JP2000015655A - Method and apparatus for lamination in vacuum - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable the lamination of a molding material corresponding to the temperature conditions of the molding material, to laminate/mold a laminated article surely without forming wrinkles, and to improve the yield. SOLUTION: An upper plate 1 and a lower plate 2 are arranged opposite to each other to have a prescribed interval, a cooling means 3 is installed at least on the upper plate. A heating means 4 and a membrane body 5 are installed in a frame body 6 and a frame body 7 respectively, and a molding space S is formed by joining the frame bodies 6, 7. A pressure reducing means 8 for reducing the pressure of the space S, a membrane body operating means 9 for operating the membrane body 5 to be able to control change over with optional timing so that a material H to be laminated is pushed to the heating means 4 at a prescribed pressure, and a moving means 10 which moves the heating means 4 to which the material H was pushed to be contacted/separated with/from the upper plate 1 on which the cooling means 3 is mounted are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum laminating apparatus and a vacuum laminating method for laminating materials to be laminated by heating and pressing them in a vacuum atmosphere.

[0002]

2. Description of the Related Art For example, when a printed wiring board is manufactured, an insulating substrate made of a thermosetting resin such as a phenol resin or an epoxy resin, or a flexible insulating base film made of a thermoplastic resin such as a polyimide. And a step of laminating a conductor layer such as a copper foil which is patterned or etched in a later step (the former is simply called a laminated substrate, and the latter is called a flexible laminated substrate). In the case of forming a laminated substrate, the insulating substrate and the copper foil are heated and pressed in a vacuum atmosphere, the insulating substrate is plasticized by a chemical reaction of a thermosetting resin, adhered and laminated with the copper foil, and further subjected to a chemical reaction. To cure the insulating substrate to which the copper foil is bonded. Also,
Similarly, when molding a flexible laminated substrate, the insulating base film and the copper foil are heated and pressed in a vacuum atmosphere,
The insulating base film is plasticized and adhesively laminated with a copper foil. That is, in the step of laminating a conductor layer such as a copper foil, a laminated material itself such as an insulating substrate or an insulating base film made of a thermosetting resin becomes the adhesive.

In order to protect the laminated copper foil from etching, plating, soldering, etc., a film-like photoresist forming layer comprising a support film and a photosensitive layer is laminated on the laminated substrate and the flexible laminated substrate. There is a step of thermocompression bonding to the surface of the conductor layer thus formed. The photoresist forming layer has tackiness when heated, and is pressed and laminated on the surface of the copper foil.

[0004] In recent years, such a printed wiring board has a higher integration density and its configuration has changed with the development of surface mounting. Therefore, multilayer printed wiring boards and multilayer flexible printed wiring boards having three or more conductive patterns including the surface conductive layer have been increasingly used. In order to form such a multilayer printed wiring board or the like, a build-up method is used in which an insulating substrate or an insulating base film and a conductive layer are sequentially laminated on a conductive layer of a laminated substrate or a flexible laminated substrate.

[0005] By the way, when performing the above-mentioned laminating step of the conductor layer and the thermocompression bonding step of the film-like photoresist forming layer, bubbles such as volatile components of the material to be laminated are formed on the laminated substrate or the flexible laminated substrate and the copper foil. And between the laminated copper foil and the film-like photoresist formation layer, and voids may be generated. The generated void is
For example, it may expand during high-temperature processing in a post-process such as a molten solder bath, and may damage a laminated copper foil or a film-like photoresist forming layer, which may result in poor protection of a circuit board, poor insulation, and thus poor conductivity. There is a possibility that.

[0006] Therefore, in the case of laminating various materials to be laminated by heating and pressing, it has been customary to laminate-form the materials to be laminated in a vacuum atmosphere so as not to generate voids between the materials to be laminated. Is being done.

[0007] As a conventional technique for laminating a plurality of materials to be laminated consisting of a plate-like, sheet-like or film-like material, Japanese Patent Application Laid-Open No. 63-295218 and Japanese Patent Application Laid-Open No.
As disclosed in Japanese Patent Publication No. 299895, a cylindrical rubber is provided in a heating container, or a rubber sheet is stretched inside a vacuum chamber which can be opened and closed, and a vacuum is formed in the cylindrical rubber or between the rubber sheets. A vacuum laminating apparatus connected to a pump is known. In these vacuum laminating apparatuses, a material to be laminated is arranged in a cylindrical rubber or between rubber sheets, a cylindrical rubber or a rubber sheet is sealed, a molding space is formed, and the pressure in the molding space is reduced. Accordingly, the cylindrical rubber or rubber sheet presses the material to be laminated. In JP-A-63-295218,
The stage material is heated by a heating vessel to which a heating device is connected. In JP-A-63-299895, the stage material is heated by heating the fixed-side chamber and the movable-side chamber by a heating mechanism.

[0008] As another conventional technique, Japanese Patent Publication No.
As disclosed in JP-A-13341, a photoresist forming layer adhered to a film support is adjacent to a surface of a circuit board, a region between the surface of the circuit board and the photoresist forming layer, and a film support. The above absolute pressure is reduced to 1 atm or less, the photoresist forming layer is pressed onto the surface of the circuit board by pressing the film support serving as a pressure transmitting layer, and the photoresist forming layer is heated and softened, A vacuum laminating method for laminating is known.

Further, as another conventional technique, for example, as disclosed in Japanese Patent Publication No. 52200/1992, a fixed plate and a movable plate which is provided to the fixed plate so as to be freely clamped and opened. 2. Description of the Related Art A vacuum hot press in which a plurality of hot plates are disposed between a plate and a moving space of a movable plate to form an airtight chamber is known. In such a vacuum hot press,
Generally, a temperature control fluid passage is formed in each hot plate, and a heat medium such as pressurized steam or heating oil is supplied to the temperature control fluid passage to press the material to be laminated inserted between the hot plates. Heat at the same time. In addition, in the temperature control fluid passage for supplying the heat medium, or in the temperature control fluid passage formed in each heat plate for supplying a coolant such as cooling water separately from the temperature control fluid passage for supplying the heat medium. By supplying the refrigerant in a manner that can be switched with the heat medium,
The heated material to be laminated is cooled.

[0010]

However, among the above-mentioned conventional techniques, Japanese Patent Application Laid-Open Nos. Sho 63-295218 and 63-299895, and Japanese Patent Publication No. Sho 55-1
In the apparatus (referred to as a vacuum laminator) used in the vacuum laminating method disclosed in Japanese Patent No. 3341, a curing reaction proceeds before a thermosetting resin is pressurized by heat conduction or radiant heat in a chamber, and a copper foil or the like is formed. There has been a problem that poor bonding with the material to be laminated occurs and the bonding strength is not guaranteed. In addition, since the material to be laminated heated by the heating device or the heating mechanism is gradually cooled to a temperature at which the material is stabilized, the heat at the time of heating remains in the material to be laminated even after the lamination is completed. Since the coefficient of thermal expansion differs between the conductor layer and the insulating substrate made of thermosetting resin, the insulating base film, or the film-like photoresist forming layer, molding such as wrinkles, sink marks, and deformation due to thermal shrinkage due to uneven temperature drop. There was a problem that defects occurred.
Further, in the case of a laminated material having a high temperature dependency such as a film-shaped photoresist forming layer having adhesiveness by being heated as described above, a contacted portion is stuck before being placed in a vacuum atmosphere, There was a problem that degassing failure occurred between the laminated copper foil and the film-like photoresist formation layer. Also, plasticization progresses too much before pressing,
There has been a problem that wrinkles occur and the accuracy of positioning and the like is reduced. These problems cause the yield of molded articles to deteriorate. Since these vacuum laminators move the entire movable side chamber up and down as disclosed in Japanese Patent Application Laid-Open No. 63-299895, the load on the chamber opening / closing means is large, and this load is countered. There is a problem that a large-sized chamber opening / closing means is required.

On the other hand, in a vacuum hot press as disclosed in Japanese Patent Publication No. 52200/1992, a heat medium or a refrigerant is supplied to a temperature control fluid passage formed in each hot plate. However, there was a problem that the molding cycle could not be shortened, and that the thermal efficiency was poor, the cost was high, and the productivity could not be improved. And since the vacuum hot press encloses the entire moving space of the movable plate to form an airtight chamber, it requires a lot of energy to reduce the pressure and shortens the molding cycle. There was a problem. Further, the vacuum hot press has a problem in that the movable plate has a large moving amount when pressing the material to be laminated inserted between the hot plates, and also requires a large amount of energy and time.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problem, and it is an object of the present invention to appropriately stack a plurality of plate-like, sheet-like, or film-like materials to be laminated according to the temperature conditions of the materials to be laminated. The present invention provides a vacuum laminating apparatus and a vacuum laminating method capable of reliably laminating and forming a laminated product without forming wrinkles, improving yield, and shortening a molding cycle. Aim.

[0013]

According to a first aspect of the present invention, there is provided a vacuum laminating apparatus, comprising: an upper plate and a lower plate which are opposed to each other and have a predetermined space; A cooling means provided on at least one of the upper plate and the lower plate, a heating means provided on one side, and a film body provided on the other side, and an air-tight molding space for accommodating a material to be laminated by being joined to each other. And a pair of frame bodies, a decompression means for decompressing the inside of the molding space in which the material to be laminated is housed, so that the material to be laminated is not pressed when the inside of the molding space is depressurized by the decompression means, and A film body operating means for switching and controlling the film body at an arbitrary timing so that the material to be laminated housed in the molding space is pressed against the heating means at a predetermined pressure; The heating means for one of the frames And moving means which moves so as to be separated and the closely against the upper or lower plate is provided,
It is characterized by having.

According to a second aspect of the present invention, in order to achieve the above object, in the first aspect of the present invention, the heating means is made flexible so that a central portion thereof swells. Is what you do.

According to a third aspect of the present invention, there is provided a vacuum laminating method, wherein one and the other of a pair of frame bodies are joined together to form an airtight molding space for accommodating a material to be laminated. Arrange the material to be laminated between the heating means and the film body provided in the above, form an airtight molding space by joining both frames, without changing the volume in the formed molding space In a state where the heating means is separated from the upper plate or the lower plate provided with the cooling means, the material to be laminated is pressed by the film body against the heating means, and the material to be laminated is pressed by the heating means. Is heated, and the pressure on the heating means of the material to be laminated by the film body is maintained, and
While the heating by the heating means is stopped, the frame is moved so that the material to be laminated is brought into close contact with the upper plate or the lower plate provided with the cooling means via the heating means to cool the material to be laminated. It is characterized by the following.

In the invention according to the first aspect of the present invention,
With the pair of frames separated from each other, a material to be laminated is inserted between the heating means and the film, and the frames are joined to each other to form an airtight molding space. Next, the film body is brought into close contact with the facing surface of the upper plate or the lower plate on which the frame body is provided by the film body operating means so that the material to be laminated is not pressed, and the pressure is reduced while maintaining this state. The pressure in the molding space in which the material to be laminated is accommodated is reduced by the means. When the pressure in the molding space is reduced, the frames come into close contact with each other. Subsequently, in a state in which the heating unit is separated from the upper plate or the lower plate provided with the cooling unit, the film body operation unit is switched, and the close contact of the film body with the upper plate or the lower plate is released, and the film body is released. The material to be laminated is pressed against the heating means by the body. Simultaneously with the pressing of the material to be laminated, the material to be laminated is heated by the heating means. Thereby, the materials to be laminated are laminated on each other. Thereafter, the heating by the heating means is stopped, and one of the frames provided with the heating means is moved by the moving means so as to be in close contact with the upper plate or the lower plate provided with the cooling means. Since the inside of the molding space is decompressed in a state where the frames are joined to each other, the other frame provided with the film also moves together. The material to be laminated is cooled by being brought into close contact with the upper plate or the lower plate provided with the cooling means via the heating means whose heating has been stopped. In the laminated product, the materials to be laminated are uniformly reduced in temperature and thermally contracted, and are stabilized without forming defects such as wrinkles. Further, since the radiant heat in the molding space is also removed by cooling the heating means, the material to be laminated is not heated before pressing.

In the invention according to the second aspect of the present invention,
In the invention of claim 1, when the heating means is bent so that the central portion expands when the material to be laminated is pressed by the film body, the material to be laminated is moved from the central portion to the peripheral portion by the film body. Since the portions that are pressed and not pressed do not remain in the shape of an island, and the material to be laminated is pulled so as to be curved and expanded, the occurrence of molding defects such as wrinkles is further prevented.

In the invention according to the third aspect of the present invention,
The material to be laminated is arranged between the heating means and the film body provided on one and the other sides of the pair of frame bodies, and the two frame bodies are joined to form an airtight molding space. The inside of the molding space is depressurized in a state in which it is in close contact with the facing surface of the upper or lower plate on which the frame body is located. This decompression does not reduce the volume of the molding space, and therefore, the material to be laminated is not pressed against the film body, the surroundings of the material to be laminated become a vacuum atmosphere,
Further, the pair of frame bodies joined to each other do not come into close contact with each other. Next, in a state where the heating unit is separated from the upper plate or the lower plate provided with the cooling unit, the laminated body is pressed against the heating unit by the film body, and the laminated member is pressed by the heating unit. Heat. The material to be laminated is laminated by being pressed and heated. After that, while maintaining the pressure on the heating means of the material to be laminated by the film body and stopping the heating by the heating means, the material to be laminated is passed through the heating means to the upper plate or the lower plate provided with the cooling means. Move the frame so that it is in close contact.
The laminated product is cooled, and the temperature of each laminated material is uniformly reduced and thermally shrunk, and is stabilized without forming wrinkles. Also,
Since the radiant heat in the molding space is also removed by cooling the heating means, the material to be laminated is not heated before pressing.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an embodiment of a vacuum laminating apparatus according to the present invention will be described in detail with reference to FIG. The same reference numerals in the drawings denote the same or corresponding parts.

The vacuum laminating apparatus according to the present invention is provided on an upper plate 1 and a lower plate 2 which are disposed so as to face each other at a predetermined interval, and on at least one of the upper plate 1 and the lower plate 2. A cooling means 3 provided, a heating means 4 provided on one side, and a film body 5 provided on the other side, and an airtight molding space S for accommodating a material to be laminated H by being joined together (see FIG. 2). ), A pair of frames 6 and 7 and a material to be laminated H
And a pressure reducing means 8 for reducing the pressure in the molding space S in which the material to be laminated is accommodated. The film body operating means 9 for switching and controlling the film body 5 at an arbitrary timing so as to press the laminated material H to the heating means 4 at a predetermined pressure, and the laminated material H are pressed. And a moving means 10 for moving the heating means 4 of the other frame body 6 so as to be separated from and in close contact with the upper plate 1 or the lower plate 2 provided with the cooling means 3.

Further, in the vacuum laminating apparatus according to the present invention, in addition to the above-described structure, the heating means 4 is made to be able to bend so that the central portion thereof swells.

The upper plate 1 and the lower plate 2 are each formed of a substantially rectangular flat plate. In the case of this embodiment, the engaging portions 15a, 15a,
15b, and are disposed so as to face each other at a predetermined interval. The upper plate 1 is held so as to be movable along the longitudinal direction of the frame 15 (in the direction perpendicular to the plane of the drawing). The engaging portion 15a of the frame 15 with which the upper plate 1 is engaged is not formed at a position that does not correspond to the lower plate 2. When performing maintenance and inspection, etc.,
Is completely moved along the frame 15 to a position where the engaging portion is not formed, and is configured to be able to be inverted with one end edge of the upper plate 1 as a rotation axis center. When the upper plate 1 is turned over, the lower surface of the upper plate 1 faces upward, and when the upper plate 1 is moved, the upper surface of the lower plate can be completely exposed, so that maintenance and inspection can be easily performed.

In the case of this embodiment, the cooling means 3 comprises a flow path through which a coolant such as cooling water flows.
And the lower plate 2. A coolant adjusted to a predetermined temperature is constantly circulated and supplied to the flow path 3 constituting the cooling means. Further, passages 16 and 17 penetrating vertically are formed at substantially the center of the upper plate 1 and the lower plate 2, respectively.

On the upper surface facing the upper plate 1 of the lower plate 2, a heat insulating material 20, a heating means 21, and a membrane operating fluid diffusion member 22 are provided in a state of being sequentially superposed. The heat insulating material 20 and the heating means 21 have holes 20 so as to be continuous with the passage 17.
a and 21a are respectively formed. Insulation material 2
A plurality of grooves 20b are formed in a lattice pattern on the surface in contact with the lower plate 2 so as to open to the peripheral side surface of the heat insulating material 20 and communicate with the passage 17. The heating means 21
In this embodiment, an electric heater that generates heat when energized is used. Membrane operating fluid diffusion member 22
Is made of a perforated plate such as a punched metal. The passage 17 is connected to a conduit (not shown) for supplying and discharging a membrane operating fluid such as air for operating the membrane 4 and constitutes a part of the membrane operating means 9. I have.

The frame 6 comprises a member 6a to which the tip of a piston rod 10b of a cylinder 10a as a moving means 10 is connected, and a member 6b for pressing the heating means 4. The inner opening of the member 6b is formed so as to protrude into the molding space S more than the inner opening of the member 6a. The heating means 4, like the heating means 21 of the lower plate 2, is composed of a thin plate-shaped electric heater which generates heat when energized, and is made of a stainless steel plate or the like whose surface is coated and insulated. The heating means 4 is arranged so as to close the opening of the frame 6, and its peripheral edge is sandwiched between the members 6 a and 6 b of the frame 6, and is attached to the frame 6 by tightening bolts 6 c. I have. Sealing members 18 and 1 for maintaining the airtightness between the heating means 4 and the frame 6 are provided on the surfaces of the frame 6 which are in contact with the heating means 4 of the members 6a and 6b.
8, 18 are provided over the entire circumference. The frame 6 can also be moved on the outer peripheral surface of the upper plate 1 in contact with the inner peripheral surface of the member 6a while maintaining the airtightness of a space T (see FIGS. 2 and 3) described later. Sealing member 19 is provided. When the piston rod 10b of the cylinder 10a is driven to extend, the heating means 4 provided on the frame 6 moves so as to be separated from the lower surface of the upper plate 1 provided with the cooling means 3, and the lower surface of the upper plate 1 An airtight space T is formed between the heater and the heating means 4 (see FIGS. 2 and 3). On the other hand, the piston rod 1 of the cylinder 10a
When driven to retract 0b, the heating means 4 provided on the frame 6 moves so as to be in close contact with the lower surface of the upper plate 1 provided with the cooling means 3 (see FIGS. 1 and 4).

The frame 7 is a member 7 which is in contact with the outer peripheral surface of the lower plate 2.
a, and a member 7b for holding down the film body 5.
The inner opening of the member 7b is formed so as to protrude into the molding space S more than the inner opening of the member 7a. The membrane body 5
It is arranged so as to close the opening of the frame 7, and its periphery is
And is attached to the frame 7 by tightening bolts (not shown) or the like. Sealing members 28, 28, 28 for maintaining the airtightness between the film body 5 and the frame body 7 are disposed on the entire surface of the frame 7 in contact with the members 7a and 7b. ing. Also, on the outer peripheral surface of the lower plate 2 which is in contact with the inner peripheral surface of the member 7a, the frame 7 joined to the frame 6 while maintaining the airtightness between the lower plate 2 and the film body 5 as described later. A sealing member 29 is provided to allow movement (see FIGS. 3 and 4 for comparison).

The member 7a of the frame 7 is formed with a deaeration passage 80 to which a vacuum pump or the like (not shown) is connected.
A hole 81 communicating with the deaeration passage 80 is formed in the member 7 b, and a concave portion 82 is formed so as to open into the molding space S when joined to the frame 6. Make up part. When a vacuum pump (not shown) of the decompression means 8 is driven in a state where the frames 6 and 7 are joined to each other, air is sucked and discharged into the molding space S through the concave portion 82, the hole 81, and the deaeration passage 80. The pressure is reduced.

When air is used as the membrane operating fluid, for example, the membrane operating means 9 is an air compressor which supplies air from the passage 17 of the lower plate 2 into the space between the upper surface of the lower plate 2 and the membrane 5. And a vacuum pump for sucking air in the space between the upper surface of the lower plate 2 and the film body 5 from the passage 17, and switching so that air can be supplied and sucked to the passage 17 at an arbitrary timing. And a control means for controlling (not shown).

The membrane operating fluid supplied and discharged from the passage 17 of the lower plate 2 by the membrane operating means 9 is formed in the heat insulating material 20 and the holes 20 a and 21 a formed in the heating means 21 and the heat insulating material 20. It flows through the lattice-shaped grooves 20 b thus formed, and evenly covers the entire surface of the film body 5. In this embodiment, the heat insulating material 20 has a lattice-shaped groove 20b.
Is described, but the heat insulating material 2 of the lower plate 2
The present invention is not limited to this embodiment as long as it can uniformly apply the membrane operating fluid over the entire surface of the membrane 5, such as by forming grooves in a grid on the upper surface in contact with zero.

On the other hand, in this embodiment, since the heating means 4 is in the form of a thin plate in the passage 16 of the upper plate, the pressure in the molding space S is reduced by the pressure reducing means 8 or the film operating means 9 When the body 5 presses the material to be laminated H, the heating means 4 is prevented from being inadvertently deformed by these pressures, or the central portion of the heating means 4 is bulged against these pressures. An air compressor for supplying air from a passage 16 into an airtight space T formed between the lower surface of the upper plate 1 and the heating means 4; a vacuum pump for sucking air in the space T; Control means for switching control so that air can be supplied and sucked into the passage 16 at the timing of
A means 11 for operating the heating means 4 is connected (not shown). In the case where the heating means 4 has rigidity that cannot be deformed by the pressing force of the film body 5 and the pressure reduction in the molding space S by the pressure reducing means 8,
There is no need to provide means 11 for operating the heating means 4.

The material H to be laminated according to the present invention is
For example, as in the case of laminating a film-like photoresist forming layer composed of a support film and a photosensitive layer on a laminated substrate or a flexible laminated substrate, a plurality of plate-like, continuous sheet-like or film-like materials are used. Alternatively, a film made of a thermoplastic or thermosetting resin or a film-like material and a substrate such as a wood plate, a metal plate, a sheet made of an organic material, an inorganic material, or a composite material may be attached. In addition, the lamination of the film-like materials may be the same or different and may be performed in two or more layers, and the lamination of the film-like material on the substrate may be performed on only one side of the substrate or on both sides. It may be performed. Further, the vacuum laminating apparatus according to the present invention is not limited to the above-described embodiment, but may be used only as the heating means 4 on the upper plate 1 side depending on conditions such as temperature suitable for the material to be laminated H. In some cases, the heating means 21 may not be provided, or the flow path 3 for circulating and supplying the refrigerant may be provided only in the upper plate 1 and not provided in the lower plate 2. Furthermore, in the vacuum laminating apparatus according to the present invention, the upper plate 1 and the lower plate 2 can be arranged upside down.
That is, the heat insulating material 20, the heating means 21, and the membrane operating fluid diffusion member 22 are provided on the upper plate 1, the frame 7 provided with the membrane 5 is provided, and the moving means 10 is provided on the lower plate 2. The moving means 10 can movably support the frame 6 provided with the heating means 4.

Next, the vacuum laminating method of the present invention will be described with reference to FIG.
A description will be given based on FIGS. Note that the vacuum laminating apparatus shown in FIGS. 2 to 5 has the same configuration as that shown in FIG. 1, but does not show detailed parts. The vacuum laminating method of the present invention generally includes one of the pair of frame members 6 and 7 that are joined together to form an airtight molding space S that accommodates the material to be laminated H.
The material to be laminated H is arranged between the heating means 4 and the film body 5 provided in the above, and the frame bodies 6 and 7 are joined to form an airtight molding space S. Then, the pressure is reduced without changing the volume, and in a state where the heating means 4 is separated from the upper plate 1 or the lower plate 2 provided with the cooling means 3, the material to be laminated H is moved to the heating means 4 by the film body 5. The material H to be laminated is heated by the heating means 4, the pressing of the material H to the heating means 4 by the film body 5 is maintained, and the heating by the heating means 4 is stopped. Then, the frames 6 and 7 are moved via the heating means 4 so as to make the laminated material H adhere to the upper plate 1 or the lower plate 2 provided with the cooling means 3, and the laminated material H is cooled. Things.

First, when the material to be laminated H is disposed between the heating means 4 and the film body 5, the piston rod 10b of the moving means 10 is in a retracted state, and the pressure reducing means 8 is driven. Not. Therefore, the frames 6 and 7 are not joined to each other, and the molding space S is open (see FIG. 1).

Thereafter, as shown in FIG.
The molding space S is formed by driving the piston rod 10b of FIG. At this time, the heating means 4 provided on the frame 6 is separated from the lower surface of the upper plate 1 provided with the cooling means 3, and an airtight space T is formed between the lower surface of the upper plate 1 and the heating means 4. You. Prior to heating the material to be laminated H by the heating means 4 to be described later, the material to be laminated H is previously heated to a temperature lower than the heating temperature by the heating means 4 by the heating means 21. it can.

Next, a vacuum pump (not shown) of the pressure reducing means 8 is driven to reduce the pressure in the molding space S through the concave portion 82, the hole 81, and the deaeration passage 80 (arrow C in FIG. 2). At this time, the pressure in the molding space S is reduced, so that the film 5
Is inadvertently swelled or thin plate-shaped heating means 4
The vacuum pump (not shown) of the film body operating means 9 is driven so that the volume of the molding space S does not change due to bulging, that is, the material H to be laminated is not pressed. Air is sucked from 17 to bring the membrane 5 into close contact with the surface of the membrane operating fluid diffusion member 22 (arrow B in FIG. 2).
The vacuum pump of the means 11 for operating the heating means 4 is driven to reduce the pressure in the space T almost synchronously with the pressure reduction in the molding space S (arrow A in FIG. 2). To keep. The pressure reduction (C) in the molding space S is caused by the close contact of the film body 5 (B).
And a pressure (degree of vacuum) equal to or higher than the reduced pressure (A) in the space T (B ≦ C ≧ A).

Thereafter, as shown in FIG. 3, the heating means 4 is separated from the lower surface of the upper plate 1 while maintaining the reduced pressure (arrow C in FIG. 3) in the molding space S by the reducing means 8. In this state, control means (not shown) of the film body operating means 9
From the state where the membrane 5 is in close contact with the surface of the membrane operating fluid diffusion member 22, switching control is performed so that air is supplied from the passage 17 by the air compressor to expand the membrane (arrow B in FIG. 3). The material to be laminated H is the expanded film body 5.
Is pressed against the heating means 4. At this time, simultaneously, the means 11 for operating the heating means 4 is switched and controlled so as to oppose the pressing by the film body 5, and compressed air is supplied from the passage 16 (arrow A in FIG. 3). The pressure (B) supplied to the film body 5 and the pressure (A) supplied to the space T are set to be substantially the same (A = B). When the heating means 4 composed of an electric heater is energized and generates heat, the material to be laminated H is heated while being pressed, and is laminated and formed. The reaction force applied to the upper plate 1 and the lower plate 2 by the film body 5 is received by the engagement portions 15a and 15b of the frame 15.

Subsequently, the power supply to the heating means 4 comprising an electric heater, that is, the heating is stopped, and the heating means 4 is operated while maintaining the reduced pressure in the molding space S by the pressure reducing means 8 as shown in FIG. The supply of the compressed air to the passage 16 by the means 11 is stopped, the air in the space T is exhausted (arrow A in FIG. 4), and the pressurization by the film body 5 is maintained (FIG. 4).
The piston rod 10b of the moving means 10 is driven to retract by the arrow B). Since the inside of the molding space S is depressurized by the decompression means 8, the joints of the frames 6, 7 are maintained and move up together. Then, in a state where the heating means 4 whose heating has been stopped is in close contact with the lower surface of the upper plate 1, the film 5
Is further pressurized, the laminated material H to be laminated is formed.
Is pressed by the film body 5 through the heating means 4 so as to be in close contact with the lower surface of the upper plate 1, and is cooled and stabilized. The heating means 4 is also cooled by stopping heating and being brought into close contact with the lower surface of the upper plate 1.

As an embodiment included in the vacuum laminating method of the present invention, as shown in FIG. 5, means 11 for operating heating means 4 when pressurizing and heating material H to be laminated. The pressure of the compressed air supplied from the passage 16 to the space T (arrow A in FIG. 5) is set higher than the pressure (arrow B in FIG. 5) for inflating the membrane by the membrane operating means 9 (FIG. 5). A> B), the center of the heating means 4 may be swelled downward. In this case, the material to be laminated H is pressed by the film body 4 from the central portion to the peripheral portion by the swelling of the center of the heating means 4, and the unpressed portion does not remain in an island shape. Therefore, since the sheet is pulled so as to be curved and expanded, occurrence of molding defects such as wrinkles can be further prevented.

Next, another embodiment of the vacuum laminating apparatus of the present invention will be described with reference to FIG. Note that the same or corresponding portions as those of the embodiment described with reference to FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. This embodiment is different from that shown in FIG. 1 in that the lower plate 2 is not held by the frame 15 but is supported by the pressing device 30 so as to be able to move up and down. The degassing passage 80 of the pressure reducing means 8 is fixed to the lower plate 2 and is formed in the lower plate 2.

In the vacuum laminating apparatus according to this embodiment, the lower plate 2 is arranged and positioned so as to have a predetermined interval with respect to the upper plate 1 by the pressing device 30, and the piston rod 10b of the moving means 10 is retracted. Let molding space S
Is open, the material to be laminated H is arranged between the heating means 4 and the film body 5. Then, by driving the piston rod 10b of the cylinder 10a to extend, the molding space S
And the heating means 4 is separated from the lower surface of the upper plate 1 provided with the cooling means 3.

Next, the membrane 5 is brought into close contact with the surface of the membrane-operating fluid diffusion member 22 by the membrane operating means 9 to form the molding space S.
The inside and the space T formed between the lower surface of the upper plate 1 and the heating means 4 are depressurized almost in synchronism by the decompression means 8 and the means 11 for operating the heating means 4, respectively.
Thereafter, in a state where the heating means 4 is separated from the lower surface of the upper plate 1, the material to be laminated H is pressed between the heating means 4 by the film body 5 swelled by the film body operating means 9, and
It is heated by the heating means 4 to form a laminate.

Subsequently, the power supply to the heating means 4 comprising an electric heater, that is, the heating is stopped, and the positioning of the lower plate 2 by the pressing device 30 is released while the pressure in the molding space S is maintained by the pressure reducing means 8. And the piston rod 10b of the moving means 10 is driven to retract. Since the inside of the molding space S is depressurized by the decompression means 8, the joining of the frames 6, 7 is maintained, and the lower plate 2 moves upward with the elevation of the frame 6. When the heating means 4 whose heating has been stopped is in close contact with the lower surface of the upper plate 1 and is further pressed by the film body 5, the laminated material H to be laminated is heated by the film body 5. 4 through the upper plate 1
Is pressed so as to be in intimate contact with the lower surface, and is cooled and stabilized. The reaction force of the pressurization by the film body 5 is
5 is received by the engaging portion 15a and the pressing device 30. In this description, the case where the lower plate 2 is also moved upward by the driving of the moving means 10 has been described. However, the present invention is not limited to this. Used to separate the upper plate 1 from the lower surface,
A pressing device 30 may be used to bring the heating means 4 into close contact with the lower surface of the upper plate 1. In addition, the present invention can be used so that the pressing device 30 functions as a moving unit without providing the moving unit 10 in FIG.
Further, although not shown, the moving means is provided with an urging means for separating or closely contacting the heating means 4 with the lower surface of the upper plate 1 and the heating means 4 against the urging means.
Means for closely contacting or separating from the lower surface of the device may be provided. That is, the "moving means" in the present invention
Is not limited to the moving means 10 shown in FIGS. 1 to 6, and the heating means 4 of the one frame body 6 on which the material to be laminated H is pressed is replaced by the upper plate provided with the cooling means 3. 1 (in the case of the embodiment shown in the figure), other methods can be adopted as long as they can be moved so as to be separated from and close to each other.

[0043]

According to the vacuum laminating apparatus according to the first aspect of the present invention, the upper plate and the lower plate are disposed so as to face each other at a predetermined interval, and at least one of the upper plate and the lower plate. Cooling means provided on one side, heating means provided on one side,
A film body is provided on the other side, and a pair of frames forming an airtight molding space for accommodating the material to be laminated by being joined to each other, and a pressure reducing means for decompressing the inside of the molding space in which the material to be laminated is accommodated. In order not to pressurize the material to be laminated when the inside of the molding space is depressurized by the pressure reducing means, and to press the material to be laminated contained in the molding space at a predetermined pressure against the heating means. In addition, the film body operation means for switching and controlling the film body at an arbitrary timing, and the heating means of one of the frames pressed by the material to be laminated, the upper plate or the lower plate provided with the cooling means Moving means for moving the material to be separated and in close contact with each other, when heating the material to be laminated, the heating means is separated from the cooling means, and when cooling the material to be laminated formed, the heating means is also provided at the same time. Can be cooled Therefore, depending on the temperature condition of the material to be laminated, it is possible to appropriately laminate a plurality of plate-like, sheet-like, or film-like materials to be laminated, and to reliably form a laminated product without forming wrinkles. In addition, it is possible to provide a vacuum laminating apparatus capable of improving the yield and shortening the molding cycle.

According to the vacuum laminating apparatus of the second aspect of the present invention, in the first aspect of the present invention, the heating means can be bent so that the central portion thereof swells, so that the material to be laminated is at the center. Is pressed by the membrane from the part to the peripheral part, because the part that is not pressed does not remain in the shape of an island, and
Since the laminate is formed by spreading the material to be laminated, it is possible to provide a vacuum laminating apparatus capable of further preventing the occurrence of molding defects such as wrinkles.

According to the vacuum laminating method according to the third aspect of the present invention, the vacuum laminating method is provided on one and the other of a pair of frame bodies which are joined to each other to form an airtight molding space for accommodating the material to be laminated. The material to be laminated is arranged between the heating means and the film body, the two frames are joined to form an airtight molding space, and the inside of the formed molding space is depressurized without changing its volume, and cooled. In a state in which the heating means is separated from the upper plate or the lower plate provided with the means, while applying pressure by pressing the material to be laminated by the film body against the heating means, heating the material to be laminated by the heating means, While maintaining the pressure on the heating means of the material to be laminated by the film body, and in a state where the heating by the heating means is stopped, the material to be laminated is placed on the upper or lower plate provided with the cooling means via the heating means. Move the frame so that , By cooling the object to be laminated material,
Depending on the temperature conditions of the material to be laminated, a plurality of plate-like, sheet-like, or film-like materials to be laminated can be appropriately laminated, and the laminated product can be reliably laminated and formed without forming wrinkles. It is possible to provide a vacuum laminating method capable of improving the retention and shortening the molding cycle.

[Brief description of the drawings]

FIG. 1 is a partial sectional view showing one embodiment of a vacuum laminating apparatus according to the present invention.

FIG. 2 is a cross-sectional view illustrating an embodiment of a vacuum lamination method according to the present invention and schematically illustrating a vacuum lamination apparatus when vacuum lamination is started.

FIG. 3 is an explanatory diagram showing a state in which a material to be laminated is pressed by a film body from a state shown in FIG. 2 to a heating unit separated from an upper plate provided with a cooling unit;

FIG. 4 is an explanatory diagram showing a state in which the material to be laminated is cooled by being brought into close contact with an upper plate provided with a cooling means via a heating means from the state of FIG. 3;

FIG. 5 is a view showing a modification of FIG. 3 and showing a state in which the center of the heating means is expanded.

FIG. 6 is a partial sectional view showing another embodiment of the vacuum laminating apparatus of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Upper plate 2 Lower plate 3 Cooling means 4 Heating means 5 Film body 6 Frame 7 Frame 8 Decompression means 9 Film body operating means 10 Moving means H Material to be laminated S Molding space T Space

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) // B29K 105: 06 B29L 31:34

Claims (3)

[Claims] 1. An upper plate and a lower plate which are disposed so as to face each other at a predetermined interval, a cooling means provided on at least one of the upper plate and the lower plate, and a heating means provided on one of the upper plate and the lower plate. A film body is provided on the other side, and a pair of frames that are joined to each other to form an airtight molding space for accommodating the material to be laminated, and a decompression for reducing the pressure in the molding space in which the material to be laminated is accommodated. Means, when the inside of the molding space is depressurized by the pressure reducing means, the laminated material is pressed against the heating means at a predetermined pressure so as not to pressurize the material to be laminated. As described above, the film body operating means for switching and controlling the film body at an arbitrary timing and the heating means for one of the frames to which the material to be laminated is pressed are attached to the upper plate or the lower plate provided with the cooling means. To move them apart and closely Vacuum lamination apparatus comprising: the means. 2. The vacuum laminating apparatus according to claim 1, wherein the heating means is bendable so that a central portion thereof swells. 3. A material to be laminated is interposed between a heating means and a film provided on one and the other of a pair of frames which form an airtight molding space for accommodating the material to be laminated by being joined to each other. It is arranged, and the both frame bodies are joined to form an airtight molding space. The pressure in the formed molding space is reduced without changing its volume, and the heating means is provided from the upper plate or the lower plate provided with the cooling means. In a state where the layers are separated from each other, the material to be laminated is pressed against the heating means by the film body, and the material to be laminated is heated by the heating means, so that the film body keeps the material to be laminated pressed against the heating means. And
In addition, in a state where the heating by the heating means is stopped, the frame is moved so that the material to be laminated is brought into close contact with the upper plate or the lower plate provided with the cooling means via the heating means to cool the material to be laminated. A vacuum lamination method.