JP1700777S - - Google Patents
Info
- Publication number
- JP1700777S JP1700777S JPD2021-5258F JP2021005258F JP1700777S JP 1700777 S JP1700777 S JP 1700777S JP 2021005258 F JP2021005258 F JP 2021005258F JP 1700777 S JP1700777 S JP 1700777S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2021-5258F JP1700777S (ko) | 2021-03-15 | 2021-03-15 | |
| TW110304575F TWD225035S (zh) | 2021-03-15 | 2021-08-31 | 基板處理裝置用晶舟之部分 |
| US29/807,738 USD981971S1 (en) | 2021-03-15 | 2021-09-14 | Boat of substrate processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2021-5258F JP1700777S (ko) | 2021-03-15 | 2021-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1700777S true JP1700777S (ko) | 2021-11-29 |
Family
ID=78766340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JPD2021-5258F Active JP1700777S (ko) | 2021-03-15 | 2021-03-15 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD981971S1 (ko) |
| JP (1) | JP1700777S (ko) |
| TW (1) | TWD225035S (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1731674S (ko) * | 2022-05-30 | 2022-12-08 | ||
| JP1731673S (ko) * | 2022-05-30 | 2022-12-08 | ||
| JP1731675S (ko) * | 2022-05-30 | 2022-12-08 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD302382S (en) * | 1987-08-19 | 1989-07-25 | Bleakley David M | Pin for locking or stopping a sliding window sash |
| EP1006562A3 (en) * | 1998-12-01 | 2005-01-19 | Greene, Tweed Of Delaware, Inc. | Two-piece clamp ring for holding semiconductor wafer or other workpiece |
| US6455395B1 (en) * | 2000-06-30 | 2002-09-24 | Integrated Materials, Inc. | Method of fabricating silicon structures including fixtures for supporting wafers |
| JP2002324830A (ja) * | 2001-02-20 | 2002-11-08 | Mitsubishi Electric Corp | 基板熱処理用保持具、基板熱処理装置、半導体装置の製造方法、基板熱処理用保持具の製造方法及び基板熱処理用保持具の構造決定方法 |
| JP4467028B2 (ja) * | 2001-05-11 | 2010-05-26 | 信越石英株式会社 | 縦型ウェーハ支持治具 |
| ATE535015T1 (de) * | 2004-09-01 | 2011-12-15 | Nikon Corp | Substrathalter, bühnenvorrichtung und belichtungsvorrichtung |
| USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
| US9153466B2 (en) | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
| TWD166332S (zh) * | 2013-03-22 | 2015-03-01 | 日立國際電氣股份有限公司 | 基板處理裝置用晶舟之部分 |
| US9343304B2 (en) * | 2014-09-26 | 2016-05-17 | Asm Ip Holding B.V. | Method for depositing films on semiconductor wafers |
| CN107533996B (zh) * | 2015-04-10 | 2021-02-23 | Ev 集团 E·索尔纳有限责任公司 | 衬底固持器和用于接合两个衬底的方法 |
| CN111128814A (zh) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | 晶舟 |
| KR102406942B1 (ko) * | 2019-09-16 | 2022-06-10 | 에이피시스템 주식회사 | 엣지 링 및 이를 포함하는 열처리 장치 |
| JP1665228S (ko) * | 2019-11-28 | 2020-08-03 | ||
| CN114378751B (zh) * | 2020-10-20 | 2022-11-01 | 长鑫存储技术有限公司 | 晶圆用承载环的安装夹具 |
| CN114628291A (zh) * | 2022-04-01 | 2022-06-14 | 合肥真萍电子科技有限公司 | 一种晶圆烘烤用石英舟结构 |
-
2021
- 2021-03-15 JP JPD2021-5258F patent/JP1700777S/ja active Active
- 2021-08-31 TW TW110304575F patent/TWD225035S/zh unknown
- 2021-09-14 US US29/807,738 patent/USD981971S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD981971S1 (en) | 2023-03-28 |
| TWD225035S (zh) | 2023-05-01 |