JP2006317798A - Microscope apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope apparatus capable of reducing the time for initialization operation. <P>SOLUTION: The microscope apparatus 1 has a driving mechanism 8 for moving an objective lens 5 or a specimen mounting stand 11 in the direction of the optical axis; a sensor detection member 33 fixed to the objective lens 5 or the specimen-mounting stand 11; a first sensor 30, which detects the sensor detection member 33 at a moving limit, in a direction in which the the objective lens 5 and the specimen-mounting stand 11 separate; a second sensor 32 which detects the sensor detection member 33 at a moving limit, in a direction in which the the objective lens 5 and the specimen-mounting stand 11 approach; a third sensor 31, which detects the sensor detection member 33 in a halfway position within a moving range defined by the sensors 30, 32; and a processing section 35 which controls the driving mechanism 8, based on a signal from at least one of the first to third sensors 30-32, wherein the processing section 35 determines the operation of the driving mechanism 8 in initialization operation, according to the signal of the first to third sensors 30-32 output at the beginning of the initialization operation. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a microscope apparatus, and more particularly to a microscope apparatus that performs an initialization operation when power is turned on.

  Normally, when the power source of the electric microscope is turned on, a command is first sent from the microscope processing unit to the focusing unit or the driving mechanism of the specimen mounting stage to perform the initialization operation. The initialization operation refers to an operation that always drives the focusing unit or the sample mounting stage to the origin position after the power is turned on, and returns to the position when the power is turned on after the origin position is detected. At this time, in the microscope processing unit, the number of pulses for operating the driving mechanism from the driving start position of the focusing unit or the sample mounting stage when the power is turned on to the origin position is measured, and by driving to the origin position, The current position of the focusing unit or specimen mounting stage when the power is turned on can be known. After detecting the origin position, it is possible to return to the original position depending on the number of measured pulses. By performing such an initialization operation, the address of the current position can be managed.

In conventional inverted microscopes and upright microscopes, the specimen is as thin as a slide glass or glass bottom dish, and therefore the driving range of the focusing section or specimen placement stage is about 40 mm. For example, when the driving speed is 2.0 mm / sec, the focusing position or the sample mounting stage at the time of turning on the power is closest to the sample, and the origin position is farthest from the sample, It takes about 40 seconds to complete the initialization operation.
An example is disclosed in which a focusing range is always set constant by operating two sensors that set a movement limit and a sensor that sets a search range for focusing when the specimen is thick ( For example, see Patent Document 1.)
Japanese Utility Model Publication No. 6-25820

  However, in a microscope in which the specimen is not a thin specimen such as a slide glass or a glass bottom dish but a small animal such as a mouse or a rat is observed, the driving range of the focusing unit or specimen mounting stage is at least 80 mm. A degree is required. In addition, when observing a specimen that is larger than a small animal, the driving range is further widened. When the drive range is widened, there is a problem that the time required for the initialization operation when the power is turned on becomes further longer. For example, even if the driving condition is the same as that when the driving range is 40 mm, when the driving range becomes 80 mm, it takes twice as much as about 80 seconds.

  This is limited to the search range for focusing, and the initialization operation takes a long time. Further, since the search range is made constant by operating the position of the sensor for setting the search range, there is also a problem that it takes time and effort to operate the sensor.

  The present invention has been made in view of the above circumstances, and a microscope capable of shortening the initialization operation time by limiting the drive range of the drive mechanism of the focusing unit or the specimen mounting stage in the initialization operation. An object is to provide an apparatus.

In order to achieve the above object, the present invention provides the following means.
The present invention provides a driving mechanism for moving an objective lens or a sample mounting table in the optical axis direction, a sensor sensing member fixed to either the objective lens or the sample mounting table, and a direction in which the objective lens and the sample mounting table are separated from each other. A first sensor for detecting a sensor sensing member at a movement limit; a second sensor for detecting a sensor sensing member at a movement limit in a direction in which the objective lens and the specimen mounting table are close to each other; the first sensor; And a third sensor for detecting a sensor sensing member at a midpoint of a movement range defined by the second sensor, and controlling the drive mechanism based on a signal from at least one of the first to third sensors. A processing unit that determines the operation of the drive mechanism in the initialization operation according to the signals of the first to third sensors output at the beginning of the initialization operation. To provide a mirror device.

  According to the present invention, the operation of the drive mechanism in the initialization operation is determined depending on which of the first to third sensors the sensor signal output at the beginning of the initialization operation is not necessary. It is possible to prevent the operation from being performed, shorten the initialization operation, and start observation quickly. In other words, the positional relationship between the objective lens and the sample mounting table at the start of the initialization operation is often arranged between the farthest position and the closest position. It is performed in a direction in which the mounting table is separated or approached. In the present invention, by arranging the third sensor between the first sensor and the second sensor, the initialization operation starts in the direction away from these sensors in the immediate vicinity of the first and second sensors. Even if it is done, it is not necessary to operate the drive mechanism to the position where the farthest opposite sensor outputs the detection signal, and the initialization operation can be shortened.

In the above invention, the processing unit may determine the driving direction of the driving mechanism during the initialization operation.
With this configuration, the driving direction of the driving mechanism at the time of initialization can be determined by the sensor signal, the driving distance is shortened, the initialization operation is shortened, and observation can be started quickly. It becomes possible.

In the above invention, when the first sensor detects the sensor sensing member first by driving the drive mechanism in a direction in which the objective lens and the specimen are separated during the initialization operation. The first sensor position may be the origin position, and in the case of the third sensor, the first sensor position may be the origin by subtracting the distance from the third sensor position to the origin position.
In this way, unnecessary driving is prevented, the initialization operation is shortened, and observation can be started quickly.

In the above invention, the second sensor detects the sensor sensing member first by driving the driving mechanism in a direction in which the objective lens and the specimen are close to each other during the initialization operation. In some cases, the distance from the second sensor position to the origin position is subtracted to set the first sensor position as the origin, and in the case of the third sensor, the distance from the third sensor position to the origin position is subtracted. Thus, the first sensor position may be the origin.
In this way, unnecessary driving is prevented, the initialization operation is shortened, and observation can be started quickly.

Moreover, in the said invention, the said process part is good also as restrict | limiting the drive range of the said drive mechanism between the said 3rd sensor and one of the said 1st or 2nd sensor.
In this way, by determining the drive direction of the drive mechanism at the time of initialization based on the sensor signal, the driving distance is shortened, the initialization operation is shortened, and observation can be started quickly. Become.

Moreover, in the said invention, the said process part is good also as changing the drive direction of the said drive mechanism at the time of initialization operation | movement.
By doing so, it is possible to drive in any direction desired by the user without being limited to the sensor signal, and it is possible to perform the initialization operation more efficiently.

  According to the microscope apparatus of the present invention, by limiting the drive direction or drive range, the time required for the initialization operation can be shortened, and the observation can be started quickly.

Hereinafter, a microscope apparatus 1 according to a first embodiment of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 shows the overall configuration of a microscope apparatus 1 according to the present embodiment.

  As shown in FIG. 1, the microscope apparatus 1 according to the present embodiment is, for example, a laser scanning microscope 1 and includes a laser light source 2 that emits laser light and a photodetector 3 that detects observation light from a sample A. , A measurement head 6 including an objective lens unit 5 brought into contact with the sample A, an optical fiber 7 connecting the optical unit 4 and the measurement head 6, and a drive mechanism for driving the measurement head 6. 8, a control device 9 that controls the drive mechanism 8, the optical unit 4, and the measurement head 6, and a monitor 10 that displays an image detected by the photodetector 3. In the figure, reference numeral 11 is a stage on which the sample A is placed, reference numeral 12 is a cable connecting the measuring head 6 and the control device 9, and reference numeral 13 is a cable connecting the drive mechanism 8 and the control device 9.

  The optical unit 4 includes a collimating lens 14 that collimates the light emitted from the laser light source 2, a condensing lens 15 that condenses the parallel light on the end surface 7 a of the optical fiber 7, laser light (excitation light), and observation. A dichroic mirror 16 for branching light (fluorescence) and a condenser lens 17 for condensing the branched fluorescence to the photodetector 3 are provided. The photodetector 3 is, for example, a photomultiplier tube (PMT).

  The measuring head 6 is scanned with a collimator lens 18 that converts laser light propagated in the optical fiber 7 into parallel light, and an optical scanning unit 19 that scans the parallel laser light in a two-dimensional direction. A pupil projection optical system 20 that collects the collected light to form a first intermediate image B, a first imaging lens 21 that converts laser light that forms the first intermediate image B into parallel light, and parallel light A second imaging lens 22 for condensing the laser light thus formed to form a second intermediate image C, and an objective lens 23 for re-imaging the laser light of the second intermediate image C on the sample A. I have. The collimating lens 18, the optical scanning unit 19, the pupil projection optical system 20, the first imaging lens 21 and the second imaging lens 22 are housed in a housing 24, and the objective lens 23 is detachable from the housing 24. The objective lens unit 5 is housed in the objective lens unit 5. In the present embodiment, the measuring head 6 is connected via the optical fiber 7, but the same effect can be obtained even if the measuring head 6 is directly connected without using the optical fiber 7.

  The optical scanning unit 19 is, for example, a so-called proximity galvanometer mirror in which two galvanometer mirrors 19a and 19b that are swung around one axis are arranged close to the pupil conjugate plane of the objective lens and the two axes are orthogonal to each other. is there. The optical scanning unit 19 is connected to the control device 9 by a cable 12 and can be swung at high speed around two orthogonal axes in response to a command from the control device 9. Thereby, the laser beam can be scanned over a predetermined region on the sample A by shaking the laser beam incident on the galvanometer mirrors 19a and 19b over a predetermined angular range.

  The drive mechanism 8 includes a base 25, a linear guide 26 fixed to the base 25, a slider 27 supported so as to be movable in the vertical direction along the linear guide 26, and a motor for driving the slider 27 in the vertical direction. 28 and a ball screw 29. The slider 27 is fixed to the housing 24 of the measuring head 6. Therefore, by operating the motor 28 and rotating the ball screw 29, the measuring head 6 fixed to the slider 27 can be moved in the vertical direction.

  The drive mechanism 8 is provided with sensors 30 to 32 (first to third sensors) for detecting the position of the tip 5 a of the objective lens unit 5 included in the measurement head 6. The slider 27 is provided with a sensor sensing member 33.

  When the motor 28 is operated, the ball screw 29 rotates, the slider 27 moves up and down along the linear guide 26, and the sensor sensing member 33 provided on the slider 27 moves in the direction of arrow a in the figure. It is like that. The position of the tip 5a of the objective lens unit 5 included in the measurement head 6 is detected by the sensor sensing member 33 moving and sensing the sensor sensing member 33 by the respective sensors 30 to 32.

  For example, as shown in FIG. 2, the sensor 30 (first sensor) has a movement limit position (FAR) in a direction (FAR direction) in which the tip 5 a of the objective lens unit 5 included in the measurement head 6 is away from the sample A. Limit). Thus, when the sensor 30 senses the sensor sensing member 33, a signal is sent to the processing unit 35, and a signal is sent from the processing unit 35 to the motor 28 so that the motor 28 stops. Further, for example, the sensor 32 (second sensor) is installed at a movement limit position (NEAR limit) in a direction (NEAR direction) in which the tip 5a of the objective lens unit 5 included in the measurement head 6 is close to the sample A. Yes. Thus, when the sensor 32 senses the sensor sensing member 33, a signal is sent from the processing unit 35 to the motor 28 so that the motor 28 is stopped.

  The control device 9 includes an operation unit 34 and a processing unit 35. The operation unit 34 includes, for example, a dial 36 that is rotated by an observer. For example, when the dial 36 is turned to the right, a command to lower the focal position B is sent to the processing unit 35, and when it is turned to the left, a command to raise the focal position B is sent to the processing unit 35. Yes.

The processing unit 35 controls the operation of the optical scanning unit 19 and the optical unit 4 in the measuring head 6 and the operation of the drive mechanism 8.
Specifically, the processing unit 35 is configured to two-dimensionally scan the laser light from the laser light source 2 by sending deflection angle commands to the two galvanometer mirrors 19a and 19b. The processing unit 35 is configured to output commands such as laser light output, stop, and light intensity adjustment to the laser light source 2 in the optical unit 4. Further, the processing unit 35 records a detection signal sent from the photodetector 3 in the optical unit 4 in association with the scanning position of the laser beam by the galvanometer mirrors 19a and 19b, thereby forming a two-dimensional image. Are output to the monitor 10.

  Further, the processing unit 35 always reads the state of each of the sensors 30 to 32, and when the sensors 30 to 32 sense the sensor sensing member 33, a sensor signal is sent to the processing unit 35. Yes.

The operation of the microscope apparatus 1 according to this embodiment configured as described above will be described below.
According to the laser scanning microscope 1 according to the present embodiment, the laser light emitted from the laser light source 2 is incident on the optical fiber 7 by the collimating lens 14 and the condenser lens 15, propagates in the optical fiber 7, and collimates. The light enters the lens 18. In the collimating lens 18, the laser light is converted into parallel light and is incident on the optical scanning unit 19. The galvanometer mirrors 19 a and 19 b are swung over a predetermined angle range, thereby deflecting the incident laser light within the predetermined angle range and directing it toward the pupil projection optical system 20.

  The laser light incident on the pupil projection optical system 20 once forms the first intermediate image B, then enters the first image forming lens 21 to become parallel light, and enters the second image forming lens 22. Incident. The laser light is condensed by the second imaging lens 22 and is incident on the objective lens 23 in the objective lens unit 5 while forming the second intermediate image C. The laser light incident on the objective lens 23 is re-imaged by the objective lens 23 at a position away from the tip 5a of the objective lens unit 5 by a distance (working distance) determined by each optical system 18, 20-23. .

  When the sample A is irradiated with the laser light, the fluorescent material contained in the sample A is excited by the laser light to generate fluorescence. The generated fluorescence returns the same path as the incident path via the objective lens 23, the second imaging lens 22, the first imaging lens 21, the pupil projection optical system 20, the galvanometer mirrors 19a and 19b, and the collimating lens 18. The light is condensed on the end surface 7 b of the optical fiber 7 by the collimating lens 18. That is, the re-imaging position D by the objective lens 23, that is, the focal position D of the laser scanning microscope 1 according to the present embodiment and the end face 7 b of the optical fiber 7 in the housing 24 are conjugate positions. Therefore, the end face 7 b of the optical fiber 7 functions as a confocal pinhole, and only the return light emitted from the focal position D is incident on the optical fiber 7.

  The fluorescence propagating through the optical fiber 7 and returning to the optical unit 4 is separated from the laser light by the dichroic mirror 16 and detected by the photodetector 3 by the condenser lens 17. The image signal output from the photodetector 3 is displayed on the monitor 10 by image processing in the processing unit 35.

  Next, the initialization operation of the microscope apparatus according to the present embodiment will be described with reference to FIGS. Table 1 shows the logic of the sensor signals of the sensors 30 to 32.

  FIG. 2 shows the relationship between the sensors 30 to 32 and the sensor sensing member 33 according to this embodiment. In the present embodiment, the sensor 30 is the FAR limit position of the driving range (here, 80 mm) of the tip 5a of the objective lens unit 5 included in the measurement head 6, and the sensor 32 is the tip of the tip 5a of the objective lens unit 5. At the NEAR limit position of the drive range, the sensor 31 is at the center position of the drive range of the tip 5a of the objective lens unit 5 included in the measurement head 6 (40 mm from the FAR limit position). Here, the FAR limit position is set as the origin position for address management.

  Further, when the sensors 30 to 32 used in the description of the present embodiment do not sense the sensor sensing member 33, the processing unit 35 always outputs an “H” signal to the processing unit 35 and senses the sensor sensing member 33. An “L” signal is output to 35.

The flowchart in FIG. 3 shows the processing procedure of the initialization operation in the present embodiment.
When a power source (not shown) of the microscope apparatus 1 is turned on (S1), first, whether or not the current position of the tip 5a of the objective lens unit 5 included in the measuring head 6 is the NEAR limit position (second sensor 32 position). Is determined (S2).
Since the position of the sensor 32 is at the NEAR limit position, if the sensor signal from the sensor 32 in the processing unit 35 is “L”, the sensor sensing member 33 is at the position of the sensor 32, and the objective included in the measurement head 6 is used. It can be determined that the current position of the tip 5a of the lens unit 5 is the NEAR limit position (S3). Since the NEAR limit position is 80 mm from the origin position, (current position−80 mm) is the position address of the origin position (S4).

If the sensor signal from the sensor 32 is not “L”, measurement of the movement amount N is started (S5).
Next, when the signal of the third sensor 31 becomes “L”, the tip 5a of the objective lens unit 5 included in the measurement head 6 is at the center position, and therefore, in order to detect an accurate position, the drive mechanism 8 is driven by one pulse in the NEAR direction (S6, S7). At this time, since the movement amount N increases by one pulse, N = N + 1 (S8). Here, if the signal of the sensor 31 becomes “H”, it means that the center position has been passed, so the driving is stopped and one pulse is driven in the opposite FAR direction (S9 to S11). On the other hand, if the signal of the sensor 31 is “L” in step S9, the operation returns to the operation of step S7, and the driving in the NEAR direction is repeated until the signal of the sensor 31 becomes “H”.

  In step S11, since the movement amount N is reduced by one pulse, N = N−1 (S12). Here, if the signal of the sensor 31 becomes “L”, the sensor sensing member 33 is at the position of the sensor 31, and the tip 5a of the objective lens unit 5 included in the measurement head 6 is at the center position of the driving range. Therefore, the drive is stopped (S13, S14). Since the current position is the center position of the drive range, (current position−40 mm) is the address of the origin position (S15).

  In step S13, if the signal of the sensor 31 is not “L”, the process returns to the operation of step S11, and the driving in the FAR direction is repeated until the signal of the sensor 31 becomes “L”. In step S15, since the address of the origin position is found, an operation of returning to the original position when the power is turned on is performed. Driving in the NEAR direction, the driving is stopped when the moving amount becomes N (S16 to S18).

  On the other hand, if the signal of the third sensor 31 is not “L” in step S6, the current position of the tip 5a of the objective lens unit 5 included in the measurement head 6 is the position of the first sensor 30 (FAR limit position). (S19). Here, if the signal of the first sensor 30 is “L”, the sensor sensing member 33 is at the position of the sensor 30, and the tip 5 a of the objective lens unit 5 included in the measurement head 6 is in the FAR limit of the driving range. Since it is in the position, the drive is stopped (S20). Now, since the FAR limit position is the origin position, the current position is the address of the origin position (S21). In step S21, since the address of the origin position is found, an operation of returning to the original position when the power is turned on is performed. Driving in the NEAR direction, the driving is stopped when the moving amount becomes N (S16 to S18).

  If the third sensor 31 is not “L” in step S19, one pulse is driven in the FAR direction (S22). At this time, since the movement amount N is reduced by one pulse, N = N−1 (S23). Here, if the signal of the sensor 31 becomes “L”, the sensor sensing member 33 is at the position of the sensor 31 and the current position is the center position, so the driving is stopped (S24, S14). Since the current position is the center position of the drive range, (current position−40 mm) is the address of the origin position (S15). As a result, the address of the origin position is known, and the operation of returning to the original position when the power is turned on is performed. Driving in the NEAR direction, the driving is stopped when the moving amount becomes N (S16 to S18).

  In the present embodiment, whether or not to drive to detect the origin position in the initialization operation after power-on is determined by the state of the sensor logic. In the case of driving, the third sensor 31 is provided so that the driving range can be divided in half, and the sensing member 33 is between the first and third sensors 30 and 31 when the power is turned on. The first sensor 30 is driven, the origin position is detected from the position of the first sensor 30, and if it is between the second and third sensors 32, 31, the third sensor 31 is reached. Driven to detect the origin position from the position of the third sensor 31. Further, when the sensors 30 to 32 are located, the origin position is detected without driving. As a result, the entire drive range is not driven when the power is turned on, the initialization operation is shortened, and observation can be started quickly.

In the present embodiment, the first to third sensors 30 to 32 are arranged in series and the number of the sensor sensing members 33 is one. However, as shown in FIG. The sensor 32 may be in series, the third sensor 31 may be in parallel with the first and second sensors 30 and 32, and the sensor sensing members 33a and 33b may be provided respectively. Table 2 shows the logic of each sensor signal at this time.
In the said embodiment, although the case where the sensors 30-32 were three was demonstrated, it is not limited to this, You may provide three or more sensors 30-32.

  In the present embodiment, the sensor 31 is provided at the central position, but it may be provided at an arbitrary position depending on the object such as the sample A or the magnification of the objective lens instead of the central position. Further, the position of the sensor 31 may be arbitrarily changed by the user.

  In the present embodiment, when the sensing member 33 is between the first and third sensors 30 and 31 when the power is turned on, the sensing member 33 is driven to the first sensor 30 and the origin position is determined by the position of the first sensor 30. However, the origin position may be detected from the position of the third sensor 31 by driving to the third sensor 31. Similarly, when the sensing member 33 is between the third and second sensors 31 and 32, the sensor is driven to the third sensor 31 and the origin position is detected from the position of the third sensor 31. The second sensor 32 may be driven and the origin position may be detected from the position of the second sensor 32. Furthermore, the user may arbitrarily set the sensors 30 to 32 that detect the driving direction and the origin.

  In the present embodiment, the driving direction of the driving mechanism is determined by the signals of the sensors 30 to 32. However, when driving in the direction approaching the sample A, the driving direction of the sample A that is not likely to be destroyed is changed. It is also possible to change the direction closer to the sample A. In addition, the user can arbitrarily set.

  Next, a microscope apparatus 1 according to the second embodiment of the present invention will be described. This embodiment is an example in which a function for limiting the drive range using the third sensor 31 is added to the microscope apparatus 1 described in the first embodiment, and a schematic diagram of the microscope apparatus 1 is the same as that of FIG. Therefore, we shall quote the same figure. The control of the initialization operation (S1 to S18) is the same as that in FIG. 3, but the operation after the initialization operation in FIG. 5 ends (S18) will be described with reference to the flowchart of FIG. The logic of each sensor signal is as shown in Table 3.

  After performing the initialization operation in the same manner as in the first embodiment, the user inputs the thickness of the sample A, so that the processing unit 35 determines that the thickness of the sample A is the second sensor 31 and the second sensor 31. It is determined whether the distance between the sensors is smaller than 40 mm (S25, S26). When the current position is between the third sensor 31 (40 mm from the origin position) and the first sensor 30 (origin position), the third sensor 31 (origin) is driven to the position of the third sensor 31. If it is between 40 mm from the position) and the second sensor 32 (80 mm from the origin position), the drive is stopped at that position (S27 to S29), and the FAR limit sensor is replaced with the first sensor 30. To the third sensor 31 (S30).

In the present embodiment, the FAR limit sensor is determined by the thickness of the sample A and the distance between the sensors.
When the thickness of the sample A is smaller than the distance between the third sensor 31 and the second sensor 32, it is not necessary to drive wider than the distance between the third sensor 31 and the second sensor 32. The driving range can be limited by switching the sensor 31 to the limit sensor. By limiting the range that does not need to be driven, the drive range is narrowed, unnecessary driving is avoided, and the driving time is further shortened.

  In the present embodiment, the FAR limit is switched from the first sensor 30 to the third sensor 31, but the NEAR limit may be switched from the second sensor 32 to the third sensor 31. Also, the user can arbitrarily set it.

  Further, in the present embodiment, it is possible to arbitrarily set not only the thickness of the sample A but also the type of the sample A, the magnification of the objective lens, and the like. In addition, the user can arbitrarily set.

  Next, a microscope apparatus 1 according to the third embodiment of the present invention will be described. This embodiment is an example in which a function for knowing the current position is added to the microscope apparatus 1 described in the first embodiment by the logic of the sensor signal. The schematic diagram of the microscope apparatus 1 is the same as FIG. The figure shall be cited. FIG. 6 shows the relationship between the sensors 30 to 32 and the sensor sensing member 33, and the control procedure will be described with reference to the flowcharts of FIGS.

  In the present embodiment, unlike the first embodiment, the first to third sensors 30 to 32 are not at the FAR limit, NEAR limit, and the center position of the driving range, but at arbitrary positions as shown in FIG. Is placed in.

  When the power supply (not shown) of the microscope apparatus 1 is turned on, measurement of the moving amount N of the tip 5a of the objective lens unit 5 included in the measurement head 6 is first started (S31, S32). Next, it is determined whether or not the current position of the tip 5a of the objective lens unit 5 included in the measurement head 6 is the position of the first sensor 30 (S33). If the current position of the tip 5 a of the objective lens unit 5 included in the measurement head 6 is the position of the first sensor 30, the signal of the sensor 30 becomes “L” and then the position of the second sensor 32. If the position of the second sensor 32 is determined, the signal of the sensor 32 becomes “L” (S34).

  Then, it is determined whether or not the current position of the tip 5a of the objective lens unit 5 included in the measurement head 6 is the third sensor 31 position (S35). Here, if it is the position of the 3rd sensor 31, the signal of the sensor 31 will be "L", and is considered to exist in the area of (ii) (S36). If it is not the position of the third sensor 31, the signal of the sensor is “H” and is considered to be in the section (iii) (S37).

  If it is not the position of the second sensor 32 in step S 34, the signal of the sensor 32 becomes “H”, and then it is determined whether it is the position of the third sensor 31. In this case, the signal of the sensor 31 becomes “L” (S38). If it is the position of the 3rd sensor 31, it will be in the area of (iv) (S39). In step S38, when the signal of the sensor 31 is “H”, it can be determined that the tip 5a of the objective lens unit 5 included in the measuring head 6 is in the NEAR limit position, and (current position−80 mm) is the address of the origin position. (S40, S41).

  If it is not the position of the first sensor 30 in step S33, the signal of the sensor 30 is “H”, and it is then determined whether or not it is the position of the second sensor 32. If so, the signal of the sensor 32 becomes “L” (S42). If it is the position of the 3rd sensor 31, the signal of the sensor 31 will be "L", and will exist in the area of (i) (S43, S44). In step S42, it is determined whether or not the second sensor 32 is “L”. If it is “H”, it can be determined that the position is the center position, and (current position−40 mm) is the origin position. It is set as an address (S45, S46). In step S43, if the position is not the third sensor 31 position, the sensor signal becomes “H” and it can be determined that the current position is the FAR limit position, and the current position is set as the address of the origin position (S47, S48).

  If it is determined in step S44 that the current position of the tip 5a of the objective lens unit 5 included in the measuring head 6 is in the section (i), the process proceeds to subroutine S441, and first, as shown in FIG. The motor 28 included in the mechanism 8 is driven by one pulse in the FAR direction (S49). At this time, since the moving amount N increases by one pulse, N = N + 1 (S50). Here, if the signal of the third sensor 31 is “H”, the driving is stopped and one pulse is driven in the opposite FAR direction (S51 to S53). On the other hand, if the signal of the third sensor 31 is “L”, the process returns to the operation of step S49, and the driving in the FAR direction is repeated until the signal of the sensor 31 becomes “H”.

  In step S53, since the movement amount N is reduced by one pulse, N = N−1 (S54). Here, if the signal of the sensor 31 is “L”, it means that the tip 5a of the objective lens unit 5 included in the measuring head 6 is at the FAR limit position of the driving range, so that the driving is stopped (S55, S56). ). Since the current position is the FAR limit position of the drive range, the current position is the position address of the origin position (S57).

  If the signal of the sensor 31 is not “L” in step S55, the process returns to the operation of step S53, and the driving in the FAR direction is repeated until the position where the signal of the sensor 31 becomes “L”. In step S57, since the origin position address is found, an operation of returning to the original position when the power is turned on is performed. Driving in the NEAR direction, the driving is stopped when the moving amount becomes N (S58 to S60).

  Similarly, if it is determined in step S37 that the current position of the tip 5a of the objective lens unit 5 included in the measuring head 6 is in the section (iii), the process proceeds to subroutine S371, as shown in FIG. First, the motor 28 included in the drive mechanism 8 is driven by one pulse in the FAR direction (S61). At this time, since the movement amount N increases by one pulse, N = N + 1 (S62). If the signal of the third sensor 31 is “L”, it can be determined that the tip 5a of the objective lens unit 5 included in the measurement head 6 is the center position of the driving range, stops driving, and (current position− 40 mm) is the origin position address (S63 to S65).

  On the other hand, if the signal of the third sensor 31 is “L”, the process returns to the operation of step S47, and the driving in the FAR direction is repeated until the position where the signal of the sensor 31 becomes “H”. Here, since the origin position address is found in step S63, an operation of returning to the original position when the power is turned on is performed. Driving in the NEAR direction, the driving is stopped when the moving amount becomes N (S64 to S66).

  If it is determined in steps S36 and S39 that the position of the tip 5a of the objective lens unit 5 included in the measuring head 6 is in the section (ii), (iv), the process proceeds to subroutine S361, as shown in FIG. First, the motor 28 included in the drive mechanism 8 is driven by one pulse in the NEAR direction (S69). At this time, since the movement amount N increases by one pulse, N = N + 1 (S70). Here, if the signal of the third sensor 31 is “H”, the driving is stopped, and one pulse is driven in the opposite FAR direction (S71, 72, 73). On the other hand, if the signal of the third sensor 31 is “L”, the process returns to the operation of step S69, and the driving in the FAR direction is repeated until the signal of the sensor 31 becomes “H”.

  In step S73, since the movement amount N is decreased by one pulse, N = N−1 (S74). If the signal from the sensor 31 is “L”, the driving is stopped (S75, S76). At this time, if the signal of the second sensor 32 is “L”, since the current position is the center position of the driving range, (current position−40 mm) is set as the address of the origin position (S77, S78). If the signal of the second sensor 32 is “H”, since the current position is the NEAR limit position, (current position−80 mm) is set as the address of the origin position (S79). In steps S78 and S79, since the address of the origin position has been determined, an operation of returning to the original position when the power is turned on is performed. Driving in the NEAR direction, the driving is stopped when the movement amount becomes N (S80 to S82).

In this embodiment, the initialization operation at power-on is determined by the sensor signal logic.
Based on the sensor signal logic, it is possible to determine where in the drive range the drive mechanism is always located, and by driving to the position where the logic of the sensor changes without driving to the origin position at the time of initialization, The position can be detected. As a result, the time until the end of the initialization operation when the power is turned on can be shortened, and observation can be started quickly.

In the present embodiment, the case of three sensors has been described. However, the present invention is not limited to this, and the same effect can be achieved with three or more sensors.
In this embodiment, the driving direction of the drive mechanism is determined by the sensor signal. However, when driving in the direction approaching the sample A, the sample A that is not likely to be destroyed approaches the driving direction from the sample A. It is also possible to change the direction. In addition, the user can arbitrarily set.

  In the present invention, the objective lens unit 5 is fixed to the casing 24 of the measuring head 6 and driven together with the measuring head 6 by the drive mechanism 8. Instead, the casing 24 of the measuring head 6 is used as a base. A new driving mechanism that drives the objective lens unit 5 relative to the housing 24 may be provided. Further, instead of driving the objective lens unit 5, a drive mechanism for driving the stage 11 may be provided.

In the present invention, the case where the present invention is applied to the laser scanning microscope apparatus 1 has been described. However, the present invention is not limited to this, and the present invention can be applied to any other type of microscope apparatus.
In any of the embodiments described in the present invention, various modifications can be made without departing from the gist thereof.

1 is an overall configuration diagram showing a microscope apparatus according to a first embodiment of the present invention. It is a figure explaining the positional relationship of the sensor and sensing member of the microscope apparatus of FIG. 3 is a flowchart showing a flow of initialization operation of the microscope apparatus of FIG. 1. It is a figure explaining the positional relationship of the sensor and sensing member of the microscope apparatus which concern on the 2nd Embodiment of this invention. 5 is a flowchart showing a flow of initialization operation of the microscope apparatus of FIG. 4. It is a figure explaining the positional relationship of the sensor and sensing member of the microscope apparatus which concern on the 3rd Embodiment of this invention. It is a flowchart which shows the flow of the initialization operation | movement of the microscope apparatus of FIG. It is a flowchart which shows the content of subroutine S441 of the flowchart of FIG. It is a flowchart which shows the content of subroutine S371 of the flowchart of FIG. It is a flowchart which shows the content of subroutine S361 of the flowchart of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microscope apparatus 5 Objective lens 8 Drive mechanism 11 Stage Specimen mounting base 30 1st sensor 31 3rd sensor 32 2nd sensor 33, 33a, 33b Sensor sensing member 35 Processing part

Claims (6)

A drive mechanism for moving the objective lens or the sample mounting table in the optical axis direction;
A sensor sensing member fixed to either the objective lens or the specimen mounting table;
A first sensor for detecting a sensor sensing member at a movement limit in a direction in which the objective lens and the specimen mounting table are separated from each other;
A second sensor for detecting a sensor sensing member at a movement limit in a direction in which the objective lens and the sample mounting table are close to each other;
A third sensor for detecting a sensor sensing member at an intermediate position in a movement range defined by the first sensor and the second sensor;
A processing unit that controls the drive mechanism based on a signal from at least one of the first to third sensors;
The microscope apparatus, wherein the processing unit determines the operation of the driving mechanism in the initialization operation in accordance with the signals of the first to third sensors output at the beginning of the initialization operation.   The microscope apparatus according to claim 1, wherein the processing unit determines a driving direction of the driving mechanism in an initialization operation.   When the processing unit drives the drive mechanism in a direction away from the objective lens and the sample during the initialization operation and first detects the sensor sensing member, the first sensor If the position is the origin position and the third sensor is the third sensor position, the distance from the third sensor position to the first sensor is subtracted to set the first sensor position as the origin position. The microscope apparatus described.   When the processing unit drives the driving mechanism in the direction in which the objective lens and the specimen are close to each other during the initialization operation and the sensor detecting member is first detected by the second sensor, Subtract the distance from the sensor position to the first sensor, the first sensor position as the origin position, if it is the third sensor, subtract the distance from the third sensor position to the first sensor, The microscope apparatus according to claim 1, wherein the first sensor position is an origin position.   5. The microscope apparatus according to claim 1, wherein the processing unit limits a drive range of the drive mechanism between the third sensor and one of the first and second sensors. .   The microscope apparatus according to any one of claims 1 to 4, wherein the processing unit is capable of changing a drive direction of the drive mechanism during an initialization operation.

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