IT201600098502A1 - Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' - Google Patents
Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'Info
- Publication number
- IT201600098502A1 IT201600098502A1 IT102016000098502A IT201600098502A IT201600098502A1 IT 201600098502 A1 IT201600098502 A1 IT 201600098502A1 IT 102016000098502 A IT102016000098502 A IT 102016000098502A IT 201600098502 A IT201600098502 A IT 201600098502A IT 201600098502 A1 IT201600098502 A1 IT 201600098502A1
- Authority
- IT
- Italy
- Prior art keywords
- relation
- temperature
- high stability
- mems gyroscope
- humidity changes
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102016000098502A IT201600098502A1 (it) | 2016-09-30 | 2016-09-30 | Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' |
US15/466,722 US10488200B2 (en) | 2016-09-30 | 2017-03-22 | MEMS gyroscope having a high stability with respect to temperature and humidity variations |
EP17162662.5A EP3301398B1 (en) | 2016-09-30 | 2017-03-23 | A mems gyroscope having a high stability with respect to temperature and humidity variations |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102016000098502A IT201600098502A1 (it) | 2016-09-30 | 2016-09-30 | Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' |
Publications (1)
Publication Number | Publication Date |
---|---|
IT201600098502A1 true IT201600098502A1 (it) | 2018-03-30 |
Family
ID=58410211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT102016000098502A IT201600098502A1 (it) | 2016-09-30 | 2016-09-30 | Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' |
Country Status (3)
Country | Link |
---|---|
US (1) | US10488200B2 (it) |
EP (1) | EP3301398B1 (it) |
IT (1) | IT201600098502A1 (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201600098502A1 (it) * | 2016-09-30 | 2018-03-30 | St Microelectronics Srl | Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' |
EP3882571B1 (en) * | 2020-03-16 | 2022-08-24 | Murata Manufacturing Co., Ltd. | Gyroscope with locked secondary oscillation frequency |
FR3108897B1 (fr) * | 2020-04-03 | 2022-04-08 | Commissariat Energie Atomique | Procédé de commande d’un capteur |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050022596A1 (en) * | 2003-06-27 | 2005-02-03 | Jean-Claude Lehureau | Vibrating mass gyro |
US20110041609A1 (en) * | 2009-08-21 | 2011-02-24 | Analog Devices, Inc. | Offset Detection and Compensation for Micromachined Inertial Sensors |
JP2012255668A (ja) * | 2011-06-07 | 2012-12-27 | Denso Corp | 角速度センサ |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2023082B1 (en) * | 2007-07-05 | 2010-09-08 | STMicroelectronics Srl | Micro-electro-mechanical gyroscope with open-loop reading device and control method thereof |
ITUA20162172A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
IT201600098502A1 (it) * | 2016-09-30 | 2018-03-30 | St Microelectronics Srl | Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' |
-
2016
- 2016-09-30 IT IT102016000098502A patent/IT201600098502A1/it unknown
-
2017
- 2017-03-22 US US15/466,722 patent/US10488200B2/en active Active
- 2017-03-23 EP EP17162662.5A patent/EP3301398B1/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050022596A1 (en) * | 2003-06-27 | 2005-02-03 | Jean-Claude Lehureau | Vibrating mass gyro |
US20110041609A1 (en) * | 2009-08-21 | 2011-02-24 | Analog Devices, Inc. | Offset Detection and Compensation for Micromachined Inertial Sensors |
JP2012255668A (ja) * | 2011-06-07 | 2012-12-27 | Denso Corp | 角速度センサ |
Also Published As
Publication number | Publication date |
---|---|
EP3301398B1 (en) | 2019-10-16 |
US20180094929A1 (en) | 2018-04-05 |
US10488200B2 (en) | 2019-11-26 |
EP3301398A1 (en) | 2018-04-04 |
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