JP2000055461A - Fluid heating apparatus and substrate processing apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid heating apparatus utilizing electromagnetic induction in which a wall surface portion of a heating container, a change in temperature of a coil, and abnormal temperature of the same are detected immediately, and in which a broken wire of a coil and deformation and deterioration of the heating container are prevented, and which is excellent in safety. SOLUTION: There are provided a heating container 10 formed with a nonmagnetic material and having a closed structure in which there are formed a fluid inlet 12 and a fluid outlet 14 both communicated and connected with a piping, a coil 16 wound around an outer surface of the heating container, a power supply apparatus section 18 for conducting a high frequency current to the coil, a heater 20 formed with a conductive material and disposed in the heating container, a temperature detector 24 for detecting the temperature of the coil, and a controller 32 for controlling the power supply apparatus section based upon a temperature detection signal from the temperature detector.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid heating apparatus used for heating various gases and liquids supplied through a pipe to a substrate processing apparatus for performing a required process on a substrate, and more particularly, to a fluid heating apparatus used for heating a substrate. The present invention relates to a fluid heating device of an electromagnetic induction heating type and a substrate processing apparatus using the fluid heating device.

[0002]

2. Description of the Related Art In a substrate processing apparatus, for example, an apparatus for drying a substrate under reduced pressure, when an alcohol vapor, for example, isopropyl alcohol (IPA) vapor is supplied through a pipe into a chamber in which the substrate is housed and in a reduced pressure state, the IPA vapor is supplied. It is necessary to supply by heating to a predetermined temperature. As a device for heating the IPA vapor, generally, a resistance heater is disposed outside a pipe made of stainless steel or the like, and heat flowing from the resistance heater flows through the pipe.
Although a device for heating PA vapor is used, recently, an attempt has been made to heat a fluid flowing in a pipe using electromagnetic induction. In this heating method, a coil is wound around an outer surface of a heating container formed of a non-magnetic material and inserted in the middle of a pipe, and a conductive material is formed inside the heating container around which the coil is wound. A heating element is provided, a high-frequency current is applied to the coil to generate a magnetic flux, and an eddy current is generated in the heating element in the magnetic field to generate Joule heat, which flows through the heating vessel due to the heat generated by the heating element. For example, a gas or liquid fluid is directly heated.

In a substrate processing apparatus using such a fluid heating device utilizing electromagnetic induction, a temperature detector such as a thermocouple is usually installed at an outlet side of a heating vessel inserted in the middle of a pipe, and a heating vessel is provided. The temperature of the fluid after passing through the inside is measured by a temperature detector. Then, the electric power supplied to the coil is adjusted based on the measured temperature of the fluid, the temperature of the fluid passing through the heating vessel is feedback-controlled, and the temperature of the fluid sent to the substrate processing apparatus through the pipe is set to a desired temperature. Adjustment is performed so that

[0004]

As described above, in the system in which the temperature of the fluid after passing through the heating vessel of the fluid heating device is detected and controlled, the temperature inside the heating vessel rises. Due to this effect, even if the wall surface around which the coil is wound or the coil is hot, or if the coil and its vicinity are hot due to heat generated by the coil's own resistance, the temperature change or abnormal temperature can be detected immediately. Cannot be detected. That is, the heating element inside the heating container generates heat for a long time, the inside of the heating container becomes high temperature, and the wall portion and the coil are heated by the heat transfer from the inside of the heating container,
In addition, even if the coil itself generates heat due to the high-frequency current flowing through the coil and the temperature of the coil and its vicinity is too high, it cannot be detected immediately,
As a result, the coil may be disconnected.
In addition, since the heating container is formed of a non-magnetic material and is usually formed of a plastic material, if the temperature of the coil and its vicinity becomes too high, the heating container may be deformed or accelerated deterioration. There is a problem. Further, if the temperature of the coil and its vicinity becomes too high, there is a problem in safety.

The present invention has been made in view of the above circumstances, and in a fluid heating apparatus for heating a fluid using electromagnetic induction, a temperature change or abnormal temperature of a wall portion of a heating vessel or a coil. Can be detected immediately,
It is possible to prevent the coil from being disconnected or the heating container from being deformed or accelerated deterioration, and to provide a fluid heating device excellent in safety and using such a fluid heating device. It is an object of the present invention to provide a substrate processing apparatus.

[0006]

The invention according to claim 1 is
In a fluid heating device that is provided in the middle of a pipe through which a fluid is supplied and that heats a fluid flowing through the pipe, a fluid inlet and a fluid outlet that are respectively connected to the pipe through which the fluid is transferred are formed. A heating container having at least a heating portion formed of a non-magnetic material, a coil wound on the outer surface of the heating container at the position of the heating portion, and a high-frequency current flowing through the coil. Power supply unit for flowing
A heating element disposed at the position of the heating section and formed of a conductive material inside the heating container, temperature detection means for detecting the temperature of the coil or its vicinity, and temperature detection from the temperature detection means Control means for controlling the power supply unit based on a signal.

According to a second aspect of the present invention, in the device according to the first aspect, the control means cuts off the supply of power from the power supply unit to the coil based on a temperature detection signal from the temperature detection means. And

According to a third aspect of the present invention, in the device according to the first or second aspect, the temperature detecting section of the temperature detecting means is arranged in contact with the coil.

According to a fourth aspect of the present invention, in the substrate processing apparatus, the fluid heating apparatus according to any one of the first to third aspects is provided with a piping for supplying a fluid to a substrate processing section for processing a substrate. Is interposed and provided.

In the fluid heating apparatus according to the first aspect of the present invention, when a high-frequency current is applied to the coil wound on the outer surface of the heating vessel by the power supply unit, a magnetic flux is generated, and the heating vessel in the magnetic field is generated. An eddy current is generated in the internal heating element, Joule heat is generated by the specific resistance of the conductive material forming the heating element, and the heating element generates heat. The gas or liquid fluid flowing from the pipe through the fluid inlet into the heating vessel is directly heated by the heating element when passing through the position where the heating element is provided, and the heated fluid is heated by the heating vessel. It flows into the piping from inside through the fluid outlet. At this time, the temperature of the coil or the vicinity thereof is detected by the temperature detecting means, and the power supply unit is controlled by the control means based on the temperature detection signal from the temperature detecting means.

For example, in the fluid heating apparatus according to the second aspect of the present invention, when the temperature of the coil or the vicinity thereof exceeds a predetermined temperature, the power supply device is controlled by the control means based on a temperature detection signal from the temperature detection means. The unit is controlled, and the supply of power from the power supply unit to the coil is cut off. Thus, to detect the temperature of the coil or its vicinity,
As the temperature inside the heating vessel rises, the temperature of the wall and the coil around which the coil is wound rises due to the effect,
When the temperature of the coil and its vicinity becomes high due to the heat generated by the resistance of the coil itself, an abnormality in the temperature can be detected immediately, and the power supply to the coil is cut off based on the abnormality. Therefore, the heat generated by the coil itself is eliminated, and the temperature of the coil or the vicinity thereof is prevented from exceeding a predetermined temperature and becoming too high, so that the coil is disconnected or the heating container made of a plastic material is deformed. Premature deterioration is prevented and it is safe.

In the fluid heating apparatus according to the third aspect of the present invention,
Since the temperature of the coil itself is detected by the temperature detecting means, it is possible to more quickly detect a change in the temperature of the coil or abnormal temperature.

In the substrate processing apparatus according to the present invention, the temperature of the coil of the fluid heating device or the vicinity thereof is detected by the temperature detecting means, and the power is supplied by the control means based on the temperature detection signal from the temperature detecting means. Since the device section is controlled, if the temperature of the coil or the vicinity of the coil exceeds a predetermined temperature, the supply of power from the power supply section to the coil is immediately stopped, so that the coil is disconnected or plastic The heating container made of the material is prevented from being deformed or hastening its deterioration, and is safe.

[0014]

Preferred embodiments of the present invention will be described below with reference to the drawings.

First, the basic structure and operation of the fluid heating device will be described with reference to FIGS. FIG.
FIG. 4 is an external perspective view schematically showing a schematic configuration of the fluid heating device, and FIG. 4 is a longitudinal sectional view thereof.

The fluid heating device includes a heating vessel 2 provided in the middle of a pipe 1, a coil 3 wound around the heating vessel 2, a power supply unit (not shown), and a heating vessel 2.
Is constituted by a heating element 4 disposed inside. Note that, in FIG. 3, the coil 3 is shown in a state in which a half circumferential portion is cut.

The heating vessel 2 has a closed cylindrical shape, and a fluid inlet 5 and a fluid outlet 6 which are respectively connected to the pipe 1 are formed on both end surfaces. The heating container 2 is formed of a nonmagnetic material, for example, a plastic material such as a fluororesin or a ceramic material. Note that the entire heating vessel 2 does not necessarily need to be formed of a non-magnetic material, and it is sufficient that at least a cylindrical surface around which the coil 3 is wound and which becomes a heating section is formed of a non-magnetic material. The shape of the heating vessel is not limited to a cylinder, but may be various shapes.

A coil 3 wound on a cylindrical surface of a heating vessel 2
, A power supply unit is electrically connected, and a high-frequency current flows through the coil 3 by the power supply unit. The heating element 4 disposed inside the heating vessel 2 is
It is formed of a metal material. In this embodiment,
The heating element 4 is configured by arranging a plurality of thin metal plates 7 made of corrosion-resistant stainless steel or the like in parallel with each other at intervals. Each metal sheet 7 is arranged along the axial direction of the heating vessel 2, and each metal sheet 7
The gap between them becomes the fluid passage 8. These metal sheets 7
Has been mirror-finished by electrolytic polishing or the like, and has been precision cleaned. The configuration of the heating element is not limited to a configuration in which a plurality of thin metal plates 7 are arranged in parallel as in the illustrated example, but may be a structure in which a fluid passage is formed and a certain contact area with the fluid is secured. Any structure may be used, such as a honeycomb structure. The material of the heating element is
Other than stainless steel, for example, various metals such as nickel may be used. In addition, silicon carbide (SiC) or carbon (C) may be used, and the heating element may be made of a conductive material.

In the fluid heating device having the structure shown in FIGS. 3 and 4, when a high-frequency current is supplied to the coil 3 by the power supply unit, a magnetic flux is generated, and the eddy current flows through the metal sheet 7 inside the heating vessel 2. Is generated, and Joule heat is generated in the metal sheet 7 due to the specific resistance of the material, and the metal sheet 7 generates heat. At this time, since the heating container 2 is formed of a non-magnetic material, it does not generate heat itself. When the metal sheet 7 generates heat, the fluid flowing from the pipe 1 through the fluid inlet 5 into the heating vessel 2 flows through the passage 8 between the metal sheets 7, Is directly heated by the heat transfer. The fluid heated and heated while passing through the passage 8 between the metal sheets 7 flows out of the heating vessel 2 through the fluid outlet 6 and flows into the pipe 1.

FIG. 1 shows one embodiment of the present invention, and is a partially broken longitudinal sectional view of a fluid heating device. This fluid heating device is provided with a fluid inlet 12 and a fluid outlet 14 provided in the middle of a pipe, a heating vessel 10, a coil 16 wound around the heating vessel 10, and a high-frequency current flowing through the coil 16. The power supply unit 18 includes a heating element 20 disposed inside the heating container 10. The basic configuration and operation of this fluid heating device are shown in FIGS.
Since the device is the same as that shown in FIG. 1, the duplicate description is omitted here.

In this fluid heating device, the heating vessel 10
The heating vessel 1 has a thermal expansion absorbing portion 22 in which a portion closer to the fluid outlet 14 than the heat generating portion is formed in a fold shape, a bellows shape or the like.
The thermal expansion accompanying the temperature rise of 0 is absorbed by the thermal expansion absorbing section 22 so that an excessive force does not act on the joint between the both ends of the heating vessel 10 and the pipe. Coil 16
Is a cover 161 formed of a nonmagnetic material, for example, a fluorinated resin such as polytetrafluoroethylene or quartz.
Is located within. In addition, this device includes a temperature detector 2
The temperature detector, for example, a detection end of a thermocouple 26 is disposed in contact with the coil 16 in the cover 161. As the temperature detector, a thermometer, a radiation thermometer, or the like may be used in addition to the thermocouple. The apparatus also includes a fluid inlet 1 of the heating vessel 10.
Temperature detectors 28 and 30 for detecting the temperature of the fluid passing through the fluid outlet 2 and the fluid outlet 14, respectively, are provided. The temperature detection signals output from the respective temperature detectors 24, 28, 30 are sent to the controller 32. The power supply unit 18 and the alarm 34 are connected to the controller 32.

The controller 32 compares the preset target temperature with the temperature of the fluid at the fluid outlet 14 or the fluid inlet 12 detected by the temperature detectors 30 and 28, and performs control corresponding to the temperature difference. A signal is output from the controller 32 to the power supply unit 18, and the heating element 20 is subjected to feedback control or feedforward control so that the temperature of the fluid becomes the target temperature. Further, in this fluid heating device, the controller 32 compares the preset temperature with the temperature of the coil 16 detected by the temperature detector 24, and when the temperature of the coil 16 exceeds the set temperature, the controller 32 A signal is sent to the power supply unit 18 to interrupt the supply of power from the power supply unit 18 to the coil 16 or the output of the coil 16 is weakened. As a result, the heat generation of the coil 16 itself is eliminated or reduced, the temperature rise of the coil 16 is suppressed, and the temperature of the coil 16 is prevented from exceeding the set temperature and becoming too high. For this reason, disconnection of the coil 16 and deformation or accelerated deterioration of the heating container 10 formed of a plastic material are prevented. At the same time, a signal is also sent from the controller 32 to the alarm device 34 to drive the alarm device 34, so that the operator is notified that the temperature of the coil 16 is abnormally high. In addition, cover 1
Since 61 suppresses the heat transfer from the heating element 20, the temperature detector 24 can accurately detect the temperature rise of the coil 16.

FIG. 2 is an enlarged longitudinal sectional view of a main part showing another arrangement example of the thermocouple 26 which is a temperature detector of the temperature detector 24. The coil 16 is arranged inside the hollow cover 162, and the detection end of the thermocouple 26 is arranged near the coil 16. With this structure, since the positional accuracy between the thermocouple 26 of the temperature detector 24 and the coil 16 is not required, the assembly becomes easy.

The fluid heating apparatus having the above-described configuration is inserted in a pipe for supplying a fluid to a substrate processing section for processing a substrate in various types of substrate processing apparatuses, and is configured to supply various fluids. Used for heating. Regarding an example of a substrate processing apparatus provided with such a fluid heating device,
This will be described with reference to FIG.

FIG. 5 is a schematic diagram showing an overall schematic configuration of a reduced-pressure drying apparatus which is a kind of a substrate processing apparatus. This reduced-pressure drying apparatus is used for a process of supplying IPA vapor to a substrate and drying the substrate under a reduced-pressure atmosphere. In FIG.
Reference numeral 36 denotes a reduced-pressure drying chamber, and the inside of the chamber 36 can be evacuated and evacuated by a decompression means such as a vacuum pump (not shown). Reference numeral 38 denotes an IPA vapor supply pipe connected to the chamber 36, and reference numeral 40 denotes a dilution nitrogen gas supply pipe connected to the IPA vapor supply pipe 38. The IPA vapor supply pipe 38 is connected to a flow path of the evaporator 42. An IPA 44 is accommodated in the evaporator 42, and the IPA 44 is supplied from the injection port 50 by supplying the IPA 44 to the injection port 50 on the ceiling of the evaporator 42 through the IPA supply path 48 by the pump 46.
A vapor is prepared. Evaporator 42
A nitrogen gas supply pipe 52 for carrier is connected and connected to the internal space, and an IPA circulation pipe 54 for circulating and heating the IPA 44 housed in the evaporator 42 is attached to the evaporator 42. Have been.

The IP supplied to the chamber 36
In order to heat the A vapor to a predetermined temperature, the fluid heating device 56 having the above-described configuration as shown in FIG. 1 is interposed in the IPA vapor supply pipe 38, and the controller 58 is connected to the fluid heating device 56. It is attached. Further, a fluid heating device 60 provided with a controller 62 for heating the dilution nitrogen gas is provided in the dilution nitrogen gas supply pipe 40, and a carrier nitrogen gas supply pipe 52 is provided in the carrier nitrogen gas supply pipe 52. In order to heat the nitrogen gas for use, a fluid heating device 64 provided with a controller 66 is provided interposed therebetween. Further, the IPA circulation pipe 54 has an IPA
In order to heat the fluid to a predetermined temperature, a fluid heating device 68 provided with a controller 70 is interposed therebetween.

The fluid heating apparatus according to the present invention is not limited to the vacuum drying apparatus shown in FIG. 5, but may be, for example, a chemical liquid circulation type processing apparatus, a hot pure water cleaning apparatus, a hot air heater for carrier cleaning, or a high-temperature nitrogen gas heater for pull-up drying. And so on,
It can be used in various processing apparatuses such as a reaction gas heating apparatus for a CVD apparatus and a coating liquid heating apparatus for a spinner.

[0028]

According to the first aspect of the present invention, there is provided a fluid heating device.
Changes in temperature and abnormalities in the temperature of the wall of the heating vessel and the coil can be detected immediately, and the necessary control is performed on the power supply unit. It can be prevented from being advanced earlier, and is excellent in safety.

In the fluid heating device according to the second aspect of the present invention,
An abnormality in the temperature of the coil or the vicinity thereof can be immediately detected, and power supply to the coil is cut off based on the detection, so that the coil itself does not generate heat and the temperature of the coil or the vicinity thereof exceeds a predetermined temperature. Since it is prevented from becoming too high, the coil is prevented from being disconnected, and the heating container made of a plastic material is prevented from being deformed or accelerated in deterioration, and safety problems are also solved.

In the fluid heating device according to the third aspect of the present invention,
Since the temperature of the coil itself is detected by the temperature detecting means, abnormalities in the temperature of the coil are more quickly detected, and the supply of power from the power supply unit to the coil is cut off. It can be effectively prevented.

When the substrate processing apparatus according to the fourth aspect of the present invention is used, it is possible to immediately detect a temperature change or abnormal temperature of a wall portion of a heating vessel or a coil of a fluid heating apparatus which constitutes a part thereof. Since the necessary control is performed on the power supply unit, it is possible to prevent disconnection of the coil, deformation of the heating container, and deterioration of the heating container, and to perform processing of the substrate safely. Can be.

[Brief description of the drawings]

FIG. 1 shows one embodiment of the present invention, and is a partially broken longitudinal sectional view of a fluid heating device.

FIG. 2 shows a second embodiment of the present invention and is an enlarged longitudinal sectional view of a main part of a fluid heating device.

FIG. 3 is an external perspective view schematically showing a basic configuration of a fluid heating device according to the present invention.

4 is a schematic vertical sectional view of the fluid heating device shown in FIG.

FIG. 5 is a schematic view showing an example in which the fluid heating device according to the present invention is used in a reduced-pressure drying device which is a kind of substrate processing device.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 piping 2, 10 heating vessel 3, 16 coil 4, 20 heating element 5, 12 fluid inlet of heating vessel 6, 14 fluid outlet of heating vessel 7 metal sheet 8 fluid passage 1691, 162 cover 18 power supply unit 24 , 28, 30 Temperature detector 26 Thermocouple 32, 58, 62, 66, 70 Controller 34 Alarm 36 Vacuum drying chamber 38 IPA vapor supply pipe 40 Dilution nitrogen gas supply pipe 42 Evaporator 44 IPA 46 Pump 52 Carrier nitrogen Gas supply piping 54 IPA circulation piping 56, 60, 64, 68 Fluid heating device

Claims (4)

[Claims] 1. A fluid heating device which is provided in the middle of a pipe through which a fluid is supplied to heat a fluid flowing through the pipe, comprising: A fluid container having a sealed structure in which a fluid outlet is formed, at least a heating unit formed of a non-magnetic material, and a coil wound around a position of the heating unit on an outer surface of the heating container; A power supply unit for supplying a high-frequency current to the coil; a heating element formed of a conductive material disposed at a position of the heating unit inside the heating container; and a temperature for detecting a temperature of the coil or the vicinity thereof. A fluid heating device, comprising: a detection unit; and a control unit that controls the power supply unit based on a temperature detection signal from the temperature detection unit. 2. The fluid heating apparatus according to claim 1, wherein the control unit cuts off power supply from the power supply unit to the coil based on a temperature detection signal from the temperature detection unit. 3. The fluid heating device according to claim 1, wherein the temperature detecting section of the temperature detecting means is disposed in contact with the coil. 4. A fluid heating device according to claim 1, wherein the fluid heating device is provided in a middle of a pipe for supplying a fluid to a substrate processing unit for processing a substrate. Substrate processing apparatus.