IT1228818B - LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS. - Google Patents

LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS.

Info

Publication number
IT1228818B
IT1228818B IT8919869A IT1986989A IT1228818B IT 1228818 B IT1228818 B IT 1228818B IT 8919869 A IT8919869 A IT 8919869A IT 1986989 A IT1986989 A IT 1986989A IT 1228818 B IT1228818 B IT 1228818B
Authority
IT
Italy
Prior art keywords
integrated circuits
optical integrated
writing system
laser writing
photolithographic masks
Prior art date
Application number
IT8919869A
Other languages
Italian (it)
Other versions
IT8919869A0 (en
Inventor
Ciro Esposito
Patrizia Boffi
Olga De Pascale
Maurizio Gaudio
Marco Vilnio
Aurora Maria Losacco
Original Assignee
Consiglio Nazionale Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consiglio Nazionale Ricerche filed Critical Consiglio Nazionale Ricerche
Priority to IT8919869A priority Critical patent/IT1228818B/en
Publication of IT8919869A0 publication Critical patent/IT8919869A0/en
Application granted granted Critical
Publication of IT1228818B publication Critical patent/IT1228818B/en

Links

IT8919869A 1989-03-22 1989-03-22 LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS. IT1228818B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT8919869A IT1228818B (en) 1989-03-22 1989-03-22 LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8919869A IT1228818B (en) 1989-03-22 1989-03-22 LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS.

Publications (2)

Publication Number Publication Date
IT8919869A0 IT8919869A0 (en) 1989-03-22
IT1228818B true IT1228818B (en) 1991-07-04

Family

ID=11161933

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8919869A IT1228818B (en) 1989-03-22 1989-03-22 LASER WRITING SYSTEM OF PHOTOLITHOGRAPHIC MASKS FOR OPTICAL INTEGRATED CIRCUITS.

Country Status (1)

Country Link
IT (1) IT1228818B (en)

Also Published As

Publication number Publication date
IT8919869A0 (en) 1989-03-22

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19950330