JP2000006019A - Grinding method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the poor processing of a work securely, even though the work is ground and processed after grinding wheels are dressed. SOLUTION: In a grinding method by inserting and setting a work between a pair of grinding wheels 21 and 22, and grinding the work while the work is rotation contacting to the grinding wheels 21 and 22, a dammy work is inserted and set between the upper and the lower grinding wheels 22 and 21, and the grinding operation surfaces 22a and 21a of the both grinding wheels 22 and 21 are rotationally contacted to the dammy work, so as to dress the grinding surfaces 22a and 21a of the grinding wheels 22 and 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding method for ultra-precise grinding of a surface of a work made of a brittle material.

[0002]

2. Description of the Related Art For example, in order to grind a wafer-like work made of a brittle material cut with a wire saw or the like, or a thin plate-like work such as glass or ceramic, a grinding stone is brought into rotational contact with the upper and lower surfaces of the work. ing. The grindstone used in this grinding has abrasive grains such as diamond bonded by a bonding material. Grinding for a predetermined period of time causes clogging and blinding of the abrasive grains on the grinding surface of the grindstone, so that truing is performed periodically. However, in the state immediately after truing, clogging and blinding on the grinding action surface are eliminated, but the abrasive grains are buried in the binder and the grinding action face is in a flat state. That is, if the grinding is performed as it is, the grinding resistance is large and heat is generated, and the workpiece is warped to cause a processing defect. For this reason, after truing is completed, a white stone is pressed against a rotating grindstone to dress the grinding surface and dress the abrasive grains.

[0003]

However, in the conventional grinding method, dressing is performed manually using a white stone, so that the efficiency is low and it is difficult to uniformly dress the grinding surface of the grindstone. Therefore, when the processing of the work is started after the dressing, the first few sheets cannot avoid the defective grinding.

[0004] The present invention has been made in view of the above problems, and an object of the present invention is to provide a method for dressing a grindstone after dressing.
It is an object of the present invention to provide a grinding method that can reliably prevent processing defects of a work even when the work is ground.

[0005]

According to a first aspect of the present invention, there is provided a grinding method in which a work is inserted between a pair of grindstones and the work is ground while the grindstone is in rotational contact with the work. Instead, a dummy work with the same shape as the work is inserted between the two grindstones, and the grinding work surfaces of both grindstones are brought into rotational contact with the dummy work while rotating the dummy work, thereby dressing the grinding work surface of the grindstone. I did it.

According to a second aspect of the present invention, in the grinding method according to the first aspect, the dressing is performed after the grinding operation surface of the grinding wheel is trued by a dresser.
According to a third aspect of the present invention, in the grinding method according to the first or second aspect, the dressing is performed by alternately replacing a plurality of dummy works between the two grindstones.

[0007]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Although the embodiments described below are preferred specific examples of the present invention, various technically preferable limitations are given thereto. However, the scope of the present invention is particularly limited in the following description. Is not limited to these embodiments unless otherwise described.

FIG. 1 shows a double-sided surface grinder according to an embodiment of the present invention, which is provided with a lower frame 11. An intermediate frame 12 is fixed on the lower frame 11.
An upper frame 13 is fixed to an upper portion of the intermediate frame 12. Further, on the lower frame 11, a lower grinding wheel rotating / elevating mechanism 14, a work supporting mechanism 15, and a dresser 18 are provided.
(See FIGS. 2 and 6) and the like, and the upper frame 13 is provided with an upper grindstone rotating / elevating mechanism 16.

The rotary shaft 1 of the two whetstone rotary elevating mechanisms 14 and 16
Wheel bases 17 are attached to 4a and 16a so as to face each other. Upper and lower whetstones 22 and 21 are fixed to each whetstone base 17, and their grinding action surfaces 22a and 2
1a are parallel to each other. And the rotating shaft 14
The upper and lower grindstones 22 and 21 are rotated by the rotation of a and 16a, and the grinding action surfaces 22a and 21a are brought into rotational contact with the work 19, whereby the upper and lower surfaces of the work 19 are simultaneously ground. Note that the lower grindstone rotating / elevating mechanism 14 is controlled by the control device 101 through the lower grindstone rotating / elevating control unit 102 to rotate and raise / lower the lower rotating grindstone 21.
The upper grindstone rotating / elevating mechanism 16 is controlled by the control device 101 via the upper grindstone rotating / elevating control unit 103.
Is controlled.

As shown in FIGS. 2 and 3, the wheel base metal 17 is formed in a disk shape, and a mounting boss 26 is formed at the center of the back surface of the wheel base metal 17 so as to protrude.
A plurality of mounting screw holes 27 are formed in the mounting boss 26 at predetermined intervals. Then, in a state where the mounting boss portion 26 is fitted to the rotating shafts 14a, 16a of the respective rotary elevating mechanisms 14, 16, each of the mounting screw holes 27 and the rotating shafts 14a, 16a
The screw 29 is screwed into the shaft, so that the grindstone base 17 is attached to the rotating shafts 14a and 16a.

A recess 31 is provided at the center of the end surface of the grindstone base 17.
Is formed, and a step-like mounting seat 32 is formed on the outer peripheral edge thereof. A plurality of rectangular parallelepiped whetstone segments 33 constituting the upper and lower whetstones 22 and 21 are bonded and fixed to the mounting seat 32 at predetermined intervals on the same circumference.

As shown in FIGS. 7 and 8, each of the grinding stone segments 33 is formed by bonding abrasive grains 33a such as diamond to a bonding material 33.
The structure is connected by b. Further, as the bonding material 33b, a material called metal bond, which is a metal such as nickel, a resin, or the like is used.

The structure of the work supporting mechanism 15 will be described in detail with reference to FIGS. 1, 4 and 5. Work support mechanism 1
The moving frame 53 of the support 52 in 5 is supported on the support 52 via a pair of guide rails 54 so as to be movable in the horizontal direction. The moving motor 55 is provided on the support base 52, and the moving frame 53 is moved via the ball screw 56 by the rotation of the moving motor 55. The movement motor 55 includes a movement motor control unit 104 and the control device 1.
01 controls the rotation.

An annular rotating frame 57 is placed on the moving frame 53 by three.
It is rotatably supported via a plurality of guide rollers 58, and a gear 59 is formed on the outer periphery of its lower part. Work 19
The carrier plate 60 for holding the workpiece 19 is stretched on the lower surface of the rotating frame 57, and the work piece 19 is provided at the center of the carrier plate 60.
There is formed a setting hole 60a for detachably setting. The rotating motor 61 is disposed on a moving frame 53 via a bracket 61a, and a rotating shaft 57
The gear 62 that meshes with the gear 59 is fixed. The rotation of the rotation motor 61 causes the gears 62,
The rotation frame 57 is rotated via the rotation frame 59, and the work 19 is rotated integrally with the rotation frame 57. The rotation motor 61
The rotation is controlled by the rotation motor control unit 105 and the control unit 101.

As shown in FIG. 2 and FIG. 6, the dresser 18
2 above. The dresser 18 includes a rotating arm 71 which is connected to the rotating shaft 14 of
The rotary arm 71 is supported by a rotary shaft 72 parallel to the rotary shafts a and 16a, and is rotated by a rotary motor (not shown).
A dressing wheel 73 is rotatably supported at the tip of the rotating arm 71, and the dressing wheel 73 is rotated by a rotation motor 74.

During the grinding process, the rotating arm 71 is retracted to a position outside the upper and lower grinding wheels 22, 21 as shown by a dashed line in FIG. On the other hand, at the time of truing, as shown by a solid line in FIG. 2, the rotating arm 71 is rotated between the upper and lower grindstones 22 and 21, and the dressing wheel 73 is disposed relatively to the upper and lower grindstones 22 and 21.

Next, the operation of the double-sided surface grinder thus configured will be described. As the processing is continued, the grindstone is clogged or blinded, and the truing of the grinding action surfaces 22a, 21a of the upper and lower grindstones 22, 21 is performed first.
That is, in a state where the upper and lower grinding wheels 22, 21 are rotated, FIG.
The rotary arm 71 that has been retracted to the position outside the upper and lower grindstones 22 and 21 at the position shown by the dashed line in FIG. 2 is rotated between the upper and lower grindstones 22 and 21 at the position shown by the solid line in FIG. Thus, the dressing wheel 73 is also disposed relative to the upper and lower grindstones 22 and 21, and the respective grinding action surfaces 22a and 21a of the upper and lower grindstones 22 and 21 are trued. As shown in FIG. 7, the entire grinding action surfaces 22a, 21a of the upper and lower grinding wheels 22, 21 are shaped by truing.

When the truing is completed, an instruction "Please insert a dummy work" is displayed on the carrier plate 60 on which the work 19 is set on the display screen (not shown) of the operation panel. When this display is given, the operator sets a dummy work 19b having the same shape as the regular work 19 on the carrier plate 60 as shown in FIG. The dummy work 19b has the same shape as the work 19, and is made of white alundum made of, for example, aluminum oxide as an abrasive.

The dummy work 19b is a work support mechanism 1
5 while being supported by the carrier plate 60, inserted between the grindstones 22 and 21 of the vertical grindstone rotating / elevating mechanisms 14 and 16. Then, the grinding wheel 2 of the upper grinding wheel rotating and lifting mechanism 16
2 is lowered and approached toward the work 19, and the upper and lower whetstones 2
2, 21 are rotated at high speed. And the upper and lower whetstones 22 and 2
The first grinding action surfaces 22a, 21a are joined to the dummy work 19b, and the upper and lower grinding wheels 22, 21 are dressed.
This dressing is performed between the upper and lower whetstones 22 and 21 by a plurality of (about 3 or 4 in this embodiment) dummy work 1.
9b is performed alternately. As shown in FIG. 8, by the dressing using the dummy work 19b, the binder 33b of the grindstone segment 33 is mainly shaved on the grinding action surfaces 22a, 21a of the upper and lower grindstones 22, 21, and the protrusion amount of the abrasive grains 33a is reduced. The bonding material protrudes. When the dressing is completed, “grinding is OK” is displayed on the display screen of the operation panel.

Next, in order to perform the grinding process, the regular work 19 is inserted and arranged between the grindstones 22 and 21 of the upper and lower grindstone rotating / elevating mechanisms 14 and 16 while the regular work 19 is supported by the carrier plate 60 of the work support mechanism 15. Is done. In this state, the grinding action surfaces 22a and 21a of the upper and lower grinding wheels 22 and 21 are
And the upper and lower surfaces of the work 19 are simultaneously ground. In this grinding, since the upper and lower grinding wheels 22 and 21 are dressed by the dummy work 19b, the work 19 is not wasted.

Next, effects that can be found from the present embodiment will be described below. The grinding action surfaces 22a, 21a of the upper and lower whetstones 22, 21 are brought into rotational contact with the dummy work 19b in place of the work 19, so that the grinding action surfaces 21 of the two whetstones 22, 21 are brought into contact.
a and 22a are dressed. Therefore, the abrasive grains 33a of each grinding wheel segment 33 in the upper and lower grinding wheels 22 and 21.
Can surely be uniformed. Therefore, even if the regular work 19 is ground after the upper and lower whetstones 22 and 21 are dressed, processing defects of the work 19 can be prevented, and the work 19 is not wasted. Further, since it is not necessary for an operator to manually dress the dressing, dressing can be easily performed without skill.

Since the dressing is performed after the truing is completed, the abrasive grains 33a contained in the grindstones 22 and 21 can be reliably dressed. -Since the plurality of dummy works 19b are alternately dressed, dressing in the upper and lower whetstones 22 and 21 can be performed more reliably. Therefore, in the grinding after the dressing, processing defects of the regular work 19 can be more reliably prevented.

A dummy work 19b having the same shape as the work 19 is rotated while being chucked, and the dummy work 19b is made of white alundum as an abrasive. Therefore, the grinding machine can be used as a dressing device, and it is not necessary to newly provide a dedicated dressing facility. Therefore, it is possible to prevent the equipment cost from increasing.

The above embodiment can be embodied and configured as follows. The dressing by the dummy work 19b is not performed after the truing but is performed by interrupting the grinding of the work 19.

In place of using white alundum as the dummy work 19b, another metal abrasive is used. Alternatively, the dummy work 19 b is made of the same material as the regular work 19. Alternatively, use a material that is harder than the work 19.

When dressing, the dummy work 1
Use only one 9b. Next, technical ideas other than the claims that can be grasped from the embodiment will be described together with their effects.

The grinding method according to any one of claims 1 to 3, wherein the dummy work is a wafer-shaped abrasive.
According to this method, the grinding machine can also be used for dressing, and it is not necessary to newly provide equipment dedicated to dressing.

The grinding method according to any one of claims 1 to 3, wherein the abrasive comprises white alundum. According to this method, dressing can be performed without increasing running costs.

[0029]

Since the present invention is configured as described above, it has the following effects. According to the invention of claim 1, even after grinding the work after dressing the grindstone, it is possible to prevent processing defects of the work,
It is possible to stabilize grinding processing and reduce costs without wasting work that can be used as a product.

According to the second aspect of the present invention, sharpening of the abrasive grains contained in the grindstone can be reliably performed. According to the third aspect of the present invention, it is possible to more reliably prevent processing defects of the work.

[Brief description of the drawings]

FIG. 1 is an overall front view of a grinding machine embodying an embodiment.

FIG. 2 is an enlarged view of a grinding tool and its peripheral members.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is a plan view of a work supporting mechanism.

FIG. 5 is an enlarged cross-sectional view illustrating a configuration of a work holding unit.

FIG. 6 is a side view of a dresser and the like.

FIG. 7 is an enlarged sectional view of a grinding wheel segment showing a state after truing.

FIG. 8 is an enlarged sectional view of the grinding wheel segment showing a state after dressing.

[Explanation of symbols]

19: Work, 19b: Dummy work, 21: Lower whetstone,
22: Upper whetstone, 21a, 22a: Grinding action surface

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Tetsuo Okuyama 1 Shinmeicho, Yokosuka City, Kanagawa Prefecture F-term in Hihira Toyama Technical Center Co., Ltd. 3C043 BC06 3C047 AA15 AA16 BB02 BB11 BB15

Claims (3)

[Claims] 1. A work is inserted and arranged between a pair of whetstones,
In the grinding method that grinds the work while rotating the grindstone against the work, a dummy work of the same shape as the work is inserted between both grindstones instead of the work, and the dummy work is A grinding method in which the grinding action surfaces of both grinding wheels are brought into rotary contact to dress the grinding action surfaces of the grinding wheels. 2. The dressing is performed after the grinding operation surface of the grinding wheel is trued by a dresser.
Grinding method described in 1. 3. The grinding method according to claim 1, wherein the dressing is performed by alternately replacing a plurality of dummy works between the two grindstones.