ITMI20090513A1 - PROCEDURE FOR THE MANUFACTURE OF A MICROMECHANICAL STRUCTURE AND MICRO-MECHANICAL STRUCTURE. - Google Patents

PROCEDURE FOR THE MANUFACTURE OF A MICROMECHANICAL STRUCTURE AND MICRO-MECHANICAL STRUCTURE.

Info

Publication number
ITMI20090513A1
ITMI20090513A1 ITMI20090513A ITMI20090513A1 IT MI20090513 A1 ITMI20090513 A1 IT MI20090513A1 IT MI20090513 A ITMI20090513 A IT MI20090513A IT MI20090513 A1 ITMI20090513 A1 IT MI20090513A1
Authority
IT
Italy
Prior art keywords
micro
procedure
manufacture
micromechanical
mechanical
Prior art date
Application number
Other languages
Italian (it)
Inventor
Marco Lammer
Andreas Scheurle
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20090513A1 publication Critical patent/ITMI20090513A1/en
Application granted granted Critical
Publication of IT1393678B1 publication Critical patent/IT1393678B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0136—Growing or depositing of a covering layer
ITMI2009A000513A 2008-04-08 2009-03-31 PROCEDURE FOR THE MANUFACTURE OF A MICROMECHANICAL STRUCTURE AND MICROMECHANICAL STRUCTURE. IT1393678B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200810001042 DE102008001042A1 (en) 2008-04-08 2008-04-08 Manufacturing method for micromechanical structure, involves producing functional layer made of one material, where sealing layer is produced on functional layer, and is made of another material

Publications (2)

Publication Number Publication Date
ITMI20090513A1 true ITMI20090513A1 (en) 2009-10-09
IT1393678B1 IT1393678B1 (en) 2012-05-08

Family

ID=41060273

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A000513A IT1393678B1 (en) 2008-04-08 2009-03-31 PROCEDURE FOR THE MANUFACTURE OF A MICROMECHANICAL STRUCTURE AND MICROMECHANICAL STRUCTURE.

Country Status (2)

Country Link
DE (1) DE102008001042A1 (en)
IT (1) IT1393678B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009027898B4 (en) 2009-07-21 2019-09-05 Robert Bosch Gmbh Manufacturing method for a micromechanical component

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19940512A1 (en) 1999-08-26 2001-03-22 Bosch Gmbh Robert Method for capping a component with a cavern structure and method for producing the cavern structure

Also Published As

Publication number Publication date
DE102008001042A1 (en) 2009-10-15
IT1393678B1 (en) 2012-05-08

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