IT1397180B1 - MICROMECHANICAL COMPONENT - Google Patents
MICROMECHANICAL COMPONENTInfo
- Publication number
- IT1397180B1 IT1397180B1 ITMI2009A001976A ITMI20091976A IT1397180B1 IT 1397180 B1 IT1397180 B1 IT 1397180B1 IT MI2009A001976 A ITMI2009A001976 A IT MI2009A001976A IT MI20091976 A ITMI20091976 A IT MI20091976A IT 1397180 B1 IT1397180 B1 IT 1397180B1
- Authority
- IT
- Italy
- Prior art keywords
- micromechanical component
- micromechanical
- component
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008043790.5A DE102008043790B4 (en) | 2008-11-17 | 2008-11-17 | Micromechanical component |
Publications (2)
Publication Number | Publication Date |
---|---|
ITMI20091976A1 ITMI20091976A1 (en) | 2010-05-18 |
IT1397180B1 true IT1397180B1 (en) | 2013-01-04 |
Family
ID=42104818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI2009A001976A IT1397180B1 (en) | 2008-11-17 | 2009-11-12 | MICROMECHANICAL COMPONENT |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102008043790B4 (en) |
IT (1) | IT1397180B1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010039293B4 (en) | 2010-08-13 | 2018-05-24 | Robert Bosch Gmbh | Micromechanical component and production method for a micromechanical component |
DE102011006422B4 (en) | 2011-03-30 | 2019-02-28 | Robert Bosch Gmbh | Micromechanical component and sensor device |
DE102011081014B4 (en) | 2011-08-16 | 2020-01-23 | Robert Bosch Gmbh | Micromechanical component and manufacturing method for a micromechanical component |
JP6002481B2 (en) | 2012-07-06 | 2016-10-05 | 日立オートモティブシステムズ株式会社 | Inertial sensor |
DE102013210512B4 (en) * | 2013-06-06 | 2016-01-07 | Robert Bosch Gmbh | Sensor with membrane and manufacturing process |
JP6464608B2 (en) * | 2014-08-19 | 2019-02-06 | セイコーエプソン株式会社 | Physical quantity sensor, electronic device and mobile object |
US9810712B2 (en) | 2014-08-15 | 2017-11-07 | Seiko Epson Corporation | Physical quantity sensor, physical quantity sensor device, electronic equipment, and moving body |
JP6464613B2 (en) | 2014-08-27 | 2019-02-06 | セイコーエプソン株式会社 | Physical quantity sensor, electronic device and mobile object |
US11268976B2 (en) * | 2017-02-23 | 2022-03-08 | Invensense, Inc. | Electrode layer partitioning |
JP2021071394A (en) * | 2019-10-31 | 2021-05-06 | セイコーエプソン株式会社 | Physical quantity sensor, electronic apparatus, and mobile body |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3611360A1 (en) | 1986-04-04 | 1987-10-08 | Bosch Gmbh Robert | SENSOR FOR AUTOMATIC TRIGGERING OF PASSENGER PROTECTION DEVICES |
DE19541388A1 (en) | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Micromechanical acceleration sensor |
US6105427A (en) * | 1998-07-31 | 2000-08-22 | Litton Systems, Inc. | Micro-mechanical semiconductor accelerometer |
JP2001076605A (en) * | 1999-07-01 | 2001-03-23 | Advantest Corp | Integrated microswitch and its manufacture |
EP1547189A4 (en) * | 2002-08-03 | 2006-11-08 | Siverta Inc | Sealed integral mems switch |
JP2005069852A (en) * | 2003-08-25 | 2005-03-17 | Seiko Instruments Inc | Capacitance type dynamic quantity sensor |
WO2006127777A1 (en) * | 2005-05-25 | 2006-11-30 | Northrop Grumman Corporation | Silicon accelerometer chip design for size and thermal distortion reduction and process simplification |
US7610809B2 (en) * | 2007-01-18 | 2009-11-03 | Freescale Semiconductor, Inc. | Differential capacitive sensor and method of making same |
-
2008
- 2008-11-17 DE DE102008043790.5A patent/DE102008043790B4/en active Active
-
2009
- 2009-11-12 IT ITMI2009A001976A patent/IT1397180B1/en active
Also Published As
Publication number | Publication date |
---|---|
DE102008043790A1 (en) | 2010-05-20 |
DE102008043790B4 (en) | 2017-04-06 |
ITMI20091976A1 (en) | 2010-05-18 |
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