JP2001284034A - Heating device of fluid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heating device of fluid enable to set at a high heating- possible temperature. SOLUTION: This is enable to house the fluid inside as a heated substance, and wind in a solenoid shape, and equipped with a pipe wherein a flow-in port side end region into which the fluid flows and flow-out port side end region from which the fluid flows out are conductively connected and short-circuited, a high frequency heating coil cover arranged in the inner side of the pipe, a high frequency heating coil wound at an outer circumferential part of the high frequency coil cover, and a high frequency electric power supply source supplying a high frequency electric power into the high frequency heating coil. A high frequency electric power is supplied into the high frequency heating coil from the high frequency electric power supply, and high frequency electric power is supplied to the high frequency heating coil from the high frequency power supply, and a high frequency magnetic field is generated by the high-frequency heating coil, and induced current is made to flow into the pipe by coupling with the high frequency magnetic field, and the pipe is induction-heated, and by the fact that the induced current flows, the pipe as an exothermic body, heats the fluid being housed inside.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid heating apparatus, and more particularly, to a fluid to be heated, such as a liquid such as water or petroleum, or a gas such as nitrogen gas or argon gas. In particular, the present invention relates to a fluid heating device suitable for use in a cleaning device, an etching device, a distillation device, or the like.

[0002]

2. Description of the Related Art Conventionally, as a liquid heating device for heating a liquid such as water or petroleum in a fluid as an object to be heated, for example, as shown in FIG. Liquid heating devices adapted for use are known.

That is, the liquid heating apparatus 100 shown in FIG.
Is a container 1 having a liquid inlet 102a and a liquid outlet 102b and capable of storing a liquid in an internal space 102c.
02, a heater 104 arranged in the internal space 102c of the container 102, and a power supply 106 for supplying power to the heater 104.

In the above configuration, a pump (not shown)
The internal space 1 of the container 102 is
02c through the inlet 102a, the liquid is supplied from the inner space 102c of the container 102 to the outlet 102c.
The setting is made so that the liquid flows out through b.

On the other hand, the power source 106
4 is supplied with electric power to heat the heater 104.

Then, the inlet 102a of the container 102
Liquid flowing into the internal space 102c from the heater 104
, And the liquid heated by the heater 104 is discharged from the outlet 102b to the outside.

In the liquid heating apparatus 100, when the supply of the liquid to the internal space 102c of the container 102 is stopped, the heater 104 is so-called empty heating.
Is rapidly increased, and the container 102 is abnormally heated. When the temperature of the container 102 exceeds the heat-resistant temperature of the seal member that seals between the constituent members of the container 102 due to the abnormal heating of the container 102 due to the empty heating, the deterioration of the seal member is deteriorated. From the deteriorated seal member.
There is a problem that the liquid leaks out of the device.

If the liquid leaked to the outside due to such damage to the container 102 is petroleum or the like, the leaked liquid ignites and a fire occurs, and the liquid heating device 1
00 and its installation location.

Further, as a liquid heating apparatus for heating a liquid such as water or petroleum in a fluid as an object to be heated, for example, as shown in FIG. Liquid heating devices are also known.

In the liquid heating apparatus shown in FIG.
Components that are the same as or correspond to the components shown in FIG. 1 are denoted by the same reference numerals as those in FIG. 1, and detailed description of the configuration and operation will be omitted.

That is, the liquid heating device 200 shown in FIG.
Is a container 1 having a liquid inlet 102a and a liquid outlet 102b and capable of storing a liquid in an internal space 102c.
02, a pipe 204 arranged in the internal space 102c of the container 102, and high-temperature steam supply means 206 for supplying high-temperature steam into the pipe 204.

In the above configuration, a pump (not shown)
The internal space 1 of the container 102 is
02c through the inlet 102a, the liquid is supplied from the inner space 102c of the container 102 to the outlet 102c.
The setting is made so that the liquid flows out through b.

On the other hand, high-temperature steam is supplied from the high-temperature steam supply means 206 into the pipe 204, and the high-temperature steam is circulated through the pipe 204 to heat the pipe 204 and to transfer heat of the high-temperature steam to the outside of the pipe 204. Dissipate heat.

Then, the inlet 102a of the container 102
Is heated by the heat radiated to the heated pipe 204 and the outside of the pipe 204 from the liquid flowing into the internal space 102c.
02b to the outside.

By the way, in the liquid heating device 200, compared to the above-described liquid heating device 100, the container 10 caused by abnormal heating of the container 102 by, for example, empty heating is used.
Although there is little danger of ignition due to the damage of 2, the heating temperature is lower than that of the liquid heating device 100 described above, and a large-sized device such as a boiler is required as the high-temperature steam supply means 206. There has been a problem that the cost is increased as a whole.

In the above-described liquid heating device 200, it is possible to use a heat medium oil instead of high-temperature steam as the heating element. In addition to being lower than the liquid heating device 100 described above, a device such as an oil heater for heating the heat transfer medium oil is required, which causes a problem that the cost of the entire device is increased.

Further, as a liquid heating apparatus for heating a liquid such as water or petroleum in a fluid as an object to be heated, for example, as shown in FIG. Is also known.

That is, the liquid heating device 300 shown in FIG.
Is a container 302 having a liquid inlet 302a and a liquid outlet 302b, capable of containing the liquid in the internal space 302c and functioning as a heating element.
02 is made of a metal such as stainless steel, for example. The high-frequency heating coil 304 is wound around the outer periphery of ()) with a predetermined gap.

A high-frequency power supply 306 for supplying high-frequency power is connected to the high-frequency heating coil 304.

In the above configuration, a pump (not shown)
The internal space 3 of the container 302 is
02c through the inflow port 302a, and from the internal space 302c of the container 302 to the outflow port 302a.
The setting is made such that the liquid flows out through b.

On the other hand, when high-frequency power is supplied from the high-frequency power supply 306 to the high-frequency heating coil 304, the high-frequency heating coil 302 generates a high-frequency magnetic field, and the induction current flows through the container 302 by interlinking with the high-frequency magnetic field. ,
The container 302 is heated by the induction current.

Then, the inlet 302a of the container 302
Flowing into the internal space 302c from the internal space 302c
While moving from the inflow port 302a to the outflow port 302b in the inside 02c, it is heated by the induction-heated vessel 302,
The liquid heated by the induction-heated container 302 flows out from the outlet 302b to the outside.

Here, in the liquid heating apparatus 300, the liquid flows in the internal space 302c of the container 302. However, since the volume of the container 302 serving as the heating element is large, the liquid is heated by the container 302 serving as the heating element. There is a problem in that the heat exchange efficiency is deteriorated because the flow velocity in the portion where the transmission occurs is low.

Further, since the distribution of the induced current differs depending on the position of the container 302, for example, the state of heat generation differs at points A, B, and C, and the container 302 is partially heated. there were.

Further, since the volume of the container 302, which is a heating element, is large, the heat capacity of the container 302, which is a heating element, is also large, so that the thermal response is slow. There was a problem that it was difficult to detect empty heating.

[0026]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to set a high heating temperature. SUMMARY OF THE INVENTION It is an object of the present invention to provide a fluid heating device that can be used.

It is another object of the present invention to provide a fluid heating device in which the size of the entire device is reduced and the cost is reduced.

Further, it is an object of the present invention to reduce the temperature difference between the heating element and the object to be heated by making the thermal response faster so that an emergency heating of the container due to empty heating or the like occurs. It is an object of the present invention to provide a fluid heating device capable of improving control characteristics at the time and preventing the occurrence of damage to the container due to abnormal heating of the container.

[0029]

In order to achieve the above object, according to the first aspect of the present invention, a fluid as an object to be heated can be accommodated therein, and the fluid is wound in a solenoid shape. And a short-circuited pipe in which the inflow-side end area where the fluid flows in and the outflow-side end area where the fluid flows out are short-circuited, and the pipe is disposed inside. A high-frequency heating coil cover, a high-frequency heating coil wound around an outer peripheral portion of the high-frequency heating coil cover, and a high-frequency power supply for supplying high-frequency power to the high-frequency heating coil. A high-frequency power is supplied, a high-frequency magnetic field is generated by the high-frequency heating coil, and an induction current flows through the pipe by interlinking with the high-frequency magnetic field. It is obtained so as to heat the fluid which contains therein a heating element is inductively heated by Rukoto.

That is, in the first aspect of the present invention, the inflow-side end region where the fluid flows in and the outflow-side end region where the fluid flows out are electrically connected to each other. By uniformly heating the pipe containing the fluid by induction heating, the pipe achieves a function as a container for storing the fluid and a function as a heating element for heating the fluid.

Therefore, according to the first aspect of the present invention, the packing for sealing the fluid used in the above-mentioned conventional liquid heating apparatus is not used, and the heat generating element and the container are separated. Since the components are the same, the temperature at which the fluid can be heated can be set high. For example, nitrogen gas can be heated up to 1000 ° C.

According to the first aspect of the present invention, since the heating element and the container are integrated, the size of the entire apparatus can be reduced.

In addition, since the container is a pipe, the design of the pressure container is easy, and the manufacturing is easy, so that the cost can be reduced.

According to a second aspect of the present invention, in the fluid heating apparatus according to the first aspect, an end portion of the pipe on the inlet side where the fluid flows in and an outlet side where the fluid flows out. The end region is brazed with a metal having a melting point at a predetermined temperature, is electrically connected and short-circuited, and when the pipe is heated to the predetermined temperature, When the brazed metal is melted, the induction current flowing through the pipe is cut off, and the induction heating of the pipe is stopped.

That is, according to the second aspect of the present invention, since a pipe having a small heat capacity is used, the thermal responsiveness is improved, and the pipe serving as a heating element and the object to be heated are separated. This makes it possible to reduce the temperature difference between the two, and to improve the control over the abnormal heating such as in the case of idling. For this reason, if the pipe is heated to a predetermined temperature or higher by empty heating, the induction current flowing through the pipe will be cut off, and the induction heating of the pipe will be stopped. The occurrence can be prevented beforehand.

That is, since the pipe has a small volume, it has a small heat capacity and excellent thermal responsiveness, and it is possible to reduce the temperature difference between the pipe as the heating element and the object to be heated. Improved control during abnormal heating is improved. If the heat capacity of the heating element is large, the temperature rise of the heating element is delayed even if the fluid to be heated is vaporized by empty heating, but the temperature rise is not delayed in a pipe having a small heat capacity.

Since the same induced current flows through the pipe at any position, partial overheating does not occur.

The pipe can be made of metal, as in the third aspect of the present invention.

[0039]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a fluid heating device according to the present invention will be described below in detail with reference to the accompanying drawings.

Here, the fluid heating device according to the present invention uses, as a heating element, a pipe that is induction-heated by the flow of an induction current, and this pipe functions as a heating element and serves as a container for containing a fluid. Also works.

That is, the fluid heating apparatus according to the present invention can heat not only liquids such as water and petroleum but also general fluids containing gases such as nitrogen gas and argon gas.

FIG. 4 is a perspective view schematically showing the structure of a fluid heating device according to an embodiment of the present invention, which is partially cut away. FIG. 5 is a perspective view of the fluid heating device shown in FIG. FIG. 2 is a schematic configuration perspective view showing a part of a pipe used in the apparatus in a cutaway manner.

The fluid heating apparatus 10 includes a pipe provided with a solenoid-shaped winding portion 16a wound in a solenoid shape in a cylindrical high-frequency heating coil cover 14 having a high-frequency heating coil 12 wound on the outer periphery. 16 are provided.
The fluid to be heated is stored in the pipe 16.

Further, a high-frequency power supply 18 for supplying high-frequency power to the high-frequency heating coil 12 is connected to the high-frequency heating coil 12, and the high-frequency power supply 18 has a built-in load monitor circuit 18a.

The high-frequency heating coil cover 14 can be made of, for example, ceramic,
6 can be formed of a conductor such as a metal such as stainless steel, for example.

The pipe 16 is provided with the solenoid-shaped winding portion 16a as described above, and one end thereof is provided with a fluid supply means (not shown) such as a pump from the outside.
And an inlet 16b for the fluid supplied by
The other end serves as an outlet 16 c for the fluid contained in the pipe 16.

Here, referring to FIG.
The shape of the pipe 16 will be described in more detail. The pipe 16 is located on the lower side so that the inflow port 16b opens downward in FIG. 4, and the outflow port 16c opens upward in FIG. It is arranged so as to be located on the upper side.

Further, an inlet end region 16d connected to the inlet 16b and an outlet end region 16e connected to the outlet 16c.
Are arranged so as to extend in the axial direction at the axial center portion of the solenoid shape, and the contact portion 20 between the inlet end region 16d and the outlet end region 16e.
Are connected electrically conductively and short-circuited by brazing with a metal having a melting point at a predetermined temperature.

That is, the pipe 16 is provided at the inlet end region 16.
d extends upward in the axial central portion of the solenoid shape so as to extend in the axial direction, and the inlet end region 16d reaching a predetermined upper position in FIG. 4 is wound so as to form a solenoid shape. The solenoid-shaped winding portion 16a is turned down to form a solenoid-shaped winding portion 16a, and the solenoid-shaped winding portion 16a which has reached a predetermined lower position in FIG. 4 extends in the axial direction at the axial center portion of the solenoid shape. And extends upward to form an outlet side region 16e.

In the above configuration, a pump (not shown)
The fluid is supplied from the inflow port 12b into the pipe 16 and the fluid is set to flow out of the pipe 16 from the outflow port 16c by using a fluid delivery means such as the above.

On the other hand, when high-frequency power is supplied from the high-frequency power supply 18 to the high-frequency heating coil 12, the high-frequency heating coil 12 generates a high-frequency magnetic field. The pipe 16 is induction-heated by the induction current.

That is, in the pipe 16 wound in a solenoid shape and both ends are electrically connected and short-circuited, an induced current flows through the contact portion 20 which is a short-circuit portion.

Then, from the inlet 16a to the pipe 16
The fluid that has flowed into the pipe 16 moves through the pipe 16 from the inlet 16a to the outlet 16b while being heated by induction.
Pipe 16 thus heated by induction and thus induction heated.
As a result, the heated liquid flows out of the outlet 16b to the outside.

That is, the fluid that has entered from the inlet end region 16d is heated while passing through the pipe 16 that is the heating element through which the induced current is flowing, and exits from the outlet end region 16e to the outside. Become.

Here, the inflow end region 16d and the outflow end region 16e are connected to be electrically conductive by brazing or the like and are short-circuited, so that an induction current for heating the pipe 16 is generated. Is equal at any point of the pipe 16, and the entire pipe 16 can be uniformly heated, so that the fluid in the pipe 16 can be uniformly heated. That is, in the fluid heating device 10, the temperature of only any part of the pipe 16 does not rise.

According to the fluid heating device 10,
Since the heating element for heating the fluid and the container for containing the fluid are constituted by the same member as the pipe 16, the heating element, that is, the pipe 16 and the pipe 16
The temperature difference with the fluid contained therein is reduced, and the heat capacity of the pipe 16 is also small.

As described above, since the fluid heating device 10 heats the pipe 16 containing the fluid by induction heating instead of heating by energizing the heater, power is supplied to the pipe 16. It is not necessary to provide any terminal of the pipe 16, and any point of the pipe 16 is grounded (grounded).
You may let it. Therefore, a security circuit such as a temperature measuring circuit for measuring the temperature of the pipe 16 can be constructed with high accuracy, and the temperature of the pipe 16 can be measured with high accuracy and easily. .

Here, when the pipe 16 is heated to a predetermined temperature, if the abutting portion 20 which is a short-circuit portion is brazed, the brazed metal is melted, so that the induction flowing into the pipe 16 is reduced. Electric current is cut off and pipe 1
The induction heating of 6 is stopped.

Therefore, when the temperature of the pipe 16 rises due to idle heating or the like, the induction current flowing through the pipe 16 is immediately cut off, the induction heating of the pipe 16 is stopped, and damage to the apparatus due to abnormal heating may occur. It can be prevented beforehand.

Here, the temperature of the fluid at the outlet of the pipe 16 has a correlation with the temperature of the outlet end region 16e, and the temperature gradually increases as the fluid proceeds from the inlet end region 16d into the pipe 16. , The highest temperature in the outlet end region 16e. In the case of empty firing, this outlet end area 1
The temperature of the portion 6e starts to rise first.

That is, if the temperature in the vicinity of the contact portion 20 between the inflow end region 12d and the outflow end region 12e of the pipe 16 is measured, it is possible to prevent a rise in temperature during empty heating. It will be easy to deal with.

Further, in the fluid heating device 10, the load monitor circuit 18 a
, The resistance of the high-frequency heating coil 12 can be monitored as a load impedance.

FIG. 6 is a circuit diagram of the load monitor circuit 18a. The load monitor circuit 18a includes a monitor circuit 50, a control circuit 52, a switching circuit 54, a converter circuit 56, and an AC power supply. 58.

That is, at the time of idle heating, the pipe 16 serving as a heating element is used.
The temperature of the high-frequency heating coil 12 increases when viewed from the high-frequency power supply 18.

Therefore, when the pipe 16 is in an empty-fired state and the pipe 16 is abnormally heated, the load monitor 18
The load impedance detected by “a” increases and the monitored value changes. Therefore, when the supply of high-frequency power to the high-frequency heating coil 12 by the high-frequency power supply 18 is stopped when the monitored value exceeds a predetermined value, it is possible to prevent the pipe 16 from being heated to a predetermined temperature or higher. it can.

It is to be noted that a protection circuit having a thermostat or a fuse may be provided as a secondary protection circuit as required.

When the pipe 16 is made of metal, if the pipe 16 is abnormally heated by, for example, empty heating, even if the protection circuit does not operate and abnormal heating continues, fluid leakage or the like may occur. It is unlikely to happen.

[0068]

Since the present invention is configured as described above, it has an excellent effect that it is possible to provide a fluid heating device capable of setting a heatable temperature to be high.

Further, since the present invention is configured as described above, there is an excellent effect that it is possible to provide a fluid heating device in which the size of the entire device can be reduced and the cost can be reduced. .

Further, since the present invention is configured as described above, the thermal response is accelerated to reduce the temperature difference between the heating element and the object to be heated. An excellent effect that it is possible to provide a fluid heating device capable of improving control characteristics in an emergency when heating occurs and preventing the occurrence of damage to the container due to abnormal heating of the container. To play.

[Brief description of the drawings]

FIG. 1 is a schematic sectional configuration diagram of a conventional liquid heating device.

FIG. 2 is a schematic sectional configuration diagram of another conventional liquid heating device.

FIG. 3 is a schematic sectional configuration diagram of another conventional liquid heating apparatus.

FIG. 4 is a schematic configuration perspective view showing a part of an example of an embodiment of a fluid heating device according to the present invention in a cutaway manner.

FIG. 5 is a schematic configuration perspective view in which a part of a pipe used in the fluid heating device shown in FIG. 4 is cut away.

FIG. 6 is a circuit configuration diagram of a load monitor circuit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Fluid heating device 12, 304 High frequency heating coil 14 High frequency heating coil cover 16 Pipe 16a Solenoid winding part 16b, 102a, 302a Inlet 16c, 102b, 302b Outlet 16d Inlet end area 16e Outlet end area 18 , 306 High frequency power supply 18a Load monitor circuit 50 Monitor circuit 52 Control circuit 54 Switching circuit 56 Converter circuit 58 AC power supply 100, 200, 300 Liquid heating device 102, 302 Container 102c, 302c Internal space 104 Heater 106 Power supply 204 Pipe 206 High-temperature steam supply means

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3K059 AA08 AB23 AB28 AC09 AC16 AC33 AD02 AD05 AD10 AD32 AD35 BD08 CD10 CD18 CD37 CD39 CD53 CD74

Claims (3)

[Claims] A fluid that can be accommodated therein as an object to be heated, and is wound in a solenoid shape;
A pipe short-circuited by electrically connecting the inflow-side end area where the fluid flows in and the outflow-side end area where the fluid flows out; and a high-frequency heating coil cover for disposing the pipe inside And a high-frequency heating coil wound around an outer peripheral portion of the high-frequency heating coil cover; and a high-frequency power supply for supplying high-frequency power to the high-frequency heating coil, and supplying high-frequency power from the high-frequency power supply to the high-frequency heating coil. Then, a high-frequency magnetic field is generated by the high-frequency heating coil, and an induction current flows through the pipe by interlinking with the high-frequency magnetic field, and the pipe is induction-heated by the induction current and is internally heated as a heating element. A fluid heating device for heating a contained fluid. 2. The fluid heating device according to claim 1, wherein the inlet-side end region where the fluid of the pipe flows in and the outlet-side end region where the fluid flows out have a melting point at a predetermined temperature. When the pipe is heated to the predetermined temperature, the brazed metal melts to form the pipe, so that the pipe is heated to the predetermined temperature. A fluid heating device, wherein an induction current flowing through the pipe is interrupted to stop induction heating of the pipe. 3. The fluid heating device according to claim 1, wherein the pipe is made of a metal.