JP2000011896A - Gas-discharge type display device and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve particularly optical characteristics such as bright field contrast and the migration life by providing a first electrode consisting of a first substrate and a transparent electrode, first metal thin film and second metal thin film successively laminated thereon. SOLUTION: A bus electrode comprises a front substrate 400 and a transparent electrode 600, first metal thin film electrode 701, and second metal thin film electrode 702 laminated thereon. Cr is laminated in (100-2000)×10-10 m for the first metal thin film electrode 701, Cu is laminated in 1-3 μm for the second metal thin film electrode 702, and Cr is laminated in (1000-2000)×10-10 m for the top layer. The upper layer Cr is laser machined, the Cr pattern is resisted to etch the lower layer Cu, and the Cu pattern is further resisted to etch the bottom layer Cr. In the etching of the bottom layer Cr, the top layer Cr is extinguished to form a prescribed pattern.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas discharge type display device, and more particularly to a structure of an AC type gas discharge type display device having a three-electrode surface discharge structure.

[0002]

2. Description of the Related Art A gas discharge type display device such as a plasma display performs display by self-emission, so that the display angle is wide and the display is easy to see. In addition, it has features such as being able to produce a thin type and realizing a large screen, and has begun to be applied to display devices of information terminal equipment and high-definition television receivers. Plasma displays are roughly classified into a DC drive type and an AC drive type. Among them, the AC-driven plasma display has been able to obtain a display with high luminance and a serviceable life for practical use due to the memory function of the dielectric layer covering the electrodes and the formation of the protective layer. As a result, the plasma display has been put to practical use as a versatile display device.

FIG. 1 is a perspective view showing the structure of a plasma display panel that has been put into practical use. In this figure, for the sake of clarity, the front substrate 100 and the rear substrate 200 are connected to the discharge space area.
It is shown away from 300.

[0004] The front substrate 100 has an IT glass
A display electrode (transparent electrode) 600 made of a transparent electrode material such as O (Indium Tin Oxide) or tin oxide (SnO2), a bus electrode 700 made of a low-resistance material, a dielectric layer 800 made of a transparent insulating material, magnesium oxide ( It has a structure in which a protective layer 900 made of a material such as MgO) is formed.

The rear substrate 200 has a structure in which an address electrode 1000, a partition 1100, and a phosphor layer 1200 are formed on a rear glass substrate 500.

The front substrate 100 and the rear substrate 200 are bonded so that the display electrodes 600 and the address electrodes 1000 are substantially orthogonal to each other, so that a discharge space region 300 is formed between the front substrate 100 and the rear substrate 200. .

In this gas discharge type display device, the front substrate 10
0 and one of the pair of display electrodes 600 provided on
An address discharge is generated by applying a voltage to the address electrode 1000 provided on the substrate, and charges are accumulated in predetermined discharge cells by a memory function of the dielectric.
By applying an AC voltage between the pair of display electrodes 600 provided in the above, a main discharge is generated in the discharge cells in which the charges are accumulated. The red, green, and blue phosphors 1200 that are separately applied to the respective discharge cells are illuminated by ultraviolet rays generated by the main discharge, and display is performed.

A conventional example of such a gas discharge type display device is described in, for example, pages 208 to 215 of a flat panel display 1996 (edited by Nikkei Microdevices, 1995).

Incidentally, as a material of the bus electrode and the address electrode, a laminated thin-film wiring of Cr / Cu / Cr or Cr / Al / Cr and a thick-film Ag sintered body wiring are generally used.

[0010]

When a thick-film Ag sintered body wiring is used for the bus electrode, the production cost is relatively low, but the denseness of the sintered body is not increased and the light emission in the discharge cell is not increased. There is a problem in that there is light leakage, the bright-field contrast is not particularly improved due to a weak light reflection effect outside the panel, and especially in a high-definition panel, the life of migration is short due to a short distance between wirings. In addition, Cr / Cu / Cr or
When Cr / Al / Cr multilayer thin film wiring is used, it is excellent in terms of bright field contrast and migration life. However, there is a major drawback in that cost cannot be reduced due to high costs.

A first object of the present invention is to provide an inexpensive gas discharge type display device which satisfies optical characteristics such as bright-field contrast and migration life.

[0012]

According to the present invention, there is provided a first substrate having a plurality of first electrodes, a plurality of second electrodes arranged to intersect the first electrodes, and a discharge space. A second substrate having a partition wall and a second substrate, wherein the first electrode is a transparent electrode, a first metal thin film, a second metal thin film on the first substrate from the substrate surface. Are laminated in the order of the metal thin films described above.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect with the first electrodes are provided.
A gas discharge type display device comprising: a second substrate having a first electrode and a partition partitioning a discharge space, wherein the first electrode is a transparent electrode on the first substrate from the substrate surface, And a second metal thick film in this order.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A gas discharge type display device comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the first electrode is a first metal thin film on the first substrate from a substrate surface. , A transparent electrode, and a second thick metal film in this order.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged to intersect the first electrodes are provided.
A gas discharge type display device comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the second electrode is provided on the second substrate from a substrate surface by a first metal thin film. And a second metal thin film laminated in this order.

Further, the width of the second metal thick film electrode is smaller than the width of the first metal thin film electrode outside the region covered with the dielectric.

Further, the wiring outside the region covered with the dielectric is only the first metal thin film electrode.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the method of forming an electrode other than a transparent electrode in the first electrode comprises:
A step of laminating a first metal thin film, a second metal thin film, and a first metal thin film in this order on one substrate; and a step of patterning the first metal thin film of the uppermost layer of the laminated film by laser. Using the uppermost first metal pattern as a resist,
And a step of etching the lowermost first metal thin film using the second metal pattern as a resist.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect with the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the method of forming an electrode other than a transparent electrode in the first electrode comprises:
A step of laminating a first metal thin film, a second metal thin film, and a first metal thin film in this order on one substrate; and a step of patterning the first metal thin film of the uppermost layer of the laminated film by laser. Using the uppermost first metal pattern as a resist,
2) a step of etching the metal thin film and a step of patterning the lowermost first metal thin film by laser.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the method of forming an electrode other than a transparent electrode in the first electrode comprises:
A step of forming a first metal thin film on one substrate, a step of patterning the first metal thin film by a laser, and a step of forming the first metal thin film on the first substrate having the transparent electrode pattern and the first metal pattern. A step of printing and drying the entire surface of the second photosensitive metal paste, a step of pattern-exposing the second metal printed film by an exposure machine or a laser, and a step of developing the exposed second metal printed film. And baking the developed second metal pattern.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the method of forming an electrode other than a transparent electrode in the first electrode comprises:
A step of forming a first metal thin film on one substrate, a step of patterning the first metal thin film by a laser, and a step of forming the first metal thin film on the first substrate having the transparent electrode pattern and the first metal pattern. It comprises a step of pattern printing and drying the second metal paste and a step of firing the second metal pattern.

A first substrate having a plurality of first electrodes and a plurality of second substrates arranged to intersect with the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first substrate having a first electrode and a second substrate having a partition partitioning a discharge space, wherein the first electrode is formed on the first substrate by a first method. Forming a metal thin film, patterning the first metal thin film with a laser, and forming a transparent electrode film on the first substrate having the first metal thin film pattern,
Patterning the transparent electrode with a laser,
A step of printing and drying a second photosensitive metal paste on the entire surface of the first substrate having the first metal thin film pattern and the transparent electrode pattern, and pattern-exposing the second metal print film with an exposing machine or laser. And a step of developing the exposed second metal print film, and a step of firing the developed second metal pattern.

Also, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first substrate having a first electrode and a second substrate having a partition partitioning a discharge space, wherein the first electrode is formed on the first substrate by a first method. Forming a metal thin film, patterning the first metal thin film with a laser, and forming a transparent electrode film on the first substrate having the first metal thin film pattern,
A step of pattern printing and drying a second metal paste on a first substrate having the first metal thin film pattern and the transparent electrode pattern; a step of patterning the transparent electrode by a laser; It consists of a firing step.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first substrate having a first electrode and a second substrate having a partition partitioning a discharge space, wherein the first electrode is formed on the first substrate by a first method. Forming a metal thin film, patterning the first metal thin film with a laser, and forming a transparent electrode film on the first substrate having the first metal thin film pattern,
A step of printing and drying a second photosensitive metal paste on the entire surface of the first substrate having the first metal thin film pattern and the transparent electrode pattern, and pattern-exposing the second metal print film with an exposing machine or laser. A step of developing the exposed second metal print film, a step of patterning the transparent electrode with a laser, and a step of firing the developed second metal pattern.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect the first electrodes are provided.
A method for manufacturing a gas discharge display device comprising: a first substrate having a first electrode and a second substrate having a partition partitioning a discharge space, wherein the first electrode is formed on the first substrate by a first method. Forming a metal thin film, patterning the first metal thin film with a laser, and forming a transparent electrode film on the first substrate having the first metal thin film pattern,
A step of pattern printing and drying a second metal paste on the first substrate having the first metal thin film pattern and the transparent electrode pattern; a step of firing the second metal pattern; It comprises a step of patterning.

Also, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect with the first electrodes are provided.
A method for manufacturing a gas discharge type display device, comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the second electrode is formed on the second substrate by a first method. Stacking a metal thin film, a second metal thin film, and a first metal thin film in this order; patterning a first metal thin film of the uppermost layer of the stacked film with a laser; Etching the second metal thin film using the metal pattern as a resist, and etching the first metal thin film using the second metal pattern as a resist.

Further, a first substrate having a plurality of first electrodes and a plurality of second substrates arranged so as to intersect with the first electrodes are provided.
A method for manufacturing a gas discharge type display device, comprising: a first electrode and a second substrate having a partition partitioning a discharge space, wherein the second electrode is formed on the second substrate by a first method. Stacking a metal thin film, a second metal thin film, and a first metal thin film in this order; patterning a first metal thin film of the uppermost layer of the stacked film with a laser; Etching the second metal thin film using the metal pattern as a resist, and patterning the first metal thin film by laser.

More specifically, in the case of thin-film wiring, the second-layer thin film is directly etched by subjecting the uppermost thin-film metal to laser processing and using the pattern instead of forming a resist. By using the second layer of thin film wiring as a resist and etching the third layer of thin film, an inexpensive wiring forming method without a photo step can be obtained. Also, laser processing can be used instead of etching the third layer thin film. As a structure of the thin film wiring selected as a result of the present invention, in the front plate, a first substrate having a plurality of first electrodes, and a plurality of second substrates arranged to intersect with the first electrodes. A gas discharge type display device comprising an electrode and a second substrate having a partition partitioning a discharge space,
The first electrode is a transparent electrode on the first substrate from the substrate surface,
A first metal thin film, a second metal thin film, and a third metal thin film laminated in this order, or a transparent electrode, a first metal thin film, and a second metal thin film on the first substrate from the substrate surface Are stacked in this order. In addition, on the back plate,
A gas discharge type including a first substrate having one electrode, and a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrode and a partition partitioning a discharge space. The display device, wherein the second electrode is formed by sequentially stacking a first metal thin film, a second metal thin film, and a third metal thin film on the second substrate from a substrate surface. The first metal thin film and the second metal thin film are laminated on the second substrate in this order from the substrate surface.

When a thick-film electrode is used, a mixed film with a thin film having good optical characteristics is formed so as to intersect the first substrate having a plurality of first electrodes and the first electrode. A gas discharge type display device comprising: a second substrate having a plurality of second electrodes and a partition partitioning a discharge space disposed in the display,
The first electrode is a transparent electrode on the first substrate from the substrate surface,
It is formed by laminating a first metal thin film and a second metal thick film in this order. Further, the problem of migration can be solved by making the wiring width of the thick film narrower than the thin film wiring width or by using only the thin film wiring outside the dielectric forming region, which is a particular problem.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings.

FIGS. 2 to 7 show one embodiment of the present invention.

FIG. 2 shows an example in which two types of metal thin films are used for the bus electrodes. Cr is 100A to 2000A for the first metal thin film,
For the second metal thin film, a Cu thin film of 1 to 3 μm and C
1000A ~ 2000A laminated film, laser processing the upper layer Cr, etching the lower layer Cu using this Cr pattern as a resist, and further using the Cu pattern as a resist to form the lowermost layer Cr
The uppermost layer disappears when the lowermost layer is etched, and a pattern as shown in FIG. 3 can be formed. The same result is obtained when Al is used as the second metal. When the lowermost layer of Cr is laser-processed, a conventional Cr / Cu / Cr or Cr / Al / Cr bus electrode is obtained.

FIG. 7 shows a process flow for forming a thin-film bus electrode according to the prior art. On the other hand, FIGS. 8 and 9 show a process flow of forming the thin film bus electrode of the present invention. In contrast to the conventional process, which takes at least 14 steps, the present invention can reduce the number of steps dramatically to 5 steps, and does not require any auxiliary material for the organic resist window, resulting in a very inexpensive process.

FIGS. 3 and 4 show examples in which a metal thin film and a thick metal are used for the bus electrode. Cr is 100A for the first metal thin film
This is an example in which Ag is formed to 2 μm or more on the second metal thick film. A bus electrode having good adhesion and excellent optical characteristics was formed. Ag electrode formation method is 25 inch XGA and S
High-definition panels such as XGA could be formed by photo-processing using a photosensitive Ag paste, and panels with low wiring density, such as VGA, could be formed by pattern printing. The thick film process flow of the present invention is shown in FIGS. In each case, the cost is low, from 5 to 7 steps.

As a countermeasure against migration of the terminal portion,
As shown in FIGS. 14 and 15, by extending the thickness of the thin film outside the dielectric formation region with respect to the thin film or by using only the thin film, the life was greatly extended. Also, Ti for thin-film metals, and for thick-film metals
Ni, Al, Au, etc. could also be used.

FIGS. 5 and 6 show examples in which the thin film wiring of the present invention is applied to a back plate. Inexpensive thin film wiring could be formed even when applied to the wiring of the back plate.

[0037]

As described above, according to the present invention,
Very inexpensive thin film bus electrodes and thin film address wiring can be supplied. In addition, it is possible to supply a thick-film bus wiring which has excellent optical characteristics and can secure a migration life.

[Brief description of the drawings]

FIG. 1 is a perspective view of a conventional AC type gas discharge display device.

FIG. 2 is a cross-sectional view of a front plate of an AC type gas discharge display device according to one embodiment of the present invention.

FIG. 3 is a cross-sectional view of a front plate of an AC type gas discharge display device according to an embodiment of the present invention.

FIG. 4 is a cross-sectional view of a front plate of an AC type gas discharge display device according to an embodiment of the present invention.

FIG. 5 is a cross-sectional view of a back plate of the AC type gas discharge display device according to one embodiment of the present invention.

FIG. 6 is a sectional view of a back plate of the AC type gas discharge display device according to the embodiment of the present invention;

FIG. 7 is a process flow of forming a thin film wiring of a conventional AC type gas discharge display device.

FIG. 8 is a wiring forming process flow of the AC type gas discharge display device according to one embodiment of the present invention;

FIG. 9 is a wiring forming process flow of an AC type gas discharge display device according to an embodiment of the present invention.

FIG. 10 is a wiring forming process flow of the AC type gas discharge display device according to one embodiment of the present invention;

FIG. 11 is a wiring forming process flow of an AC type gas discharge display device according to an embodiment of the present invention;

FIG. 12 is a wiring forming process flow of the AC type gas discharge display device according to one embodiment of the present invention;

FIG. 13 is a wiring forming process flow of an AC type gas discharge display device according to an embodiment of the present invention.

FIG. 14 is a configuration plan view of a region outside a dielectric material formation in a thick-film / thin-film hybrid wiring according to an embodiment of the present invention;

FIG. 15 is a plan view of a configuration of a region outside a dielectric in a thick-film / thin-film hybrid wiring according to an embodiment of the present invention;

[Explanation of symbols]

100 ... front substrate, 200 ... rear substrate, 300 ... discharge space, 400 ...
Front glass substrate, 500… Back glass substrate 600… Display electrode (transparent electrode), 700… Bus electrode, 701… First
702: a second metal thin film electrode 703: a third metal thin film electrode, 704: a second metal thick film electrode,
800: transparent dielectric, 900: protective layer (MgO, etc.) 1000: address electrode, 1001: first metal thin film electrode, 1002
... second metal thin film electrode 1003 ... third metal thin film electrode, 1004 ... second metal thick film electrode, 1100 ... partition, 1200 ... phosphor, 1300 ... dielectric

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masahito Ijuin 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture Inside of Hitachi, Ltd. F term in Hitachi, Ltd. Production Technology Laboratory (reference) 5C027 AA01 AA02 5C040 DD01 DD03

Claims (16)

[Claims] A first substrate having a plurality of first electrodes; and a second partition having a plurality of second electrodes arranged to intersect the first electrodes and a partition partitioning a discharge space. A gas discharge type display device comprising a substrate, wherein the first electrode is a transparent electrode on the first substrate from a substrate surface,
A gas discharge type display device comprising a first metal thin film and a second metal thin film laminated in this order. 2. A second substrate comprising: a first substrate having a plurality of first electrodes; and a plurality of second electrodes arranged to intersect the first electrodes and a partition partitioning a discharge space. A gas discharge type display device comprising a substrate, wherein the first electrode is a transparent electrode on the first substrate from a substrate surface,
A gas discharge display device comprising a first metal thin film and a second metal thick film laminated in this order. 3. A second substrate, comprising: a first substrate having a plurality of first electrodes; and a plurality of second electrodes disposed so as to intersect the first electrodes and a partition partitioning a discharge space. A gas discharge type display device comprising a substrate, wherein the first electrode is laminated on the first substrate in the order of a first metal thin film, a transparent electrode, and a second metal thick film from a substrate surface. A gas discharge type display device characterized by comprising: 4. A second substrate comprising: a first substrate having a plurality of first electrodes; and a plurality of second electrodes arranged to intersect the first electrodes and a partition partitioning a discharge space. A gas discharge type display device comprising: a substrate; wherein the second electrode is formed by stacking a first metal thin film and a second metal thin film on the second substrate in this order from a substrate surface. A gas discharge type display device. 5. The gas discharge display device according to claim 2, wherein the second metal thick film electrode width is equal to the first metal thin film outside a region covered with the dielectric. A gas discharge type display device characterized in that the width is smaller than an electrode width. 6. The gas discharge type display device according to claim 2, wherein a wiring outside a region covered with said dielectric is only said first metal thin film electrode. Gas discharge type display device. 7. A second substrate comprising: a first substrate having a plurality of first electrodes; and a plurality of second electrodes disposed to intersect the first electrodes and a partition partitioning a discharge space. A method for manufacturing a gas discharge type display device comprising: a substrate; and a method for forming an electrode other than a transparent electrode among the first electrodes,
A first metal thin film, a second metal thin film, a first metal thin film on the first substrate;
A step of laminating a metal thin film in this order, a step of patterning the first metal thin film of the uppermost layer of the laminated film by laser, and a step of forming a second metal thin film using the first metal pattern of the uppermost layer as a resist. A method for manufacturing a gas discharge display device, comprising: a step of etching; and a step of etching a lowermost first metal thin film using the second metal pattern as a resist. 8. A second substrate, comprising: a first substrate having a plurality of first electrodes; and a plurality of second electrodes arranged to intersect the first electrodes and a partition partitioning a discharge space. A method for manufacturing a gas discharge type display device comprising: a substrate; and a method for forming an electrode other than a transparent electrode among the first electrodes,
A first metal thin film, a second metal thin film, a first metal thin film on the first substrate;
A step of laminating a metal thin film in this order, a step of patterning the first metal thin film of the uppermost layer of the laminated film by laser, and a step of forming a second metal thin film using the first metal pattern of the uppermost layer as a resist. A method for manufacturing a gas discharge type display device, comprising: a step of etching; and a step of patterning the lowermost first metal thin film with a laser. 9. A second substrate comprising: a first substrate having a plurality of first electrodes; and a plurality of second electrodes disposed so as to intersect the first electrodes and a partition partitioning a discharge space. A method for manufacturing a gas discharge type display device comprising: a substrate; and a method for forming an electrode other than a transparent electrode among the first electrodes,
A step of forming a first metal thin film on the first substrate, a step of patterning the first metal thin film with a laser, and the first substrate having the transparent electrode pattern and the first metal pattern. A step of printing and drying a second photosensitive metal paste on the entire surface, a step of pattern-exposing the second metal printed film by an exposure machine or a laser, and developing the exposed second metal printed film. And a step of baking the developed second metal pattern. 10. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and The method of forming an electrode other than the transparent electrode among the one electrode is as follows:
A step of forming a first metal thin film on the first substrate, a step of patterning the first metal thin film with a laser, and the first substrate having the transparent electrode pattern and the first metal pattern. A method for manufacturing a gas discharge display device, comprising: a step of pattern printing and drying a second metal paste thereon; and a step of firing the second metal pattern. 11. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and A method of forming one electrode includes a step of forming a first metal thin film on the first substrate, a step of patterning the first metal thin film by a laser, and a step of patterning the first metal thin film. A step of forming a transparent electrode film on the first substrate, a step of patterning the transparent electrode by laser, and a step of forming a second photosensitive film on the first substrate having the first metal thin film pattern and the transparent electrode pattern. A step of printing and drying the entirety of the conductive metal paste, a step of pattern-exposing the second metal print film with an exposure machine or a laser, and a step of developing the exposed second metal print film. A step of firing the second metal pattern Method for manufacturing a gas discharge display device characterized by comprising more. 12. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and A method of forming one electrode includes a step of forming a first metal thin film on the first substrate, a step of patterning the first metal thin film by a laser, and a step of patterning the first metal thin film. Forming a transparent electrode film on the first substrate, and pattern printing / printing a second metal paste on the first substrate having the first metal thin film pattern and the transparent electrode pattern.
A method for manufacturing a gas discharge display device, comprising: a step of drying; a step of patterning the transparent electrode with a laser; and a step of firing the second metal pattern. 13. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and A method of forming one electrode includes a step of forming a first metal thin film on the first substrate, a step of patterning the first metal thin film by a laser, and a step of patterning the first metal thin film. Forming a transparent electrode film on the first substrate, and printing and drying a second photosensitive metal paste on the entire surface of the first substrate having the first metal thin film pattern and the transparent electrode pattern. A step of pattern-exposing the second metal print film with an exposure machine or a laser, a step of developing the exposed second metal print film, a step of patterning the transparent electrode with a laser, and A step of firing the second metal pattern Method for manufacturing a gas discharge display device characterized by comprising more. 14. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and A method of forming one electrode includes a step of forming a first metal thin film on the first substrate, a step of patterning the first metal thin film by a laser, and a step of patterning the first metal thin film. Forming a transparent electrode film on the first substrate, printing and drying a second metal paste on a first substrate having the first metal thin film pattern and the transparent electrode pattern, A method for manufacturing a gas discharge display device, comprising: a step of firing a second metal pattern; and a step of patterning the transparent electrode with a laser. 15. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and Forming a first metal thin film, a second metal thin film, and a first metal thin film on the second substrate in this order; Patterning the metal thin film by laser with the first layer of the uppermost layer.
Etching a second metal thin film using the second metal pattern as a resist, and etching the first metal thin film using the second metal pattern as a resist. . 16. A first substrate having a plurality of first electrodes,
A method for manufacturing a gas discharge display device, comprising: a second substrate having a plurality of second electrodes disposed so as to intersect with the first electrodes and a partition partitioning a discharge space; and Forming a first metal thin film, a second metal thin film, and a first metal thin film on the second substrate in this order; Patterning the metal thin film by laser with the first layer of the uppermost layer.
A method of etching a second metal thin film using said metal pattern as a resist, and a step of patterning said first metal thin film with a laser.