IT1228818B - LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS. - Google Patents
LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS.Info
- Publication number
- IT1228818B IT1228818B IT8919869A IT1986989A IT1228818B IT 1228818 B IT1228818 B IT 1228818B IT 8919869 A IT8919869 A IT 8919869A IT 1986989 A IT1986989 A IT 1986989A IT 1228818 B IT1228818 B IT 1228818B
- Authority
- IT
- Italy
- Prior art keywords
- integrated circuits
- optical integrated
- writing system
- laser writing
- photolithographic masks
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8919869A IT1228818B (en) | 1989-03-22 | 1989-03-22 | LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8919869A IT1228818B (en) | 1989-03-22 | 1989-03-22 | LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS. |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8919869A0 IT8919869A0 (en) | 1989-03-22 |
IT1228818B true IT1228818B (en) | 1991-07-04 |
Family
ID=11161933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8919869A IT1228818B (en) | 1989-03-22 | 1989-03-22 | LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS. |
Country Status (1)
Country | Link |
---|---|
IT (1) | IT1228818B (en) |
-
1989
- 1989-03-22 IT IT8919869A patent/IT1228818B/en active
Also Published As
Publication number | Publication date |
---|---|
IT8919869A0 (en) | 1989-03-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19950330 |