IT941125B - Procedimento ed impianto per il pompaggio di gas - Google Patents

Procedimento ed impianto per il pompaggio di gas

Info

Publication number
IT941125B
IT941125B IT30926/71A IT3092671A IT941125B IT 941125 B IT941125 B IT 941125B IT 30926/71 A IT30926/71 A IT 30926/71A IT 3092671 A IT3092671 A IT 3092671A IT 941125 B IT941125 B IT 941125B
Authority
IT
Italy
Prior art keywords
plant
procedure
gas pumping
pumping
gas
Prior art date
Application number
IT30926/71A
Other languages
English (en)
Italian (it)
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Application granted granted Critical
Publication of IT941125B publication Critical patent/IT941125B/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IT30926/71A 1970-11-13 1971-11-10 Procedimento ed impianto per il pompaggio di gas IT941125B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7040599A FR2114039A5 (ja) 1970-11-13 1970-11-13

Publications (1)

Publication Number Publication Date
IT941125B true IT941125B (it) 1973-03-01

Family

ID=9064083

Family Applications (1)

Application Number Title Priority Date Filing Date
IT30926/71A IT941125B (it) 1970-11-13 1971-11-10 Procedimento ed impianto per il pompaggio di gas

Country Status (12)

Country Link
US (1) US3769806A (ja)
JP (1) JPS56637B1 (ja)
BE (1) BE775243A (ja)
CA (1) CA947990A (ja)
CH (1) CH550941A (ja)
DE (1) DE2155994A1 (ja)
FR (1) FR2114039A5 (ja)
GB (1) GB1375734A (ja)
IT (1) IT941125B (ja)
LU (1) LU64250A1 (ja)
NL (1) NL172590C (ja)
SE (1) SE377830B (ja)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
DE2949092A1 (de) * 1979-12-06 1981-06-11 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
GB2115602B (en) * 1982-02-24 1986-01-02 Philips Electronic Associated Getters in infra-red radiation detectors
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4608866A (en) * 1985-03-13 1986-09-02 Martin Marietta Corporation Small component helium leak detector
IT1197069B (it) * 1986-08-06 1988-11-25 Sgs Microelettronica Spa Trappola a fluido refrigerante per evaporatori sotto vuoto per la deposizione di sottili pellicole metalliche
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4017213C1 (ja) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5653113A (en) * 1995-04-07 1997-08-05 Rigaku Corporation Cooling system
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
KR101986159B1 (ko) * 2011-02-09 2019-06-05 브룩스 오토메이션, 인크. 극저온 펌프
US20140202174A1 (en) * 2013-01-24 2014-07-24 Cryomech, Inc. Closed Cycle 1 K Refrigeration System
JP6053552B2 (ja) * 2013-02-18 2016-12-27 住友重機械工業株式会社 クライオポンプ及びクライオポンプ取付構造

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
US3252652A (en) * 1963-01-24 1966-05-24 Bendix Balzers Vacuum Inc Process and apparatus for the production of high vacuums
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
FR2048253A5 (ja) * 1969-12-01 1971-03-19 Air Liquide

Also Published As

Publication number Publication date
US3769806A (en) 1973-11-06
CA947990A (en) 1974-05-28
GB1375734A (ja) 1974-11-27
CH550941A (fr) 1974-06-28
BE775243A (fr) 1972-05-12
SE377830B (ja) 1975-07-28
DE2155994A1 (de) 1972-05-18
JPS56637B1 (ja) 1981-01-08
LU64250A1 (ja) 1972-06-02
NL172590C (nl) 1983-09-16
NL172590B (nl) 1983-04-18
NL7115666A (ja) 1972-05-16
FR2114039A5 (ja) 1972-06-30

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