DE2259180A1 - PROCESS FOR CURING PHOTORESISTS - Google Patents

Description

Patent attorney Dipl.-Ing. Erich Weintraud

6 Frankfurt 1, Mainzer Landstr. 128-146, P.O. Box 4432

Note; Buckbee-Mears Company, St. Paul / Minnesota USA

Process for hardening phtoresists

The invention relates to a method for curing a photoresist or a light-insensitive cover mass.

In the known processes, the photochemical manufacturing techniques use, metal surfaces are largely processed by etching away the relevant sections with etching agents, which the experts do well are known. The remaining metal sections are protected by a material, generally called resist or light-insensitive deckase is known. The resist is generally used as a layer on the entire metal surface applied and exposed by exposure through a suitable Mask hardened through the protected areas. The cast layer is then dissolved out d «T r.'tcpt hardened metal lab cuts designed to the to expose the desired M ^ tallaba * initie to the etching treatment.

-2- 309832/1157 BAD ORIGINAL

A foolish fact, however, continues in three well-known processes that day hardened lies are sometimes not sufficiently cor-tacted with the metal surface, so that the resist never remains in place during the etching process engages the etching solution, the metal surfaces, which should be protected actually go that is, Cndprodukt verdorbe _# n. This problem is particularly critical when very detailed and fine patterns are to be formed in which small protected areas are covered by very small areas of the resist.

The lack of adhesion between the hesist and the metal surface is attributed to a partial and incomplete reaction of the photoresist. While the exposure affects the incident on the photoreaiet Light to the effect that there is a reaction of the free Radical is initiated, which oich by the leeistmaese spreads. Yeah, the reaction is not completely obeyed spread through to the surface of the metal, so there is no good contact with the metal surface, additional exposure could ensure that the reaction is effective down to the metal. However, it has been found that such measures beyond the limits of being eligible for editing Coming areas also expands, so that the structural training can not be maintained.

309832/1167

BAD ORlGfMAL

The .ίχ · fin-luiif * i ^ Jft the AiLfgiibe zu & ruade, such e to avoid.

This task we / l nei2ä.ü> ^ he invention better by a method of contacting de ο - "taotoreaists cit of Metal 1 surface achieved in that unnittelbar nr.ch the Jlelich processing the Z-bofcorecisuE a heating or burning · provided ict. i'js has found that this hot curtain maintains the action of the free radicals that is conducted through the jjicht and carries them right through to the metal surface. However, the heat does not cause the reaction to occur This heating process must be carefully kept under control, since the heat can initiate the reaction of the free radicals in the iiosist in the same way as light, so that an excessive amount of heat eats the sown surface to harden In fact, in practice it is generally considered to be disadvantageous to even give a little on the resist that one assumes; a, that is all e Resist would harden and become unusable. i) hrough the <\ <iv iii'findung studies underlying has been found, however, that a weak IVärme, which is applied only short, for the desired reaction \ ... ünCx- stirred borbeizufuhren without unerwüriachtes stretching, reaction -Jemzufpl ^ e ev ^ i 1.1 is the subject of the /Jr.Viudung a photochemi achets i! (3ri3tstellungBverfahren by which the 3098 32/1157 - '* -

BATH ORIGINAL

If you wanted to, Flachon set up organic goals can be heard all over the lip, including the metal surface to contact more firmly.

In the drawings show:

Figures 1 and 2 known method aura exposing a

Resist or L'eckmaesenschicht, dux-ch that hardens the `` green '' surfaces v / ground, but with excessive exposure drives the response beyond the desired range;

Ficair 3 the course of the reaction when used

of the process and

Figure 4 · the finished "lurch (in α method according to the

iürirtdun ^; fjov.onneotj.-i

In the bakunnt «n 7ei * fahi ·« «is shown in FIG a "layer of a Jliot": deckioasse 12 on the metal surface area 1o eufgütrafion. Iac Applying tiien Quhicht 12 takes place iiu ■ illjroiaQiJien in flüaüicer Forn un.i v; ii'd heated, to displace Loaeiaittel ^ u. Jiebö first proceedings des, '.. Twärnimj is aorsfülti ^ ge.iteuert and At the end, the tables were soon dried iot, in order to avoid jor! i: irtun (<sro'il; tii) n :: a. jine about the ücljicht 1 «? learned mask 1 ^ is there wit

Wire the openings where the Jeekicuuse should hold (Fir 309832/1157 .- ,.

BATH ORIGINAL

1 shows only one opening 16). Layer 12 is exposed from source 18 through hole 16. The light sets in motion a reaction of the free radicals, which then propagates through the covering compound, which is indicated by the Junkel dashed area. It has been found that a good determination of the hardened area and an exact correspondence to the The limited exposure often leads to a reaction above the dashed zone 20, which does not reach down to the surface of the metal Io down to the surface of the membrane, the decay mass must be exposed to an additional exposure (Fig. -2). Yes, however, if the light is only picked up by the upper side of the covering mass, the reaction not only proceeds to the metal surface, but also spreads even more the limits given by the hole 16 at 22 and 24, so that the surface area of the hardened covering compound is actually larger than it wish.

In the case of the method according to the invention, the exposure limited to that indicated in Fig. 1 by the on the metal surface coated with topping compound is placed in a Cfen to keep it for a short time Period of time weak 'to heat up. It has been shown that the vial treatment ciie you initiate the exposure.

309 8 3 2/1 1 5 7

The reaction of free radicals is further supported or maintained and continues to the surface of the metal (Fig. 3). ^ g iet important here "that the reaction does not proceed significantly laterally, which aui" lie fact each "zu.-tic ^1: did lead au that the V / ärrae that the UEI Decka & ^ cc '''eaahichteto metal surrounds the reaction zone 2o ν ja; tllen ^ axt-iu uni in particular by 'Jbertra-Tuni ¹ ; by (Lyλ ! the reaction lower tu-doing i / ärinebeharidlung in the preferred Ausführunpsbeiijpiel the ^ rfindunp extremely good working when it is in vorgenonjnen eir.er temperature of about to 49 ° C during eir.er Jauer voc 3o to 12o seconds. ¹ ^ Ju ^ Mnder ebnie Fir ·. 4 shows, where the unhardened jeckraasse has been loosened and washed, ux to develop the "ecictauster" hardened tieaiat 2o remaining amounts of the solvent to drive off.

BATH ORIGINAL -7-

309832/1 1B7

Claims (2)

P A J B H: i N S P; i t! 'J H B y method for better adhesion of photoresist Metal surfaces, ge.konnzeich.net l by heating the Metal surface coated with the .Resist, which activates the hardening process on the desired Areas was exposed, so that the hardening process is completed, and by removing the resist by dissolving the unhardened areas. 2. The method according to claim 1, characterized by heating of the resist-coated metal surface in an oven at a temperature of 32 to 4-9 ° C, for a period of 10 to 12 seconds. $. A method for attaching photoresist patterns to metal surfaces according to claim 1, characterized by applying the resist to the metal surface, by heating the resist in order to dry it, exposing the resist through a mask, but in the resist in the luster of the resist niche educated, 309832/1157 BATH ORIGINAL by iürv / iraen des nesists to remove the [rehabilitated areas further to hard, by developing the hesist pattern, indea the unhardened areas are removed, and by burning a metal surface coated with Racist, 30 there were some remaining herbal remedies drink According to / ji? pr ^ ch 5 _t characterized by this, -JiZ for further hardening deo ReEiste the heating of the groove desisted metals in a furnace at a temperature range of 32 Ms -4-9 ° C is carried out for a period of 3 <> to 12o seconds. BATHROOM ORIQI _NA L 309832/1 157