ITUB20156268A1 - Dispositivo sensore di pressione per misurare una pressione differenziale normale al dispositivo e relativi metodi - Google Patents

Dispositivo sensore di pressione per misurare una pressione differenziale normale al dispositivo e relativi metodi

Info

Publication number
ITUB20156268A1
ITUB20156268A1 ITUB2015A006268A ITUB20156268A ITUB20156268A1 IT UB20156268 A1 ITUB20156268 A1 IT UB20156268A1 IT UB2015A006268 A ITUB2015A006268 A IT UB2015A006268A IT UB20156268 A ITUB20156268 A IT UB20156268A IT UB20156268 A1 ITUB20156268 A1 IT UB20156268A1
Authority
IT
Italy
Prior art keywords
measure
related methods
pressure sensor
normal differential
sensor device
Prior art date
Application number
ITUB2015A006268A
Other languages
English (en)
Inventor
Alessandro Motta
Alberto Pagani
Giovanni Sicurella
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Publication of ITUB20156268A1 publication Critical patent/ITUB20156268A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
ITUB2015A006268A 2015-06-30 2015-12-04 Dispositivo sensore di pressione per misurare una pressione differenziale normale al dispositivo e relativi metodi ITUB20156268A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/754,788 US9719874B2 (en) 2015-06-30 2015-06-30 Pressure sensor device for measuring a differential normal pressure to the device and related methods

Publications (1)

Publication Number Publication Date
ITUB20156268A1 true ITUB20156268A1 (it) 2017-06-04

Family

ID=57683714

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUB2015A006268A ITUB20156268A1 (it) 2015-06-30 2015-12-04 Dispositivo sensore di pressione per misurare una pressione differenziale normale al dispositivo e relativi metodi

Country Status (3)

Country Link
US (2) US9719874B2 (it)
CN (2) CN206132282U (it)
IT (1) ITUB20156268A1 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9719874B2 (en) * 2015-06-30 2017-08-01 Stmicroelectronics S.R.L. Pressure sensor device for measuring a differential normal pressure to the device and related methods
CN108760100B (zh) * 2018-04-10 2021-02-02 苏州敏芯微电子技术股份有限公司 一种差压压力传感器的制备方法
US11650110B2 (en) 2020-11-04 2023-05-16 Honeywell International Inc. Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396417A1 (fr) 1977-06-29 1979-01-26 Tokyo Shibaura Electric Co Composant semi-conducteur comprenant une resistance
CN85103486B (zh) * 1985-05-03 1988-03-02 闵志骞 直读式数字传感器
US5094973A (en) 1987-11-23 1992-03-10 Texas Instrument Incorporated Trench pillar for wafer processing
FR2653197B1 (fr) * 1989-10-12 1991-12-27 Vulcanic Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede.
WO2004046704A1 (ja) 2002-11-15 2004-06-03 Renesas Technology Corp. 建造物品質モニタシステム、建造物品質モニタ方法、及びそれらに用いられる半導体集積回路装置
DE102004003853B4 (de) 2004-01-26 2009-12-17 Infineon Technologies Ag Vorrichtung und Verfahren zur Kompensation von Piezo-Einflüssen auf eine integrierte Schaltungsanordnung
US7856885B1 (en) * 2006-04-19 2010-12-28 University Of South Florida Reinforced piezoresistive pressure sensor
CN1932462A (zh) * 2006-09-15 2007-03-21 杨旸 环形振荡器式数字压力传感器及其制作方法
US8378834B1 (en) 2008-05-02 2013-02-19 Captive-Aire Systems, Inc. Kitchen hood assembly with fire suppression control system including multiple monitoring circuits
ITMI20120912A1 (it) * 2012-05-25 2013-11-26 St Microelectronics Srl Package in materiale edilizio per dispositivo di monitoraggio di parametri, all'interno di una struttura solida, e relativo dispositivo.
US10317297B2 (en) * 2013-12-11 2019-06-11 Melexis Technologies Nv Semiconductor pressure sensor
US9835515B2 (en) 2014-10-10 2017-12-05 Stmicroeletronics S.R.L. Pressure sensor with testing device and related methods
US9887165B2 (en) 2014-12-10 2018-02-06 Stmicroelectronics S.R.L. IC with insulating trench and related methods
US9726587B2 (en) 2015-01-30 2017-08-08 Stmicroelectronics S.R.L. Tensile stress measurement device with attachment plates and related methods
US9719874B2 (en) * 2015-06-30 2017-08-01 Stmicroelectronics S.R.L. Pressure sensor device for measuring a differential normal pressure to the device and related methods
US9704624B2 (en) 2015-06-30 2017-07-11 Stmicroelectronics S.R.L. Integrated circuit (IC) including semiconductor resistor and resistance compensation circuit and related methods

Also Published As

Publication number Publication date
CN206132282U (zh) 2017-04-26
US10041848B2 (en) 2018-08-07
CN106323513A (zh) 2017-01-11
US20170003186A1 (en) 2017-01-05
CN106323513B (zh) 2019-11-26
US20170307456A1 (en) 2017-10-26
US9719874B2 (en) 2017-08-01

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