IT972853B - PROCEDURE FOR IMPROVING THE ADE SION OF THE PHOTOR RESERVE TO METAL SURFACES - Google Patents
PROCEDURE FOR IMPROVING THE ADE SION OF THE PHOTOR RESERVE TO METAL SURFACESInfo
- Publication number
- IT972853B IT972853B IT3350772A IT3350772A IT972853B IT 972853 B IT972853 B IT 972853B IT 3350772 A IT3350772 A IT 3350772A IT 3350772 A IT3350772 A IT 3350772A IT 972853 B IT972853 B IT 972853B
- Authority
- IT
- Italy
- Prior art keywords
- photor
- ade
- sion
- reserve
- improving
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- ing And Chemical Polishing (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22308272A | 1972-02-03 | 1972-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT972853B true IT972853B (en) | 1974-05-31 |
Family
ID=22834951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT3350772A IT972853B (en) | 1972-02-03 | 1972-12-22 | PROCEDURE FOR IMPROVING THE ADE SION OF THE PHOTOR RESERVE TO METAL SURFACES |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS4887904A (en) |
| BE (1) | BE791212A (en) |
| CA (1) | CA981507A (en) |
| DE (1) | DE2259180A1 (en) |
| FR (1) | FR2171724A5 (en) |
| GB (1) | GB1387350A (en) |
| IT (1) | IT972853B (en) |
| NL (1) | NL7215272A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5228370B2 (en) * | 1972-03-06 | 1977-07-26 | ||
| DE2529054C2 (en) * | 1975-06-30 | 1982-04-29 | Ibm Deutschland Gmbh, 7000 Stuttgart | Process for the production of a resist image which is negative for the original |
| DE3038605A1 (en) * | 1980-10-13 | 1982-06-03 | Hoechst Ag, 6000 Frankfurt | METHOD FOR PRODUCING RELIEF COPIES |
| JPS5890636A (en) * | 1981-11-24 | 1983-05-30 | Fuji Photo Film Co Ltd | Method for forming image with photosensitive material using photopolymerizable composition and developing unit |
| US4389482A (en) * | 1981-12-14 | 1983-06-21 | International Business Machines Corporation | Process for forming photoresists with strong resistance to reactive ion etching and high sensitivity to mid- and deep UV-light |
| DE3731333A1 (en) * | 1987-09-15 | 1989-03-30 | Schering Ag | METHOD FOR THE PRODUCTION OF LADDER NETWORKS |
| JPH1026834A (en) * | 1996-07-09 | 1998-01-27 | Tokyo Ohka Kogyo Co Ltd | Image forming method |
| US11581187B2 (en) * | 2018-12-20 | 2023-02-14 | Xia Tai Xin Semiconductor (Qing Dao) Ltd. | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same |
-
0
- BE BE791212D patent/BE791212A/en unknown
-
1972
- 1972-10-10 CA CA153,534A patent/CA981507A/en not_active Expired
- 1972-10-11 GB GB4680472A patent/GB1387350A/en not_active Expired
- 1972-11-10 NL NL7215272A patent/NL7215272A/xx not_active Application Discontinuation
- 1972-12-02 DE DE19722259180 patent/DE2259180A1/en active Pending
- 1972-12-18 FR FR7245032A patent/FR2171724A5/fr not_active Expired
- 1972-12-22 IT IT3350772A patent/IT972853B/en active
-
1973
- 1973-01-30 JP JP1166773A patent/JPS4887904A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2259180A1 (en) | 1973-08-09 |
| GB1387350A (en) | 1975-03-19 |
| NL7215272A (en) | 1973-08-07 |
| CA981507A (en) | 1976-01-13 |
| JPS4887904A (en) | 1973-11-19 |
| FR2171724A5 (en) | 1973-09-21 |
| BE791212A (en) | 1973-03-01 |
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