IT992983B - METHOD FOR REMOVING PHOTORESISTANT MATERIAL FROM A SUPPORT - Google Patents
METHOD FOR REMOVING PHOTORESISTANT MATERIAL FROM A SUPPORTInfo
- Publication number
- IT992983B IT992983B IT27905/73A IT2790573A IT992983B IT 992983 B IT992983 B IT 992983B IT 27905/73 A IT27905/73 A IT 27905/73A IT 2790573 A IT2790573 A IT 2790573A IT 992983 B IT992983 B IT 992983B
- Authority
- IT
- Italy
- Prior art keywords
- support
- photoresistant material
- photoresistant
- removing photoresistant
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US28176472A | 1972-08-18 | 1972-08-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT992983B true IT992983B (en) | 1975-09-30 |
Family
ID=23078694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT27905/73A IT992983B (en) | 1972-08-18 | 1973-08-14 | METHOD FOR REMOVING PHOTORESISTANT MATERIAL FROM A SUPPORT |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5815939B2 (en) |
DE (1) | DE2341216C2 (en) |
FR (1) | FR2196611A5 (en) |
GB (1) | GB1408067A (en) |
IT (1) | IT992983B (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4341592A (en) * | 1975-08-04 | 1982-07-27 | Texas Instruments Incorporated | Method for removing photoresist layer from substrate by ozone treatment |
JPS5856340A (en) * | 1981-09-30 | 1983-04-04 | Toshiba Corp | Purification of semiconductor wafer |
GB2118028B (en) * | 1982-04-05 | 1985-12-18 | Maxwell Lab Inc | Decontaminating surfaces |
JPH0612766B2 (en) * | 1983-03-04 | 1994-02-16 | 株式会社精密エンタプライズ | Light irradiation device |
JPS6039238U (en) * | 1983-08-24 | 1985-03-19 | ウシオ電機株式会社 | UV cleaning equipment |
JPS6039240U (en) * | 1983-08-24 | 1985-03-19 | ウシオ電機株式会社 | UV cleaning equipment |
JPS6039239U (en) * | 1983-08-24 | 1985-03-19 | ウシオ電機株式会社 | UV cleaning equipment |
JPS6049630A (en) * | 1983-08-29 | 1985-03-18 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6053029A (en) * | 1983-09-02 | 1985-03-26 | Ushio Inc | Cleaning device using ultraviolet rays |
JPS6127635A (en) * | 1984-07-17 | 1986-02-07 | Samuko Internatl Kenkyusho:Kk | High efficiency dry type removing device of photoresist |
JPS6153335A (en) * | 1984-08-22 | 1986-03-17 | Tohoku Richo Kk | Dry etching of plastic |
JPS6177852A (en) * | 1984-09-26 | 1986-04-21 | Fujitsu Ltd | Method and device for removing resist |
JPH0622220B2 (en) * | 1984-11-19 | 1994-03-23 | 富士通株式会社 | Resist ashing method |
JPS61163342A (en) * | 1985-01-14 | 1986-07-24 | Ricoh Co Ltd | Method for removing photoresist |
JPH0810690B2 (en) * | 1987-01-29 | 1996-01-31 | 東京エレクトロン株式会社 | Ashing method and ashing apparatus |
US4923486A (en) * | 1988-12-22 | 1990-05-08 | University Of Dayton | Gas chromatography methods and apparatus |
US5028243A (en) * | 1988-12-22 | 1991-07-02 | University Of Dayton | Gas chromatography methods and apparatus |
US5068040A (en) * | 1989-04-03 | 1991-11-26 | Hughes Aircraft Company | Dense phase gas photochemical process for substrate treatment |
DE4113523A1 (en) * | 1991-04-25 | 1992-10-29 | Abb Patent Gmbh | METHOD FOR TREATING SURFACES |
JPH05109674A (en) * | 1991-10-18 | 1993-04-30 | Ushio Inc | Method and device for ashing resist film |
DE4202158C1 (en) * | 1992-01-27 | 1993-07-22 | Siemens Ag, 8000 Muenchen, De | |
US5417826A (en) * | 1992-06-15 | 1995-05-23 | Micron Technology, Inc. | Removal of carbon-based polymer residues with ozone, useful in the cleaning of plasma reactors |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2443373A (en) * | 1943-08-20 | 1948-06-15 | Victor N Borsoff | Method of removing carbon and carbonaceous matter |
US3664899A (en) * | 1969-12-29 | 1972-05-23 | Gen Electric | Removal of organic polymeric films from a substrate |
-
1973
- 1973-08-14 IT IT27905/73A patent/IT992983B/en active
- 1973-08-16 FR FR7329882A patent/FR2196611A5/fr not_active Expired
- 1973-08-16 GB GB3882473A patent/GB1408067A/en not_active Expired
- 1973-08-16 DE DE2341216A patent/DE2341216C2/en not_active Expired
- 1973-08-17 JP JP48091783A patent/JPS5815939B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2341216A1 (en) | 1974-02-28 |
FR2196611A5 (en) | 1974-03-15 |
DE2341216C2 (en) | 1985-11-07 |
GB1408067A (en) | 1975-10-01 |
JPS5815939B2 (en) | 1983-03-28 |
JPS503958A (en) | 1975-01-16 |
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