ITMI920717A0 - Pompa a polverizzazione ionica con modulo assorbitore - Google Patents

Pompa a polverizzazione ionica con modulo assorbitore

Info

Publication number
ITMI920717A0
ITMI920717A0 IT92MI717A ITMI920717A ITMI920717A0 IT MI920717 A0 ITMI920717 A0 IT MI920717A0 IT 92MI717 A IT92MI717 A IT 92MI717A IT MI920717 A ITMI920717 A IT MI920717A IT MI920717 A0 ITMI920717 A0 IT MI920717A0
Authority
IT
Italy
Prior art keywords
spray pump
ion spray
absorber module
absorber
module
Prior art date
Application number
IT92MI717A
Other languages
English (en)
Inventor
Josef Romer
Hans-J Mundinger
Gunter Krischer
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of ITMI920717A0 publication Critical patent/ITMI920717A0/it
Publication of ITMI920717A1 publication Critical patent/ITMI920717A1/it
Application granted granted Critical
Publication of IT1254560B publication Critical patent/IT1254560B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
ITMI920717A 1991-04-02 1992-03-26 Pompa a polverizzazione ionica con modulo assorbitore IT1254560B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4110588A DE4110588A1 (de) 1991-04-02 1991-04-02 Ionenzerstaeuberpumpe mit gettermodul

Publications (3)

Publication Number Publication Date
ITMI920717A0 true ITMI920717A0 (it) 1992-03-26
ITMI920717A1 ITMI920717A1 (it) 1993-09-26
IT1254560B IT1254560B (it) 1995-09-25

Family

ID=6428629

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI920717A IT1254560B (it) 1991-04-02 1992-03-26 Pompa a polverizzazione ionica con modulo assorbitore

Country Status (3)

Country Link
US (1) US5221190A (it)
DE (1) DE4110588A1 (it)
IT (1) IT1254560B (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
IT1290548B1 (it) * 1997-02-24 1998-12-10 Getters Spa Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
CA2714274A1 (en) * 2008-03-28 2009-10-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
ITMI20090402A1 (it) 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
JP6327974B2 (ja) * 2014-06-30 2018-05-23 国立研究開発法人情報通信研究機構 積層型超高真空作成装置
CN108119329B (zh) * 2017-12-20 2019-09-24 南京华东电子真空材料有限公司 一种大抽速结构紧凑的组合泵
CN108302007A (zh) * 2017-12-24 2018-07-20 安徽万瑞冷电科技有限公司 低温离子泵
GB2576968B (en) * 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps
CN113550884A (zh) * 2021-08-19 2021-10-26 安徽益东惠电子科技有限公司 堆叠式吸气剂片泵芯及其吸气剂泵

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121210A (en) * 1977-03-30 1978-10-23 Hitachi Ltd Non-evaporation type getter pump
DE3434787A1 (de) * 1984-09-21 1986-04-03 Siemens AG, 1000 Berlin und 8000 München Getter-ionenzerstaeuber-kombinationspumpe fuer hoch- und ultrahochvakuumanlagen

Also Published As

Publication number Publication date
DE4110588A1 (de) 1992-10-08
ITMI920717A1 (it) 1993-09-26
IT1254560B (it) 1995-09-25
US5221190A (en) 1993-06-22

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