JP2000039562A - Scanning laser microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform automatic focusing operation at an optional part within a visual field by controlling the deflection angle of a light deflecting member so that a part designated by an operation part may be irradiated with a laser beam, moving either of an objective lens or a sample so that the luminance information of light from the sample may be maximum and controlling focusing. SOLUTION: When a part pixel position (i, j)} where a focused image on the surface of a sample 13 is desired to be obtained, is indicated for an operation part 31, an luminance information acquiring part 32 of a control part 30 controls to fix the deflection angles of 1st and 2nd galvano mirrors 3 and 9 so that the part where the focused image on the surface of the sample 13 is desired to be obtained may be irradiated with a light beam 2. Then, the control part 30 fetches the luminance information outputted from a detector 17, decides a position Z where the intensity of a reflected beam is maximum and displays the image 21 focused in the center of a visual field on a monitor 22 by moving a Z stage 19 to a focusing position, that is, focused for the target part pixel position (i, j)} where the focused image on the surface 13b of the sample 13 is desired to be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a scanning laser microscope.

[0002]

2. Description of the Related Art A scanning laser microscope is known as a microscope for measuring and observing the dimensions of a minute portion such as a line pattern of a semiconductor or a magnetic head with high accuracy. Further, when measuring minute dimensions, an automatic focusing function is used in order to eliminate a human error or the like of a measured value due to a difference in a measurer.

FIG. 6 is a configuration diagram of an optical system of a scanning laser microscope having such an automatic focusing function. The beam splitter 1 receives a laser beam (light beam) 2 that is equivalently considered to be a point light source and is output from a laser light source (not shown). The light beam 2 is transmitted and reflected by the beam splitter 1, and the transmitted light beam 2 is the first light beam.
(For example, a galvanometer mirror) 3.

The first galvanomirror 3 scans the light beam 2 in, for example, the X direction.
When the beam is not deflected, the light beam 2 is advanced along the optical axis 5. When the beam is deflected, that is, when the light beam 2 is scanned, the light beam 2 is scanned. The traveling direction and the center are made to pass through the off-axis main optical axis 6.

[0005] The light beam 2 scanned by the first galvanomirror 3 passes through two pupil transmission lenses 7 and 8 and enters a second deflector (eg, a galvanomirror) 9 arranged at the pupil position. This second galvanometer mirror 9 is used to
Is scanned in the Y direction, for example.

However, the light beam 2 scanned two-dimensionally in the X and Y directions by the first and second galvanometer mirrors 3 and 9 passes through a pupil projection lens 10 and an imaging lens 11 and a pupil 12 of the objective lens 4. And the objective lens 4 generates point-like light limited by diffraction on the surface of the sample 13, and the point-like light two-dimensionally scans the surface of the sample 13.

The light beam (reflected beam) reflected from the surface of the sample 13 by the two-dimensional scanning passes through the objective lens 4 and its pupil 12, forms an image once through the imaging lens 11, and further forms an image on the pupil projection lens 10. Through the second galvanometer mirror 9
Incident on. This reflected beam travels in the reverse direction along the same path as the light beam 2 irradiating the surface of the sample 13 and returns to the beam splitter 1. The reflected beam reflected by the beam splitter 1 becomes a detection beam 14.

The detection beam 14 does not move even when scanning off axis because the reflected beam is returning through the second and first galvanometer mirrors 9 and 3. This detection beam 14
Is focused by a condenser lens 15 into a point, passes through a pinhole 16 disposed at a position where the point is focused, and enters a detector 17. However, by detecting the detection beam 14 with the detector 17, an image with a higher resolution than a normal microscope can be obtained. A normal image can be obtained without disposing the pinhole 16.

Next, the automatic focusing function of the scanning laser microscope will be described with reference to FIG. The same parts as those in FIG. 6 are denoted by the same reference numerals. When performing automatic focusing, both the first and second galvanometer mirrors 3 and 9 are configured not to perform a deflection operation. Thus, the light beam 2 is
Since scanning is not performed on the surface of the sample 13, the light travels along the optical axis 5.

Hereinafter, the light beam 2 passes through the pupil projection lens 10 and the imaging lens 11 in the same manner as described above, and the pupil 1 of the objective lens 4
The objective lens 4 irradiates a position on the optical axis 5 on the surface of the sample 13, that is, a center of the visual field of the microscope. The reflected beam from the surface of the sample 13 travels in the same path as the light beam 2 incident on the surface of the sample 13 and returns to the beam splitter 1, and the reflected beam reflected by the beam splitter 1 is extracted. Detection beam 1
It becomes 4. The detection beam 14 passes through the condenser lens 15 and the pinhole 16 and is detected by the detector 17.

The sample 13 is placed on the XY stage 18 and the Z stage 19, and at the time of automatic focusing, the Z stage 19 relatively moves the laser scanning optical system and the sample 13 in the optical axis direction (Z direction). (Direction), a relationship between the Z position and the intensity of the reflected beam as shown in FIG. 8 is obtained.
Becomes largest Z position Z _m is the intensity of the reflected beam from this relationship is the focus position.

Accordingly, the control unit 20 takes in the luminance information output from the detector 17, determines the Z position where the intensity of the reflected beam is maximum, moves the Z stage 19 to the in-focus position, and moves the Z stage 19 to the center of the visual field. An image 21 focused on the surface 13a of the sample 13 is displayed on the monitor 22.

[0013]

However, in the automatic focusing function, a focused image on the surface 13a of the sample 13 at the position on the optical axis 5 on the sample 13, that is, at the center of the visual field is obtained. If it is not the center of the visual field that is desired to obtain a focused image, but the surface 13b of the peripheral portion of the center of the visual field is different from the surface 13a of the sample 13, for example, by driving the XY stage 18, the portion of the surface 13b of the sample 13 is visualized. It had to be moved to the center for automatic focusing.

In the case where the surface 13b of the sample 13 is moved so as to be at the center of the visual field, the movement distance of the surfaces 13a and 13b of the sample 13 is very small and difficult to adjust. , The operation was troublesome. In particular, when measuring various line widths having different heights within one field of view, such as a three-dimensional line pattern of a semiconductor, it is expected that the sample 13 must be moved each time. In addition, when the measurement target area becomes small in the field of view, an expensive and high-precision XY table capable of performing minute feed for the alignment of the sample 13 is required. Accordingly, an object of the present invention is to provide a scanning laser microscope capable of performing an automatic focusing operation at an arbitrary part in a visual field.

[0015]

According to the present invention, a laser light source, an objective lens for condensing laser light from the laser light source on a sample surface, and a conjugate position with a pupil position of the objective lens are provided. A light deflecting member that scans the sample surface by deflecting the laser light entering the objective lens, a detector that detects light from the sample, and displays an image based on the image signal detected by this detector In a scanning laser microscope equipped with a monitor for performing the operation, an operation section for instructing a portion on the sample surface where a focused image is to be obtained, and an optical deflecting member for irradiating a laser beam to the portion designated by the operation section. A scanning laser microscope comprising: a control unit that controls a deflection angle and moves at least one of an objective lens and a sample to perform focusing control so that luminance information of light from the sample is maximized.

According to a second aspect of the present invention, in the scanning laser microscope according to the first aspect, the light deflecting member is fixedly controlled to a deflection angle at which a laser beam is applied to a portion designated by the operation unit. Has functions.

According to a third aspect of the present invention, in the scanning laser microscope according to the first aspect, the control means synchronizes when a laser beam is applied to a portion designated by the operation unit during the deflection control of the light deflecting member. And a function of sampling the luminance information of the light from the sample.

[0018]

(1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. The same parts as those in FIG. 7 are denoted by the same reference numerals, and detailed description thereof will be omitted. FIG. 1 is a configuration diagram of a scanning laser microscope.

The controller 30 deflects the first galvanometer mirror 3 to scan the light beam 2 in, for example, the X direction, and deflects the second galvanometer mirror 9 to drive the light beam 2.
Is scanned in the Y direction, for example, and at the time of automatic focusing, the Z stage 19 is driven to move the surface of the sample 13 relative to the objective lens 4 in the optical axis direction (Z direction). When the luminance information output from the detector 17 is taken in, the Z position at which the intensity of the reflected beam is maximized is determined as shown in FIG. 8, and AF stage operation information is issued to the Z stage 19 to reach the in-focus position. It has a function of controlling the movement of the Z stage 19 in the Z direction.

The control unit 30 is connected to an operation unit 31 for instructing a region on the sample 13 where a focused image is desired to be obtained. A function of a luminance information acquisition unit 32 that receives information on a part where a focused image is to be obtained and acquires luminance information on image data corresponding to the designated part is provided.

The luminance information acquisition section 32 controls the deflection angle of the light beam 2 to be irradiated on the designated portion on the surface of the sample 13 by a first angle.
And a function of performing the fixed control of the second galvanometer mirrors 3 and 9. More specifically, each deflection angle of the first and second galvanometer mirrors 3 and 9 corresponds to a voltage value of a sinusoidal AC voltage applied as shown in FIG. The point is scanned at the center of the visual field of the monitor 22. However, if the pixel position of the portion where it is desired to obtain a focused image on the surface of the sample 13 specified by the operation unit 31 is, for example, (i, j), the luminance information acquisition unit 32 sets the pixel position (i, j) The first corresponding to
And the number of sampling clocks (I, J) of the second galvanometer mirrors 3 and 9 are obtained, and the application of the voltage value of the I-th sampling clock number in the AC voltage to the first galvanometer mirror 3 is instructed. The second galvanomirror 9 has a function of instructing the application of the voltage value of the J-th sampling clock number in the AC voltage to fix and control each deflection angle of the first and second galvanomirrors 3 and 9. ing.

Next, the operation of the microscope configured as described above will be described. A target portion for obtaining a focused image in the microscope field of view with respect to the operation unit 31, for example, the surface 13b of the sample 13
When the upper pixel position (i, j) is specified, the luminance information acquisition unit 32 of the control unit 30 transmits the sample 1 specified by the operation unit 31.
The number of sampling clocks (I, J) of the first and second galvanomirrors 3, 9 corresponding to the pixel position (i, j) of the part where the in-focus image is desired to be obtained on the three surfaces is obtained.

Thereafter, the luminance information acquisition unit 32 instructs the first galvanomirror 3 to apply the voltage value of the I-th sampling clock number in the AC voltage, and
Is instructed to apply the voltage value of the J-th sampling clock number in the AC voltage to the galvanomirror 9.

Thus, the first galvanomirror 3 is
The deflection angle corresponding to the voltage value of the I-th sampling clock is fixedly controlled and tilted in the direction of irradiating the light beam 2 to the X-coordinate of the part where the in-focus image is to be obtained. The light beam 2 is tilted in the direction of irradiating the light beam 2 to the Y coordinate of the part where the in-focus image is desired to be obtained, being fixedly controlled to the deflection angle corresponding to the voltage value of the number of sampling clocks.

In this state, the light beam 2 output from a laser light source (not shown), which is equivalently regarded as a point light source, enters the beam splitter 1. This light beam 2
Is transmitted and reflected by the beam splitter 1, and the transmitted light beam 2 is incident on the first galvano mirror 3.

The first galvanometer mirror 3 deflects the light beam 2 in the direction of illuminating the same X coordinate as the pixel position (i, j) of the target portion where a focused image of the surface of the sample 13 is to be obtained. The scanned light beam 2 passes through the two pupil transmission lenses 7 and 8 and enters the second galvanometer mirror 9 arranged at the pupil position. The second galvanometer mirror 9 deflects the light beam 2 in the direction of illuminating the same Y coordinate as the pixel position (i, j) of the target portion where a focused image of the sample 13 is desired to be obtained.

However, the light beam 2 fixedly polarized in the X and Y directions by the first and second galvanometer mirrors 3 and 9 passes through the pupil projection lens 10 and the imaging lens 11 and enters the pupil 12 of the objective lens 4. Then, the objective lens 4 generates point-like light limited by diffraction on the surface of the sample 13 and irradiates the point-like light only to a target portion on the surface of the sample 13.

The reflected beam from the sample 13 surface travels in the same path as the light beam 2 incident on the sample 13 surface and returns to the beam splitter 1, and the reflected beam reflected by the beam splitter 1 is a detection beam. It becomes 14. The detection beam 14 is detected by the detector 17 via the condenser lens 15 and the pinhole 16.

The control section 30 takes in the luminance information output from the detector 17 and sets the Z value at which the intensity of the reflected beam becomes maximum.
The position is determined, and the Z stage 19 is moved to the in-focus position to focus on the center of the visual field, that is, the surface 13 of the sample 13.
b where a desired part to obtain a focused image / pixel position (i,
j) An image 21 focused on｝ is displayed on the monitor 22.

As described above, in the first embodiment, when the operation unit 31 is instructed to obtain a focused image on the surface of the sample 13, the brightness information acquisition unit 3 of the control unit 30
In the microscope 2, the deflection angles of the first and second galvanometer mirrors 3 and 9 are fixedly controlled so that the light beam 2 is irradiated to a portion on the surface of the sample 13 where a focused image is to be obtained. It is possible to easily obtain a focused image at the specified portion {pixel position (i, j)} on the surface 13b of the sample 13. In this way, if a site on the surface 13b of the sample 13 is indicated, a focused image of this site can be easily obtained, so that the center of the surface of the sample 13 can be obtained even if the measurement target is small in the field of view of the microscope. There is no need for high-precision XY stage, and there is no need for expensive high-precision XY stage.

Further, the step of the sample can be quickly measured by applying the first embodiment. For example, FIG.
Is an external view of the sample 40 having a step, and FIG. 2B shows an image in the visual field of the microscope when the sample 40 is observed with a microscope. Microscope visual field 41 when observing this sample 40
The step between these A and B points can be quickly obtained from the difference between the positions of the respective Z stages 19 at the time of focusing at arbitrary two points A and B in the above.

Further, when measuring a very small step in which the magnitude of the field curvature aberration in the microscope field of view cannot be ignored,
By correcting the step measurement value in advance with the data of the field curvature amount for each objective lens, more accurate step measurement can be performed.

Therefore, the step between any two points in the visual field of the microscope can be easily measured without moving the XY stage. (2) Next, a second embodiment of the present invention will be described. In the second embodiment, the first and second galvanometer mirrors 3 and 9 in the scanning laser microscope shown in FIG. 1 are respectively replaced with light deflection mechanisms (for X-direction scanning and Y-direction scanning) shown in FIG. It has been replaced. The configuration of the entire scanning laser microscope is the same as that of FIG. 1, and a detailed description thereof will be omitted.

Each of these light deflection mechanisms for scanning in the X and Y directions changes the direction of the first or second galvanometer mirrors 3 and 9 itself, and is connected to the rotation shaft of the pulse motor 50 via a power transmission mechanism 51. The galvanomirror holding part 52 is connected. The power transmission mechanism 51 includes a pulley 56 connected to the rotation shaft of the pulse motor 50, a pulley 53 connected to the galvanomirror holding component 52, and a belt 54 hung between the pulleys 56 and 53. And a base 55 for fixing the pulse motor 50 and rotatably supporting the galvanomirror holding component 52. Further, the galvanomirror holding component 52 is instructed relative to the base 55 so as to be rotatable about the rotation axes of the mirrors 3a, 9a of the first or second galvanomirrors 3, 9, and these galvanomirrors. 3, 9 themselves are held.

On the other hand, the control unit 30 scans the light beam 2 in the X and Y directions by deflecting and driving the first and second galvanometer mirrors 3 and 9 as described above. The luminance information output from the sample 17 is taken in, and the Z stage 1 is set so that the intensity of the reflected beam from the sample 13 is maximized.
9 is controlled to move in the Z direction, and a function of displaying a focused image at that time on the monitor 22 is provided.

When the control unit 30 receives information on a part on the sample 13 surface on which the user wants to obtain a focused image specified by the operation unit 31, the control unit 30 sends the information to the designated part on the sample 13 surface on which the focused image is to be obtained. It has a function of stopping and controlling the first and second galvanometer mirrors 3 and 9 so as to have a deflection angle for irradiating the light beam 2.

Further, the control unit 30 calculates the current deflection angles of the galvanomirrors 3 and 9 and the focused image on the surface of the sample 13 based on the number of sampling clocks for the first and second galvanomirrors 3 and 9. It has a function of obtaining an offset angle with respect to a deflection angle for illuminating a desired portion, and issuing a command to the pulse motor 50 to rotate the first or second galvanometer mirror 3 or 9 itself by the offset angle. are doing.

When such a light deflecting mechanism is used, when the operation unit 31 is instructed to specify a target portion within the visual field of the microscope, for example, a pixel position (i, j), the control unit 3
0 illuminates the current deflection angle of these galvanomirrors 3 and 9 and the pixel position (i, j) where it is desired to obtain a focused image based on the respective sampling clock numbers for the first and second galvanomirrors 3 and 9. And an instruction to rotate the first or second galvanomirrors 3 and 9 by the offset angle is issued to the pulse motor 50.

When the pulse motor 50 rotates, the rotation is transmitted through the power transmission mechanism to the galvanomirror holding component 5.
The first and second galvanometer mirrors 3 and 9 integrated with the galvanometer mirror holding component 52 are rotated to a predetermined deflection angle. At this time, since no voltage is applied to the galvanometer mirror, the mirror faces the neutral position (front). When the deflection angle of the first or second galvanometer mirror 3 or 9 becomes an angle for illuminating the pixel position (i, j) for which a focused image is to be obtained,
A stop command is issued from the control unit 30 to the pulse motor 50, and the integral rotation of the galvanomirror holding component 52 and the first or second galvanomirrors 3, 9 stops.

In the same manner as above, the first galvanomirror 3 fixedly deflects the light beam 2 in the direction of illuminating the same X coordinate as the pixel position i of the target portion where the in-focus image of the sample 13 is desired to be obtained. Then, the second galvanometer mirror 9 deflects the light beam 2 in the direction of illuminating the same Y coordinate as the pixel position j of the target portion where the in-focus image of the sample 13 is desired to be obtained.

The first and second galvanomirrors 3,
The light beam 2 fixedly deflected in the X and Y directions by 9 passes through the pupil projection lens 10 and the imaging lens 11 to enter the pupil 12 of the objective lens 4, and arbitrarily divides the pixel position (i, j) Irradiated only on｝.

The reflected beam from the surface of the sample 13 travels in the same path as the light beam 2 incident on the surface of the sample 13 and is reflected by the beam splitter 1 to become a detection beam 14, and the detection beam 14 is collected. The light is detected by the detector 17 via the optical lens 15 and the pinhole 16.

The control unit 30 takes in the luminance information output from the detector 17 and sets the Z value at which the intensity of the reflected beam becomes maximum.
Determine the position. Next, the control unit 30 moves the Z stage 19 to the in-focus position and focuses at the center of the visual field, that is, a target part to obtain a focused image on the surface 13 b of the sample 13 ｛pixel position (i, j) ) Display on the monitor 22 the image 21 focused on｝.

As described above, according to the second embodiment, it goes without saying that the same effects as in the first embodiment can be obtained. (3) Next, a third embodiment of the present invention will be described. In the third embodiment, the method of taking in luminance information from the detector 17 in the scanning laser microscope shown in FIG. 1 is changed. The configuration of the entire scanning laser microscope is the same as that of FIG. 1, and a detailed description thereof will be omitted.

The brightness information acquisition unit 32 of the control unit 30
A function of sampling the luminance information detected by the detector 17 in synchronization with the light beam 2 being irradiated on the part specified by the operation unit 31 during the scanning control by the first and second galvanometer mirrors 3 and 9. have. That is, FIG. 5 is a diagram showing the sampling timing of the luminance information, and shows a voltage value change during scanning of the first and second galvanometer mirrors 3 and 9. These galvanometer mirrors 3, 9
Performs a full scan of one screen in a period T, and repeats this scan.

However, if the target portion in the microscope visual field designated by the operation section 31 for which a focused image is to be obtained is, for example, the pixel position (i, j), the first and second positions for illuminating this portion are to be obtained. Each deflection angle of the two galvanometer mirrors 3 and 9 is the first
The voltage value of the sampling clock number I with respect to the galvanomirror 3 (X direction), the second galvanomirror (Y direction)
9 corresponds to the voltage value of the sampling clock number J.

Accordingly, the control unit 30 fetches the luminance information from the detector 17 when the number of sampling clocks is I for the first galvano mirror 3 and the number of sampling clocks J is for the second galvanomirror 9. The Z position at which the intensity of the reflected beam is maximized is determined, and the Z stage 19 is moved to the in-focus position to focus at the center of the field of view, that is, the target site on the surface of the sample 13 ｛the pixel position (i. , J)} on the monitor 22 to display the image 21 focused on.

With such a configuration, the light beam 2 is scanned in the X direction by the first galvanometer mirror 3, and the second
When the light beam 2 is scanned in the Y direction by the galvanomirror 9, when the operation unit 31 designates a target part, such as a pixel position (i, j), in which the in-focus image is to be obtained in the microscope field of view, When the number of sampling clocks for the first galvanomirror 3 becomes I and the number of sampling clocks for the second galvanomirror 9 becomes J, the control unit 30 takes in luminance information from the detector 17 and determines that the intensity of the reflected beam is maximum. Is determined, and the Z stage 1 is moved to the in-focus position.
9 is moved to focus on the center of the visual field, ie, the sample 1
3 where the in-focus image is desired to be obtained / pixel position (i,
j) An image 21 focused on｝ is displayed on the monitor 22.

As described above, according to the third embodiment,
During scanning in the X and Y directions by the first and second galvanometer mirrors 3 and 9, an in-focus image of an arbitrary part can be obtained, whereby a resonance type galvanometer mirror that cannot be stopped at an arbitrary deflection angle can be obtained. It is also effective when used.

The present invention is not limited to the first to third embodiments, but may be modified as follows. For example, in the first to third embodiments, an example in which the present invention is applied to a reflection type laser microscope has been described. However, the present invention can also be applied to a transmission type laser microscope which detects transmitted light of the sample 13.

[0051]

As described in detail above, claims 1 to 5 of the present invention.
According to 3, it is possible to provide a scanning laser microscope capable of performing an automatic focusing operation at an arbitrary part in the visual field. According to a third aspect of the present invention, there is provided a scanning laser capable of performing an automatic focusing operation at an arbitrary position in a field of view even when a resonance type galvanometer mirror which cannot be stopped at an arbitrary deflection angle is used. A microscope can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of a scanning laser microscope according to the present invention.

FIG. 2 is a diagram showing stop control of each galvanomirror when irradiating a laser beam on a designated portion where a focused image on a sample surface is desired to be obtained on the microscope.

FIG. 3 is a view for explaining step measurement of a sample using the microscope.

FIG. 4 is a configuration diagram of a light deflection mechanism showing a second embodiment of the scanning laser microscope according to the present invention.

FIG. 5 is a diagram illustrating a sampling timing of luminance information in a control unit according to a third embodiment of the scanning laser microscope according to the present invention.

FIG. 6 is a configuration diagram of an optical system of a conventional scanning laser microscope with an automatic focusing function.

FIG. 7 is a functional block diagram showing an automatic focusing function.

FIG. 8 is a diagram showing the relationship between the Z position (in the direction of the optical axis) and the intensity of the reflected beam from the sample surface.

[Explanation of symbols]

 1: beam splitter, 3: first optical deflector, 4: objective lens, 7, 8: pupil transmission lens, 9: second deflector, 10: pupil projection lens, 11: imaging lens, 13: sample Reference numeral 15: condenser lens, 16: pinhole, 17: detector, 18: XY stage, 19: Z stage, 22: monitor, 30: control unit, 31: operation unit, 32: luminance information acquisition unit.

Claims (3)

[Claims] 1. A laser light source, an objective lens for condensing laser light from the laser light source on a sample surface, and a laser light which is arranged at a position conjugate with a pupil position of the objective lens and deflects the laser light entering the objective lens A light deflecting member that scans the sample surface by scanning, a detector that detects light from the sample, and a monitor that displays an image based on an image signal detected by the detector. In a laser microscope, an operation unit for instructing a site on the sample surface where a focused image is desired to be obtained, and a deflection angle of the light deflecting member is controlled so that the laser beam is applied to the site instructed by the operation unit. A scanning laser microscope comprising: a control unit that controls focusing by moving at least one of the objective lens and the sample so that luminance information of light from the sample is maximized. 2. The light deflecting member has a function of fixing and controlling the light deflecting member at a deflection angle at which a portion specified by the operation unit is irradiated with the laser light. 2. The scanning laser microscope according to 1. 3. The method according to claim 1, wherein the control unit is configured to sample luminance information of the light from the sample in synchronization with the irradiation of the laser beam on a portion designated by the operation unit during the deflection control of the light deflecting member. 2. The scanning laser microscope according to claim 1, wherein the scanning laser microscope has a function of performing the following operations.