IT8224351A0 - Procedimento di riduzione a bassa temperatura per fotomaschere. - Google Patents
Procedimento di riduzione a bassa temperatura per fotomaschere.Info
- Publication number
- IT8224351A0 IT8224351A0 IT8224351A IT2435182A IT8224351A0 IT 8224351 A0 IT8224351 A0 IT 8224351A0 IT 8224351 A IT8224351 A IT 8224351A IT 2435182 A IT2435182 A IT 2435182A IT 8224351 A0 IT8224351 A0 IT 8224351A0
- Authority
- IT
- Italy
- Prior art keywords
- photomasks
- low temperature
- temperature reduction
- reduction procedure
- procedure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/005—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to introduce in the glass such metals or metallic ions as Ag, Cu
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/76—Patterning of masks by imaging
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Surface Treatment Of Glass (AREA)
- Glass Compositions (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/323,332 US4407891A (en) | 1981-11-20 | 1981-11-20 | Low temperature reduction process for large photomasks |
US06/323,333 US4390592A (en) | 1981-11-20 | 1981-11-20 | Low temperature reduction process for photomasks |
Publications (3)
Publication Number | Publication Date |
---|---|
IT8224351A0 true IT8224351A0 (it) | 1982-11-19 |
IT8224351A1 IT8224351A1 (it) | 1984-05-19 |
IT1153650B IT1153650B (it) | 1987-01-14 |
Family
ID=26983897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT24351/82A IT1153650B (it) | 1981-11-20 | 1982-11-19 | Procedimento di riduzione a bassa temperatura per fotomaschere |
Country Status (3)
Country | Link |
---|---|
FR (1) | FR2516911B1 (it) |
GB (2) | GB2109786B (it) |
IT (1) | IT1153650B (it) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004037882A1 (de) * | 2003-12-19 | 2005-07-14 | Boraglas Gmbh | Glas mit geringer Eigenfloureszenz und hoher Strahlungsabsorption |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3508894A (en) * | 1966-09-29 | 1970-04-28 | Owens Illinois Inc | Method for metailizing a glass surface |
US3620795A (en) * | 1968-04-29 | 1971-11-16 | Signetics Corp | Transparent mask and method for making the same |
JPS5319208B2 (it) * | 1972-11-27 | 1978-06-20 | ||
AU7016574A (en) * | 1974-06-18 | 1975-12-18 | Matvienko V Y | Photomasks |
GB1459722A (en) * | 1975-02-28 | 1976-12-31 | Bokov J S | Method for making coloured photostencils |
GB1548283A (en) * | 1976-06-23 | 1979-07-11 | Berezin G N | Methods of preapring transparent artworks |
DE3042553C2 (de) * | 1979-11-19 | 1995-01-05 | Corning Glass Works | Silberhalogenid enthaltender photochromer Glaskörper |
-
1982
- 1982-11-19 IT IT24351/82A patent/IT1153650B/it active
- 1982-11-22 GB GB08233198A patent/GB2109786B/en not_active Expired
- 1982-11-22 FR FR8219491A patent/FR2516911B1/fr not_active Expired
-
1984
- 1984-11-21 GB GB08429335A patent/GB2163274B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB2109786B (en) | 1986-12-17 |
GB2163274B (en) | 1987-02-04 |
IT1153650B (it) | 1987-01-14 |
IT8224351A1 (it) | 1984-05-19 |
GB8429335D0 (en) | 1985-01-03 |
GB2109786A (en) | 1983-06-08 |
FR2516911A1 (fr) | 1983-05-27 |
GB2163274A (en) | 1986-02-19 |
FR2516911B1 (fr) | 1986-10-03 |
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