ITUA20161818A1 - Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione - Google Patents

Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione

Info

Publication number
ITUA20161818A1
ITUA20161818A1 ITUA2016A001818A ITUA20161818A ITUA20161818A1 IT UA20161818 A1 ITUA20161818 A1 IT UA20161818A1 IT UA2016A001818 A ITUA2016A001818 A IT UA2016A001818A IT UA20161818 A ITUA20161818 A IT UA20161818A IT UA20161818 A1 ITUA20161818 A1 IT UA20161818A1
Authority
IT
Italy
Prior art keywords
picoprojector
mems
manufacturing
flying spot
spot type
Prior art date
Application number
ITUA2016A001818A
Other languages
English (en)
Inventor
Guido Chiaretti
Fabio Luigi Grilli
Roberto Carminati
Lorenzo Sarchi
Bruno Murari
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITUA2016A001818A priority Critical patent/ITUA20161818A1/it
Priority to US15/280,704 priority patent/US10018835B2/en
Priority to CN201621103291.8U priority patent/CN206363065U/zh
Priority to CN201610876946.3A priority patent/CN107203085B/zh
Publication of ITUA20161818A1 publication Critical patent/ITUA20161818A1/it
Priority to US16/007,951 priority patent/US10895740B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/142—Adjusting of projection optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3598—Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/2006—Lamp housings characterised by the light source
    • G03B21/2013—Plural light sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/20—Lamp housings
    • G03B21/2006—Lamp housings characterised by the light source
    • G03B21/2033—LED or laser light sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02251—Out-coupling of light using optical fibres
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3129—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] scanning a light beam on the display screen
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3504—Rotating, tilting or pivoting the waveguides, or with the waveguides describing a curved path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
ITUA2016A001818A 2016-03-18 2016-03-18 Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione ITUA20161818A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITUA2016A001818A ITUA20161818A1 (it) 2016-03-18 2016-03-18 Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione
US15/280,704 US10018835B2 (en) 2016-03-18 2016-09-29 Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method
CN201621103291.8U CN206363065U (zh) 2016-03-18 2016-09-30 投影mems设备、投影mems系统、便携式电子设备和便携式电子装置
CN201610876946.3A CN107203085B (zh) 2016-03-18 2016-09-30 投影mems设备、系统、装置及其制造方法
US16/007,951 US10895740B2 (en) 2016-03-18 2018-06-13 Projective MEMS device for a picoprojector of the flying spot type and related manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITUA2016A001818A ITUA20161818A1 (it) 2016-03-18 2016-03-18 Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione

Publications (1)

Publication Number Publication Date
ITUA20161818A1 true ITUA20161818A1 (it) 2017-09-18

Family

ID=56203813

Family Applications (1)

Application Number Title Priority Date Filing Date
ITUA2016A001818A ITUA20161818A1 (it) 2016-03-18 2016-03-18 Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione

Country Status (3)

Country Link
US (2) US10018835B2 (it)
CN (2) CN107203085B (it)
IT (1) ITUA20161818A1 (it)

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ITUA20161818A1 (it) * 2016-03-18 2017-09-18 St Microelectronics Srl Dispositivo mems proiettivo per un picoproiettore di tipo flying spot e relativo metodo di fabbricazione
EP3788427A4 (en) * 2018-05-03 2021-11-17 Thorlabs, Inc. LASER SCANNING HEAD DESIGN FOR THREE SCANNING MIRRORS WITH OPTICS
EP3811132B1 (en) * 2018-06-18 2023-11-15 Dolby Laboratories Licensing Corporation Modal-noise mitigator and associated method
CN111751981B (zh) * 2019-03-26 2022-11-08 成都理想境界科技有限公司 一种投影显示模组及投影显示设备
CN111538154B (zh) * 2020-04-28 2022-06-03 安徽中科米微电子技术有限公司 静电驱动mems微镜阵列及其制备方法
DE102021132134A1 (de) 2021-12-07 2023-06-07 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Gefaltetes multi-laserpackage

Citations (3)

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US6124663A (en) * 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US6164837A (en) * 1998-12-30 2000-12-26 Mcdonnell Douglas Corporation Integrated microelectromechanical alignment and locking apparatus and method for fiber optic module manufacturing
US20060222286A1 (en) * 2005-03-31 2006-10-05 Eastman Kodak Company Polarized light emitting source with an electro-optical addressing architecture

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DE20122526U1 (de) 2000-09-07 2006-06-01 Canesta, Inc., San Jose Eine Vorrichtung zum Erfassen und Lokalisieren einer Interaktion eines Benutzerobjekts und virtuelle Übertragungsvorrichtung
US20030012545A1 (en) * 2001-07-05 2003-01-16 Bellman Robert A. Broad-band variable optical attenuator
KR100674500B1 (ko) 2004-12-21 2007-01-25 주식회사 셀루온 광원 장착모듈
US7834867B2 (en) 2006-04-11 2010-11-16 Microvision, Inc. Integrated photonics module and devices using integrated photonics modules
US8941620B2 (en) 2010-01-06 2015-01-27 Celluon, Inc. System and method for a virtual multi-touch mouse and stylus apparatus
US20110188054A1 (en) 2010-02-02 2011-08-04 Primesense Ltd Integrated photonics module for optical projection
EP2330461A1 (de) 2010-03-26 2011-06-08 Bayer MaterialScience AG Projektionseinrichtung für einen Picoprojektor und holographischer Projektionsschirm
US20110317972A1 (en) * 2010-06-25 2011-12-29 Agency For Science, Technology And Research Optical device, optical arrangement and optical element holder
US20120113514A1 (en) 2010-11-08 2012-05-10 Polycom, Inc. Picoprojector with Image Stabilization [Image-Stabilized Projector]
US8323041B2 (en) 2011-02-17 2012-12-04 Citizen Finetech Miyota Co., Ltd. Connectors for connecting a projector module to an application module
UA74230U (ru) 2012-03-19 2012-10-25 Винницкий Национальный Университет Устройство визуализации заднего вида на транспорте
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Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US6124663A (en) * 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US6164837A (en) * 1998-12-30 2000-12-26 Mcdonnell Douglas Corporation Integrated microelectromechanical alignment and locking apparatus and method for fiber optic module manufacturing
US20060222286A1 (en) * 2005-03-31 2006-10-05 Eastman Kodak Company Polarized light emitting source with an electro-optical addressing architecture

Also Published As

Publication number Publication date
CN107203085B (zh) 2020-06-30
CN206363065U (zh) 2017-07-28
US20170269355A1 (en) 2017-09-21
CN107203085A (zh) 2017-09-26
US20180292645A1 (en) 2018-10-11
US10895740B2 (en) 2021-01-19
US10018835B2 (en) 2018-07-10

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