IT958650B - Fabbricazione di un dispositivo semiconduttore impiegante una combinazione di fasci di energia per il mascheramento ed il dro gaggio di impurita - Google Patents

Fabbricazione di un dispositivo semiconduttore impiegante una combinazione di fasci di energia per il mascheramento ed il dro gaggio di impurita

Info

Publication number
IT958650B
IT958650B IT51252/72A IT5125272A IT958650B IT 958650 B IT958650 B IT 958650B IT 51252/72 A IT51252/72 A IT 51252/72A IT 5125272 A IT5125272 A IT 5125272A IT 958650 B IT958650 B IT 958650B
Authority
IT
Italy
Prior art keywords
masking
impurity
drug
manufacture
combination
Prior art date
Application number
IT51252/72A
Other languages
English (en)
Italian (it)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Application granted granted Critical
Publication of IT958650B publication Critical patent/IT958650B/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/023—Deep level dopants
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/04—Dopants, special
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/043—Dual dielectric
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/106—Masks, special
IT51252/72A 1971-07-01 1972-06-30 Fabbricazione di un dispositivo semiconduttore impiegante una combinazione di fasci di energia per il mascheramento ed il dro gaggio di impurita IT958650B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15878971A 1971-07-01 1971-07-01

Publications (1)

Publication Number Publication Date
IT958650B true IT958650B (it) 1973-10-30

Family

ID=22569719

Family Applications (1)

Application Number Title Priority Date Filing Date
IT51252/72A IT958650B (it) 1971-07-01 1972-06-30 Fabbricazione di un dispositivo semiconduttore impiegante una combinazione di fasci di energia per il mascheramento ed il dro gaggio di impurita

Country Status (8)

Country Link
US (1) US3737346A (https=)
BE (1) BE785660A (https=)
CA (1) CA944870A (https=)
DE (1) DE2231356A1 (https=)
FR (1) FR2143959B1 (https=)
GB (1) GB1390853A (https=)
IT (1) IT958650B (https=)
NL (1) NL7209190A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2222736A1 (de) * 1972-05-09 1973-11-22 Siemens Ag Verfahren zur ionenimplantation
US4013502A (en) * 1973-06-18 1977-03-22 Texas Instruments Incorporated Stencil process for high resolution pattern replication
US3950187A (en) * 1974-11-15 1976-04-13 Simulation Physics, Inc. Method and apparatus involving pulsed electron beam processing of semiconductor devices
KR100679610B1 (ko) * 2006-01-16 2007-02-06 삼성전자주식회사 단결정 구조를 갖는 박막의 형성 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3193418A (en) * 1960-10-27 1965-07-06 Fairchild Camera Instr Co Semiconductor device fabrication
US3364087A (en) * 1964-04-27 1968-01-16 Varian Associates Method of using laser to coat or etch substrate
US3563809A (en) * 1968-08-05 1971-02-16 Hughes Aircraft Co Method of making semiconductor devices with ion beams
US3655457A (en) * 1968-08-06 1972-04-11 Ibm Method of making or modifying a pn-junction by ion implantation
US3615875A (en) * 1968-09-30 1971-10-26 Hitachi Ltd Method for fabricating semiconductor devices by ion implantation
US3571918A (en) * 1969-03-28 1971-03-23 Texas Instruments Inc Integrated circuits and fabrication thereof

Also Published As

Publication number Publication date
FR2143959A1 (https=) 1973-02-09
DE2231356A1 (de) 1973-01-18
US3737346A (en) 1973-06-05
GB1390853A (en) 1975-04-16
NL7209190A (https=) 1973-01-03
BE785660A (fr) 1972-10-16
FR2143959B1 (https=) 1978-06-02
CA944870A (en) 1974-04-02

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