ITUB20160719A1 - Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia mems - Google Patents
Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia memsInfo
- Publication number
- ITUB20160719A1 ITUB20160719A1 ITUB2016A000719A ITUB20160719A ITUB20160719A1 IT UB20160719 A1 ITUB20160719 A1 IT UB20160719A1 IT UB2016A000719 A ITUB2016A000719 A IT UB2016A000719A IT UB20160719 A ITUB20160719 A IT UB20160719A IT UB20160719 A1 ITUB20160719 A1 IT UB20160719A1
- Authority
- IT
- Italy
- Prior art keywords
- microspects
- picoprojector
- mirror group
- mems technology
- mems
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00198—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/07—Integrating an electronic processing unit with a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITUB2016A000719A ITUB20160719A1 (it) | 2016-02-12 | 2016-02-12 | Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia mems |
US15/264,446 US10338378B2 (en) | 2016-02-12 | 2016-09-13 | Mirror group, in particular for a picoprojector, comprising micromirrors made using the MEMS technology |
CN201610875917.5A CN107082406B (zh) | 2016-02-12 | 2016-09-30 | 特别是用于微型投影仪的、包括使用mems技术制造的微镜面的镜面组件 |
CN201621102197.0U CN206441727U (zh) | 2016-02-12 | 2016-09-30 | 镜面组件和用于组装集成微镜面的薄片金属卷带 |
EP16194664.5A EP3206071B1 (en) | 2016-02-12 | 2016-10-19 | Mirror group, in particular for a picoprojector, comprising micromirrors made using the mems technology |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITUB2016A000719A ITUB20160719A1 (it) | 2016-02-12 | 2016-02-12 | Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia mems |
Publications (1)
Publication Number | Publication Date |
---|---|
ITUB20160719A1 true ITUB20160719A1 (it) | 2017-08-12 |
Family
ID=55806706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITUB2016A000719A ITUB20160719A1 (it) | 2016-02-12 | 2016-02-12 | Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia mems |
Country Status (4)
Country | Link |
---|---|
US (1) | US10338378B2 (it) |
EP (1) | EP3206071B1 (it) |
CN (2) | CN206441727U (it) |
IT (1) | ITUB20160719A1 (it) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITUB20160719A1 (it) * | 2016-02-12 | 2017-08-12 | St Microelectronics Srl | Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia mems |
US10841548B2 (en) * | 2016-03-01 | 2020-11-17 | Funai Electric Co., Ltd. | Oscillating mirror element and projector |
US10237515B2 (en) * | 2017-03-28 | 2019-03-19 | Stmicroelectronics Ltd | MEMS projector using multiple laser sources |
CN107966810A (zh) * | 2017-12-19 | 2018-04-27 | 无锡英菲感知技术有限公司 | 一种二维扫描微镜 |
CN113031256B (zh) * | 2019-12-09 | 2023-05-09 | 觉芯电子(无锡)有限公司 | 一种集成透镜阵列的微镜、微镜制备方法及激光显示系统 |
CN113031287A (zh) * | 2019-12-09 | 2021-06-25 | 觉芯电子(无锡)有限公司 | 一种光学积分器、散斑抑制装置及其激光显示系统 |
US11550210B2 (en) | 2020-05-29 | 2023-01-10 | Mega1 Company Ltd. | Projecting apparatus |
IT202000022715A1 (it) | 2020-09-25 | 2022-03-25 | St Microelectronics Srl | Modulo elettronico integrato includente due microspecchi, e sistema che include il modulo elettronico |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040252501A1 (en) * | 2002-04-24 | 2004-12-16 | Hideo Moriyama | Light source coupler, illuminant device, patterned conductor, and method for manufacturing light source coupler |
US20050013534A1 (en) * | 2003-07-14 | 2005-01-20 | Atsushi Kazama | Beam direction module and optical switch using the same |
US20090190201A1 (en) * | 2008-01-30 | 2009-07-30 | Olympus Corporation | Micromirror device |
DE102014208498A1 (de) * | 2014-05-07 | 2015-11-12 | Robert Bosch Gmbh | Montagekörper für Mikrospiegelchips, Spiegelvorrichtung und Herstellungsverfahren für eine Spiegelvorrichtung |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10240598A1 (de) | 2002-08-27 | 2004-03-25 | Carl Zeiss Smt Ag | Optisches Abbildungssystem, insbesondere katadioptrisches Reduktionsobjektiv |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
TWI225246B (en) | 2003-05-21 | 2004-12-11 | Fan-Gang Tseng | Micro optical pickup head module, method of manufacturing the same and method of manufacturing the objective lens of the same |
JP4680833B2 (ja) | 2006-05-23 | 2011-05-11 | 株式会社東海理化電機製作所 | コネクタ及び鏡面角度調整装置 |
US7817331B2 (en) | 2007-06-21 | 2010-10-19 | Jds Uniphase Corporation | MEMS device with an angular vertical comb actuator |
CN101532880B (zh) | 2008-03-12 | 2010-12-15 | 中国科学院西安光学精密机械研究所 | 双动镜干涉仪 |
IL195919A0 (en) | 2008-12-14 | 2009-09-01 | Btendo Ltd | Device and method for scanning images by a laser projector |
JP2011123245A (ja) | 2009-12-10 | 2011-06-23 | Panasonic Corp | 光学反射素子 |
JP2013190448A (ja) | 2010-06-30 | 2013-09-26 | Sharp Corp | 表示装置 |
JP2014142517A (ja) | 2013-01-24 | 2014-08-07 | Funai Electric Co Ltd | 振動ミラー素子およびプロジェクタ機能を有する電子機器 |
ITUB20160719A1 (it) * | 2016-02-12 | 2017-08-12 | St Microelectronics Srl | Gruppo specchio, in particolare per picoproiettore, comprendente microspecchi realizzati in tecnologia mems |
-
2016
- 2016-02-12 IT ITUB2016A000719A patent/ITUB20160719A1/it unknown
- 2016-09-13 US US15/264,446 patent/US10338378B2/en active Active
- 2016-09-30 CN CN201621102197.0U patent/CN206441727U/zh not_active Withdrawn - After Issue
- 2016-09-30 CN CN201610875917.5A patent/CN107082406B/zh active Active
- 2016-10-19 EP EP16194664.5A patent/EP3206071B1/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040252501A1 (en) * | 2002-04-24 | 2004-12-16 | Hideo Moriyama | Light source coupler, illuminant device, patterned conductor, and method for manufacturing light source coupler |
US20050013534A1 (en) * | 2003-07-14 | 2005-01-20 | Atsushi Kazama | Beam direction module and optical switch using the same |
US20090190201A1 (en) * | 2008-01-30 | 2009-07-30 | Olympus Corporation | Micromirror device |
DE102014208498A1 (de) * | 2014-05-07 | 2015-11-12 | Robert Bosch Gmbh | Montagekörper für Mikrospiegelchips, Spiegelvorrichtung und Herstellungsverfahren für eine Spiegelvorrichtung |
Also Published As
Publication number | Publication date |
---|---|
US10338378B2 (en) | 2019-07-02 |
CN107082406B (zh) | 2019-05-28 |
US20170235128A1 (en) | 2017-08-17 |
CN206441727U (zh) | 2017-08-25 |
EP3206071B1 (en) | 2018-09-19 |
CN107082406A (zh) | 2017-08-22 |
EP3206071A1 (en) | 2017-08-16 |
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