ITMI20050320A1 - Componente micromeccanico con una membrana e procedimento per la fabbricazione di un tale componente - Google Patents

Componente micromeccanico con una membrana e procedimento per la fabbricazione di un tale componente

Info

Publication number
ITMI20050320A1
ITMI20050320A1 IT000320A ITMI20050320A ITMI20050320A1 IT MI20050320 A1 ITMI20050320 A1 IT MI20050320A1 IT 000320 A IT000320 A IT 000320A IT MI20050320 A ITMI20050320 A IT MI20050320A IT MI20050320 A1 ITMI20050320 A1 IT MI20050320A1
Authority
IT
Italy
Prior art keywords
component
membrane
procedure
manufacture
micromechanical
Prior art date
Application number
IT000320A
Other languages
English (en)
Inventor
Hans Artmann
Frank Fischer
Julian Gonska
Arnim Hoechst
Laris Metzger
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20050320A1 publication Critical patent/ITMI20050320A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Micromachines (AREA)
IT000320A 2004-03-03 2005-03-02 Componente micromeccanico con una membrana e procedimento per la fabbricazione di un tale componente ITMI20050320A1 (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004010293 2004-03-03
DE102005005551.6A DE102005005551B4 (de) 2004-03-03 2005-02-07 Mikromechanisches Bauelement mit einer Membran und Verfahren zur Herstellung eines solchen Bauelements

Publications (1)

Publication Number Publication Date
ITMI20050320A1 true ITMI20050320A1 (it) 2005-09-04

Family

ID=34877280

Family Applications (1)

Application Number Title Priority Date Filing Date
IT000320A ITMI20050320A1 (it) 2004-03-03 2005-03-02 Componente micromeccanico con una membrana e procedimento per la fabbricazione di un tale componente

Country Status (2)

Country Link
DE (1) DE102005005551B4 (it)
IT (1) ITMI20050320A1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007022255B4 (de) 2007-05-09 2009-07-09 Beiersdorf Ag Ausgabeöffnungsplatte für optisch attraktive Antitranspirant Formulierungen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4665610A (en) * 1985-04-22 1987-05-19 Stanford University Method of making a semiconductor transducer having multiple level diaphragm structure
US5060504A (en) * 1988-09-23 1991-10-29 Automotive Systems Laboratory, Inc. Self-calibrating accelerometer
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
US6808954B2 (en) * 2001-09-07 2004-10-26 Intel Corporation Vacuum-cavity MEMS resonator
US6635519B2 (en) * 2002-01-10 2003-10-21 Agere Systems, Inc. Structurally supported thin film resonator and method of fabrication
JP3778128B2 (ja) * 2002-05-14 2006-05-24 株式会社デンソー メンブレンを有する半導体装置の製造方法

Also Published As

Publication number Publication date
DE102005005551A1 (de) 2005-09-22
DE102005005551B4 (de) 2015-10-01

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