JP2000015269A - Treating method for fluorine-containing water - Google Patents

Treating method for fluorine-containing water

Info

Publication number
JP2000015269A
JP2000015269A JP10348586A JP34858698A JP2000015269A JP 2000015269 A JP2000015269 A JP 2000015269A JP 10348586 A JP10348586 A JP 10348586A JP 34858698 A JP34858698 A JP 34858698A JP 2000015269 A JP2000015269 A JP 2000015269A
Authority
JP
Japan
Prior art keywords
fluorine
filtration
wastewater
concentration
solid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10348586A
Other languages
Japanese (ja)
Other versions
JP4380825B2 (en
Inventor
Satoshi Kezuka
智 毛塚
Takayuki Sadakata
孝之 定方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP34858698A priority Critical patent/JP4380825B2/en
Priority to US09/246,706 priority patent/US6331256B1/en
Priority to TW091134466A priority patent/TWI222428B/en
Priority to TW088101996A priority patent/TW534894B/en
Priority to KR1019990006269A priority patent/KR100354888B1/en
Publication of JP2000015269A publication Critical patent/JP2000015269A/en
Priority to KR10-2001-0049633A priority patent/KR100382660B1/en
Application granted granted Critical
Publication of JP4380825B2 publication Critical patent/JP4380825B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/58Treatment of water, waste water, or sewage by removing specified dissolved compounds
    • C02F1/583Treatment of water, waste water, or sewage by removing specified dissolved compounds by removing fluoride or fluorine compounds
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/02Treatment of water, waste water, or sewage by heating
    • C02F1/04Treatment of water, waste water, or sewage by heating by distillation or evaporation
    • C02F1/041Treatment of water, waste water, or sewage by heating by distillation or evaporation by means of vapour compression
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/24Treatment of water, waste water, or sewage by flotation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/38Treatment of water, waste water, or sewage by centrifugal separation
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/44Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Removal Of Specific Substances (AREA)
  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Physical Water Treatments (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a treating method for fluorine-contg. water whereby the water content of the resultant calcium fluoride cake is reduced; the effective application of this cake is broadened; and the space occupied by a treating apparatus is reduced by conducting solid-liquid separation by a means selected from among filtration, centrifugal separation, concentration by evaporation, and floatation. SOLUTION: A calcium salt 35 (e.g. calcium hydroxide) is added to fluorine-contg. wastewater in a reaction vessel 26 to form calcium fluoride. After the pH of the wastewater is adjusted in a pH-adjusting vessel 27, the wastewater is subjected to solid-liquid separation in a cocentration apparatus 28. As the concentration apparatus 28, one which can carry out the solid-liquid separation of the calcium fluoride-contg. wastewater discharged from the reaction vessel 26 and which is based on filtration, centrifugal separation, concentration by evaporation, or floatation is used. Since a concentration means based on filtration, centrifugal separation, concentration by evaporation, or floatation makes the separation possible without allowing crystals to grow, the addition of a flocculant is not necessary. An example of a solid-liquid separation means based on filtration is a method based on membrane separation; in this case, an ultrafiltration membrane, a micro-filtration membrane, filter cloth, etc., are used as a filtration membrane.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、フッ素含有水の処
理方法に関する。半導体製造、化学肥料製造、窯業、ア
ルミニウム工業等の産業においては、フッ化水素を使用
するか、またはこれを発生する製造工程を有することか
ら、フッ素を含む排水が排出される。本発明は、近年の
環境対策の強化および資源の有効利用の観点から、有効
なフッ素含有水の処理技術を確立するものである。
[0001] The present invention relates to a method for treating fluorine-containing water. In industries such as semiconductor manufacturing, chemical fertilizer manufacturing, ceramics, and the aluminum industry, wastewater containing fluorine is discharged because hydrogen fluoride is used or has a manufacturing process for generating hydrogen fluoride. The present invention establishes an effective technology for treating fluorine-containing water from the viewpoint of strengthening environmental measures and effectively using resources in recent years.

【0002】[0002]

【従来の技術】半導体製造、化学肥料製造、窯業、アル
ミニウム工業等の産業においては、フッ化水素を使用す
るか、またはこれを発生する製造工程を有することか
ら、フッ素を含む排水が排出される。このようなフッ素
含有排水は、水酸化カルシウム(Ca(OH)2 )等の
カルシウム塩と反応させ、フッ化カルシウム(Ca
2 )の不溶物を生成させてフッ素を固定化し、重力に
より固液分離する凝集沈澱法が一般に採用されている。
2. Description of the Related Art In industries such as semiconductor manufacturing, chemical fertilizer manufacturing, ceramic industry, and aluminum industry, wastewater containing fluorine is discharged because hydrogen fluoride is used or has a manufacturing process for generating hydrogen fluoride. . Such a fluorine-containing wastewater is reacted with a calcium salt such as calcium hydroxide (Ca (OH) 2 ) to form calcium fluoride (Ca (OH) 2 ).
In general, a coagulation sedimentation method in which an insoluble matter of F 2 ) is generated to fix fluorine and solid-liquid separation is performed by gravity.

【0003】図1に従来例(例えば特開平8−1970
70号参照)を示す。フッ素含有排水は、原水槽1に貯
留される。1次反応槽2では、水酸化カルシウム等のカ
ルシウム塩9を添加し、pH6〜10としてフッ化カルシ
ウムを生成させる。このとき排水中のフッ素含有率を低
減するためにカルシウム塩を過剰に添加し、また2次反
応槽3において不溶性のフッ化カルシウムの生成を促進
するためにアルミニウムまたは鉄等の化合物の無機凝集
剤10を添加する。pH調整槽4で酸またはアルカリの添
加により排水のpHを6〜8にしてさらにフッ化カルシウ
ムの生成を促進し、次いで生成物の沈降性をあげるた
め、凝集槽5においてポリアクリルアミドの部分加水分
解物等の有機凝集剤11を添加する。次に、この処理排
水を沈澱槽6に導き、この槽中で重力による固液分離が
行われる。
FIG. 1 shows a conventional example (for example, Japanese Patent Application Laid-Open No. 8- 1970).
No. 70). The fluorine-containing wastewater is stored in the raw water tank 1. In the primary reaction tank 2, a calcium salt 9 such as calcium hydroxide is added to adjust the pH to 6 to 10 to generate calcium fluoride. At this time, an excessive amount of calcium salt is added to reduce the fluorine content in the wastewater, and an inorganic coagulant of a compound such as aluminum or iron is added to promote the formation of insoluble calcium fluoride in the secondary reaction tank 3. Add 10 The pH of the wastewater is adjusted to 6 to 8 by adding an acid or an alkali in the pH adjusting tank 4 to further promote the formation of calcium fluoride, and then the partial hydrolysis of polyacrylamide in the flocculating tank 5 to increase the sedimentation of the product. An organic coagulant 11 such as a substance is added. Next, the treated wastewater is guided to a precipitation tank 6, where solid-liquid separation is performed by gravity.

【0004】また、1次反応槽2および2次反応槽3で
の晶析を促進するため、沈澱した汚泥24を配管13に
より1次反応槽2に返送し、晶析の核として利用する方
法が一般に採用されている。沈澱槽6において分離され
た汚泥は、一部が返送される一方で、残部は汚泥貯槽7
に移送され、脱水機8により脱水され、脱水ケーキ9が
産業廃棄物として処理される。
[0004] In order to promote crystallization in the primary reaction tank 2 and the secondary reaction tank 3, a method in which the settled sludge 24 is returned to the primary reaction tank 2 through the pipe 13 and used as a nucleus for crystallization. Is generally adopted. Part of the sludge separated in the sedimentation tank 6 is returned, while the rest is stored in the sludge storage tank 7.
, And dewatered by the dehydrator 8, and the dewatered cake 9 is treated as industrial waste.

【0005】上澄み水は、前段で生成したフッ化カルシ
ウムの不溶物を含むため、後段の処理設備に移送され
る。貯留槽16から砂等を充填した濾過塔17により、
沈澱槽6で沈降しなかったフッ化カルシウムの不溶物を
除去する。さらに、排水中の残留フッ素を除去するた
め、ジルコニウム等のフッ素イオンと錯化合物を形成す
る金属イオンを添着した樹脂または活性アルミナ等の吸
着剤を充填した吸着塔19で処理が行われる。さらに、
放流基準を満たすようにpH調整をpH調整槽20において
行った後に放流される。なお、図1において、18は濾
過された処理水のバッファーおよび水質監視のための濾
過水槽であり、21はpH調整した処理水のバッファーお
よび水質監視のための貯留槽である。
[0005] The supernatant water is transferred to a subsequent treatment facility because it contains insoluble matter of calcium fluoride generated in the preceding stage. By the filtration tower 17 filled with sand and the like from the storage tank 16,
The insoluble matter of calcium fluoride which has not settled in the settling tank 6 is removed. Further, in order to remove residual fluorine in the wastewater, the treatment is performed in an adsorption tower 19 filled with an adsorbent such as a resin or activated alumina to which a metal ion forming a complex compound with fluorine ions such as zirconium is attached. further,
After the pH is adjusted in the pH adjusting tank 20 so as to satisfy the discharge standard, the water is discharged. In FIG. 1, reference numeral 18 denotes a buffer of filtered treated water and a filtered water tank for monitoring water quality, and reference numeral 21 denotes a buffer of treated pH-adjusted treated water and a storage tank for monitoring water quality.

【0006】以上のように、従来の如く、フッ素含有排
水を凝集沈澱法にて処理を行うためには、過剰のカルシ
ウム塩の添加、多量の凝集剤の添加が必要であり、その
ため処理のための費用が増大する。凝集性を向上させる
ために、沈澱槽において沈降した汚泥の一部を1次反応
槽に戻し、晶析の核とする方法では、凝集剤が晶析の阻
害要因となる。1次反応槽から運ばれるフッ化カルシウ
ムと2次反応槽に無機凝集剤として添加されたアルミニ
ウム化合物等とが反応してゲル化してしまい、晶析が進
行しないからである。従って、凝集剤を含まないフッ化
カルシウム単体での処理の方が効果的であるが、フッ化
カルシウムは沈澱槽において沈降しないため、凝集剤の
添加が必要である。
As described above, in order to treat the fluorine-containing wastewater by the coagulation sedimentation method as in the prior art, it is necessary to add an excessive calcium salt and a large amount of a coagulant. Costs increase. In the method of returning a part of the sludge settled in the sedimentation tank to the primary reaction tank in order to improve the coagulation property and using the sludge as a nucleus for crystallization, the coagulant becomes a hindrance factor for crystallization. This is because calcium fluoride carried from the primary reaction tank reacts with an aluminum compound or the like added as an inorganic coagulant to the secondary reaction tank, causing gelation, and crystallization does not proceed. Therefore, although treatment with calcium fluoride alone containing no flocculant is more effective, calcium fluoride does not settle in the sedimentation tank, so that a flocculant needs to be added.

【0007】また、生成したフッ化カルシウムの不溶物
を重力沈降により固液分離する方式では、上澄み水への
フッ化カルシウムの不溶物の流出(通常20〜50mg/
L)は避けられず、後段の濾過設備が必要であった。後
段の濾過設備において、砂濾過等が利用されるが定期的
な洗浄作業が必要であった。また、フッ素含有排水にカ
ルシウム塩および凝集剤を添加し、フッ化カルシウムの
不溶塩を重力分離する処理では、排水中の残留フッ素が
多いため、吸着塔での処理が必要であった。
In the method in which the insoluble matter of calcium fluoride is separated into solid and liquid by gravity sedimentation, the outflow of insoluble matter of calcium fluoride into the supernatant water (usually 20 to 50 mg / day).
L) was unavoidable and required a subsequent filtration facility. Sand filtration or the like is used in the subsequent filtration equipment, but periodic cleaning work is required. In addition, in a process of adding a calcium salt and a flocculant to a fluorine-containing wastewater and gravity separating an insoluble salt of calcium fluoride, the wastewater has a large amount of residual fluorine, and thus requires treatment in an adsorption tower.

【0008】また、従来の処理設備において排出される
汚泥は、凝集剤を添加するため脱水性が悪く、脱水ケー
キを処理するためには多大のコストが発生していた。ま
た、汚泥中のフッ化カルシウムの純度が高ければ、フッ
化水素の製造用の原料等の付加価値の高い用途において
有効利用可能であるが、汚泥中への凝集剤成分の混入、
排水中のSiO2 等の不純物の混入等があり、高々95
%程度の純度しか得られないため、有効利用できたとし
てもセメント剤の増量剤等の付加価値の低い用途でしか
なかった。
Further, the sludge discharged from the conventional treatment equipment has a poor dewatering property due to the addition of a flocculant, and a great deal of cost is required to treat the dewatered cake. Also, if the purity of calcium fluoride in the sludge is high, it can be effectively used in high value-added applications such as raw materials for the production of hydrogen fluoride, but mixing of flocculant components into the sludge,
95% at most due to contamination of impurities such as SiO 2 in wastewater
%, It was only used with low added value, such as an extender for cement, even if it could be used effectively.

【0009】また、沈澱工程においては、重力沈降によ
り固液分離を行うため、沈降させるための容積が必要で
あり、広大な専有スペースが必要であった。
In the precipitation step, since solid-liquid separation is performed by gravity sedimentation, a volume for sedimentation is required, and a large exclusive space is required.

【0010】[0010]

【発明が解決しようとする課題】以上の問題点を解決す
るために、本発明では、フッ素含有水中のフッ素とカル
シウム塩との反応により発生したフッ化カルシウムを重
力沈降によらず、濾過、遠心分離、蒸発濃縮、浮上分離
等により固液分離を行い、濃縮した汚泥を一部反応槽に
返送し、晶析の核とさせ、フッ素含有水中のフッ素濃度
を低減する。
SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, in the present invention, calcium fluoride generated by the reaction between fluorine and calcium salt in fluorine-containing water is filtered and centrifuged without gravity sedimentation. Solid-liquid separation is performed by separation, evaporation concentration, flotation separation, etc., and the concentrated sludge is partially returned to the reaction tank to be used as nuclei for crystallization, thereby reducing the fluorine concentration in the fluorine-containing water.

【0011】よって、本発明は、フッ素含有水の処理方
法において、有機および無機凝集剤を使用しない安価な
ランニングコストにおける処理、および得られるフッ化
カルシウムケーキの含水率の低減、高純度化による有効
利用の用途拡大、専有スペースの縮小化を目的とする。
Therefore, the present invention provides a method for treating fluorine-containing water at a low running cost without using an organic or inorganic coagulant, and reducing the water content of the obtained calcium fluoride cake and improving its effectiveness by purifying the cake. The purpose is to expand the use of the use and reduce the exclusive space.

【0012】[0012]

【課題を解決するための手段】本発明は、上記課題を解
決するため、フッ素含有水を反応槽中でカルシウム塩と
接触させ、フッ素含有水中のフッ素をカルシウム塩と反
応させてフッ化カルシウムとして固定した後、固液分離
を行って処理水を流出させるとともに、前記固液分離に
より濃縮された汚泥の一部を前記反応槽に返送すること
を含むフッ素含有水の処理方法において、固液分離を濾
過、遠心分離、蒸発濃縮および浮上分離から選ばれる手
段により行うことを特徴とするフッ素含有水の処理方法
を提供する。
In order to solve the above-mentioned problems, the present invention comprises contacting fluorine-containing water with a calcium salt in a reaction tank, and reacting fluorine in the fluorine-containing water with the calcium salt to form calcium fluoride. After fixing, the solid-liquid separation is performed to discharge the treated water, and a method for treating fluorine-containing water, which includes returning a part of the sludge concentrated by the solid-liquid separation to the reaction tank, By a means selected from the group consisting of filtration, centrifugation, evaporation and concentration, and flotation.

【0013】かかる本発明によれば、フッ素含有水の処
理に際して有機もしくは無機の凝集剤を用いる必要はな
い。
According to the present invention, it is not necessary to use an organic or inorganic coagulant in treating the fluorine-containing water.

【0014】[0014]

【発明の実施の形態】以下に、図面を参照しながら、本
発明の好ましい態様について説明する。以下において
は、フッ素含有水としてフッ素含有排水を処理する場合
を例として説明する。図2は本発明の方法を模式的に示
す系統図である。フッ素含有排水は、原水槽25に貯留
される。反応槽26では、水酸化カルシウム等のカルシ
ウム塩35を添加し、フッ素含有排水のpHを4〜10と
して、フッ化カルシウムを生成させる。pH調整槽27に
おいてフッ化カルシウムが晶析し易いpH域に調整し、排
水は濃縮設備28にて固液分離に付され、濃縮された汚
泥は汚泥貯槽30に移送され、脱水機31にて脱水され
る。濃縮された汚泥の一部は、配管33により反応槽2
6に返送され反応槽26においてのフッ化カルシウムの
晶析の核として利用される。このとき、貯槽39に返送
汚泥34およびフッ素含有排水41を貯留し、カルシウ
ム塩40を添加して、晶析の核となるフッ化カルシウム
の結晶を成長させて反応槽26に返送することも晶析を
促進するために有効であり、これはフッ素含有排水38
中のフッ素イオン濃度が低い場合に特に有効である。カ
ルシウム塩40の添加量はフッ素含有排水41中のフッ
素イオンの量に対する当量よりやや多め、例えば、約
1.2倍当量であるのが好ましく、フッ素含有排水41
の貯槽39への投入量はフッ素含有排水38の総量の約
10〜20%であるのが好ましい。また、一般に、返送
汚泥量は、発生汚泥の総量の約10〜40%であるのが
好ましい。
Preferred embodiments of the present invention will be described below with reference to the drawings. In the following, a case where fluorine-containing wastewater is treated as fluorine-containing water will be described as an example. FIG. 2 is a system diagram schematically showing the method of the present invention. The fluorine-containing wastewater is stored in the raw water tank 25. In the reaction tank 26, a calcium salt 35 such as calcium hydroxide is added to adjust the pH of the fluorine-containing wastewater to 4 to 10 to generate calcium fluoride. The pH is adjusted to a pH range in which calcium fluoride is easily crystallized in the pH adjusting tank 27, the wastewater is subjected to solid-liquid separation in the concentration equipment 28, and the concentrated sludge is transferred to the sludge storage tank 30, and the dewatering machine 31 Dehydrated. Part of the concentrated sludge is supplied to the reaction tank 2 by the pipe 33.
6 and used as nuclei for crystallization of calcium fluoride in the reaction tank 26. At this time, the return sludge 34 and the fluorine-containing wastewater 41 are stored in the storage tank 39, and calcium salts 40 are added to grow calcium fluoride crystals which are nuclei for crystallization, and the crystals are returned to the reaction tank 26. This is effective to promote the
This is particularly effective when the concentration of fluorine ions in the inside is low. The amount of the calcium salt 40 to be added is slightly larger than the equivalent to the amount of fluorine ions in the fluorine-containing wastewater 41, for example, preferably about 1.2 times equivalent.
Is preferably about 10 to 20% of the total amount of the fluorine-containing wastewater 38. Generally, it is preferable that the amount of returned sludge is about 10 to 40% of the total amount of generated sludge.

【0015】また、返送汚泥中の汚泥濃度またはフッ素
イオン濃度が低いときには、フッ素含有排水38を貯槽
39に添加してもよい。濃縮設備28としては、反応槽
26から排出されるフッ化カルシウムを含んだ排水を固
液分離する機能を有するものが用いられ、これは濾過、
遠心分離、蒸発濃縮または浮上分離によるものである。
重力沈降により固液分離を行う場合には、フッ化カルシ
ウム結晶の比重を大きくする必要があるため、凝集剤の
添加が必須となるけれども、濾過、遠心分離、蒸発濃縮
または浮上分離による濃縮手段によれば結晶を成長させ
ることなく分離が可能となるため、凝集剤の添加は不要
となる。
When the sludge concentration or the fluorine ion concentration in the returned sludge is low, a fluorine-containing wastewater 38 may be added to a storage tank 39. As the concentration device 28, a device having a function of solid-liquid separation of waste water containing calcium fluoride discharged from the reaction tank 26 is used.
By centrifugation, evaporation concentration or flotation.
When solid-liquid separation is performed by gravity sedimentation, it is necessary to increase the specific gravity of calcium fluoride crystals, so the addition of a flocculant is essential.However, filtration, centrifugation, evaporation concentration or flotation separation means According to this, the separation can be performed without growing the crystal, and therefore, the addition of the coagulant is unnecessary.

【0016】濾過による固液分離手段としては、例え
ば、膜分離による方法が挙げられる。膜としては限外濾
過(UF)膜、精密濾過(MF)膜、濾布等が採用され
る。
As a solid-liquid separation means by filtration, for example, a method by membrane separation can be mentioned. As the membrane, an ultrafiltration (UF) membrane, a microfiltration (MF) membrane, a filter cloth, or the like is employed.

【0017】[0017]

【実施例】以下、実施例を挙げて本発明をさらに説明す
る。 参考例1 本発明の効果を検証するため、下記のようにして参考例
1を実施した。フッ素イオンを200mg/L、100mg
/L、50mg/L、20mg/Lを含有する模擬排水を作
成し、水酸化カルシウム(Ca(OH)2 )を添加して
いき、排水中にフッ素イオンとして残留する濃度の測定
を実施した。このときのpHを6〜8の範囲に、水酸化ナ
トリウム(NaOH)により調整した。結果を図3に示
す。
The present invention will be further described below with reference to examples. Reference Example 1 In order to verify the effects of the present invention, Reference Example 1 was performed as follows. 200 mg / L, 100 mg of fluoride ion
/ L, 50 mg / L, and 20 mg / L, simulated wastewater was prepared, calcium hydroxide (Ca (OH) 2 ) was added, and the concentration of fluorine ions remaining in the wastewater was measured. The pH at this time was adjusted to a range of 6 to 8 with sodium hydroxide (NaOH). The results are shown in FIG.

【0018】図3によれば、フッ素イオン濃度が高い排
水(200mg/L、100mg/L)では、カルシウム塩
を少量添加した場合にも直ちにフッ素イオン濃度が低下
することを示しており、フッ素イオンと添加したカルシ
ウム塩から発生したカルシウムイオンと効率よく反応し
てフッ化カルシウム(CaF2 )の不溶物を析出するこ
とがわかる。一方、フッ素イオン濃度が低い排水(50
mg/L、20mg/L)では、過剰のカルシウム塩を添加
しなければ、排水中のフッ素イオン濃度を低減すること
ができないことがわかる。
FIG. 3 shows that in wastewater with a high fluoride ion concentration (200 mg / L, 100 mg / L), the fluorine ion concentration immediately decreases even when a small amount of calcium salt is added. It can be seen that it reacts efficiently with calcium ions generated from the added calcium salt to precipitate insoluble matter of calcium fluoride (CaF 2 ). On the other hand, wastewater with a low fluorine ion concentration (50
(mg / L, 20 mg / L), it can be seen that the fluorine ion concentration in the wastewater cannot be reduced unless an excess calcium salt is added.

【0019】かかるメカニズムの詳細は明らかではない
が、以下のように推測することができる。すなわち、フ
ッ素イオン濃度が高い場合には、微量のカルシウムイオ
ンでフッ化カルシウムの不溶物が析出し、その析出した
フッ化カルシウムが晶析の核となり、残留するフッ素イ
オン濃度の低いところまで晶析が行われる。これに対
し、フッ素イオン濃度が低い場合には、晶析の開始が遅
れ、過剰にカルシウム塩を添加しても排水中にフッ素イ
オンが残留するものと思われる。
The details of such a mechanism are not clear, but can be guessed as follows. That is, when the fluoride ion concentration is high, insoluble matter of calcium fluoride precipitates with a small amount of calcium ions, and the precipitated calcium fluoride serves as a nucleus for crystallization, and is crystallized to a place where the remaining fluorine ion concentration is low. Is performed. On the other hand, when the fluorine ion concentration is low, the start of crystallization is delayed, and it is considered that fluorine ions remain in the wastewater even if calcium salts are added excessively.

【0020】参考例2 上記の事実を検証するために発明者らは、参考例2を実
施した。フッ素イオン濃度20mg/Lでかつカルシウム
イオン濃度320mg/Lの模擬排水に、フッ素濃度50
0mg/L、カルシウム濃度580mg/Lにより調製した
フッ化カルシウム含有液を徐々に添加した。このときの
pHを6〜8の範囲に、水酸化ナトリウム(NaOH)に
より調整した。結果を図4に示す。
Reference Example 2 The inventors carried out Reference Example 2 in order to verify the above fact. In a simulated wastewater having a fluorine ion concentration of 20 mg / L and a calcium ion concentration of 320 mg / L, a fluorine concentration of 50 mg / L was added.
A solution containing calcium fluoride prepared at 0 mg / L and a calcium concentration of 580 mg / L was gradually added. At this time
The pH was adjusted to between 6 and 8 with sodium hydroxide (NaOH). FIG. 4 shows the results.

【0021】図4によれば、フッ素イオン濃度が20mg
/Lの場合、参考例1で示した条件では排水中のフッ素
イオン濃度は低減されなかったが、晶析の核となるフッ
化カルシウムを微量添加することにより、フッ素イオン
はフッ化カルシウムの不溶物となり、排水中の残留フッ
素イオンの低減が実現することがわかる。また、図3と
図4との比較により、フッ素イオン濃度を5mg/Lまで
低減させるのに、従来法では残留カルシウムイオン濃度
が100mg/Lであることを要する(図3)のに対し、
本発明法では残留カルシウムイオン濃度は20mg/Lで
あり(図4)、本発明では用いるカルシウム塩の量を低
減することができることがわかる。
According to FIG. 4, the fluorine ion concentration is 20 mg.
In the case of / L, the fluoride ion concentration in the wastewater was not reduced under the conditions shown in Reference Example 1. However, by adding a small amount of calcium fluoride, which is a nucleus for crystallization, the fluorine ions were insoluble in calcium fluoride. It can be seen that the reduction of the residual fluorine ions in the wastewater is realized. In addition, by comparing FIG. 3 with FIG. 4, the conventional method requires a residual calcium ion concentration of 100 mg / L to reduce the fluorine ion concentration to 5 mg / L (FIG. 3).
According to the method of the present invention, the residual calcium ion concentration was 20 mg / L (FIG. 4), indicating that the amount of the calcium salt used in the present invention can be reduced.

【0022】ここで、上記の参考例1および参考例2
は、本発明の原理の検証のみであり、本発明を採用する
設備の設計条件や運転条件を制約するものではない。 実施例1 図2に示す如き装置を用いた。この実施例は、本発明の
フッ素含有水の処理方法の一実施例であって、本発明は
何ら図示の方法に限定されるものではない。
Here, the above-mentioned Reference Examples 1 and 2
Is only for verification of the principle of the present invention, and does not limit the design conditions and operating conditions of the equipment employing the present invention. Example 1 An apparatus as shown in FIG. 2 was used. This embodiment is an embodiment of the method for treating fluorine-containing water of the present invention, and the present invention is not limited to the illustrated method.

【0023】この例では、濾布を用いる濾過により固液
分離を行った。濾布としては、ポリエステル系、ポリ塩
化ビニル、ポリビニルアルコール系、ポリアクリロニト
リル系等の耐薬品性を有し、使用温度に耐える耐熱性を
持ち、また使用に耐えうる機械的強度を持つ繊維を使用
する。濾布として、織布(撚糸織物)が採用され、目開
きおよび撚糸の直径は、排水のフッ素イオン濃度、他の
イオン濃度、その他含有する物質の性状により決定され
る。
In this example, solid-liquid separation was performed by filtration using a filter cloth. As the filter cloth, use fibers that have chemical resistance such as polyester, polyvinyl chloride, polyvinyl alcohol, and polyacrylonitrile, have heat resistance to withstand use temperature, and have mechanical strength to withstand use. I do. A woven fabric (twisted woven fabric) is used as the filter cloth, and the aperture and the diameter of the twisted yarn are determined by the fluorine ion concentration of the waste water, other ion concentrations, and the properties of other contained substances.

【0024】このような濾布を使用した場合、織布にあ
る程度の粒径を持つフッ化カルシウムの不溶物を通すと
粗い粒子は主として慣性衝突作用により、また細かい粒
子は主として拡散作用およびさえぎり作用によって織糸
に付着し、織糸と織糸の間に粒子ブリッジを形成する。
このようにして形成された一次付着層は曲折した多数の
細孔をもち、新しい濾布の空間率より大きな空間率を持
つ。この一次付着層により微細な粒子の補集が行われ
る。また、一次付着層を形成させる段階において通常生
成するフッ化カルシウムの不溶物の粒径よりも大きな粒
子を濾過させることにより、空間率が向上し、濾布を通
過する流束を大きくとれることを確認した。ここでいう
大きな粒子には、後述する洗浄の際に悪影響を及ぼさな
い、炭酸カルシウム、SiO2 の粒等を用いる。
When such a filter cloth is used, when calcium fluoride having an insoluble particle having a certain particle size is passed through a woven cloth, coarse particles are mainly affected by inertial impact, and fine particles are mainly diffused and blocked. To form a particle bridge between the yarns.
The thus formed primary adhesion layer has a large number of bent pores, and has a porosity larger than that of a new filter cloth. Collection of fine particles is performed by this primary adhesion layer. Also, by filtering particles larger than the particle size of the insoluble matter of calcium fluoride normally generated in the stage of forming the primary adhesion layer, it is possible to improve the porosity and increase the flux passing through the filter cloth. confirmed. As the large particles used herein, calcium carbonate, SiO 2 particles, or the like, which do not adversely affect the washing described below, are used.

【0025】このように、本発明に従えばフッ化カルシ
ウムの除去を極めて効率的に行うことができるので、図
1に示した如き後段の濾過設備が不要となる。また、本
発明法では、凝集剤を使用することがなく、そのため処
理汚泥として純度の高いフッ化カルシウムを得ることが
でき、従って汚泥をフッ酸の製造原料等の高純度のフッ
化カルシウムを必要とする用途に再利用することができ
る。
As described above, according to the present invention, the removal of calcium fluoride can be performed extremely efficiently, so that the subsequent filtration equipment as shown in FIG. 1 becomes unnecessary. In addition, in the method of the present invention, a high-purity calcium fluoride can be obtained as a treated sludge without using a flocculant. It can be reused for the purpose.

【0026】濃縮設備28を構成する濾過塔の構造とし
ては、濾布を円筒状にしたもの、平板にしたもの等が利
用できる。濾過性能を検証するために、濃縮設備28と
して、図5に示すように、ポリエステルの織布を約12
mmの直径を有する円筒42にし(図5(イ))、かかる
円筒3本を内径約35mmのPVC製の筒43内に装填し
た(図5(ロ))濾過装置44(図5(ハ))を使用し
た。
As the structure of the filtration tower constituting the concentrating equipment 28, a filter cloth having a cylindrical shape or a plate shape can be used. In order to verify the filtration performance, as shown in FIG.
A cylinder 42 having a diameter of 2 mm (FIG. 5 (A)) was loaded into a PVC cylinder 43 having an inner diameter of about 35 mm (FIG. 5 (B)). A filtration device 44 (FIG. 5 (C)) )It was used.

【0027】処理には、フッ素イオンを400mg/L含
有するフッ素含有排水が供された。この排水60Lに水
酸化カルシウム100gを添加し、循環運転した。この
ときの流束の変化と洗浄による流束の回復度合いを図6
に示す。図6からわかるように、循環運転することによ
り、流束が減少する傾向にある。これは、フッ化カルシ
ウムの不溶物が濾布の表面に堆積し、圧力損失が増大し
たためと推測される。また、濾布の表面に堆積したフッ
化カルシウムを洗浄により除去することにより、流束が
回復することが確認できる。この例では、塩酸を用いて
洗浄を行ったが、フッ化カルシウムを除去する方法であ
れば、塩酸洗浄に限定されることはない。
For the treatment, a fluorine-containing wastewater containing 400 mg / L of fluorine ions was provided. 100 g of calcium hydroxide was added to 60 L of the drainage water, and a circulation operation was performed. FIG. 6 shows the change of the flux at this time and the degree of recovery of the flux by washing.
Shown in As can be seen from FIG. 6, the circulating operation tends to reduce the flux. This is presumably because calcium fluoride insolubles accumulated on the surface of the filter cloth and the pressure loss increased. Further, it can be confirmed that the flux is recovered by removing the calcium fluoride deposited on the surface of the filter cloth by washing. In this example, the cleaning was performed using hydrochloric acid. However, the method is not limited to hydrochloric acid cleaning as long as the method is a method for removing calcium fluoride.

【0028】実施例2 濃縮設備28を構成する濾過装置として図7および図8
に示す装置を用いて、実施例2を行った。孔径0.1μ
m〜100μmのMF膜を濾過装置に使用した例であ
る。MF膜45を支持体46に固定した平板47を等間
隔に配列し、処理排水を通水するとともに下方からバブ
リングを行い、膜面への過剰なフッ化カルシウムの堆積
を防止するものである。流束が低下した場合には、薬品
洗浄または物理的に堆積物を除去することにより、流束
を回復させることができる。
Embodiment 2 FIGS. 7 and 8 show a filtration device constituting the concentration equipment 28.
Example 2 was performed using the apparatus shown in FIG. 0.1μ pore size
This is an example in which an MF membrane having a size of m to 100 μm is used for a filtration device. The flat plates 47 in which the MF film 45 is fixed to the support 46 are arranged at regular intervals, and the treated wastewater is passed through and bubbling is performed from below to prevent excessive calcium fluoride deposition on the film surface. If the flux is reduced, the flux can be restored by chemical cleaning or physically removing the deposits.

【0029】なお、濃縮設備28として、様々な構成を
有する公知の遠心分離装置、蒸発濃縮装置および浮上分
離装置を用いても上記と同様の結果が得られる。
The same results as described above can be obtained by using well-known centrifugal separators, evaporative concentrators, and flotation devices having various configurations as the concentration equipment 28.

【0030】[0030]

【発明の効果】以上、詳述した通り、本発明のフッ素含
有水の処理方法によれば、処理剤の低減、汚泥量の低
減、設備の簡素化、設置スペースの低減、良質なフッ化
カルシウムの回収によるフッ素の有効利用等が実現され
る。
As described in detail above, according to the method for treating fluorine-containing water of the present invention, the amount of treating agent, the amount of sludge, the equipment, the installation space, and the quality of calcium fluoride are reduced. The effective use of fluorine, etc., by the recovery of fluorine is realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】従来の処理方法を示す模式系統図。FIG. 1 is a schematic system diagram showing a conventional processing method.

【図2】本発明の処理方法を示す模式系統図。FIG. 2 is a schematic system diagram showing a processing method of the present invention.

【図3】参考例1の結果を示すグラフ。FIG. 3 is a graph showing the results of Reference Example 1.

【図4】参考例2の結果を示すグラフ。FIG. 4 is a graph showing the results of Reference Example 2.

【図5】実施例1で用いた濾過装置を示す模式図。FIG. 5 is a schematic diagram showing a filtration device used in Example 1.

【図6】実施例1の結果を示すグラフ。FIG. 6 is a graph showing the results of Example 1.

【図7】実施例2で用いた濾過装置を示す模式図。FIG. 7 is a schematic view showing a filtration device used in Example 2.

【図8】図7の装置の部分拡大図。FIG. 8 is a partially enlarged view of the device of FIG. 7;

【符号の説明】[Explanation of symbols]

1,25…原水槽 2,3,26…反応槽 4,27…pH調整槽 6…沈澱槽 28…濃縮設備 42…濾布円筒 43…PVC製筒 44…濾過装置 45…MF膜 46…支持体 47…平板 1,25 ... raw water tank 2,3,26 ... reaction tank 4,27 ... pH adjustment tank 6 ... precipitation tank 28 ... concentration equipment 42 ... filter cloth cylinder 43 ... PVC cylinder 44 ... filtration device 45 ... MF membrane 46 ... support Body 47 ... flat plate

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 フッ素含有水を反応槽中でカルシウム塩
と接触させ、フッ素含有水中のフッ素をカルシウム塩と
反応させてフッ化カルシウムとして固定した後、固液分
離を行って処理水を流出させるとともに、前記固液分離
により濃縮された汚泥の一部を前記反応槽に返送するこ
とを含むフッ素含有水の処理方法において、固液分離を
濾過、遠心分離、蒸発濃縮および浮上分離から選ばれる
手段により行うことを特徴とするフッ素含有水の処理方
法。
1. Fluorine-containing water is brought into contact with a calcium salt in a reaction tank, and fluorine in the fluorine-containing water is reacted with the calcium salt to be fixed as calcium fluoride. Then, solid-liquid separation is performed to discharge treated water. A method for treating fluorine-containing water, comprising returning part of the sludge concentrated by the solid-liquid separation to the reaction tank, wherein the solid-liquid separation is selected from filtration, centrifugation, evaporation concentration and flotation separation. A method for treating fluorine-containing water.
【請求項2】 反応槽中で、フッ素含有水が、有機もし
くは無機の凝集剤を存在させることなく、カルシウム塩
と接触される、請求項1記載の方法。
2. The method according to claim 1, wherein the fluorine-containing water is contacted with the calcium salt in the reaction vessel without the presence of an organic or inorganic flocculant.
【請求項3】 反応後、固液分離の前にpH調整が行われ
る、請求項1記載の方法。
3. The method according to claim 1, wherein the pH is adjusted after the reaction and before the solid-liquid separation.
【請求項4】 反応槽に返送される汚泥に、返送の途中
で、カルシウム塩が添加される請求項1記載の方法。
4. The method according to claim 1, wherein a calcium salt is added to the sludge returned to the reaction tank during the return.
JP34858698A 1998-04-22 1998-12-08 Fluorine-containing water treatment method Expired - Fee Related JP4380825B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP34858698A JP4380825B2 (en) 1998-04-27 1998-12-08 Fluorine-containing water treatment method
US09/246,706 US6331256B1 (en) 1998-04-22 1999-02-09 Treatment process for fluorine-containing water
TW091134466A TWI222428B (en) 1998-04-22 1999-02-09 Treatment process for fluorine-containing water
TW088101996A TW534894B (en) 1998-04-22 1999-02-09 Treatment process for fluorine-containing water
KR1019990006269A KR100354888B1 (en) 1998-04-22 1999-02-25 Treatement process for fluorine-containing waters
KR10-2001-0049633A KR100382660B1 (en) 1998-04-27 2001-08-17 Treatement process for fluorine-containing waters

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-117155 1998-04-27
JP11715598 1998-04-27
JP34858698A JP4380825B2 (en) 1998-04-27 1998-12-08 Fluorine-containing water treatment method

Publications (2)

Publication Number Publication Date
JP2000015269A true JP2000015269A (en) 2000-01-18
JP4380825B2 JP4380825B2 (en) 2009-12-09

Family

ID=26455324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34858698A Expired - Fee Related JP4380825B2 (en) 1998-04-22 1998-12-08 Fluorine-containing water treatment method

Country Status (2)

Country Link
JP (1) JP4380825B2 (en)
KR (1) KR100382660B1 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001054791A (en) * 1999-08-19 2001-02-27 Kurita Water Ind Ltd Waste water treating device
JP2001276848A (en) * 2000-03-29 2001-10-09 Kurita Water Ind Ltd Water treating equipment
JP2001334265A (en) * 2000-05-30 2001-12-04 Kubota Corp Method and apparatus for treating wastewater containing fluorine
JP2003275772A (en) * 2002-03-26 2003-09-30 Kurita Water Ind Ltd Method and device for treating fluorine-containing water
JP2003334566A (en) * 2002-05-20 2003-11-25 Japan Organo Co Ltd Method and device for treating drain containing fluorine
JP2003340210A (en) * 2002-05-28 2003-12-02 Japan Organo Co Ltd Cleaning method for filter apparatus
JP2005193189A (en) * 2004-01-09 2005-07-21 Kurita Water Ind Ltd Anaerobic treatment method and anaerobic treatment apparatus
JP2005342574A (en) * 2004-06-01 2005-12-15 Sanyo Electric Co Ltd Treatment apparatus and method for treating water to be treated using the apparatus
JP2006263500A (en) * 2005-03-22 2006-10-05 Sanyo Electric Co Ltd Wastewater treatment apparatus
CN102897931A (en) * 2011-07-27 2013-01-30 彰化炼水股份有限公司 Sewage purification circulation system of semiconductor industry
CN108358231A (en) * 2017-01-26 2018-08-03 新岛世纪(北京)新型材料技术有限公司 A method of recycling fluorine resource from solar cell or glass thinning industry fluorine-containing sludge
JP2018143919A (en) * 2017-03-01 2018-09-20 オルガノ株式会社 Device and method for treating fluorine-containing water, and membrane filtration system
CN115286166A (en) * 2022-07-20 2022-11-04 河南龙宇煤化工有限公司 Advanced treatment method for medium-high concentration coal gasification fluorine-containing wastewater
CN115368628A (en) * 2022-08-18 2022-11-22 无锡中天固废处置有限公司 Desalting regeneration method of saliferous polyethylene glycol waste liquid

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101699349B1 (en) 2015-08-13 2017-01-24 한국과학기술연구원 Absorbing medium using water-treatment sludge and method for fabricating the same
KR102112112B1 (en) * 2019-11-19 2020-05-18 에코매니지먼트코리아홀딩스 주식회사 Process for recycling wasteacid

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930010763B1 (en) * 1990-12-27 1993-11-10 포항종합제철 주식회사 Fluorine and cianide removing method from waste water

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001054791A (en) * 1999-08-19 2001-02-27 Kurita Water Ind Ltd Waste water treating device
JP2001276848A (en) * 2000-03-29 2001-10-09 Kurita Water Ind Ltd Water treating equipment
JP2001334265A (en) * 2000-05-30 2001-12-04 Kubota Corp Method and apparatus for treating wastewater containing fluorine
JP2003275772A (en) * 2002-03-26 2003-09-30 Kurita Water Ind Ltd Method and device for treating fluorine-containing water
JP2003334566A (en) * 2002-05-20 2003-11-25 Japan Organo Co Ltd Method and device for treating drain containing fluorine
JP2003340210A (en) * 2002-05-28 2003-12-02 Japan Organo Co Ltd Cleaning method for filter apparatus
JP2005193189A (en) * 2004-01-09 2005-07-21 Kurita Water Ind Ltd Anaerobic treatment method and anaerobic treatment apparatus
JP4501432B2 (en) * 2004-01-09 2010-07-14 栗田工業株式会社 Anaerobic treatment method and apparatus
US7452463B2 (en) 2004-06-01 2008-11-18 Sanyo Electric Co., Ltd. Apparatus for treating water
JP2005342574A (en) * 2004-06-01 2005-12-15 Sanyo Electric Co Ltd Treatment apparatus and method for treating water to be treated using the apparatus
JP2006263500A (en) * 2005-03-22 2006-10-05 Sanyo Electric Co Ltd Wastewater treatment apparatus
US7396458B2 (en) 2005-03-22 2008-07-08 Sanyo Electric Co., Ltd. Wastewater treatment equipment
CN102897931A (en) * 2011-07-27 2013-01-30 彰化炼水股份有限公司 Sewage purification circulation system of semiconductor industry
CN108358231A (en) * 2017-01-26 2018-08-03 新岛世纪(北京)新型材料技术有限公司 A method of recycling fluorine resource from solar cell or glass thinning industry fluorine-containing sludge
JP2018143919A (en) * 2017-03-01 2018-09-20 オルガノ株式会社 Device and method for treating fluorine-containing water, and membrane filtration system
CN115286166A (en) * 2022-07-20 2022-11-04 河南龙宇煤化工有限公司 Advanced treatment method for medium-high concentration coal gasification fluorine-containing wastewater
CN115368628A (en) * 2022-08-18 2022-11-22 无锡中天固废处置有限公司 Desalting regeneration method of saliferous polyethylene glycol waste liquid
CN115368628B (en) * 2022-08-18 2024-03-19 无锡中天固废处置有限公司 Desalination regeneration method of salt-containing polyethylene glycol waste liquid

Also Published As

Publication number Publication date
JP4380825B2 (en) 2009-12-09
KR100382660B1 (en) 2003-05-09
KR20010087434A (en) 2001-09-15

Similar Documents

Publication Publication Date Title
US5965027A (en) Process for removing silica from wastewater
JP4380825B2 (en) Fluorine-containing water treatment method
KR100354888B1 (en) Treatement process for fluorine-containing waters
JP4880656B2 (en) Water treatment apparatus and water treatment method
JPWO2008120704A1 (en) Fluorine-containing wastewater treatment apparatus and treatment method
JP2001096281A (en) Method of recovering desalted water from fluorine- containing waste water
JPH1034161A (en) Treatment of silica-containing waste water
JP4508600B2 (en) Method and apparatus for treating fluorine-containing wastewater
JP3319053B2 (en) Treatment method for fluoride-containing water
JP2503806B2 (en) Fluoride-containing water treatment method
US8808547B2 (en) Apparatus and processes for removing boron from liquids
JPS59189987A (en) Circulative use of waste water used for grinding silicon wafer
US5338457A (en) Removal of aluminum and sulfate ions from aqueous solutions
JP2000263063A (en) Method and apparatus for treating fluorine-containing waste liquid
JP2014133188A (en) Water treatment method and water treatment apparatus
JP2003019404A (en) Arsenic adsorbent and removal treatment method for arsenic using the same
JP2003334566A (en) Method and device for treating drain containing fluorine
KR100385706B1 (en) Process for Removing Silica from Wastewater
JP3622407B2 (en) Water treatment method
JPH05253575A (en) Treatment of fluorine-containing water
JPH1057969A (en) Fluorine-containing waste water treating device and its treatment
JP2003071470A (en) Method and apparatus for treating fluorine-containing water
WO2022210467A1 (en) High-performance pretreatment system for desulfurized wastewater for reverse osmosis membrane
EP4317085A1 (en) Waste water volume reduction process
WO2021131141A1 (en) Calcium fluoride collecting device and calcium fluoride collecting method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051007

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20080730

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090122

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090210

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090410

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090818

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090915

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131002

Year of fee payment: 4

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees