IT7924411A0 - Procedimento per la deposizione di silicio in forma microcristallina. - Google Patents
Procedimento per la deposizione di silicio in forma microcristallina.Info
- Publication number
- IT7924411A0 IT7924411A0 IT7924411A IT2441179A IT7924411A0 IT 7924411 A0 IT7924411 A0 IT 7924411A0 IT 7924411 A IT7924411 A IT 7924411A IT 2441179 A IT2441179 A IT 2441179A IT 7924411 A0 IT7924411 A0 IT 7924411A0
- Authority
- IT
- Italy
- Prior art keywords
- deposition
- silicon
- procedure
- microcrystalline form
- microcrystalline
- Prior art date
Links
- 230000008021 deposition Effects 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19782831819 DE2831819A1 (de) | 1978-07-19 | 1978-07-19 | Verfahren zum abscheiden von silicium in feinkristalliner form |
Publications (2)
Publication Number | Publication Date |
---|---|
IT7924411A0 true IT7924411A0 (it) | 1979-07-17 |
IT1122595B IT1122595B (it) | 1986-04-23 |
Family
ID=6044834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT24411/79A IT1122595B (it) | 1978-07-19 | 1979-07-17 | Procedimento per la deposizione di silicio in forma microcristallina |
Country Status (5)
Country | Link |
---|---|
US (1) | US4255463A (it) |
JP (1) | JPS5516000A (it) |
DE (1) | DE2831819A1 (it) |
DK (1) | DK302979A (it) |
IT (1) | IT1122595B (it) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60173002A (ja) * | 1984-02-20 | 1985-09-06 | Sanwa Shoji Kk | イエロ−種コ−ンスタ−チの脱色方法 |
JPH03112525A (ja) * | 1989-09-28 | 1991-05-14 | Matsushita Electric Ind Co Ltd | 野菜切り機 |
JPH04254228A (ja) * | 1991-02-05 | 1992-09-09 | Shugo Fuwa | 車輛牽引装置 |
JP3321890B2 (ja) * | 1992-06-23 | 2002-09-09 | ソニー株式会社 | 半導体結晶の形成方法及び半導体素子 |
US5904981A (en) * | 1998-05-27 | 1999-05-18 | Tokuyama Corporation | Polycrystal silicon rod having an improved morphyology |
EP2021279A2 (en) * | 2006-04-13 | 2009-02-11 | Cabot Corporation | Production of silicon through a closed-loop process |
DE102007023041A1 (de) * | 2007-05-16 | 2008-11-20 | Wacker Chemie Ag | Polykristalliner Siliciumstab für das Zonenziehen und ein Verfahren zu dessen Herstellung |
CN102027156A (zh) * | 2008-03-26 | 2011-04-20 | Gt太阳能公司 | 在化学气相沉积反应器中用于配气的系统和方法 |
US20110159214A1 (en) * | 2008-03-26 | 2011-06-30 | Gt Solar, Incorporated | Gold-coated polysilicon reactor system and method |
JP5137670B2 (ja) * | 2008-04-23 | 2013-02-06 | 信越化学工業株式会社 | 多結晶シリコンロッドの製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1123300B (de) * | 1960-06-03 | 1962-02-08 | Siemens Ag | Verfahren zur Herstellung von Silicium oder Germanium |
US3496037A (en) * | 1967-05-29 | 1970-02-17 | Motorola Inc | Semiconductor growth on dielectric substrates |
US4087571A (en) * | 1971-05-28 | 1978-05-02 | Fairchild Camera And Instrument Corporation | Controlled temperature polycrystalline silicon nucleation |
JPS5019013U (it) * | 1973-06-15 | 1975-03-03 |
-
1978
- 1978-07-19 DE DE19782831819 patent/DE2831819A1/de active Granted
-
1979
- 1979-07-17 JP JP9088679A patent/JPS5516000A/ja active Granted
- 1979-07-17 IT IT24411/79A patent/IT1122595B/it active
- 1979-07-18 DK DK302979A patent/DK302979A/da not_active Application Discontinuation
- 1979-07-18 US US06/058,455 patent/US4255463A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE2831819A1 (de) | 1980-01-31 |
IT1122595B (it) | 1986-04-23 |
JPS5516000A (en) | 1980-02-04 |
JPS6156163B2 (it) | 1986-12-01 |
DK302979A (da) | 1980-01-20 |
DE2831819C2 (it) | 1987-08-06 |
US4255463A (en) | 1981-03-10 |
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