JP2000048943A - Fluid heating system and board processing device using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device that can instantly detect inside temperature variation and abnormality of the temperature of a heating container and is excellent in response and safety in control in relation to a fluid heating system utilizing electromagnetic induction. SOLUTION: This device is composed by providing: a heating container 10 that has a sealed structure for which a fluid inlet 12 and a fluid outlet 14 communicating with and connected to piping and are formed of a non-magnetic material; a coil 16 wound around the outside surface of the heating container; a power supply device part 18 to carry a high-frequency current to the coil; a heating element 20 installed inside the heating container and formed from a conductive material; a temperature detector 24 to detect the temperature of the heating element; and a controller 32 to control the power supply device part based on a temperature detection signal from the temperature detector and drive an alarm unit 34.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid heating apparatus used for heating various gases and liquids supplied through a pipe to a substrate processing apparatus for performing a required process on a substrate, and more particularly, to a fluid heating apparatus used for heating a substrate. The present invention relates to a fluid heating device of an electromagnetic induction heating type and a substrate processing apparatus using the fluid heating device.

[0002]

2. Description of the Related Art In a substrate processing apparatus, for example, an apparatus for drying a substrate under reduced pressure, when an alcohol vapor, for example, isopropyl alcohol (IPA) vapor is supplied through a pipe into a chamber in which the substrate is housed and in a reduced pressure state, the IPA vapor is supplied. It is necessary to supply by heating to a predetermined temperature. As a device for heating the IPA vapor, generally, a resistance heater is disposed outside a pipe made of stainless steel or the like, and heat flowing from the resistance heater flows through the pipe.
Although a device for heating PA vapor is used, recently, an attempt has been made to heat a fluid flowing in a pipe using electromagnetic induction. In this heating method, a coil is wound around an outer surface of a heating container formed of a non-magnetic material and inserted in the middle of a pipe, and a conductive material is formed inside the heating container around which the coil is wound. A heating element is provided, a high-frequency current is applied to the coil to generate a magnetic flux, and an eddy current is generated in the heating element in the magnetic field to generate Joule heat, which flows through the heating vessel due to the heat generated by the heating element. For example, a gas or liquid fluid is directly heated.

In a substrate processing apparatus using such a fluid heating device utilizing electromagnetic induction, a temperature detector such as a thermocouple is usually installed at an outlet side of a heating vessel inserted in the middle of a pipe, and a heating vessel is provided. The temperature of the fluid after passing through the inside is measured by a temperature detector. Then, the electric power supplied to the coil is adjusted based on the measured temperature of the fluid, the temperature of the fluid passing through the heating vessel is feedback-controlled, and the temperature of the fluid sent to the substrate processing apparatus through the pipe is set to a desired temperature. Adjustment is performed so that

[0004]

However, as described above, in the system in which the temperature of the fluid after passing through the heating vessel of the fluid heating device is detected and controlled, a change in the temperature inside the heating vessel is immediately detected. It cannot be detected, resulting in insufficient responsiveness in control. Further, even if the temperature inside the heating vessel becomes too high, it is not possible to immediately detect an abnormality in the temperature, and there is a problem in terms of safety. For example, in a case where a chemical is supplied to a substrate processing apparatus through a pipe, even when a heating element inside the heating container is overheated and a part of the chemical flowing in the heating container boils, By simply detecting the temperature of the chemical after passing through the heating vessel, the detected temperature does not fluctuate so much, so that the boiling of the chemical cannot be confirmed. For this reason, it is not possible to prevent partial abnormal heat generation of the heating element due to vaporization of a part of the chemical solution in the heating container. As a result, even if the heating element is abnormally deformed or damaged due to abnormally high temperature, it cannot be detected, and a serious accident such as a fire, explosion, or rupture may be caused.

The present invention has been made in view of the above circumstances, and in a fluid heating apparatus that heats a fluid using electromagnetic induction, it is possible to immediately detect a change in temperature inside a heating vessel. It is possible to provide a fluid heating device which is excellent in control responsiveness, can immediately detect an abnormality in the temperature inside the heating vessel, and is excellent in safety. An object of the present invention is to provide a substrate processing apparatus using the apparatus.

[0006]

The invention according to claim 1 is
In a fluid heating device that is provided in the middle of a pipe through which a fluid is supplied and that heats a fluid flowing through the pipe, a fluid inlet and a fluid outlet that are respectively connected to the pipe through which the fluid is transferred are formed. A heating container having at least a heating portion formed of a non-magnetic material, a coil wound on the outer surface of the heating container at the position of the heating portion, and a high-frequency current flowing through the coil. Power supply unit for flowing
Inside the heating vessel, a heating element provided at the position of the heating section and formed of a conductive material, temperature detecting means for detecting the temperature of the heating element or the vicinity thereof, and the temperature from the temperature detecting means Control means for performing required control based on the detection signal.

According to a second aspect of the present invention, in the device according to the first aspect, the control means controls the power supply unit based on a temperature detection signal from the temperature detection means so that the heating element has a set temperature. It is characterized by.

According to a third aspect of the present invention, in the device according to the first aspect, an alarming means for issuing an alarm when the temperature of the heating element exceeds a predetermined temperature is provided, and the control means controls the temperature detection signal from the temperature detecting means. The alarm means is driven based on the following.

According to a fourth aspect of the present invention, in the device according to the first aspect, the control means cuts off the supply of power from the power supply unit to the coil based on a temperature detection signal from the temperature detection means. And

According to a fifth aspect of the present invention, in the apparatus according to any one of the first to fourth aspects, the temperature detecting section of the temperature detecting means is arranged downstream of the heating element.

According to a sixth aspect of the present invention, in the device according to any one of the first to fourth aspects, the temperature detecting section of the temperature detecting means is arranged in contact with the heating element.

According to a seventh aspect of the present invention, in the substrate processing apparatus, the fluid heating apparatus according to any one of the first to sixth aspects is provided with a piping for supplying a fluid to a substrate processing section for processing a substrate. Is interposed and provided.

In the fluid heating apparatus according to the first aspect of the present invention, when a high-frequency current flows through the coil wound around the outer surface of the heating vessel by the power supply unit, a magnetic flux is generated, and the heating vessel in the magnetic field is generated. An eddy current is generated in the internal heating element, Joule heat is generated by the specific resistance of the conductive material forming the heating element, and the heating element generates heat. The gas or liquid fluid flowing from the pipe through the fluid inlet into the heating vessel is directly heated by the heating element when passing through the position where the heating element is provided, and the heated fluid is heated by the heating vessel. It flows into the piping from inside through the fluid outlet. At this time, the temperature of the heating element or the vicinity thereof is detected by the temperature detecting means, and necessary control is performed by the control means based on the temperature detection signal from the temperature detecting means.

For example, in the fluid heating apparatus according to the second aspect of the present invention, the power supply unit is controlled by the control means based on the temperature detection signal from the temperature detection means so that the heating element reaches the set temperature. As described above, since the temperature of the heating element or the vicinity thereof is detected, a temperature change inside the heating container can be immediately detected, and the power supply unit is controlled based on the temperature detection signal. Responsiveness is better than a system in which the temperature of the fluid after passing through the container is detected and controlled.

In the fluid heating device according to the third aspect of the present invention,
When the temperature of the heating element exceeds a predetermined temperature, the warning means is driven by the control means based on the temperature detection signal from the temperature detection means, and the warning means issues a warning. As described above, since the temperature of the heating element or the vicinity thereof is detected, an abnormality in the temperature inside the heating container can be immediately detected, and an alarm is issued based on the detection, which is safe.

According to a fourth aspect of the present invention, there is provided a fluid heating apparatus comprising:
When the temperature of the heating element exceeds a predetermined temperature, the power supply unit is controlled by the control unit based on the temperature detection signal from the temperature detection unit, and power supply from the power supply unit to the coil is cut off. You. As described above, since the temperature of the heating element or the vicinity thereof is detected, the abnormality in the temperature inside the heating container can be immediately detected, and the power supply to the coil is shut off based on the detection, which is safe.

According to a fifth aspect of the present invention, there is provided a fluid heating device.
Since the temperature of the fluid immediately after passing through the inside of the heating element is detected by the temperature detecting means, it is possible to immediately detect a temperature change or an abnormal temperature inside the heating container.

In the fluid heating apparatus according to the invention according to claim 6,
Since the temperature of the heating element itself is detected by the temperature detecting means, the abnormality of the heating element itself can be detected more quickly in addition to the temperature change and the temperature abnormality inside the heating vessel.

In the substrate processing apparatus according to the present invention, the temperature detecting means detects the temperature of the heating element inside the heating vessel of the fluid heating device or a temperature in the vicinity thereof, and based on the temperature detection signal from the temperature detecting means. Control is performed by the control means, so that the responsiveness is better than in a system in which the temperature of the fluid after passing through the heating vessel is detected and controlled, and the temperature of the fluid supplied to the substrate processing unit is adjusted. Is performed with high accuracy. Also, when the temperature of the heating element exceeds a predetermined temperature, an alarm is immediately issued,
Since the supply of power from the power supply unit to the coil is cut off, it is safe.

[0020]

Preferred embodiments of the present invention will be described below with reference to the drawings.

First, the basic structure and operation of the fluid heating device will be described with reference to FIGS. FIG.
FIG. 3 is an external perspective view schematically showing a schematic configuration of the fluid heating device, and FIG. 3 is a longitudinal sectional view thereof.

This fluid heating device includes a heating vessel 2 provided in the middle of a pipe 1, a coil 3 wound around the heating vessel 2, a power supply unit (not shown), and a heating vessel 2.
Is constituted by a heating element 4 disposed inside. In FIG. 2, the coil 3 is shown in a state in which a half circumference portion is cut.

The heating vessel 2 has a closed cylindrical shape, and a fluid inlet 5 and a fluid outlet 6 which are respectively connected to the pipe 1 are formed on both end surfaces. The heating container 2 is formed of a nonmagnetic material, for example, a plastic material such as a fluororesin or a ceramic material. Note that the entire heating vessel 2 does not necessarily need to be formed of a non-magnetic material, and it is sufficient that at least a cylindrical surface around which the coil 3 is wound and which becomes a heating section is formed of a non-magnetic material. The shape of the heating vessel is not limited to a cylinder, but may be various shapes.

Coil 3 wound on cylindrical surface of heating vessel 2
, A power supply unit is electrically connected, and a high-frequency current flows through the coil 3 by the power supply unit. The heating element 4 disposed inside the heating vessel 2 is
It is formed of a metal material. In this embodiment,
The heating element 4 is configured by arranging a plurality of thin metal plates 7 made of corrosion-resistant stainless steel or the like in parallel with each other at intervals. Each metal sheet 7 is arranged along the axial direction of the heating vessel 2, and each metal sheet 7
The gap between them becomes the fluid passage 8. These metal sheets 7
Has been mirror-finished by electrolytic polishing or the like, and has been precision cleaned. The configuration of the heating element is not limited to a configuration in which a plurality of thin metal plates 7 are arranged in parallel as in the illustrated example, but may be a structure in which a fluid passage is formed and a certain contact area with the fluid is secured. Any structure may be used, such as a honeycomb structure. The material of the heating element is
Other than stainless steel, for example, various metals such as nickel may be used. In addition, silicon carbide (SiC) or carbon (C) may be used, and the heating element may be made of a conductive material.

In the fluid heating apparatus having the structure shown in FIGS. 2 and 3, when a high-frequency current is applied to the coil 3 by the power supply unit, a magnetic flux is generated, and an eddy current flows through the metal sheet 7 inside the heating vessel 2. Is generated, and Joule heat is generated in the metal sheet 7 due to the specific resistance of the material, and the metal sheet 7 generates heat. At this time, since the heating container 2 is formed of a non-magnetic material, it does not generate heat itself. When the metal sheet 7 generates heat, the fluid flowing from the pipe 1 through the fluid inlet 5 into the heating vessel 2 flows through the passage 8 between the metal sheets 7, Is directly heated by the heat transfer. The fluid heated and heated while passing through the passage 8 between the metal sheets 7 flows out of the heating vessel 2 through the fluid outlet 6 and flows into the pipe 1.

FIG. 1 shows an embodiment of the present invention and is a partially broken longitudinal sectional view of a fluid heating device. This fluid heating device is provided with a fluid inlet 12 and a fluid outlet 14 provided in the middle of a pipe, a heating vessel 10, a coil 16 wound around the heating vessel 10, and a high-frequency current flowing through the coil 16. The power supply unit 18 includes a heating element 20 disposed inside the heating container 10. The basic configuration and operation of this fluid heating device are shown in FIGS.
Since the device is the same as that shown in FIG. 1, the duplicate description is omitted here.

In this fluid heating device, the heating vessel 10
The heating vessel 1 has a thermal expansion absorbing portion 22 in which a portion closer to the fluid outlet 14 than the heat generating portion is formed in a fold shape, a bellows shape or the like.
The thermal expansion accompanying the temperature rise of 0 is absorbed by the thermal expansion absorbing section 22 so that an excessive force does not act on the joint between the both ends of the heating vessel 10 and the pipe. Further, this device has a temperature detector 24, and the temperature detector,
For example, the detection end of the thermocouple 26 is arranged in a space inside the downstream side of the heating element 20 so as not to contact the heating element or to contact the downstream side of the heating element 20. As the temperature detector, a thermometer, a radiation thermometer, or the like may be used in addition to the thermocouple. In addition, the apparatus is provided with temperature detectors 28 and 30 for detecting the temperature of the fluid passing through the fluid inlet 12 and the fluid outlet 14 of the heating vessel 10, respectively. The temperature detection signals output from the respective temperature detectors 24, 28, 30 are sent to the controller 32. The power supply unit 18 and the alarm 34 are connected to the controller 32.

The controller 32 compares the preset target temperature with the temperature of the heating element 20 itself or the temperature of the fluid near the heating element 20 detected by the temperature detector 24, and generates a control signal corresponding to the temperature difference. Feedback is output from the controller 32 to the power supply unit 18, and feedback control is performed so that the temperature of the heating element 20 or the fluid near the heating element 20 becomes the target temperature. Alternatively, the controller 32 compares the preset target temperature with the temperature of the fluid at the fluid outlet 14 or the fluid inlet 12 detected by the temperature detectors 30 and 28, and generates a control signal corresponding to the temperature difference. The heating element 20 is output from the controller 32 to the power supply unit 18, and the heating element 20 is subjected to feedback control or feedforward control so that the temperature of the fluid becomes the target temperature.

In the controller 32, a preset alarm temperature is compared with the temperature of the heating element 20 or the fluid near the heating element 20 detected by the temperature detector 24, and the temperature of the heating element 20 or the vicinity of the heating element 20 is compared. When the temperature of the fluid exceeds the alarm temperature, a signal is sent from the controller 32 to the alarm 34 to drive the alarm 34. Thus, the operator is notified that the temperature of the heating element 20 is abnormally high. Further, when the temperature of the heating element 20 or the fluid near the heating element 20 exceeds the alarm temperature,
A signal is sent from the controller 32 to the power supply unit 18, and the supply of power from the power supply unit 18 to the coil 16 is cut off, or the output of the coil 16 is weakened. In addition, when the temperature of the heating element 20 exceeds the alarm temperature, the flow rate of the fluid introduced into the heating vessel 10 may be temporarily increased, or cooling air may be introduced into the heating vessel 10. Good.

The fluid heating apparatus having the above-described structure is inserted in the middle of a pipe for supplying a fluid to a substrate processing section for processing a substrate in various types of substrate processing apparatuses. Used for heating. Regarding an example of a substrate processing apparatus provided with such a fluid heating device,
This will be described with reference to FIG.

FIG. 4 is a schematic diagram showing the overall schematic configuration of a reduced-pressure drying apparatus, which is a type of substrate processing apparatus. This reduced-pressure drying apparatus is used for a process of supplying IPA vapor to a substrate and drying the substrate under a reduced-pressure atmosphere. In FIG.
Reference numeral 36 denotes a reduced-pressure drying chamber, and the inside of the chamber 36 can be evacuated and evacuated by a decompression means such as a vacuum pump (not shown). Reference numeral 38 denotes an IPA vapor supply pipe connected to the chamber 36, and reference numeral 40 denotes a dilution nitrogen gas supply pipe connected to the IPA vapor supply pipe 38. The IPA vapor supply pipe 38 is connected to a flow path of the evaporator 42. An IPA 44 is accommodated in the evaporator 42, and the IPA 44 is supplied from the injection port 50 by supplying the IPA 44 to the injection port 50 on the ceiling of the evaporator 42 through the IPA supply path 48 by the pump 46.
A vapor is prepared. Evaporator 42
A nitrogen gas supply pipe 52 for carrier is connected and connected to the internal space, and an IPA circulation pipe 54 for circulating and heating the IPA 44 housed in the evaporator 42 is attached to the evaporator 42. Have been.

Then, the IP supplied into the chamber 36
In order to heat the A-vapor to a predetermined temperature, the fluid heating device 56 having the above-described configuration as shown in FIG. It is attached. Further, a fluid heating device 60 provided with a controller 62 for heating the dilution nitrogen gas is provided in the dilution nitrogen gas supply pipe 40, and a carrier nitrogen gas supply pipe 52 is provided in the carrier nitrogen gas supply pipe 52. In order to heat the nitrogen gas for use, a fluid heating device 64 provided with a controller 66 is provided interposed therebetween. Further, the IPA circulation pipe 54 has an IPA
In order to heat the fluid to a predetermined temperature, a fluid heating device 68 provided with a controller 70 is interposed therebetween.

The fluid heating apparatus according to the present invention is not limited to the vacuum drying apparatus shown in FIG. 4, but may be, for example, a chemical liquid circulation type processing apparatus, a hot pure water cleaning apparatus, a hot air heater for carrier cleaning, or a high-temperature nitrogen gas heater for pull-up drying. And so on,
It can be used in various processing apparatuses such as a reaction gas heating apparatus for a CVD apparatus and a coating liquid heating apparatus for a spinner.

[0034]

According to the first aspect of the present invention, there is provided a fluid heating device.
Because the temperature change inside the heating vessel can be detected immediately, the response in control is excellent, and because the temperature abnormality inside the heating vessel can be detected immediately, the safety is also excellent. .

In the fluid heating device according to the second aspect of the present invention,
A temperature change inside the heating vessel can be immediately detected, and the power supply unit is controlled based on the temperature detection signal. Therefore, the temperature of the fluid after passing through the heating vessel is detected and controlled. Responsiveness is better than the system.

In the fluid heating apparatus according to the third aspect of the present invention,
An abnormality in the temperature inside the heating vessel can be immediately detected, and an alarm is issued based on the abnormality, which is safe.

In the fluid heating device according to the fourth aspect of the present invention,
An abnormality in the temperature inside the heating vessel can be detected immediately, and the power supply to the coil is shut off based on that,
It is safe.

In the fluid heating device according to the fifth aspect of the present invention,
The temperature detection means detects the temperature of the fluid immediately after passing through the inside of the heating element, and can immediately detect a change in the temperature inside the heating vessel or abnormal temperature. improves.

According to the fluid heating apparatus of the invention according to claim 6,
Since the temperature of the heating element itself is detected by the temperature detecting means, it is possible to more quickly detect a change in the temperature inside the heating vessel, an abnormality in the temperature, and an abnormality such as abnormal heating or breakage of the heating element itself. In addition, responsiveness and safety in control are further improved.

When the substrate processing apparatus according to the seventh aspect of the present invention is used, the responsiveness is better than that of a system in which the temperature of the fluid after passing through the heating vessel is detected and controlled, and the fluid is supplied to the substrate processing section. Since the temperature of the fluid to be adjusted is precisely controlled, stable processing of the substrate can be performed. In addition, when the temperature of the heating element exceeds a predetermined temperature, an alarm is immediately issued or the supply of power from the power supply unit to the coil is shut off, so that the substrate processing can be performed safely. it can.

[Brief description of the drawings]

FIG. 1 shows one embodiment of the present invention, and is a partially broken longitudinal sectional view of a fluid heating device.

FIG. 2 is an external perspective view schematically showing a basic configuration of a fluid heating device according to the present invention.

FIG. 3 is a schematic longitudinal sectional view of the fluid heating device shown in FIG.

FIG. 4 is a schematic diagram showing an example in which the fluid heating device according to the present invention is used in a reduced-pressure drying device which is a type of substrate processing device.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 piping 2, 10 heating vessel 3, 16 coil 4, 20 heating element 5, 12 heating vessel fluid inlet 6, 14 heating vessel fluid outlet 7 thin metal plate 8 fluid passage 18 power supply unit 24, 28, 30 Temperature detector 26 Thermocouple 32, 58, 62, 66, 70 Controller 34 Alarm 36 Vacuum drying chamber 38 IPA vapor supply pipe 40 Diluent nitrogen gas supply pipe 42 Evaporator 44 IPA 46 Pump 52 Carrier nitrogen gas supply pipe 54 IPA circulation piping 56, 60, 64, 68 Fluid heating device

Continuation of the front page (72) Inventor Yusuke Muraoka Yasumachi, Yasu-cho, Yasu-gun, Shiga Prefecture 2426-1 Kuchinogawara Dainippon Screen Mfg. Co., Ltd. F-term in the Yasu Works (reference) 3K059 AA08 AB00 AB04 AB14 AB19 AB26 AB27 AB28 AC09 AC33 AD02 AD10 BD01 CD02 CD07 CD10 CD18 CD44 CD48 CD72 CD73 CD74 5F046 KA01

Claims (7)

[Claims] 1. A fluid heating device which is provided in the middle of a pipe through which a fluid is supplied to heat a fluid flowing through the pipe, comprising a fluid inlet and a fluid inlet which are respectively connected to the pipe through which the fluid is transferred. A fluid container having a sealed structure in which a fluid outlet is formed, at least a heating unit formed of a non-magnetic material, and a coil wound around a position of the heating unit on an outer surface of the heating container; A power supply unit for supplying a high-frequency current to the coil; a heating element disposed at the position of the heating unit inside the heating container and formed of a conductive material; and detecting a temperature of the heating element or its vicinity. A fluid heating device, comprising: a temperature detection unit; and a control unit that performs required control based on a temperature detection signal from the temperature detection unit. 2. The fluid heating device according to claim 1, wherein the control unit controls the power supply unit based on a temperature detection signal from the temperature detection unit so that the temperature of the heating element becomes a set temperature. . 3. An alarm unit for issuing an alarm when the temperature of the heating element exceeds a predetermined temperature, wherein the control unit drives the alarm unit based on a temperature detection signal from the temperature detection unit. The fluid heating device according to claim 1, wherein 4. The fluid heating apparatus according to claim 1, wherein the control unit cuts off the supply of power from the power supply unit to the coil based on a temperature detection signal from the temperature detection unit. 5. The fluid heating device according to claim 1, wherein the temperature detecting section of the temperature detecting means is disposed downstream of the heating element. 6. The fluid heating device according to claim 1, wherein the temperature detecting section of the temperature detecting means is arranged in contact with the heating element. 7. A fluid heating device according to claim 1, wherein the fluid heating device is provided in a middle of a pipe for supplying a fluid to a substrate processing section for processing a substrate. Substrate processing apparatus.