JP2000009665A - Sample holder for fluorescent x-ray analysis - Google Patents

Abstract

PROBLEM TO BE SOLVED: To analyze a small-diameter sample of a disc shape having a smaller diameter than a regulated diameter by fixing a holding instrument for holding an outer circumference of the small-diameter sample on a disc-shaped pedestal of the regulated diameter. SOLUTION: A sample holder 1 has a disc-shaped pedestal 2 of an 8-inch silicon wafer. A 5-inch semiconductor wafer 4 has an orientation flat 4a as a reference used to set a direction. The pedestal 2 has a notch 2a as the direction set reference. A holding ring 3 is fixed on the pedestal 2 by bonding or the like manner, with having an outer diameter of not larger than 8 inches and an inner diameter agreeing with that of the semiconductor wafer 4. The semiconductor wafer 4 is fitted in an inner circumference of the holding ring 3. The holding ring 3 is formed of aluminum or the like in a thickness of approximately 1-1.5 mm, having an orientation flat stopper 3a formed at the inner circumference. The holding ring is fitted with having the orientation flat 4a agreed with the notch 2a in direction. The outer diameter of the holding ring 3 is slightly smaller than a diameter of the pedestal 2, so that the notch 2a of the pedestal 2 can be detected by an optical sensor of an aligner. Even a broken piece or small-diameter sample can be analyzed and treated in the same manner as a sample of a predetermined diameter.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent X-ray for automatically analyzing a disk-shaped sample having a predetermined diameter such as a semiconductor wafer.
The present invention relates to a sample holder used for analyzing a disk-shaped small-diameter sample or a small plate-shaped irregular sample having a diameter smaller than the predetermined diameter in a line analyzer.

[0002]

2. Description of the Related Art When measuring the composition and thickness of a thin film formed on the surface of a disk-shaped sample such as a semiconductor wafer by so-called X-ray fluorescence analysis, recently, an 8-inch or 300-mm wafer (hereinafter referred to as a large wafer) has been used. (Referred to as "diameter wafers"), fluorescent X having an automatic transfer mechanism for transferring large-diameter wafers stored in a cassette of a predetermined standard adapted to these large-diameter wafers from the cassette by a robot hand. A line analyzer is often used. Here, in the case of the calibration curve method, a standard sample having a known composition or the like is used. This standard sample is often used over a long period of time in order to reduce the analysis error between a plurality of X-ray fluorescence analyzers and to maintain the reproducibility of the calibration curve in the same device. It is desired that the fragments can be continuously used as a standard sample even if they are damaged. It is also desired that a standard sample of less than 8 inches corresponding to a wafer of less than 8 inches (hereinafter, referred to as a small-diameter wafer) that has been mainly produced before can be used in a current apparatus for automatically analyzing a large-diameter wafer.

[0003]

However, a current X-ray fluorescence analyzer for automatically analyzing a large-diameter wafer is a cassette of a predetermined standard adapted to a large-diameter wafer (for example, a cassette for accommodating an 8-inch wafer). , Or only a cassette stored in a 300 mm wafer cassette), that is, only an 8-inch or 300 mm wafer itself or a sample having the same size and shape can be automatically transferred and analyzed. Fragments that cannot be stored in a cassette of a predetermined standard for wafers or small-diameter standard samples cannot be handled as they are. In addition, the apparatus often includes a sample stage and an aligner (a mechanism for adjusting the center and direction of the sample to a predetermined position and direction in the apparatus) dedicated to large-diameter wafers. The standard sample cannot be handled as it is. On the other hand, manually handling only fragments or small-diameter standard samples using tweezers or the like is troublesome and time-consuming, and the configuration of the apparatus is complicated.

On the other hand, it is conceivable that a fragment or a small-diameter standard sample is adhered to a large-diameter wafer or a metal plate of the same size as the large-diameter wafer, and is automatically handled as a large-diameter wafer. When used in other fluorescent X-ray analyzers for small-diameter wafers, it must be peeled off from the large-diameter wafer, which is troublesome and time-consuming, and may be damaged. In addition, the above-mentioned problems occur not only in the case of the standard sample but also in the case where the sample to be analyzed has fragments or small diameters. Furthermore, the standard sample and the sample to be analyzed are not semiconductor wafers,
The same applies to a magnetic disk or the like.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems. An X-ray fluorescence analyzer for automatically analyzing a disk-shaped sample having a predetermined diameter, such as a semiconductor wafer, analyzes fragments and small-diameter samples. It is another object of the present invention to provide a sample holder that can handle a sample having a predetermined diameter in the same manner.

[0006]

In order to achieve the above-mentioned object, a sample holder according to claim 1 firstly prepares a disk-shaped sample having a predetermined diameter stored in a cassette of a predetermined standard.
In a fluorescent X-ray analyzer that automatically conveys from a cassette and irradiates primary X-rays and detects secondary X-rays generated from the sample, it analyzes a small disk-shaped sample having a diameter smaller than the predetermined diameter. This is a sample holder used when performing And a disk-shaped pedestal having the predetermined diameter,
A holder that is fixed on the pedestal and holds the outer periphery of the small-diameter sample.

According to the first aspect of the present invention, the small-diameter sample can be handled in the same manner as a sample having a predetermined diameter only by holding the outer periphery of the small-diameter sample on the holder on the pedestal. Since it does not adhere, it is easy to remove the small-diameter sample from the sample holder when analyzing it with another device.

According to a second aspect of the present invention, in the sample holder of the first aspect, the holder is an annular holding ring into which the small-diameter sample is fitted. According to the sample holder of the second aspect, only by fitting the small-diameter sample to the holding ring, it can be handled similarly to the sample having a predetermined diameter, and since the small-diameter sample does not adhere to the sample holder,
It is also easy to remove the small diameter sample from the sample holder when analyzing it with another device.

According to a third aspect of the present invention, in the sample holder of the second aspect, the holding ring further has a notch on an inner periphery thereof for removing the small-diameter sample. According to the sample holder of the third aspect, the small-diameter sample can be gripped by inserting the tip of a removal tool such as tweezers from the notch, so that it is easier to remove the small-diameter sample from the sample holder.

According to a fourth aspect of the present invention, first, a disk-shaped sample having a predetermined diameter stored in a cassette of a predetermined standard is automatically conveyed from the cassette and irradiated with primary X-rays.
In a fluorescent X-ray analyzer that detects secondary X-rays generated from a sample, the sample X-ray analyzer is a sample holder used when analyzing a plate-shaped irregular sample smaller than the disk-shaped sample having the predetermined diameter. The disk-shaped pedestal having the predetermined diameter, a support mounted on the pedestal, and supported by the support so as to be rotatable in a direction along the surface of the pedestal, the deformed sample And a lever for holding the lever.

According to the fourth aspect of the present invention, the deformed sample, which is a fragment of the predetermined sample, is placed on the pedestal, and the lever is rotated to hold the outer periphery of the deformed sample. Since the deformed sample is not bonded to the sample holder, it can be easily removed from the sample holder when the deformed sample is analyzed by another device.

According to a fifth aspect of the present invention, in the sample holder of the fourth aspect, the support has a ring-shaped support ring for rotatably supporting the base of the lever between the base and the pedestal. The deformed sample is held inside the inner periphery of the support ring. According to the sample holder of the fifth aspect, the deformed sample such as a fragment of the predetermined sample is placed in the support ring and the lever is rotated to hold the outer periphery of the deformed sample. Can be handled in the same way as a sample with a diameter of
It is also easy to remove the deformed sample from the sample holder when analyzing it with another device. Further, since the deformed sample is held inside the inner periphery of the support ring, even if the holding by the lever is released, there is no risk that the deformed sample will fall off the pedestal beyond the support ring.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a sample holder according to a first embodiment of the present invention will be described with reference to the drawings. This sample holder is a disk-shaped sample having a predetermined diameter housed in a cassette of a predetermined standard, for example, a cassette for an 8-inch semiconductor wafer 12 having a large diameter as shown in a plan view of FIG. The semiconductor wafer 12 of 8 inches stored in the wafer 20 is automatically conveyed from the cassette 20 by the robot hand 21 and irradiated with primary X-rays.
It is used for a fluorescent X-ray analyzer that detects rays. here,
The cassette 20 has a U-shaped shelf board 20a on which an 8-inch semiconductor wafer 12 is placed on the inside of the side other than the side opened to face the robot hand 21 in the vertical direction (perpendicular to the paper surface). And a large number of 8-inch semiconductor wafers 12 having an analysis surface facing upward. The sample holder according to the first embodiment is, as shown in FIG.
This is a sample holder 1 used when analyzing a disk-shaped small-diameter sample having a diameter smaller than 8 inches, for example, a 5-inch semiconductor wafer 4.

The 5-inch semiconductor wafer 4 has a flat notch 4a called an orientation flat which serves as a reference when setting the direction. Corresponding to the 5-inch semiconductor wafer 4, the sample holder 1 of the first embodiment is
First, a disk-shaped pedestal 2 made of an 8-inch silicon wafer is provided. The 8-inch semiconductor wafer 2 has a V-shaped notch 2a called a notch, which serves as a reference when setting the direction. Note that an orientation flat may be provided instead of the notch 2a.

The sample holder 1 of the first embodiment is
It is fixed on the pedestal 2 by bonding or the like, and has an outer diameter of 8 inches or less, an inner diameter matching the 5-inch semiconductor wafer 4, for example, 5 inches + 0.2-0.5 mm, and an inner diameter of 5 inches. A ring-shaped holding ring 3 is provided as a holding tool to which an inch semiconductor wafer 4 is fitted. Here, the retaining ring 3
Is made of, for example, aluminum and has a thickness of about 1 to 1.5 mm, and a 5-inch semiconductor wafer 4 is fitted with the direction indicated by the orientation flat 4a and the direction indicated by the notch 2a of the pedestal 2. As shown in FIG.

In this case, to align the center and the direction of the pedestal 2 and thus the 5-inch semiconductor wafer 4 with a predetermined position and direction in the fluorescent X-ray analyzer, the notch 2a of the pedestal 2 is set by an optical sensor of the aligner of the apparatus. The outer diameter of the retaining ring 3 is configured to be slightly smaller than a predetermined diameter of the pedestal 2 so that it can be detected. The small-diameter sample 4 is the orientation flat 4
In the case of a magnetic disk or the like having no a and the like and the directionality does not matter, the notch 2a of the pedestal 2 and the orientation flat 3a of the holding ring 3 are unnecessary, and the outer diameter of the holding ring 3 is
May be equal to a predetermined diameter. Further, even when the small-diameter sample 4 is a semiconductor wafer having the orientation flat 4a or the like, when local measurement such as so-called mapping measurement is not performed, the directionality of the wafer 4 does not matter. The notch 2a of the pedestal 2 is unnecessary, and the holding ring 3
May correspond to a predetermined diameter of the pedestal 2. Further, in the sample holder 1 of the first embodiment, the holding ring 3 has, for example, a rectangular cutout 3b for taking out a 5-inch semiconductor wafer 4 on the inner periphery.

According to the sample holder 1 of the first embodiment, 5
Only by fitting the inch semiconductor wafer 4 to the holding ring 3, it can be handled in the same manner as a sample which is an 8-inch semiconductor wafer. That is, even in a fluorescent X-ray analyzer equipped with an automatic transfer mechanism for holding an 8-inch semiconductor wafer stored in an 8-inch wafer cassette by a robot hand from below by electrostatic suction and transferring the semiconductor wafer from the cassette, The sample holder 1 fitted with the 5-inch semiconductor wafer 4 is accommodated in a cassette as an 8-inch semiconductor wafer, and similarly held and conveyed from the cassette. When the robot hand is held by vacuum suction instead of electrostatic suction, the pedestal 2 does not need to be a silicon wafer.
An 8-inch metal plate may be used.

Further, according to the sample holder 1 of the first embodiment, the 5-inch semiconductor wafer 4 is not adhered to the sample holder 1, and the holding ring 3 takes out the 5-inch semiconductor wafer 4 on the inner periphery. Has a notch 3b for
A 5-inch semiconductor wafer 4 can be gripped by inserting a tip of a removal tool such as tweezers from the notch 3b, and can be easily removed from the sample holder 1 when analyzing the 5-inch semiconductor wafer 4 with another apparatus. It is. The above operation and effect can be similarly obtained when the 5-inch semiconductor wafer 4 is a standard sample or a sample to be analyzed.

In the above description, the small-diameter sample 4
The holding tool for holding the outer periphery of the ring is a ring-shaped holding ring 3, but the holding tool is not limited to this, and, for example, as shown in FIG.
3B and 13C may be used. In this case, a plurality of holders 1
3A, 13B, 13C, for example, one holder 13
A can have the orientation flat 13Aa, and the gap between the holders 13A, 13B, 13C can have the same effect as the notch 3b (FIG. 1) for removing the small-diameter sample 4. In addition, for example, as shown in FIG. 3, the holding tool includes a plurality of small pieces 23A, 23B, 23C, 2 such as disks.
It may be 3D. In this case, the plurality of holders 23
A, 23B, 23C, and 23D, for example, two holders 23A and 23B are arranged so that the orientation flat 3
a (FIG. 1). Also, the gaps between the holders 23A, 23B, 23C, and 23D can have the same effect as the cutout 3b (FIG. 1) for removing the small-diameter sample 4.

Next, a sample holder according to a second embodiment of the present invention will be described. As shown in FIG. 4, this sample holder is used to hold a plate-shaped deformed sample smaller than an 8-inch semiconductor wafer, for example, a piece 8 of a semiconductor wafer, in an X-ray fluorescence analyzer similar to that described in the first embodiment. This is a sample holder 11 used for analysis. First, the sample holder 11 according to the second embodiment includes the sample holder 1 according to the first embodiment.
Like FIG. 1, a disk-shaped pedestal 2 made of an 8-inch silicon wafer is provided. The sample holder 11 of the second embodiment is fixed on the pedestal 2 by bonding or the like, and includes a ring-shaped support ring 5 having an outer diameter of 8 inches or less and an inner diameter of, for example, 5 inches. Here, the support ring 5 is made of, for example, aluminum or the like, and has a thickness of 1 to 1.
It is about 5 mm.

Furthermore, the sample holder 11 of the second embodiment
Is provided with three levers 6 rotatably attached to the support ring 5 in the direction along the surface of the pedestal 2 and holding the fragments 8 of the semiconductor wafer at equal intervals in the circumferential direction of the support ring 5. I have. Specifically, as shown in FIG. 5 which is a cross-sectional view of the mounting portion, the base of the lever 6 is inserted into a recess 5 b provided in the support ring 5, and
The pin 7 fitted and fixed in the hole 5c provided in the base 2 and the hole 2c provided in the base 2 is inserted into the hole 6c provided in the base of the lever 6 with a gap. Here, the base of the lever 6 is curved and elastic so as to be recessed downward, for example.
Is in contact with the inner surface of the concave portion 5b with frictional force. With such a configuration, as shown in FIG.
By pushing the tip of the support ring 5 around the pin 7 with a finger or the like, the support ring 5 is rotatable around the pin 7 in the radial direction, and is fixed when the finger is released.

That is, the support ring 5 and the pin 7 constitute a support 9 mounted on the pedestal 2, and the lever 6 is supported by the support 9 so as to be rotatable in a direction along the surface of the pedestal 2. Thus, the fragments 8 of the semiconductor wafer as the deformed sample are held. The support ring 5 of the support 9 rotatably supports the base of the lever 6 between the support 2 and the base 2.
The fragments 8 of the semiconductor wafer are held inside the inner circumference of the semiconductor wafer.

According to the sample holder 11 of the second embodiment,
A piece 8 of a semiconductor wafer or the like is placed in the support ring 5 and the lever 6 is rotated to hold the outer periphery of the piece 8 or the like. Also, since the fragments 8 are not adhered to the sample holder 11, it is easy to remove the fragments 8 from the sample holder 11 when analyzing the fragments 8 with another device. Furthermore, since the fragments 8 are held inside the inner periphery of the support ring 5, even if the holding by the lever 6 is released, there is no possibility that the fragments 8 fall off the pedestal 2 beyond the support ring 5. . This operation and effect is similarly obtained when the fragments 8 of the semiconductor wafer are a standard sample or a sample to be analyzed. The outer periphery of the fragment 8 may be held by the lever 6 by bringing the lever 6 into contact with the edge of the fragment 8 from three sides, or the lever 6 may be used to raise the outer periphery of the fragment 8 at three places. You may hold down with elasticity.

In the above description, the support 9 for supporting the lever 6 is constituted by the ring-shaped support ring 5 and the pin 7, but the support 9 is not limited to such. For example, as shown in FIG. 6, the support member 15A, 15B, 15C, which is obtained by dividing a ring-shaped support ring, and the pin 7 may be used. The support 9 is, for example, as shown in FIG.
As shown in FIG. 3, the support member 25 is a small piece such as a plurality of disks.
A, 25B, 25C and the pin 7 may be used.

[0025]

As described above, according to the present invention,
In a fluorescent X-ray analyzer for automatically analyzing a disk-shaped sample having a predetermined diameter, such as a semiconductor wafer, even when analyzing a fragment or a small-diameter sample, it can be handled in the same manner as a sample having a predetermined diameter.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a sample holder according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing another sample holder of the embodiment.

FIG. 3 is a perspective view showing still another sample holder of the embodiment.

FIG. 4 is a perspective view showing a sample holder according to a second embodiment of the present invention.

FIG. 5 is a cross-sectional view showing a mounting portion of the lever in the sample holder of the embodiment.

FIG. 6 is a perspective view showing another sample holder of the embodiment.

FIG. 7 is a perspective view showing still another sample holder of the embodiment.

FIG. 8 is a plan view showing an 8-inch semiconductor wafer stored in a cassette and a robot hand of an X-ray fluorescence analyzer using the sample holder of the present invention, which automatically transports the semiconductor wafer.

[Explanation of symbols]

Reference numerals 1, 11: sample holder, 2: pedestal, 3: holder (holding ring), 3b: notch of holding ring, 4: small-diameter sample (5 inch semiconductor wafer), 5: support ring, 6: lever, 8 ... deformed sample (segment of semiconductor wafer, etc.), 9 ... support.

Claims (5)

[Claims] 1. A disk-shaped sample having a predetermined diameter stored in a cassette of a predetermined standard is automatically conveyed from the cassette and irradiated with primary X-rays to detect secondary X-rays generated from the sample. In the X-ray fluorescence analyzer, a sample holder used when analyzing a disk-shaped small diameter sample having a diameter smaller than the predetermined diameter, the disk-shaped pedestal having the predetermined diameter, A sample holder comprising: a holder fixed on the base and holding an outer periphery of the small-diameter sample. 2. The sample holder according to claim 1, wherein the holder is a ring-shaped holding ring into which the small diameter sample is fitted. 3. The sample holder according to claim 2, wherein the holding ring further has a cutout on the inner periphery for removing the small-diameter sample. 4. A disk-shaped sample having a predetermined diameter stored in a cassette of a predetermined standard is automatically conveyed from the cassette and irradiated with primary X-rays to detect secondary X-rays generated from the sample. X-ray fluorescence analyzer that is used when analyzing a plate-shaped deformed sample smaller than the disk-shaped sample having the predetermined diameter, wherein the disk-shaped sample having the predetermined diameter A sample holder comprising: a pedestal; a support mounted on the pedestal; and a lever rotatably supported by the support in a direction along a surface of the pedestal and holding the deformed sample. 5. The support device according to claim 4, wherein the support has a ring-shaped support ring that rotatably supports the base of the lever between the base and the base. A sample holder for holding the deformed sample.