ITMI20061176A1 - Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazione - Google Patents

Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazione

Info

Publication number
ITMI20061176A1
ITMI20061176A1 ITMI20061176A ITMI20061176A1 IT MI20061176 A1 ITMI20061176 A1 IT MI20061176A1 IT MI20061176 A ITMI20061176 A IT MI20061176A IT MI20061176 A1 ITMI20061176 A1 IT MI20061176A1
Authority
IT
Italy
Prior art keywords
contemplating
manufacturing
well
micromechanical component
double membrane
Prior art date
Application number
Other languages
English (en)
Inventor
Hans Artmann
Peter Schmollngruber
Thomas Wagner
Heribert Weber
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20061176A1 publication Critical patent/ITMI20061176A1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0081—Thermal properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
ITMI20061176 2005-06-27 2006-06-20 Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazione ITMI20061176A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510029802 DE102005029802A1 (de) 2005-06-27 2005-06-27 Mikromechanisches Bauelement mit einer Doppelmembran sowie ein dafür geeignetes Herstellungsverfahren

Publications (1)

Publication Number Publication Date
ITMI20061176A1 true ITMI20061176A1 (it) 2006-12-28

Family

ID=37544903

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI20061176 ITMI20061176A1 (it) 2005-06-27 2006-06-20 Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazione

Country Status (2)

Country Link
DE (1) DE102005029802A1 (it)
IT (1) ITMI20061176A1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017215381B4 (de) 2017-09-01 2022-10-20 Infineon Technologies Ag Doppelmembran-MEMS-Bauelement und Herstellungsverfahren für ein Doppelmembran-MEMS-Bauelement
DE102018222719A1 (de) * 2018-12-21 2020-06-25 Robert Bosch Gmbh Mikromechanisches Bauteil für eine kapazitive Drucksensorvorrichtung

Also Published As

Publication number Publication date
DE102005029802A1 (de) 2007-01-04

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