IT1397894B1 - MICROMECHANICAL DEVICE AND PROCEDURE FOR THE PRODUCTION OF THE SAME - Google Patents

MICROMECHANICAL DEVICE AND PROCEDURE FOR THE PRODUCTION OF THE SAME

Info

Publication number
IT1397894B1
IT1397894B1 ITMI2010A000069A ITMI20100069A IT1397894B1 IT 1397894 B1 IT1397894 B1 IT 1397894B1 IT MI2010A000069 A ITMI2010A000069 A IT MI2010A000069A IT MI20100069 A ITMI20100069 A IT MI20100069A IT 1397894 B1 IT1397894 B1 IT 1397894B1
Authority
IT
Italy
Prior art keywords
procedure
production
same
micromechanical device
micromechanical
Prior art date
Application number
ITMI2010A000069A
Other languages
Italian (it)
Inventor
Johannes Classen
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20100069A1 publication Critical patent/ITMI20100069A1/en
Application granted granted Critical
Publication of IT1397894B1 publication Critical patent/IT1397894B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
ITMI2010A000069A 2009-01-27 2010-01-21 MICROMECHANICAL DEVICE AND PROCEDURE FOR THE PRODUCTION OF THE SAME IT1397894B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009000429.7A DE102009000429B4 (en) 2009-01-27 2009-01-27 Micromechanical device and manufacturing process therefor

Publications (2)

Publication Number Publication Date
ITMI20100069A1 ITMI20100069A1 (en) 2010-07-28
IT1397894B1 true IT1397894B1 (en) 2013-02-04

Family

ID=42282422

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A000069A IT1397894B1 (en) 2009-01-27 2010-01-21 MICROMECHANICAL DEVICE AND PROCEDURE FOR THE PRODUCTION OF THE SAME

Country Status (3)

Country Link
CN (1) CN101786591B (en)
DE (1) DE102009000429B4 (en)
IT (1) IT1397894B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6343994B2 (en) 2014-03-25 2018-06-20 セイコーエプソン株式会社 Optical scanner, image display device, and head mounted display
CN107328954B (en) * 2017-07-25 2019-12-31 西安交通大学 Multistage step high overload resonant accelerometer chip
CN112551474B (en) * 2020-12-09 2022-05-24 北京航天控制仪器研究所 MEMS movable structure with in-plane stop

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19539049A1 (en) * 1995-10-20 1997-04-24 Bosch Gmbh Robert Process for the production of a Coriolis rotation rate sensor
DE19930779B4 (en) * 1999-07-03 2010-05-06 Robert Bosch Gmbh Micromechanical component
DE19949605A1 (en) * 1999-10-15 2001-04-19 Bosch Gmbh Robert Acceleration sensor for car air bag control has micromachined stop bars prevents misfunction due to perpendicular acceleration
DE102005054143A1 (en) * 2005-11-14 2007-05-16 Bosch Gmbh Robert Acceleration sensor, has projection that limits deflection of seismic mass under effect of acceleration force in direction and is formed at seismic mass and/or crystal substrate, where epitaxy layer is applied on front side of substrate
DE102007002273A1 (en) * 2007-01-16 2008-07-17 Robert Bosch Gmbh Method for producing a component and sensor element
CN101279713B (en) * 2008-03-31 2011-09-14 清华大学 Manufacturing method for floating type micro-silicon electrostatic gyro/accelerometer sensitive structure

Also Published As

Publication number Publication date
CN101786591A (en) 2010-07-28
DE102009000429A1 (en) 2010-07-29
CN101786591B (en) 2016-01-27
DE102009000429B4 (en) 2021-01-28
ITMI20100069A1 (en) 2010-07-28

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