ITTO20130967A1 - Metodo di impilamento di una pluralita' di piastrine per formare un dispositivo a semiconduttore impilato, e dispositivo a semiconduttore impilato - Google Patents
Metodo di impilamento di una pluralita' di piastrine per formare un dispositivo a semiconduttore impilato, e dispositivo a semiconduttore impilatoInfo
- Publication number
- ITTO20130967A1 ITTO20130967A1 IT000967A ITTO20130967A ITTO20130967A1 IT TO20130967 A1 ITTO20130967 A1 IT TO20130967A1 IT 000967 A IT000967 A IT 000967A IT TO20130967 A ITTO20130967 A IT TO20130967A IT TO20130967 A1 ITTO20130967 A1 IT TO20130967A1
- Authority
- IT
- Italy
- Prior art keywords
- semiconductor device
- stacked semiconductor
- stacking
- plates
- stacked
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0074—3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
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- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
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Priority Applications (2)
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IT000967A ITTO20130967A1 (it) | 2013-11-28 | 2013-11-28 | Metodo di impilamento di una pluralita' di piastrine per formare un dispositivo a semiconduttore impilato, e dispositivo a semiconduttore impilato |
US14/554,473 US9290377B2 (en) | 2013-11-28 | 2014-11-26 | Method of stacking a plurality of dies to form a stacked semiconductor device, and stacked semiconductor device |
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IT000967A ITTO20130967A1 (it) | 2013-11-28 | 2013-11-28 | Metodo di impilamento di una pluralita' di piastrine per formare un dispositivo a semiconduttore impilato, e dispositivo a semiconduttore impilato |
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JP6331551B2 (ja) * | 2014-03-25 | 2018-05-30 | セイコーエプソン株式会社 | Memsデバイス |
CN106257665A (zh) * | 2015-06-16 | 2016-12-28 | 意法半导体(马耳他)有限公司 | 制作电子元件的方法及相应的电子元件 |
CN107883919A (zh) * | 2017-10-30 | 2018-04-06 | 延安大学 | 一种电子平面水平仪及其使用方法 |
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JP2000071422A (ja) * | 1998-08-31 | 2000-03-07 | Fujitsu Ten Ltd | スキージ及びスクリーン印刷装置並びにスクリーン印刷方法 |
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JP2000071422A (ja) * | 1998-08-31 | 2000-03-07 | Fujitsu Ten Ltd | スキージ及びスクリーン印刷装置並びにスクリーン印刷方法 |
US20030162324A1 (en) * | 2002-02-25 | 2003-08-28 | Seiko Epson Corporation | Semiconductor wafer with spacer and its manufacturing method, semiconductor device and its manufacturing method, and circuit substrate and electronic device |
US20060124230A1 (en) * | 2003-06-16 | 2006-06-15 | Isabelle Chartier | Method of bonding microstructured substrates |
JP2005014141A (ja) * | 2003-06-25 | 2005-01-20 | Ricoh Co Ltd | 複合素子の製造方法 |
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US9290377B2 (en) | 2016-03-22 |
US20150145077A1 (en) | 2015-05-28 |
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