JP1720449S - Getter plate for reactor for thin film deposition - Google Patents

Getter plate for reactor for thin film deposition

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Publication number
JP1720449S
JP1720449S JP2021028970F JP2021028970F JP1720449S JP 1720449 S JP1720449 S JP 1720449S JP 2021028970 F JP2021028970 F JP 2021028970F JP 2021028970 F JP2021028970 F JP 2021028970F JP 1720449 S JP1720449 S JP 1720449S
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Japan
Prior art keywords
thin film
film deposition
getter
reactor
plate
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JP2021028970F
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Japanese (ja)
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Abstract

本物品は、薄膜蒸着を行うための反応炉内で使用される。本物品は、ゲッター、すなわち、薄膜蒸着用反応炉に入り込む放射エネルギーを吸収して、薄膜蒸着用反応炉の内部表面に塗膜が生じるのを防ぐ器具として機能するプレートである。配置例を示す参考図１ないし４は、薄膜蒸着用反応炉に配置される各器具の配置例を示す。当該参考図において、Ｇｅｔｔｅｒ Ｐｌａｔｅ（ゲッタープレート）はゲッターとして機能するプレート、Ｇｅｔｔｅｒ ｓｕｐｐｏｒｔ（ゲッター支持体）はゲッターを支持する支持体、Ｏｎｅ Ｐｉｅｃｅ Ｒｉｎｇ （ＯＰＲ）（ワンピースリング）はサセプタリング（サセプタの周囲に配置される器具）を表す。The article is used in a reactor for performing thin film deposition. The article is a getter, ie, a plate that functions as a device that absorbs radiant energy entering the thin film deposition reactor and prevents the formation of a coating on the interior surfaces of the thin film deposition reactor. Reference FIGS. 1 to 4 showing examples of arrangement show examples of arrangement of each device arranged in a reaction furnace for thin film deposition. In the reference diagram, Getter Plate is a plate that functions as a getter, Getter support is a support that supports the getter, and One Piece Ring (OPR) is a susceptor ring (around the susceptor). (instruments placed in the

JP2021028970F 2021-06-30 2021-12-29 Getter plate for reactor for thin film deposition Active JP1720449S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/797,476 USD1028913S1 (en) 2021-06-30 2021-06-30 Semiconductor deposition reactor ring

Publications (1)

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JP1720449S true JP1720449S (en) 2022-07-22

Family

ID=82458069

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2021028972F Active JP1720451S (en) 2021-06-30 2021-12-29 Getter support for reactors for thin film deposition
JP2021028970F Active JP1720449S (en) 2021-06-30 2021-12-29 Getter plate for reactor for thin film deposition
JP2021028969F Active JP1720448S (en) 2021-06-30 2021-12-29 Getter support for reactors for thin film deposition
JP2021028971F Active JP1720450S (en) 2021-06-30 2021-12-29 Susceptor ring for reactor for thin film deposition

Family Applications Before (1)

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JP2021028972F Active JP1720451S (en) 2021-06-30 2021-12-29 Getter support for reactors for thin film deposition

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2021028969F Active JP1720448S (en) 2021-06-30 2021-12-29 Getter support for reactors for thin film deposition
JP2021028971F Active JP1720450S (en) 2021-06-30 2021-12-29 Susceptor ring for reactor for thin film deposition

Country Status (3)

Country Link
US (1) USD1028913S1 (en)
JP (4) JP1720451S (en)
TW (4) TWD223766S (en)

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Also Published As

Publication number Publication date
TWD223524S (en) 2023-02-11
TWD223765S (en) 2023-02-11
JP1720451S (en) 2022-07-22
JP1720450S (en) 2022-07-22
JP1720448S (en) 2022-07-22
USD1028913S1 (en) 2024-05-28
TWD223766S (en) 2023-02-11
TWD223767S (en) 2023-02-11

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