ITMI20112129A1 - Procedimento per la produzione di superfici oblique in un substrato efetta con superfici oblique - Google Patents

Procedimento per la produzione di superfici oblique in un substrato efetta con superfici oblique

Info

Publication number
ITMI20112129A1
ITMI20112129A1 IT002129A ITMI20112129A ITMI20112129A1 IT MI20112129 A1 ITMI20112129 A1 IT MI20112129A1 IT 002129 A IT002129 A IT 002129A IT MI20112129 A ITMI20112129 A IT MI20112129A IT MI20112129 A1 ITMI20112129 A1 IT MI20112129A1
Authority
IT
Italy
Prior art keywords
oblique surfaces
procedure
production
smooth substrate
oblique
Prior art date
Application number
IT002129A
Other languages
English (en)
Inventor
Stefan Pinter
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20112129A1 publication Critical patent/ITMI20112129A1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
IT002129A 2010-11-26 2011-11-23 Procedimento per la produzione di superfici oblique in un substrato efetta con superfici oblique ITMI20112129A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010062009.2A DE102010062009B4 (de) 2010-11-26 2010-11-26 Verfahren zum Herstellen von Schrägflächen in einem Substrat und Wafer mit Schrägfläche

Publications (1)

Publication Number Publication Date
ITMI20112129A1 true ITMI20112129A1 (it) 2012-05-27

Family

ID=45955507

Family Applications (1)

Application Number Title Priority Date Filing Date
IT002129A ITMI20112129A1 (it) 2010-11-26 2011-11-23 Procedimento per la produzione di superfici oblique in un substrato efetta con superfici oblique

Country Status (4)

Country Link
US (1) US8648433B2 (it)
CN (1) CN102530838B (it)
DE (1) DE102010062009B4 (it)
IT (1) ITMI20112129A1 (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012206858B4 (de) * 2012-04-25 2021-05-20 Robert Bosch Gmbh Verfahren zum Herstellen einer optischen Fenstervorrichtung für eine MEMS-Vorrichtung
DE102015213473A1 (de) 2015-07-17 2017-01-19 Robert Bosch Gmbh Herstellungsverfahren für eine mikromechanische Fensterstruktur und entsprechende mikromechanische Fensterstruktur
WO2018023033A1 (en) 2016-07-29 2018-02-01 Western Michigan University Research Foundation Magnetic nanoparticle-based gyroscopic sensor
DE102016216918A1 (de) * 2016-09-07 2018-03-08 Robert Bosch Gmbh Herstellungsverfahren für eine mikromechanische Vorrichtung mit einem geneigten optischen Fenster und entsprechende mikromechanische Vorrichtung
DE102018207201A1 (de) * 2018-05-09 2019-11-14 Robert Bosch Gmbh Herstellungsverfahren für eine mikromechanische Vorrichtung mit geneigten optischen Fenstern und entsprechende mikromechanische Vorrichtung
DE102018211548A1 (de) * 2018-07-11 2020-01-16 Robert Bosch Gmbh Herstellungsverfahren für eine mikromechanische Vorrichtung mit geneigten optischen Fenstern und mikromechanische Vorrichtung mit geneigten optischen Fenstern

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5174587A (en) 1991-09-25 1992-12-29 Crawley Thomas E Non-slip drill chuck
JP3260644B2 (ja) 1996-12-10 2002-02-25 セイコーインスツルメンツ株式会社 カンチレバーおよびその製造方法
JP2002267956A (ja) 2001-03-08 2002-09-18 Sony Corp マイクロミラーおよびその製造方法
TWI292066B (it) 2001-03-20 2008-01-01 Chi Mei Optoelectronics Corp
US20050257709A1 (en) 2003-08-28 2005-11-24 Tony Mule Systems and methods for three-dimensional lithography and nano-indentation
CN100440447C (zh) * 2004-09-15 2008-12-03 泰勒工程有限公司 应用于半导体制备工艺中的斜面制造方法
KR100707179B1 (ko) 2005-02-07 2007-04-13 삼성전자주식회사 광스캐너 패키지 및 그 제조방법
KR100667291B1 (ko) 2005-07-27 2007-01-12 삼성전자주식회사 마이크로 미러 소자 패키지 및 그 제조방법
DE102008012384A1 (de) 2008-03-04 2009-09-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Deckel für Mikro-Systeme und Verfahren zur Herstellung eines Deckels
DE102008040528B4 (de) * 2008-07-18 2018-11-08 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches Bauteil und ein mikromechanisches Bauteil

Also Published As

Publication number Publication date
DE102010062009A1 (de) 2012-05-31
US20120133004A1 (en) 2012-05-31
DE102010062009B4 (de) 2019-07-04
CN102530838B (zh) 2015-12-16
US8648433B2 (en) 2014-02-11
CN102530838A (zh) 2012-07-04

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