surface of the detection roller 30s is located slightly above.

The heating chamber R for reciprocating the substrate 10
In inner, detection roller 3 in the vicinity of the stop position S _C
0s may be provided to detect the rear end position of the reciprocating movement at the time of retreat by rotation of the detection roller 30s.

In the embodiment, a plurality of heating chambers R
Are configured to be shielded from each other by a shutter device S provided with a rotary shutter 106.
If the heat equalizing range in can be set to be sufficiently large with respect to the size of the substrate 10, the shutter device S may not necessarily be provided. In this case, interference between the shutter device S and the substrate 10 does not occur even if the substrate position is not determined. Since it is desired, the effect of providing the position determination device for the substrate 10 as in the embodiment can be sufficiently obtained.

In the embodiment, the case where the present invention is applied to the RHK 12 for sintering the substrate has been described. The present invention is similarly applied to RHK for heat treatment of an object to be heated made of various materials and parts without being limited thereto.

In the embodiment, the detection roller 3
For example, when the substrate 10 is rotated by a predetermined amount, that is, when the substrate 10 is rotated by a predetermined amount, that is, when the substrate 10 is rotated by a predetermined amount, or when the substrate is previously rotated, the rotation speed is changed and then the substrate 10 is rotated by a predetermined amount. Although it has been determined that the position has been reached, the amount of rotation for determining the arrival at the fixed position is appropriately determined by the relationship between the detected position and the position where the roller 30s is disposed. For example, when the detection position S _A , the stop positions S _B and S _{C, and the} like are set on the detection roller 30 s, it is determined that the position has been reached due to the start of rotation or a change in rotation speed. , The detection roller 30s is at the detection position S
_{In the} case where it is provided at a position behind the object _A or the like by a length in the transport direction of the object to be heated such as the substrate 10 or the like, it is determined that the rotation has been completed or the rotation speed has returned to the original value, thereby reaching the position.

In the embodiment, the roller 30 is made of alumina ceramics. However, the material is appropriately determined according to the required heat resistance and mechanical strength. For example, mullite ceramics is also suitable. Used.

Although not specifically exemplified, the present invention can be embodied with various modifications and improvements based on the knowledge of those skilled in the art.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating an overall configuration of an RHK for firing a substrate according to an embodiment of the present invention.

FIG. 2 is a view partially showing a cross section along a longitudinal direction of a furnace body of the RHK shown in FIG. 1;

FIGS. 3A to 3E are aa to ee in FIG.
It is a figure each corresponding to a viewing cross section.

FIG. 4 is a diagram illustrating a driving mechanism of the RHK of FIG. 1;

FIG. 5 is a diagram illustrating a substrate position detection mechanism of the RHK of FIG. 1;

FIGS. 6A and 6B are diagrams for explaining the arrangement of a plurality of heaters of the RHK of FIG. 1;

FIGS. 7 (a) and 7 (b) are diagrams showing an air supply pipe and an exhaust pipe of the RHK of FIG. 1, respectively.

FIG. 8 is a block diagram illustrating a control configuration of the RHK of FIG. 1;

FIG. 9 is a flowchart illustrating a method of detecting a substrate position in the control configuration of FIG. 9;

FIG. 10 is a timing chart showing a transfer position of the RHK substrate of FIG. 1;

11 is a diagram showing a set temperature of each zone of RHK of FIG. 1, that is, a firing temperature curve of a substrate.

FIG. 12 is a diagram illustrating local dimensional deformation of a substrate in a conventional RHK.

FIG. 13 is a diagram illustrating a substrate position detecting mechanism according to another embodiment of the present invention.

FIG. 14 is a diagram illustrating a substrate position detecting mechanism according to another embodiment of the present invention.

15A is a diagram illustrating an example of a detection roller support mechanism of the present invention, and FIG. 15B is a diagram illustrating a state in which the detection roller is broken in the support mechanism of FIG. is there.

FIG. 16 is a diagram illustrating another example of the rotation detection mechanism of the detection roller.

[Explanation of symbols]

10: substrate (object to be heated) 12: RHK R1, R2, ~R6: a plurality of heating chambers (heating _{segment) S A, S B, S} C: detection position (stop position) 30: roller (driving roller) 30s : Detection roller 84: control device (position determination device) {78: sensor sleeve, 82: sensor} (rotation detection device)

Continued on the front page (72) Inventor Yoshiyuki Inaba Fukuoka Prefecture Asakura-gun, Yasu-cho, Yatsu-cho, Sanzen-cho, Yatsunami 2160 No. Kyushu Noritake Co., Ltd. F term (reference) 3F027 AA03 CA02 DA01 DA02 DA08 DA14 EA01 FA03 FA12 4K034 AA01 BA05 CA05 DA02 DB02 DB03 DB04 EA12 4K050 AA02 AA04 AA09 BA05 BA16 CA13 CC07 CC10 CD05 CD13 CF06 CF16 CG04 EA02

Claims (2)

[Claims] An object to be heated is supported by a plurality of rollers arranged in parallel with each other and each of which is driven to rotate around an axis, and is conveyed in one direction in a furnace chamber. A roller hearth kiln of a type that performs heat treatment, and is rotatably supported around an axis in a state where one end is located outside the furnace chamber at a predetermined position between the plurality of rollers,
A detection roller that is driven and rotated according to a frictional force between the conveyed object to be heated, a rotation detection device that detects rotation of one end of the detection roller outside the furnace chamber, and a rotation detection device that detects the rotation. And a position determining means for determining that the object to be heated has reached a predetermined position based on the rotation of the detection roller. 2. The apparatus according to claim 1, further comprising a detection roller rotation driving device for independently rotating the detection roller around its axis at a peripheral speed different from that of the plurality of rollers adjacent thereto. The roller hearth of claim 1
Kiln.