JP2000049219A - Substrate holding cassette - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate holding cassette, which is highly effective in suppressing the residual of processing solution, and which is capable of reducing the cost of cleaning process and enhancing the processing effect of cleaning. SOLUTION: Holding protrusions 3a for holding protrusions 6a are positioned along each of the longitudinal directions of substrate holding member 3 to substrate holding member 6, respectively, with an even pitch f for each, wherein the holding protrusions 3a to the holding protrusions 6a are arranged so that the holding protrusions on each pair of neighboring ones of the substrate holding members are set at positions apart by a pitch f/2 between the neighboring pair. In addition, the longitudinal positions of the holding protrusions 3a to the holding protrusions 6a are arranged so that the space of one piece of the holding protrusion results between a pair of neighboring substrates, when the substrates 12 are held. By these arrangements, the processing solution flows out immediately on each processing bath, and the remaining processing solution among each of the holding protrusions 3a to the holding protrusions 6a can be suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a substrate holding cassette for arranging and holding a plurality of substrates such as glass substrates and silicon wafers for performing a cleaning process or the like.

[0002]

2. Description of the Related Art A conventional substrate holding cassette is disclosed, for example, in Japanese Patent Application Laid-Open No. 7-106408 by the present applicant. 7 is a side view showing a state in which a conventional substrate holding cassette holds a substrate, FIG. 8 is a front view including a half section of the conventional substrate holding cassette, and FIG.
FIG. 7 is a perspective view showing a substrate supporting member provided in the conventional substrate holding cassette shown in FIGS. 7 and 8, and FIG. 10 is an enlarged sectional view showing a state where the conventional substrate holding cassette holds a substrate;
It is a side view in the XX cross section of FIG. FIG. 11 is a perspective view illustrating an automatic substrate processing apparatus, and is a diagram illustrating an example of use of a substrate holding cassette. Hereinafter, a conventional substrate holding cassette will be described with reference to FIGS.

A conventional substrate holding cassette 101 shown in FIGS. 7 and 8 is, for example, an automatic substrate processing apparatus 1 shown in FIG.
03. The substrate automatic processing apparatus 10
An apparatus 3 performs a cleaning process by immersing a plurality of substrates such as a glass substrate and a silicon wafer collectively in a processing solution in a processing tank.

As shown in FIGS. 7, 8 and 11, the conventional substrate holding cassette 101 is formed symmetrically in the left-right direction and the front-back direction, and is provided to extend in the front-rear direction in parallel with each other. And a pair of front and rear plate-like side members 122 for mutually connecting the ends of the substrate support members 121 to each other.

[0005] The substrate support member 121 and the side member 1
Reference numeral 22 denotes a product molded using, for example, Teflon (trade name) (PFA, tetrafluoroethylene-perfluoroalkylvinyl ether copolymer, or PTFE, polytetrafluoroethylene). The substrate holding cassette 101 has a plurality of substrates, in this case, 25 substrates 1.
The main surfaces of the substrates 12 can be aligned and held at equal pitches in parallel, and the direction parallel to the main surface of the substrate 12 to be held is referred to as the left-right direction, and the alignment direction is referred to as the front-back direction. The front and back surfaces of the substrate 12 are referred to as main surfaces. The number of substrates 12 to be held can be set as appropriate.

Each of the substrate support members 121 has screw holes 121a at both ends. Further, a screw 123 is screwed into the screw hole 121a to fasten the side member 122, and the ends of the substrate support members 121 are mutually connected to integrate the whole.

As shown in FIG. 9, the four substrate support members 121 are formed in the same shape and the same size, respectively.
A cross section in a direction parallel to the main surface of the substrate 12 has a substantially circular shape with a portion protruding. In the protruding portion, receiving grooves 121b for the number of the substrates 12 to be held are arranged in parallel along the longitudinal direction, and the four substrate support members 121 are arranged along the outer periphery of the substrate 12 to be held. So that they are separated from each other. That is, the outer peripheral portions of the plurality of substrates 12 are respectively provided in the receiving grooves 1.
The adjacent substrates 12 can be held in a state where they do not come into contact with each other by engaging with the substrate 21b.

A handle 125 fastened by a screw 123 is provided on the outer surface of the side member 122 at both ends in the direction of alignment of the substrates 12 held by the substrate holding cassette 101, ie, in the front-rear direction. In the state protruding in the direction, two are fixed respectively.

Next, the automatic substrate processing apparatus 103 will be described.

As shown in FIG. 11, the automatic substrate processing apparatus 103 has a pedestal 105, and the pedestal 105
On the front end and the rear end of the
And a take-out underframe 108. The receiving underframe 1
In this case, three processing tanks 111 to 113 are arranged in this order between 07 and the unloading frame 108.
The processing bath 111 stores a pre-cleaning processing liquid 111a, and the subsequent processing tanks 112 and 113 store an etching processing liquid 112a and a post-cleaning processing liquid 113a, respectively. are doing. However, the number of processing tanks, the type of processing liquid stored in each processing tank, and the like can be appropriately set according to the processing content. Further, the receiving frame 107 and the unloading frame 108 are not always provided.

The automatic substrate processing apparatus 103 includes holding means (not shown) including a hanger member (not shown) for engaging the handle 125 and suspending and supporting the substrate holding cassette 101; The holding means is moved along a predetermined path to move the substrate holding cassette 101 into the processing tank 111.
And transport means (not shown) for transporting the inside of the processing tank 113.

Next, the operation of the automatic substrate processing apparatus 103 using the substrate holding cassette 101 will be described.

The substrate holding cassette 101 is supplied onto the receiving frame 107 while holding the unwashed substrate 12, and the holding means (not shown) and the transport means (not shown) are operated. Transport is started. Then, the substrate holding cassette 101 is immersed in the processing liquid stored in the processing tanks 111 to 113, and the substrate 1 held in the substrate holding cassette 101 is removed.
2 is performed. When the cleaning of the substrate 12 is completed,
The substrate holding cassette 101 is provided with the unloading frame 108.
It is transported and collected. In the cleaning process, the substrate holding cassette 101 is not always circulated in order from the processing tank at the end, and the order is appropriately set according to the processing content.

Next, the conventional substrate holding cassette 101 will be described.
The features possessed by will be described.

As shown in FIG. 8, the maximum dimension in the left-right direction of the substrate holding cassette 101, that is, the direction parallel to the main surface of the substrate 12 to be held, is equal to the maximum width dimension A of the side member 122. In addition, the maximum dimension A is smaller than the outer diameter of the substrate 12 in the left-right direction, that is, the diameter D. The width dimension B of the lower half of the side member 122 is smaller than the maximum dimension A.
The height H of 01 is set to about １ ／ or less of the diameter D of the substrate 12.

That is, the substrate holding cassette 101
Has achieved a reduction in size as a whole, and it is possible to reduce the capacity of the processing tanks 111 to 113 into which the substrate holding cassette 101 is loaded. Therefore, the amount of the processing liquids 111a to 113a stored in the respective processing tanks can be reduced, and the cost can be reduced. In addition, the entire substrate automatic processing apparatus 103 can be reduced in size and installation space can be reduced. The space can be saved.

The conventional substrate holding cassette 101
The substrate holding cassette 101 immersed in each of the processing liquids is taken out of the processing tank when the substrate holding cassette 101 is immersed in each of the processing liquids because the whole is miniaturized.
The amount of the processing liquid adhered to itself and taken out is relatively small. Therefore, the consumption of the processing liquid is small, and the turbidity of the processing liquid between adjacent processing tanks can be suppressed.

[0018]

However, FIG.
As shown in FIG.
The groove width of each of the receiving grooves 121b juxtaposed along the longitudinal direction of the substrate support member 121 is reduced in order to securely engage and hold the substrate 12. That is, the groove width e at the bottom of the receiving groove 121b is equal to the substrate 12 to be held.
Is formed to have substantially the same width as the thickness p.

Therefore, when the substrate holding cassette 101 immersed in the processing liquid is carried out of the processing tank, the processing liquid remains due to surface tension between the held substrate 12 and the receiving groove 121b. There is.

That is, an increase in the consumption of the processing liquid due to the processing liquid being taken out of each of the processing tanks and a reduction in the processing liquid, and a processing effect caused by mixing of different processing liquids in adjacent processing tanks with each other. Further improvement is required from the viewpoint of prevention of reduction.

When the substrate holding cassette 101 is pulled up from the processing liquid in each processing tank after the cleaning processing and the substrate 12 is dried, evaporation marks of the processing liquid remaining in the receiving grooves 121b, so-called, There is a problem that a water mark is formed on the main surface of the substrate 12 and a sufficient cleaning effect may not be obtained.

The present invention has been made in view of the above-mentioned points of the prior art, and has a high effect of suppressing the residual processing solution, enabling a reduction in the cost of the cleaning process and an effect of the cleaning process. It is an object of the present invention to provide a substrate holding cassette capable of improving the performance.

[0023]

SUMMARY OF THE INVENTION The present invention is a substrate holding cassette for holding the main surfaces of a plurality of substrates in parallel alignment, the outer peripheral portions of the substrates being engaged with each other along the longitudinal direction. A plurality of substrate support members having a plurality of support protrusions having the same pitch, and a side member that mutually connects end portions of the substrate support members, wherein the plurality of substrate support members are provided on an outer periphery of the substrate. The adjacent substrate supporting members are arranged in parallel with each other and apart from each other so as to conform to the above, and have the supporting convex portions at positions shifted from each other by の of the pitch.

Further, the substrate support member has a space for one support projection between the support projections in the longitudinal direction when a plurality of substrates are held.

The width of the side member is in a direction parallel to the main surface of the substrate and smaller than the outer diameter of the substrate.
The upper end of the side member is located below the outer diameter center of the substrate.

Further, the side member has a handle at an end in the alignment direction of the substrate.

Further, the height of the substrate holding cassette is not more than about １ ／ of the outer diameter of the substrate.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a substrate holding cassette according to the present invention will be described with reference to the drawings. The substrate holding cassette of the present invention is used, for example, in the automatic substrate processing apparatus shown in FIG. 11, and a description of the entire automatic substrate processing apparatus will be omitted. Further, the same reference numerals are used for the substrates handled by the substrate holding cassette of the present invention.

FIG. 1 is a front view including a half section of the substrate holding cassette of the present invention, FIG. 2 is a plan view showing a state where the substrate holding cassette of the present invention holds a substrate, and FIG. 3 is shown in FIG. FIG. 4 is a side view of the substrate holding cassette of the present invention in a section XX, and FIG. 4 is a partially enlarged view of the substrate holding cassette of the present invention shown in FIG. 2. FIG. 5 is a partially enlarged view of the substrate holding cassette of the present invention shown in FIG. 3, and FIG.
FIG. 6 is a perspective view showing a substrate support member provided in the substrate holding cassette of the present invention shown in FIGS. Hereinafter, a substrate holding cassette according to the present invention will be described with reference to FIGS. 1 to 6 and FIG.

As shown in FIGS. 1 to 3, a substrate holding cassette 1 according to the present invention comprises four elongated substrate supporting members 3 to 6 provided in parallel to each other and extending in the front-rear direction.
And a pair of front and rear plate-shaped side members 2 for mutually connecting the respective ends of the substrate support members 3 to 6 to each other. As shown in FIG. 6, the substrate support members 3 to 6 are spaced apart from each other along the outer periphery of the substrate 12 to be held.

The substrate supporting members 3 to 6 and the side member 2 are made of, for example, trade name Teflon (PFA,
In this case, it is integrally formed using a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer or PTFE, polytetrafluoroethylene) as a material. The substrate holding cassette 1 is capable of holding a plurality of, in this case, 25, substrates 12 aligned in parallel at equal pitches with respect to the main surfaces thereof.
The direction parallel to the main surface is referred to as the left-right direction, and the alignment direction is referred to as the front-back direction. The front and back surfaces of the substrate 12 are referred to as main surfaces.

First, the substrate support members 3 to 6 will be described.

The substrate support members 3 to 6
Are formed to have the same length, and the shape of the cross section in the direction parallel to the main surface of the substrate 12 is an irregular pentagon. Further, in the present embodiment, the substrate supporting member 3 and the substrate supporting member 6 and the substrate supporting member 4 and the substrate supporting member 5 have the same cross-sectional shape, respectively, and the lower position of the side member 2 The substrate support member 4 and the substrate support member 5 provided on the substrate are generally thinner than the substrate support member 3 and the substrate support member 6 provided at an upper position.

As shown in FIG. 1, FIG. 3 and FIG. 6, a substantially triangular positioning is formed at the central portion in the longitudinal direction of the substrate supporting member 4 and the substrate supporting member 5 in a state of projecting downward. A projection 4c and a positioning projection 5c are provided. The positioning protrusion 4c and the positioning protrusion 5c
The processing tanks 111 to 113 of the automatic substrate processing apparatus 103 (see FIG. 11) are engaged with positioning recesses of a receiving table (not shown) provided at the bottom, so that the substrate holding cassette 1 moves in the front-rear direction. The movement is restricted and positioning is performed.

As shown in FIGS. 4 and 5, one side surface of the substrate support members 3 to 6 is a support surface 3b to a support surface 6b of the substrate 12, respectively. And, on the support surfaces 3b to 6b,
The support protrusions 3a to 6a are formed at the same pitch f along the longitudinal direction, and the adjacent substrate support members 3 to 6 are f / 2 pitches from each other. The support projections 3a to 6a are provided at positions shifted by each step. That is, the support protrusion 3a, the support protrusion 4a, and the support protrusion 4a
And the supporting protrusions 5a and the supporting protrusions 5a and the supporting protrusions 6a are formed at positions shifted from each other by f / 2 pitch.

The support projections 3a to 6a have a bottom surface in a substantially square shape with a length d of one side, and an upper portion in a substantially trapezoidal shape in which a tip of a quadrangular pyramid is partially cut away. ing. In this case, the support protrusions 3a to 6a are formed integrally with the substrate support members 3 to 6, respectively.

The distance e between the support protrusions 3a to 6a in the longitudinal direction of the substrate support members 3 to 6 is respectively equal to the distance between the support protrusions 3a.
In addition, it has a width obtained by adding the thickness of two substrates 12 (thickness p) to the size of one support protrusion 6a (length d of one side of the bottom surface). That is, e = d + 2p.

The support projections 3a to 6a are formed, for example, in a number of 13, respectively.
The twenty-five substrates 12 can be aligned and held at equal pitches so that the main surfaces are parallel to each other. The number of the substrates 12 that can be held can be set by appropriately increasing or decreasing the number of the support protrusions 3a to 6a.

Next, the side member 2 will be described.

As shown in FIGS. 1 to 3, the side member 2
Are provided as a pair at both ends in the alignment direction of the substrates 12 held by the substrate holding cassette 1, that is, in the front-rear direction, and the ends of the substrate support members 3 to 6 are connected to each other. In this embodiment, the substrate supporting members 3 to 6 are formed integrally with the substrate supporting members 3 to 6.

Each of the side members 2 has two handles 7 protruding on the outer surface in the front-rear direction. The handle 7 is provided in the substrate processing apparatus 103.
A hanger member (not shown) provided in (see FIG. 11) is engaged to suspend and support the substrate holding cassette 1. In this embodiment, the hanger member is formed integrally with the side member 2. I have.

Further, the side member 2 has a positioning recess 2a at a lower portion at the center in the left-right direction. The positioning recess 2a engages with a positioning protrusion of a receiving table (not shown) provided at the bottom of the processing tanks 111 to 113 of the automatic substrate processing apparatus 103 (see FIG. 11) to hold the substrate. The position of the cassette 1 is regulated by restricting the movement in the left-right direction.

Next, the features of the substrate holding cassette 1 of the present invention will be described, including the operation of the automatic substrate processing apparatus 103.

As shown in FIGS. 2 to 5, a plurality of the substrates 12 have outer peripheral portions formed of the support protrusions 3a to 6a.
a and the supporting surfaces 3b to 6b, respectively, so that the adjacent substrates 12 are aligned and held in a state where they do not contact each other.

At this time, the support projections 3a formed on the substrate support members 3 to 6 adjacent to each other are formed.
Since the supporting protrusions 6a are formed at positions shifted by f / 2 pitch from each other, the plurality of substrates 1
2, the lower end of the outer periphery is formed by the support protrusion 3a and the support protrusion 4a, the support protrusion 4a and the support protrusion 5a, and the support protrusion 5a and the support protrusion 6a. And the other surface are alternately held.

The distance e between the support projections 3a to 6a in the longitudinal direction of the substrate support members 3 to 6 is respectively equal to the distance between the support projections 3a.
Or a width obtained by adding the thickness of one of the support protrusions 6a (the length d of one side of the bottom surface) to the thickness of the two substrates 12 (thickness p), that is, e = d + 2p. From that
The substrate 1 is placed on the substrate support members 3 to 6.
2, for example, in a state of holding 25 sheets, the support protrusions 3 a to 6 a in the longitudinal direction.
The size d between each other, that is, the support projection 3a
In addition, a space corresponding to one support protrusion 6a is formed.

The substrate holding cassette 1 holds the substrate 12 in the above-described state. When the substrate holding cassette 1 holding the unwashed substrate 12 is supplied onto the receiving frame 107 of the automatic substrate processing apparatus 103 (see FIG. 11), first, the holding means (not shown) The hanger member (not shown) engages with the handle 7 to suspend and support the substrate holding cassette 1. In this state, the transfer means (not shown) is operated, and the substrate holding cassette 1 is carried into, for example, the first processing tank 111.

The processing tanks 111 to 113
Each has a pedestal (not shown) for positioning and mounting the substrate holding cassette 1 on the bottom. The substrate holding cassette 1 is configured such that the positioning protrusions 4c, the positioning protrusions 5c, and the positioning recesses 2a engage with the positioning recesses and the positioning protrusions (not shown) provided in the receiving table, respectively. It is positioned and mounted on a cradle (not shown).

That is, the substrate 12 held by the substrate holding cassette 1 is filled with the processing liquid 111 in the processing tank 111.
a, and a cleaning process is performed. The processing tank 11
When the cleaning in the substrate holding cassette 1 is completed, the substrate holding cassette 1
Is suspended and supported again by the hanger member (not shown), and is carried out of the processing tank.

At this time, a space of a size d, that is, one space of the support protrusions 3a to 6a is formed between the support protrusions 3a to 6a in the longitudinal direction. Therefore, the processing liquid 111a immediately flows out of the processing tank 111, and the support projection 3a
Or the treatment liquid 11 between the support protrusions 6a
1a to 1a can be suppressed from remaining.

Therefore, the substrate holding cassette 1 is
The amount of the processing liquids 111a to 113a in the processing tanks 111 to 113 taken out of the respective processing tanks is extremely small, so that the consumption of the processing liquids increases, or another type of liquid in the adjacent processing tanks increases. The effect of preventing a reduction in the processing effect caused by mixing the processing liquids with each other is high.

Further, even when the substrate holding cassette 1 is pulled out of the processing liquid in each of the processing tanks and the substrate 12 is dried, traces of evaporation of the processing liquid, so-called water marks, remain on the main surface of the substrate 12. Can be prevented, and the cleaning effect is high.

The substrate 12 is provided with the support projection 3a.
In addition, the lower end of the outer periphery is held in such a manner that the lower end of the outer periphery is alternately sandwiched between the one surface and the other surface by the support protrusion 6a. In other words, the support protrusions 3a to 6a hold the substrate 12 in a state of being in contact with only one of the surfaces, and thus hold the substrate 12 with a smaller contact area. It is possible to have a high cleaning effect.

The substrate holding cassette 1 suspended and supported again by the hanger member (not shown) is conveyed, for example, to the adjacent processing tank 112, and similarly subjected to a cleaning process. Hereinafter, similarly, for example, the treatment tank 11
When the cleaning process in Step 3 is performed and all the cleaning processes are completed, the substrate holding cassette 1 is transported onto the unloading frame 108 while holding the substrate 12, and is transported to the next process. You.

In the cleaning process, the substrate holding cassette 1 is not always circulated in order from the processing tank at the end, and the order can be appropriately set according to the processing contents.

The external dimensions of the substrate holding cassette 1 of the present invention, including the depth in the front-rear direction, are set to be equal to those of the conventional substrate holding cassette 101, and are the same as those of the conventional substrate holding cassette 101. The overall size is reduced.

That is, the maximum dimension in the left-right direction of the substrate holding cassette 1, that is, the direction parallel to the main surface of the substrate 12 to be held is equal to the maximum width dimension A of the side member 2, and The maximum dimension A is smaller than the outer diameter dimension of the substrate 12 in the left-right direction, that is, the diameter D. The width dimension B of the lower half of the side member 2 is smaller than the maximum dimension A, and the height H of the substrate holding cassette 1 is
2 is set to be about 1/4 or less of the diameter D.

Therefore, the substrate holding cassette 1 is
The processing tank 111 into which the substrate holding cassette 1 is loaded.
In addition, the capacity of the processing tank 113 can be reduced, the amount of each processing solution stored in each processing tank can be reduced, and the cost can be reduced. In addition, the size of the entire automatic substrate processing apparatus 103 and the effect of reducing the installation space are achieved.

In the present embodiment, the substrate holding cassette 1 is integrally formed as a whole. However, the substrate supporting members 3 to 6 and the side members 2
May be formed separately and fastened with screws or the like to integrate the whole.

[0060]

As described above, according to the substrate holding cassette of the present invention, the effect of suppressing the residual processing solution is high, the cost of the cleaning process can be reduced, and the effect of the cleaning process can be reduced. Can be improved.

[Brief description of the drawings]

FIG. 1 is a front view including a half section of a substrate holding cassette of the present invention.

FIG. 2 is a plan view showing a state where the substrate holding cassette of the present invention holds a substrate.

FIG. 3 is a cross-sectional view of the substrate holding cassette of the present invention shown in FIG.
It is a side view in a cross section.

FIG. 4 is a partially enlarged view of the substrate holding cassette of the present invention shown in FIG.

5 is a partially enlarged view of the substrate holding cassette of the present invention shown in FIG.

FIG. 6 is a perspective view showing a substrate supporting member provided in the substrate holding cassette of the present invention shown in FIGS. 1 to 5;

FIG. 7 is a side view showing a state in which a conventional substrate holding cassette holds a substrate.

FIG. 8 is a front view including a half cross section of a conventional substrate holding cassette.

FIG. 9 is a perspective view showing a substrate support member provided in the conventional substrate holding cassette shown in FIGS. 7 and 8.

FIG. 10 is an enlarged cross-sectional view showing a state in which a conventional substrate holding cassette holds a substrate, and is a side view in a XX section of FIG. 8;

FIG. 11 is a perspective view showing an automatic substrate processing apparatus.

[Explanation of symbols]

 Reference Signs List 1 substrate holding cassette 2 side member 2a positioning concave portion 3 substrate supporting member 3a supporting convex portion 3b supporting surface 4 substrate supporting member 4a supporting convex portion 4b supporting surface 4c positioning convex portion 5 substrate supporting member 5a supporting convex portion 5b supporting surface 5c positioning convex Part 6 Substrate support member 6a Support projection 6b Support surface 7 Handle 103 Automatic substrate processing apparatus 105 Mount 107 Receiving pedestal frame 108 Unloading pedestal frame 111 Processing tank 111a Pre-cleaning processing liquid 112 Processing tank 112a Etching processing liquid 113 Processing tank 113a Post-cleaning treatment solution

────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] June 16, 1999 (1999.6.1
6)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

3. The substrate holding cassette according to claim 1, wherein the side member has a handle at an end in an alignment direction of the substrate.

Wherein the height of the substrate holding cassettes claims 1 to substrate holding cassettes as claimed in any one of claims 3, wherein the substrate is about 1/4 or less of the outer diameter of the .

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0023

[Correction method] Change

[Correction contents]

[0023]

SUMMARY OF THE INVENTION The present invention is a substrate holding cassette for holding the main surfaces of a plurality of substrates in parallel alignment, the outer peripheral portions of the substrates being engaged with each other along the longitudinal direction. A plurality of substrate support members having a plurality of support protrusions having the same pitch, and a side member that mutually connects end portions of the substrate support member, and the side member is provided on a main surface of the substrate.
The width of the upper end in the parallel direction is equal to the outer diameter of the substrate.
And the upper end of the side member is located at the center of the outer diameter of the substrate.
Than heart located below, a plurality of the substrate support member, parallel to one another along the periphery of the substrate, and are spaced apart, it said substrate support member adjacent to, the length
The support projections are provided at positions shifted from each other by の of the pitch in the hand direction .

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0024

[Correction method] Change

[Correction contents]

Further, the substrate support member, said substrate support member, in a state of holding a plurality of said substrate, between the adjacent said supporting convex portion in the longitudinal direction, said support
It has a space equal to the length of the bottom surface of the projection .

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0025

[Correction method] Change

[Correction contents]

Further, the side member is arranged in an alignment direction of the substrate.
Has a handle at the end .

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0026

[Correction method] Change

[Correction contents]

The height of the substrate holding cassette is
It is about 1/4 or less of the outer diameter of the substrate .

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0027

[Correction method] Deleted

[Procedure amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0035

[Correction method] Change

[Correction contents]

As shown in FIGS. 4 and 5, one side surface of the substrate support members 3 to 6 is a support surface 3b to a support surface 6b of the substrate 12, respectively. And, on the support surfaces 3b to 6b,
The support projections 3a to 6a are formed at the same pitch f along the longitudinal direction, and the adjacent substrate support members 3 to 6 are mutually adjacent in the longitudinal direction. The support protrusions 3a to 6a are provided at positions shifted by f / 2 pitch. That is, the support protrusion 3a and the support protrusion 4
a, the support protrusion 4a and the support protrusion 5a, and the support protrusion 5a and the support protrusion 6a
It is formed at a position shifted by 1/2 pitch. ────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] September 8, 1999 (1999.9.8)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

Wherein said side member, according to claim 1 or any one substrate holding cassette according of claim 3, characterized in that it has a handle on the end portion in the array direction of the substrate.

5. The height of the substrate holding cassettes, any one substrate holding cassette according one of claims 1 to 4, wherein the substrate is about 1/4 or less of the outer diameter of the .

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0023

[Correction method] Change

[Correction contents]

[0023]

According to the present invention, a plurality of substrates are provided.
Is used in the cleaning equipment by immersing it in the processing solution of the processing tank
Is, a substrate holding cassettes for holding aligned parallel to the main surfaces of a plurality of said substrate and having a plurality of supporting protrusions made at equal pitch along the longitudinal direction, of the substrate
Extending in the direction of alignment and along the periphery of the substrate
Parallel and spaced apart so that the outer periphery of the substrate is
Elongated first substrate support member , second substrate support
A member, a third substrate support member and a fourth substrate support member ,
A side member that couples ends of the substrate support members to each other, wherein the side member has a width of an upper end in a direction parallel to a main surface of the substrate smaller than an outer diameter dimension of the substrate. Wherein the upper end of the side member is located lower than the center of the outer diameter of the substrate , and the first substrate support member and the third substrate
Supporting member, the second substrate supporting member, and the fourth substrate
The supporting members are identical to each other in the longitudinal direction.
The first substrate support having the support protrusion at a position
Material, the second substrate support member, and the second substrate support member
And the third substrate support member and the third substrate support member
And the fourth substrate support member have the support protrusion at a position shifted from each other by の of the pitch in the longitudinal direction.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0024

[Correction method] Change

[Correction contents]

Further, each of the substrate support members has a space between the support protrusions in the longitudinal direction and equal to the length of the bottom surface of the support protrusion in a state where the plurality of substrates are held. Things.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0025

[Correction method] Change

[Correction contents]

Further, each of the substrate supporting members may be provided in the longitudinal direction.
E is the distance between the support projections in the longitudinal direction,
D is the length of the bottom surface of the supporting projection at the thickness of the substrate.
Assuming that p is p, the following equation e = d + 2p is satisfied .

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0026

[Correction method] Change

[Correction contents]

Further , the side member is arranged in an alignment direction of the substrate.
Has a handle at the end . Further, the height of the substrate holding cassette is about 1 / the outer diameter of the substrate.
4 or less.

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0030

[Correction method] Change

[Correction contents]

As shown in FIGS. 1 to 3, a substrate holding cassette 1 according to the present invention comprises four elongated substrate supporting members 3 to 6 provided in parallel to each other and extending in the front-rear direction.
And a pair of front and rear plate-shaped side members 2 for mutually connecting the respective ends of the substrate support members 3 to 6 to each other. As shown in FIG. 6, the substrate support members 3 to 6 are spaced apart from each other along the outer periphery of the substrate 12 to be held. What
The substrate supporting member 3 is a first substrate supporting member,
The plate supporting member 4 is a second substrate supporting member, the substrate supporting member
5 is a third substrate supporting member, and the substrate supporting member 6 is a fourth substrate supporting member.
Also referred to as a substrate support member.

Claims (5)

[Claims] 1. A substrate holding cassette for holding the main surfaces of a plurality of substrates in parallel alignment with each other, wherein a plurality of support projections are engaged with an outer peripheral portion of the substrates and have an equal pitch along a longitudinal direction. A plurality of substrate support members having a portion, and a side member that mutually connects the ends of the substrate support member, the plurality of substrate support members are parallel to each other along the outer periphery of the substrate, The substrate holding cassette is arranged so as to be separated from each other, and the adjacent substrate support members have the support protrusions at positions shifted from each other by の of the pitch. 2. The method according to claim 1, wherein the substrate supporting member has a space corresponding to one of the supporting protrusions between the supporting protrusions in the longitudinal direction in a state where the plurality of substrates are held. The substrate holding cassette according to claim 1. 3. The width of the side member is in a direction parallel to the main surface of the substrate and smaller than the outer diameter of the substrate, and the upper end of the side member is larger than the center of the outer diameter of the substrate. 3. The substrate holding cassette according to claim 1, wherein the substrate holding cassette is located below. 4. The substrate holding cassette according to claim 1, wherein the side member has a handle at an end in an alignment direction of the substrate. 5. The substrate holding cassette according to claim 1, wherein a height of the substrate holding cassette is about ４ or less of an outer diameter of the substrate. .