ITTO920077A0 - OPTICAL EXPOSURE SYSTEM FOR PROCESSING A SUBSTRATE USING LASERS OR EXCIMERS - Google Patents
OPTICAL EXPOSURE SYSTEM FOR PROCESSING A SUBSTRATE USING LASERS OR EXCIMERSInfo
- Publication number
- ITTO920077A0 ITTO920077A0 IT92TO77A ITTO920077A ITTO920077A0 IT TO920077 A0 ITTO920077 A0 IT TO920077A0 IT 92TO77 A IT92TO77 A IT 92TO77A IT TO920077 A ITTO920077 A IT TO920077A IT TO920077 A0 ITTO920077 A0 IT TO920077A0
- Authority
- IT
- Italy
- Prior art keywords
- excimers
- lasers
- substrate
- processing
- exposure system
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO920077A IT1256798B (en) | 1992-01-31 | 1992-01-31 | Optical exposure system for processing a substrate by means of excimer laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO920077A IT1256798B (en) | 1992-01-31 | 1992-01-31 | Optical exposure system for processing a substrate by means of excimer laser |
Publications (3)
Publication Number | Publication Date |
---|---|
ITTO920077A0 true ITTO920077A0 (en) | 1992-01-31 |
ITTO920077A1 ITTO920077A1 (en) | 1993-07-31 |
IT1256798B IT1256798B (en) | 1995-12-15 |
Family
ID=11409984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITTO920077A IT1256798B (en) | 1992-01-31 | 1992-01-31 | Optical exposure system for processing a substrate by means of excimer laser |
Country Status (1)
Country | Link |
---|---|
IT (1) | IT1256798B (en) |
-
1992
- 1992-01-31 IT ITTO920077A patent/IT1256798B/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ITTO920077A1 (en) | 1993-07-31 |
IT1256798B (en) | 1995-12-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69301759D1 (en) | Laser beam scanner | |
KR950700650A (en) | OPTICAL PROCESSING SYSTEM | |
DE69318417D1 (en) | PREIONIZER FOR LASER | |
DE69324622D1 (en) | Optical beam scanner | |
DE69306424D1 (en) | Laser apparatus | |
DE69305928D1 (en) | Semiconductor laser | |
DE69115464D1 (en) | LASER BEAM PROCESSING METHOD | |
ITMI950419V0 (en) | MIRROR DEFORMABLE ESPECIALLY FOR A LASER BEAM PROCESSING DEVICE | |
DE69209045D1 (en) | Semiconductor laser | |
DE69312767D1 (en) | Laser system | |
EP0240005A3 (en) | Optical system for semiconductor laser beam | |
DE69308078D1 (en) | Laser system | |
ITTO920443A1 (en) | OPTICAL DEMULTIPLATION SYSTEM. | |
ITTO940989A0 (en) | DEVICE FOR HANDLING A RADIATION BEAM OF A SIN-CROTONE | |
DE3884686D1 (en) | Optical semiconductor laser system. | |
DE69224054D1 (en) | Semiconductor laser | |
ITTO920077A0 (en) | OPTICAL EXPOSURE SYSTEM FOR PROCESSING A SUBSTRATE USING LASERS OR EXCIMERS | |
DE69312571D1 (en) | Laser apparatus | |
DE69424490D1 (en) | Laser printing system | |
KR950009735U (en) | Laser beam scanning optical system beam positioning device | |
DK0592873T3 (en) | Integrated optical polarization beam parts | |
DE69219955D1 (en) | Optical system for a laser beam scanner | |
FI933060A (en) | OPTICAL INTENDED PHENOLDER FOR FRAMSTAELLNING DAERAV | |
KR930004630U (en) | Dehumidifying device inside laser beam printer | |
ITRM920508A0 (en) | OPTICAL SENSOR FOR DETECTION OF LASER LIGHT BEAMs. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19980129 |