JP1746528S - 空気加熱用フィン付ヒータ - Google Patents
空気加熱用フィン付ヒータInfo
- Publication number
- JP1746528S JP1746528S JP2022026757F JP2022026757F JP1746528S JP 1746528 S JP1746528 S JP 1746528S JP 2022026757 F JP2022026757 F JP 2022026757F JP 2022026757 F JP2022026757 F JP 2022026757F JP 1746528 S JP1746528 S JP 1746528S
- Authority
- JP
- Japan
- Prior art keywords
- heater
- fins
- air heating
- efem
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Abstract
本物品は、ウェハを半導体製造装置に搬送するモジュールであるＥＦＥＭ（ｅｑｕｉｐｍｅｎｔ ｆｒｏｎｔ－ｅｎｄ ｍｏｄｕｌｅ）に用いられ、ＥＦＥＭに供給される空気を加熱する空気加熱用フィン付ヒータである。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022026757F JP1746528S (ja) | 2022-12-13 | 2022-12-13 | 空気加熱用フィン付ヒータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022026757F JP1746528S (ja) | 2022-12-13 | 2022-12-13 | 空気加熱用フィン付ヒータ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1746528S true JP1746528S (ja) | 2023-06-16 |
Family
ID=86721196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022026757F Active JP1746528S (ja) | 2022-12-13 | 2022-12-13 | 空気加熱用フィン付ヒータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1746528S (ja) |
-
2022
- 2022-12-13 JP JP2022026757F patent/JP1746528S/ja active Active
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