ITTO920077A1 - OPTICAL EXPOSURE SYSTEM FOR THE PROCESSING OF A SUBSTRATE BY EXCIMER LASER. - Google Patents

OPTICAL EXPOSURE SYSTEM FOR THE PROCESSING OF A SUBSTRATE BY EXCIMER LASER.

Info

Publication number
ITTO920077A1
ITTO920077A1 IT000077A ITTO920077A ITTO920077A1 IT TO920077 A1 ITTO920077 A1 IT TO920077A1 IT 000077 A IT000077 A IT 000077A IT TO920077 A ITTO920077 A IT TO920077A IT TO920077 A1 ITTO920077 A1 IT TO920077A1
Authority
IT
Italy
Prior art keywords
substrate
processing
excimer laser
exposure system
optical exposure
Prior art date
Application number
IT000077A
Other languages
Italian (it)
Inventor
Bello Umberto Del
Original Assignee
Istituto Per Le Ricerche Di Tecnologia Meccanica E
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Istituto Per Le Ricerche Di Tecnologia Meccanica E filed Critical Istituto Per Le Ricerche Di Tecnologia Meccanica E
Priority to ITTO920077A priority Critical patent/IT1256798B/en
Publication of ITTO920077A0 publication Critical patent/ITTO920077A0/en
Publication of ITTO920077A1 publication Critical patent/ITTO920077A1/en
Application granted granted Critical
Publication of IT1256798B publication Critical patent/IT1256798B/en

Links

ITTO920077A 1992-01-31 1992-01-31 Optical exposure system for processing a substrate by means of excimer laser IT1256798B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ITTO920077A IT1256798B (en) 1992-01-31 1992-01-31 Optical exposure system for processing a substrate by means of excimer laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO920077A IT1256798B (en) 1992-01-31 1992-01-31 Optical exposure system for processing a substrate by means of excimer laser

Publications (3)

Publication Number Publication Date
ITTO920077A0 ITTO920077A0 (en) 1992-01-31
ITTO920077A1 true ITTO920077A1 (en) 1993-07-31
IT1256798B IT1256798B (en) 1995-12-15

Family

ID=11409984

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO920077A IT1256798B (en) 1992-01-31 1992-01-31 Optical exposure system for processing a substrate by means of excimer laser

Country Status (1)

Country Link
IT (1) IT1256798B (en)

Also Published As

Publication number Publication date
IT1256798B (en) 1995-12-15
ITTO920077A0 (en) 1992-01-31

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19980129