ITMI20061176A1 - Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazione - Google Patents
Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazioneInfo
- Publication number
- ITMI20061176A1 ITMI20061176A1 ITMI20061176A ITMI20061176A1 IT MI20061176 A1 ITMI20061176 A1 IT MI20061176A1 IT MI20061176 A ITMI20061176 A IT MI20061176A IT MI20061176 A1 ITMI20061176 A1 IT MI20061176A1
- Authority
- IT
- Italy
- Prior art keywords
- contemplating
- manufacturing
- well
- micromechanical component
- double membrane
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/007—For controlling stiffness, e.g. ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0081—Thermal properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200510029802 DE102005029802A1 (de) | 2005-06-27 | 2005-06-27 | Mikromechanisches Bauelement mit einer Doppelmembran sowie ein dafür geeignetes Herstellungsverfahren |
Publications (1)
Publication Number | Publication Date |
---|---|
ITMI20061176A1 true ITMI20061176A1 (it) | 2006-12-28 |
Family
ID=37544903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI20061176 ITMI20061176A1 (it) | 2005-06-27 | 2006-06-20 | Componente micromeccanico contemplante una doppia membrana,nonche' un procedimento adatto alla sua fabbricazione |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102005029802A1 (it) |
IT (1) | ITMI20061176A1 (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017215381B4 (de) | 2017-09-01 | 2022-10-20 | Infineon Technologies Ag | Doppelmembran-MEMS-Bauelement und Herstellungsverfahren für ein Doppelmembran-MEMS-Bauelement |
DE102018222719A1 (de) | 2018-12-21 | 2020-06-25 | Robert Bosch Gmbh | Mikromechanisches Bauteil für eine kapazitive Drucksensorvorrichtung |
DE102022213217A1 (de) | 2022-12-07 | 2024-06-13 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikroelektromechanischer Drucksensor |
-
2005
- 2005-06-27 DE DE200510029802 patent/DE102005029802A1/de not_active Ceased
-
2006
- 2006-06-20 IT ITMI20061176 patent/ITMI20061176A1/it unknown
Also Published As
Publication number | Publication date |
---|---|
DE102005029802A1 (de) | 2007-01-04 |
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