JP1584066S - - Google Patents
Info
- Publication number
- JP1584066S JP1584066S JPD2017-729F JP2017000729F JP1584066S JP 1584066 S JP1584066 S JP 1584066S JP 2017000729 F JP2017000729 F JP 2017000729F JP 1584066 S JP1584066 S JP 1584066S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2017-729F JP1584066S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2017-01-18 | 2017-01-18 | |
| US29/610,847 USD868012S1 (en) | 2017-01-18 | 2017-07-17 | Cassette receiving tool for semiconductor manufacturing apparatus |
| TW106304101F TWD191015S (zh) | 2017-01-18 | 2017-07-18 | Compartment for cabin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2017-729F JP1584066S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2017-01-18 | 2017-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1584066S true JP1584066S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2017-08-21 |
Family
ID=59593655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JPD2017-729F Active JP1584066S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2017-01-18 | 2017-01-18 |
Country Status (3)
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1665228S (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 2019-11-28 | 2020-08-03 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10139159A (ja) * | 1996-11-13 | 1998-05-26 | Tokyo Electron Ltd | カセットチャンバ及びカセット搬入搬出機構 |
| JPH10147432A (ja) * | 1996-11-20 | 1998-06-02 | Tokyo Electron Ltd | カセットチャンバ |
| US6152680A (en) * | 1997-08-26 | 2000-11-28 | Daitron, Inc. | Wafer cassette rotation mechanism |
| US6270307B1 (en) * | 1999-01-25 | 2001-08-07 | Chartered Semiconductor Manufacturing Company | Method for aligning wafers in a cassette |
| US6595841B2 (en) * | 2001-12-20 | 2003-07-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process |
| USD665759S1 (en) * | 2010-12-14 | 2012-08-21 | Tokyo Electron Limited | Substrate transfer holder |
| USD674365S1 (en) * | 2011-01-20 | 2013-01-15 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
| TWM418159U (en) | 2011-07-01 | 2011-12-11 | Qun-Jing Kong | Improved stopper structure of window |
| USD701498S1 (en) * | 2011-10-20 | 2014-03-25 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
| USD695240S1 (en) * | 2011-10-20 | 2013-12-10 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
| US8676375B2 (en) * | 2012-02-27 | 2014-03-18 | Veeco Instruments Inc. | Automated cassette-to-cassette substrate handling system |
-
2017
- 2017-01-18 JP JPD2017-729F patent/JP1584066S/ja active Active
- 2017-07-17 US US29/610,847 patent/USD868012S1/en active Active
- 2017-07-18 TW TW106304101F patent/TWD191015S/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TWD191015S (zh) | 2018-06-11 |
| USD868012S1 (en) | 2019-11-26 |