JP2000037873A - Method and apparatus for manufacturing liquid-jet recording head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a long liquid-jet recording head whereby a plurality of element substrates can be temporalily positioned simultaneously en bloc and arranged accurately. SOLUTION: A plurality of element substrates 1 supplied onto a substrate tray 2 are butted against positioning pins by a temporary positioning member 11 in a noncontact method, thereby being temporarily positioned at the same time. Each of the temporarily positioned element substrates 1 is sucked and held by a suction finger of a transfer mechanism 5 and transferred over a base plate 3. Both end parts of the element substrate 1 are observed on the base plate 3 by an image-processing observation mechanism 6, image processed and positioned at last. Thereafter, the element substrates 1 are sequentially landed and arranged on the base plate 3. The plurality of element substrates can be temporarily positioned at the same time, contributing to an increase in tact of the apparatus. Moreover, an arrangement accuracy can be improved irrespective of a cutting accuracy of the element substrates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a liquid jet recording head used in a liquid jet recording apparatus or the like, and more particularly to a method for manufacturing a liquid jet recording head on a base plate on which a plurality of ejection energy generating elements are formed. The present invention relates to a method and an apparatus for manufacturing a long liquid jet recording head configured to be arranged in the following manner.

[0002]

2. Description of the Related Art A liquid jet recording head used in a liquid jet recording apparatus or the like has an element substrate (heater board) on which a plurality of ejection energy generating elements (for example, electrothermal conversion elements) are arranged at predetermined intervals. And a top plate having a plurality of discharge ports for discharging a recording liquid such as ink and a liquid flow path communicating with each of the discharge ports. The discharge energy generating element and the discharge ports and the liquid flow paths are accurately positioned. In the aligned state, the element substrate and the top plate are combined and joined, and the recording energy is applied to the recording liquid in the liquid flow path by the discharging energy generating element, so that the recording liquid is ejected as droplets from the discharge ports to print and record. Is performed. And the ejection energy generating element (electrothermal conversion element)
Formed on the element substrate with predetermined high precision using semiconductor manufacturing technology, the discharge port is similar to the discharge port plate provided on the front of the top plate by using an ultra-precision processing device such as a laser processing machine Is formed with a predetermined high precision.

In a liquid jet recording head, it is desired to use a multi-nozzle with a longer length in order to improve a printing speed of a recording apparatus.
It tends to be longer, such as eight nozzles. In order to cope with such an increase in length, an element substrate having a plurality of ejection energy generating elements is arranged on a plurality of base plates (bases), and a plurality of ejection ports and a plurality of liquid channels are provided thereon. The two top plates are joined to make a long liquid jet recording head.

As shown in FIG. 7, a long liquid jet recording head of this kind is configured such that an element substrate 40 on which a plurality of ejection energy generating elements 41 are formed has a base plate (base) made of a material such as metal or ceramics. A top plate 48 having a plurality of discharge ports 49 for discharging the recording liquid and a plurality of liquid flow paths (not shown) communicating with the respective discharge ports 49 is arranged and fixed on the table 42 in a plurality. It is made by joining. A wiring board 44 is bonded and adhered to the base plate 42 in the same manner as the element substrate 40, and the signal / power supply pads 45 on the wiring board 44 are
It is arranged so as to have a predetermined positional relationship with the upper power pad 43, the two pads 43 and 45 are connected to each other, and the wiring board 44 has a connector 46 for supplying an external printing signal and driving power. Installed.

[0005] In manufacturing such a long liquid jet recording head, a plurality of element substrates are temporarily positioned and then sequentially conveyed and arranged on a base plate. The provisional positioning of the substrate is performed by a method in which the element substrates are individually brought into contact with positioning pins or the like by a solid contact method by a mechanism such as a cylinder or the like.
As disclosed in Japanese Patent Application Laid-Open No. 162278/162, a method of arranging the end faces of the element substrates by abutting the element substrates arranged in advance, or as disclosed in JP-A-4-229278.
A method of forming a notch in a part of the unit of the element substrate and the top plate and abutting the notch against a reference on a base plate has been used.

[0006]

However, the prior art as described above has the following problems.

In the provisional positioning of the element substrates, since the element substrates are provisionally positioned one by one, the takt time of the device is reduced, and problems such as chipping on the element substrate due to the solid contact method are caused. Is more likely to occur. Further, since the mechanism uses a cylinder or the like, the cost becomes large and the size of the device itself becomes large.

Also, in the arrangement of the element substrates, the arrangement by the abutting method has a drawback that the cutting accuracy of the element substrate becomes the alignment accuracy as it is, and the reference abutting portion and the like are machined. Accuracy must be achieved, which is technically very difficult.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned unsolved problems of the prior art, and simultaneously and temporarily positions a plurality of element substrates simultaneously and accurately positions the plurality of element substrates. An object of the present invention is to provide a method and an apparatus for manufacturing a liquid jet recording head which can be arranged and can manufacture a long liquid jet recording head in a short time at low cost.

[0010]

In order to achieve the above object, a method of manufacturing a liquid jet recording head according to the present invention comprises sequentially arranging a plurality of element substrates having a plurality of ejection energy generating elements on a reference base plate. And a method of manufacturing a liquid jet recording head in which a top plate having a plurality of discharge ports and a plurality of liquid flow paths respectively communicating with the discharge ports is formed on the element substrate arranged on the base plate. A plurality of substrates are provisionally positioned at the same time, and each of the provisionally positioned element substrates is transported to a predetermined position on the base plate to perform final positioning on the base plate, and then the element substrates are sequentially arranged on the base plate. It is characterized by doing.

In the method of manufacturing a liquid jet recording head according to the present invention, the temporary positioning of the plurality of element substrates is preferably performed using a substrate tray having a plurality of temporary positioning positions provided with positioning pins serving as temporary positioning references. .

In the method of manufacturing a liquid jet recording head according to the present invention, it is preferable that a plurality of element substrates are simultaneously provisionally positioned by abutting the element substrates on positioning pins of a substrate tray by a non-contact method. In particular, a temporary positioning member having an air blow flow path and a vacuum flow path is disposed so as to face a substrate tray having positioning pins, and the element substrate is positioned on the substrate tray by air blowing and vacuum of the temporary positioning member. It is preferable that the temporary positioning of a plurality of element substrates be performed simultaneously.

In the method of manufacturing a liquid jet recording head according to the present invention, the transport of the element substrate onto the base plate is performed by a finger having a suction portion for sucking the element substrate. It is preferable that a landing detection sensor for detecting landing on the base plate is provided, and final positioning of the element substrate on the base plate is performed by image processing observation for simultaneously observing both ends of the element substrate. It is preferable to perform the measurement based on the measurement results of the system by moving two or more types of moving stages having different resolutions in parallel.

Further, in the manufacturing apparatus for a liquid jet recording head according to the present invention, a plurality of element substrates having a plurality of ejection energy generating elements are sequentially arranged on a base plate serving as a reference,
An apparatus for manufacturing a liquid jet recording head, wherein a top plate having a plurality of ejection openings and a plurality of liquid flow paths respectively communicating with the ejection openings is formed on a plurality of element substrates arranged on the base plate, A temporary positioning mechanism including a substrate tray having a plurality of temporary positioning positions having positioning pins serving as a temporary positioning reference, and a temporary positioning member having an air blow channel and a vacuum channel disposed opposite to the substrate tray. A mounting table drive mechanism for driving a movable mounting table for positioning and fixing the base plate in the element substrate arrangement direction, and transporting the temporarily positioned element substrate onto the base plate and moving and adjusting the element substrate in the element substrate arrangement direction. A transfer mechanism having a movable stage, and an element substrate transferred by the transfer mechanism on the base plate. Characterized by comprising an image processing for observation mechanism Judging.

In the apparatus for manufacturing a liquid jet recording head according to the present invention, the transport mechanism has a suction portion for sucking the element substrate, and detects that the element substrate sucked by the suction portion lands on the base plate. It is preferable that the moving stage that includes a finger provided with a landing detection sensor and that can move and adjust the finger in the element substrate arrangement direction is a high-resolution stage.

In the apparatus for manufacturing a liquid jet recording head according to the present invention, the image processing observation mechanism comprises a pair of image processing observation systems for simultaneously observing both end portions of the element substrate. It is preferable that the moving stage of the mechanism and the transfer mechanism be moved in the element substrate arrangement direction to perform final positioning of the element substrate.

[0017]

According to the method and apparatus for manufacturing a liquid jet recording head of the present invention, a plurality of element substrates having a plurality of ejection energy generating elements are simultaneously provisionally prepared by a non-contact method using compressed air blowing and vacuum. Positioning can be performed, and the provisional positioning mechanism can have a simple and low-cost structure, and also leads to an increase in tact time of the apparatus.

Further, when the element substrates are arranged on the base plate, both end faces of the element substrate can be observed at the same time, and the position of the element substrate can be corrected without being affected by the variation in the cutting of the element substrate or the cut surface. Becomes possible,
Sequence accuracy can be improved. In addition, by attaching a landing detection sensor to the finger that transports the element substrate, it is possible to transport and land without applying unnecessary force to the element substrate and without damaging the element substrate. Yield can be improved. The final positioning of the element substrate on the base plate is performed by moving two or more types of moving stages having different resolutions in parallel, so that the tact surface and the positioning accuracy can be improved.

[0019]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view schematically showing the configuration of a manufacturing apparatus for carrying out the method of manufacturing a liquid jet recording head according to the present invention.

In the apparatus for manufacturing a liquid jet recording head of the present invention, an element substrate (heater board) 1 on which a plurality of ejection energy generating elements (heating elements) are formed at predetermined intervals is temporarily placed on a substrate tray 2. A temporary positioning mechanism 4 for positioning (see FIGS. 2 and 3), a transport mechanism 5 for transporting and aligning the temporarily positioned element substrate 1 from the substrate tray 2 to the base plate (base) 3; Image processing observation mechanism 6 for observing element substrate 1 and base plate 3 on which a plurality of element substrates 1 are arranged
And a mounting table drive mechanism 8 for driving the movable mounting table 7 supporting the substrate tray 2 in the X direction.

As shown in FIGS. 2 and 3, a temporary positioning mechanism 4 for temporarily positioning the element substrate 1 includes a substrate tray 2 mounted on a movable mounting table 7 and a temporary positioning member 1.
The substrate tray 2 holds the element substrate 1 in the
A plurality of concave portions 12 formed in a rectangular shape larger than the element substrate 1 and having a depth of about 1/5 of the thickness of the element substrate 1 so as to be received one by one are arranged in a staggered pattern at an equal pitch,
It is preferable that the interval between the concave portions 12 is substantially equal to the pitch of the element substrates 1 arranged on the base plate 3. Each recess 12 has X positioning pins 13x and 2x for regulating the position of the element substrate 1 in the X and Y directions.
Each of the Y positioning pins 13y is provided.
Each recess 12 of the substrate tray 2 has an element substrate 1
After completion of the temporary positioning, a suction hole (not shown) for clamping the element substrate 1 to the temporary positioning position is provided.

The temporary positioning member 11 is for temporarily positioning each element substrate 1 in a non-contact manner, and is provided so as to be movable as shown in FIG. A plurality of air chambers 14 are arranged in a zigzag pattern so as to face the plurality of concave portions 12 arranged in a zigzag pattern on the substrate tray 2 (see FIGS. 3A and 3B).
As shown in FIG. 2B, these air chambers 14 are formed in a substantially rectangular shape larger than the concave portion 12 of the substrate tray 2, and holes and grooves for ejecting and sucking air are provided on each side thereof. Has been processed. That is, the air chambers 14 are connected to the air blow grooves 15b and 16b communicating with the air blow holes 15a and 16a for ejecting air, and the vacuum grooves 17b and 18b communicating with the vacuum holes 17a and 18a for sucking air. It is provided as follows. These air blow grooves 15b, 16
As shown in FIG. 3B, when the temporary positioning member 11 is superimposed on the substrate tray 2 and the air chambers 14 overlap the corresponding recesses 12, respectively, as shown in FIG. The air blow grooves 15b and 16b are arranged so as to face the positioning pins 13y and 13x of the recess 12, respectively, and the vacuum grooves 17b and 18b are positioned on the side of the recess 12 where the positioning pins 13x and 13y are arranged. They are arranged so as to face the grooves 15b and 16b, respectively. Therefore, a substantially closed space is formed by overlapping the concave portion 12 of the substrate tray 2 with the air chamber 14 of the positioning member 11, and the air blow grooves 15b, 16b and the vacuum groove 17 are formed.
When b and 18b are in contact with the upper surface of the substrate tray 2, an air flow path communicating with a substantially closed space is formed. By operating the air blow and the vacuum in each space, the element substrate 1 is floated by the air blow from the air blow grooves 15b and 16b and the vacuum through the vacuum grooves 17b and 18b, and the positioning pins 13x and 13y are moved. Then, as shown in FIG. 3B, the element substrate 1 can be temporarily positioned by abutting the positioning pins 13x and 13y. The air blow holes 15a and 16a are connected to an external air blow supply source via individually provided solenoid valves and electropneumatic regulators (not shown), and are controlled by voltage control in the respective electropneumatic regulators. It is configured such that the air pressure to be applied can be individually controlled. The vacuum holes 17a and 18a are also controlled by individually provided solenoid valves (not shown), and the degree of vacuum is constant for both. The operation timing of air blow and vacuum can be adjusted individually by each solenoid valve, and the air pressure of air blow,
It is preferable to appropriately change the operation timing of the air blow and the vacuum according to the size of the element substrate.

A regulating pin 19 made of resin is provided substantially at the center of the air chamber 14.
The element serves to regulate the floating of the element substrate 1 so that the element substrate 1 does not float and go over the positioning pins 13 when the element substrate 1 is provisionally positioned by air blow and vacuum.

As shown in FIGS. 1 and 4, the transport mechanism 5 has a finger 21 for sucking and holding the element substrate 1, and a Y stage 25 for moving the finger 21 in the Y direction. An X stage 26 for moving in the Z direction, a Z stage 27 for moving in the Z direction, and a θ stage 28 for rotating in the θ direction are provided. 3 to convey. The X stage 26 is configured as a high-resolution stage for accurately positioning the element substrate 1 on the base plate 3 as described later.

The finger 21 is provided with a suction portion 21a for sucking the element substrate 1 at a tip end thereof. The suction portion 21a is formed with a slit-shaped suction surface, and the entire surface thereof is damaged on the surface of the element substrate 1. It is preferable to coat with a tetrafluoroethylene resin or the like so as not to give. The finger 21 is rotatably supported by the stage at a substantially central portion thereof, and a small bearing is disposed at the rotating portion to reduce the resistance as much as possible. A pressing force adjusting spring 22 for adjusting the force applied to the suction portion 21 a of the finger 21.
Is provided on the opposite side of the suction portion 21a with the rotating portion interposed therebetween, and acts to pull up the other end side upward so as to urge the suction portion 21a downward. Also, behind the pressing force adjusting spring 22 of the finger 21, a landing for detecting that the suction portion 21 a has landed when the element substrate 1 is sucked or when the element substrate 1 held by suction is landed. A detection sensor 23 is provided. When the suction part 21a of the finger 21 moves by several microns when the suction part 21a of the finger 21 lands, the moving amount is amplified at the position of the landing detection sensor 23, and the suction is performed with a minimum pressurized amount. The landing of the portion 21a can be detected. In this embodiment, the pressing force adjusting spring 22 is 50 g / mm.
And the proximity sensor was used as the landing detection sensor 23, and the minimum pressurizing amount at that time was 4 μm. Also,
A contact type sensor such as a contact switch can also be used as the landing detection sensor, and the finger as the transport means of the element substrate 1 is not a rotary type that releases the force applied to the element substrate in the rotating direction at the time of landing, but is a linear type. It is also possible to use a guide or the like to release the force applied to the finger tip vertically upward.

As described above, by attaching the landing detection sensor 23 to the finger 21 for transporting the element substrate 1,
When the element substrate 1 is placed on the base plate 3 or when the element substrate 1 is sucked, the variation in the thickness of the base plate 3 and the variation in the thickness of the element substrate 1 can be absorbed. Can be sucked and landed on the base plate 3, and the element substrate 1 can be sucked and arranged without applying unnecessary force to the element substrate 1, so that the element substrate 1 is not damaged. I will not give.

The image processing observation mechanism 6 is provided with a pair of image processing observation systems 6a and 6b so that the element substrate 1 can be observed above the movable mounting table 7 on which the base plate 3 is positioned and fixed.
6a, and a pair of image processing observation systems 6
a and 6a are light sources 3 as shown in FIG.
1, CCD camera 32, half mirror 33, a pair of 45
° formed from the mirrors 34a, 34b, and the cut objective lens 35,
It is configured to simultaneously observe and image-process both end faces of the element substrate 1 that is sucked and held by the fingers 21 and conveyed. The pair of image processing observation systems 6a, 6a
Stage 6 in X, Y, Z, and θ directions
b, 6b (see FIG. 1), respectively, so that the pair of image processing observation systems 6a, 6a can be appropriately moved in the X direction to process element substrates 1 of various sizes. Have been. By using such an observation mechanism 6 for image processing, it is possible to simultaneously and non-contactly correct the positioning of the element substrate 1 in the θ direction and the positioning in the X and Y directions.

The movable mounting table 7 for positioning and fixing the base plate 3 is moved and adjusted in the X direction by a mounting table driving mechanism 8 as shown in FIGS. 1 and 6, and the movable mounting table 7 and the mounting table The driving mechanism 8 is constituted by a stage having a high moving speed but a low resolution, and is provided with a measuring device 9 such as a laser measuring device or a linear scale for measuring the position of the movable mounting table 7. .

Next, a method for temporarily positioning a predetermined number of element substrates and accurately arranging them on a base plate using the apparatus for manufacturing a liquid jet recording head configured as described above will be described.

First, the movable mounting table 7 is appropriately moved in the X direction from the position shown in FIG.
A predetermined number of element substrates 1 are supplied into the recess 12 of the substrate tray 2 and the base plate 3 is set on the movable mounting table 7 via a jig. At this time, the concave portion 12 of the substrate tray 2
As shown in FIG. 3A, the element substrate 1 supplied into the inside is located in the recess 12 in an irregular state.

After the substrate tray 2 is moved to a predetermined position by moving the movable mounting table 7, the plurality of element substrates 1 supplied on the substrate tray 2 are provisionally positioned. That is, the temporary positioning member 11 in which the air chamber 14 is formed is moved so as to cover the substrate tray 2. When the temporary positioning member 11 is placed on the substrate tray 2 and superposed, the recess 12 of the substrate tray 2 and the air chamber 14 of the positioning member 11 all overlap as shown in FIG. A plurality of substantially closed spaces are formed by the recess 12 and the air chamber 14, and the air blow grooves 15b and 16b and the vacuum grooves 17b and 1b are formed.
8b is in contact with the upper surface of the substrate tray 2 to form an air flow path. Thereafter, by operating the air blow and the vacuum in each space at an operation timing as shown in FIG. 3C, for example, the element substrate 1 in each space is provided with the air blow holes 15a, 16a and the air blow grooves. The air blow from the air blowers 15b and 16b and the vacuum through the vacuum holes 17a and 18a and the vacuum grooves 17b and 18b cause the air blows and moves, and as shown in FIG. Positioning is performed.

At this time, the length of the protrusion of the regulating pin 19 of the air chamber 14 is adjusted so that the element substrate 1
Does not get over the positioning pins 13 (13x, 13y), and the element substrate can be accurately positioned. Also, the positioning pins 13 (1
3x, 13y) can be abutted only by air blow, but in a substantially closed space, with only air blow, the compressed air blown by the air is reflected back to the opposite surface, and returned. Furthermore, since it is conceivable to affect adjacent element substrates, there is a tendency that the abutting accuracy is deteriorated. Therefore, in this embodiment, the compressed air blown on the side opposite to the air blow groove is vacuumed to discharge the compressed air in the space, thereby suppressing the deterioration of the abutting accuracy. In the temporary positioning mechanism 4 of the present embodiment, the concave portion 12 of the substrate tray 2 has a depth of about 0.1 mm, the height of the positioning pin 13 is about 0.4 mm, and
9 was adjusted to be 0.2 mm above the element substrate 1. When the timing of the air blow and the vacuum was controlled as shown in FIG. 3 (c) and the temporary positioning of the element substrate was performed, the temporary positioning accuracy of the element substrate was ± 5.
μm or less, and the provisional positioning time was 3 seconds.

The element substrate 1 is provided with positioning pins 13 (13x,
13y), when the provisional positioning is completed, the air blow and the vacuum are stopped, and each element substrate 1 is sucked into each recess 12 through a suction hole (not shown) for clamping the substrate tray 2. Fix it. After that, the temporary positioning member 11 is retracted from the substrate tray 2.

Next, each stage 25-2 of the transport mechanism 5
8, the finger 21 is moved to a position above the predetermined element substrate 1 on the substrate tray 2 and lowered. At the time of this descent, the detection of landing by the landing detection sensor 23 of the finger 21 is started. When the suction portion 21a of the finger 21 touches the surface of the predetermined element substrate 1, the landing detection sensor 23 immediately detects the landing and stops descending. The suction portion 21a of the finger 21 is
, And at the same time, the suction for fixing the substrate tray 2 is stopped. The finger 21 having sucked the element substrate 1 on the suction portion 21a is lifted by the operation of the Z stage 27, and is transported below the image processing observation mechanism 6 by the operation of the X and Y stages 26 and 25. I do.

The image processing observation mechanism 6 observes both end faces of the element substrate 1 adsorbed on the fingers 21 on the liquid discharge side by a pair of image processing observation systems 6a, 6a, and performs image processing. Based on the result, the θ stage 28 of the finger 21 corrects in the θ direction and the Y stage 25 corrects in the Y direction. Then, the position of the reference heating element on the element substrate 1 is observed and image processing is performed. The position is corrected by the X stage 26 so that the position of the reference heating element is located at the center of the monitor for image processing.

The movable mounting table 7 supporting the base plate 3 is moved and adjusted in the X direction by the mounting table driving mechanism 8 to set the arrangement position of the element substrate 1 with respect to the base plate 3 and to determine the position by laser measurement. Measurement is performed by a measuring instrument 9 such as a measuring instrument, and a deviation amount between the arrangement position of the element substrate 1 and the actual position is calculated. The X-stage 26, which is a high-resolution stage, is moved in accordance with the calculation result of the shift amount to correct the monitor alignment position of the position of the heating element serving as the reference, thereby performing the final positioning. As described above, the final positioning is performed by the movable mounting table 7 and the mounting table drive mechanism 8 as the low-resolution stage, and the X stage 26 as the high-resolution stage, so that the stage movement time can be reduced and the positioning accuracy can be improved. 0.25μ
m or less.

When the final positioning is completed, the operation of the Z stage 27 of the transport mechanism 5 causes the finger 21 to start the landing operation, and at the same time, activates the landing detection sensor 23 to start detecting the upper surface of the base plate 3. When the element substrate 1 adsorbed on the adsorbing portion 21a of the finger 21 lands on the upper surface of the base plate 3, the landing detection sensor 2
3 detects the upper surface of the base plate 3, stops the landing operation of the finger 21 immediately, mounts the element substrate 1 on the base plate 3, performs suction for fixing on the base plate 3 side, or temporarily fixes with an adhesive, and thereafter To
The suction of the finger 21 is released, and the finger 21 is returned. Also, the landing detection sensor 23 has several tens μm
Therefore, before the next element substrate 1 is arranged, the detection sensor was reset in order to eliminate the hysteresis.

As described above, the operations such as the transport of the element substrates 1, the image processing, and the landing on the base plate are repeated by the number of element substrates required for the long recording head, and the arrangement of the predetermined number of the element substrates 1 is completed. After that, the base plate 3 on which the element substrates 1 are arranged is discharged from the apparatus.

As described above, according to the manufacturing apparatus of the present invention, the displacement of the element substrate in the X direction was ± 2 μm or less, and the displacement in the Y direction could be suppressed to ± 2 μm or less.

[0041]

As described above, according to the present invention,
A plurality of element substrates can be provisionally positioned at the same time and in a non-contact manner, and can be performed with a simple and low-cost structure, and can be transported more reliably. Also,
Even in the final positioning, both end faces of the element substrate can be observed at the same time, so that the position of the element substrate can be corrected without being affected by variations in the cutting of the element substrate or the cut surface, improving the alignment accuracy. Can be done.

Further, by using the manufacturing apparatus of the present invention, it is possible to manufacture a long recording head having a free width according to the purpose in a short time, at low cost, and in a small space.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a configuration of a manufacturing apparatus for carrying out a method of manufacturing a liquid jet recording head of the present invention.

FIGS. 2A and 2B show a temporary positioning mechanism for an element substrate in a liquid jet recording head manufacturing apparatus of the present invention, wherein FIG. 2A is a perspective view of a substrate tray and a temporary positioning member, and FIG. FIG. 2 is a perspective view showing a configuration of an air chamber in which the air chamber is closed.

FIGS. 3A and 3B show a temporary positioning mechanism for an element substrate in the apparatus for manufacturing a liquid jet recording head of the present invention, wherein FIG. 3A is a diagram showing the relationship between a substrate tray and a temporary positioning member, and FIG. It is a state diagram which shows typically the state which laminated | positioned the temporary positioning member, and (c) is a figure which shows an example of the operation timing of the air blow in the air chamber of a temporary positioning member, and a vacuum.

4A and 4B show a transport mechanism of an element substrate in the apparatus for manufacturing a liquid jet recording head of the present invention, wherein FIG. 4A is a schematic side view, and FIG. 4B is a perspective view of a finger portion of the transport mechanism.

FIG. 5 is a schematic configuration diagram of an image processing observation system in the liquid jet recording head manufacturing apparatus of the present invention.

FIG. 6 is a schematic perspective view showing a configuration for performing final positioning of an element substrate in the apparatus for manufacturing a liquid jet recording head of the present invention.

FIG. 7 is a schematic perspective view showing a configuration of a long liquid jet recording head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Element board (heater board) 2 Substrate tray 3 Base plate 4 Temporary positioning mechanism 5 Transport mechanism 6 Image processing observation mechanism 6a Image processing observation system 7 Movable mounting table 8 Mounting table drive mechanism 9 Measuring instrument 11 Temporary positioning member 12 Depression 13 (13x, 13y) Positioning pin 14 Air chamber 15a, 16a Air blow hole 15b, 16b Air blow groove 17a, 18a Vacuum hole 17b, 18b Vacuum groove 19 Regulation pin 21 Finger 21a Suction unit 23 Landing detection sensor 25-28 Stage 32 CCD Camera 35 Objective lens 40 Element substrate 41 Discharge energy generating element 42 Base plate 44 Wiring board 48 Top plate 49 Discharge port

Claims (9)

[Claims] An element substrate having a plurality of discharge energy generating elements is sequentially arranged on a base plate serving as a reference, and a plurality of discharge ports and communication with the discharge ports are respectively formed on the element substrates arranged on the base plate. In a method of manufacturing a liquid jet recording head formed by joining a top plate having a plurality of liquid flow paths, a plurality of element substrates are provisionally positioned at the same time, and the provisionally positioned element substrates are positioned at predetermined positions on the base plate. And performing final positioning on the base plate, and then sequentially arranging the element substrates on the base plate. 2. The liquid jet recording according to claim 1, wherein the temporary positioning of the plurality of element substrates is performed using a substrate tray having a plurality of temporary positioning positions provided with positioning pins serving as temporary positioning references. Head manufacturing method. 3. The provisional positioning of a plurality of element substrates simultaneously by abutting the element substrates on positioning pins of a substrate tray by a non-contact method.
The manufacturing method of the liquid jet recording head according to the above. 4. A temporary positioning member having an air blow channel and a vacuum channel is disposed to face a substrate tray having positioning pins, and the element substrate is moved to the substrate tray by air blowing and vacuum of the temporary positioning member. 4. The method for manufacturing a liquid jet recording head according to claim 3, wherein the temporary positioning of the plurality of element substrates is performed simultaneously by abutting the positioning pins. 5. The transfer of the element substrate onto the base plate is performed by a finger having an attraction portion for adsorbing the element substrate, and the finger detects that the element substrate has landed on the base plate. 5. A landing detection sensor according to claim 1, further comprising:
6. The method for manufacturing a liquid jet recording head according to claim 1. 6. A final positioning of an element substrate on a base plate is performed based on a measurement result of an image processing observation system for simultaneously observing both ends of the element substrate, and two or more types of moving stages having different resolutions are parallelized. 6. The method for manufacturing a liquid jet recording head according to claim 1, wherein the method is performed by moving the recording head. 7. A plurality of element substrates having a plurality of discharge energy generating elements are sequentially arranged on a base plate serving as a reference, and a plurality of discharge ports and a plurality of discharge ports are formed on the plurality of element substrates arranged on the base plate. In a manufacturing apparatus for a liquid jet recording head formed by joining a top plate having a plurality of communicating liquid flow paths, a substrate tray having a plurality of temporary positioning positions provided with positioning pins serving as a temporary positioning reference for an element substrate, and the substrate A temporary positioning mechanism including a temporary positioning member having an air blow channel and a vacuum channel disposed opposite to the tray; and a mounting table drive for driving a movable mounting table for positioning and fixing the base plate in the element substrate arrangement direction. Mechanism and transporting the temporarily positioned element substrate onto the base plate and moving the element substrate in the element substrate arrangement direction An apparatus for manufacturing a liquid jet recording head, comprising: a transport mechanism having a movable stage that can be moved and adjusted; and an image processing observation mechanism for observing an element substrate transported by the transport mechanism on the base plate. . 8. The transfer mechanism includes a finger having a suction portion for sucking the element substrate and a finger provided with a landing detection sensor for detecting that the element substrate sucked by the suction portion has landed on the base plate. 8. The apparatus according to claim 7, wherein the moving stage capable of moving and adjusting the finger in the element substrate arrangement direction is a high-resolution stage. 9. An image processing observation mechanism includes a pair of image processing observation systems for simultaneously observing both end portions of an element substrate,
8. The device according to claim 7, wherein, based on the measurement result, the moving stages of the mounting table drive mechanism and the transport mechanism are respectively moved in the element substrate arrangement direction to perform final positioning of the element substrate. 9. The apparatus for manufacturing a liquid jet recording head according to item 8.