IT971665B - STRUCTURE AND METHOD FOR THE PRODUCTION OF ELEMENTS CONTAINING MI CROIMAGES - Google Patents

STRUCTURE AND METHOD FOR THE PRODUCTION OF ELEMENTS CONTAINING MI CROIMAGES

Info

Publication number
IT971665B
IT971665B IT32645/72A IT3264572A IT971665B IT 971665 B IT971665 B IT 971665B IT 32645/72 A IT32645/72 A IT 32645/72A IT 3264572 A IT3264572 A IT 3264572A IT 971665 B IT971665 B IT 971665B
Authority
IT
Italy
Prior art keywords
croimages
production
elements containing
elements
Prior art date
Application number
IT32645/72A
Other languages
Italian (it)
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Application granted granted Critical
Publication of IT971665B publication Critical patent/IT971665B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/016—Diazonium salts or compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
IT32645/72A 1971-12-08 1972-12-06 STRUCTURE AND METHOD FOR THE PRODUCTION OF ELEMENTS CONTAINING MI CROIMAGES IT971665B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20586071A 1971-12-08 1971-12-08

Publications (1)

Publication Number Publication Date
IT971665B true IT971665B (en) 1974-05-10

Family

ID=22763936

Family Applications (1)

Application Number Title Priority Date Filing Date
IT32645/72A IT971665B (en) 1971-12-08 1972-12-06 STRUCTURE AND METHOD FOR THE PRODUCTION OF ELEMENTS CONTAINING MI CROIMAGES

Country Status (10)

Country Link
JP (1) JPS5729694B2 (en)
AU (1) AU4971172A (en)
BE (1) BE792434A (en)
CA (1) CA976353A (en)
DD (1) DD102824A5 (en)
DE (1) DE2259768C2 (en)
FR (1) FR2162565A1 (en)
IL (1) IL40940A0 (en)
IT (1) IT971665B (en)
NL (1) NL7216710A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4379827A (en) * 1971-12-08 1983-04-12 Energy Conversion Devices, Inc. Imaging structure with tellurium metal film and energy sensitive material thereon
GB1566802A (en) * 1976-06-02 1980-05-08 Agfa Gevaert Photosensitive imaging material
US4357616A (en) * 1979-03-26 1982-11-02 Hitachi, Ltd. Recording medium
JPS56122130A (en) * 1980-02-28 1981-09-25 Sharp Corp Method for forming pattern of thin film transistor
US4544622A (en) * 1984-07-19 1985-10-01 Minnesota Mining And Manufacturing Company Negative-acting photoresist imaging system
JPH01122189A (en) * 1987-11-05 1989-05-15 Kansai Paint Co Ltd Electrodeposition paint composition for printed wiring board photo-resist

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE679470C (en) * 1934-03-15 1939-08-07 Heidenhain Johannes Dr Process for the production of washout reliefs by tanning development of halosilver colloid layers
BE620097A (en) * 1958-11-26
GB1031978A (en) * 1964-11-06 1966-06-02 Standard Telephones Cables Ltd Improvements in or relating to photolithographic masks
US3549373A (en) * 1966-03-19 1970-12-22 Ricoh Kk Negative-to-positive reversible copy sheet
DE1904789A1 (en) * 1969-01-31 1970-09-10 Licentia Gmbh Mask for mapping patterns on light-sensitive layers
US3645732A (en) * 1969-05-19 1972-02-29 Keuffel & Esser Co Etching alcohol-soluble nylon with aqueous solutions
JPS5022877B1 (en) * 1969-07-28 1975-08-02
JPS5139121B2 (en) * 1971-10-11 1976-10-26
JPS5520186B2 (en) * 1972-05-18 1980-05-31

Also Published As

Publication number Publication date
DE2259768A1 (en) 1973-06-14
BE792434A (en) 1973-03-30
DD102824A5 (en) 1973-12-20
FR2162565A1 (en) 1973-07-20
FR2162565B1 (en) 1977-01-14
JPS4865927A (en) 1973-09-10
IL40940A0 (en) 1973-01-30
DE2259768C2 (en) 1984-01-26
CA976353A (en) 1975-10-21
NL7216710A (en) 1973-06-13
AU4971172A (en) 1974-06-06
JPS5729694B2 (en) 1982-06-24

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