IT201600098502A1 - Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' - Google Patents

Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'

Info

Publication number
IT201600098502A1
IT201600098502A1 IT102016000098502A IT201600098502A IT201600098502A1 IT 201600098502 A1 IT201600098502 A1 IT 201600098502A1 IT 102016000098502 A IT102016000098502 A IT 102016000098502A IT 201600098502 A IT201600098502 A IT 201600098502A IT 201600098502 A1 IT201600098502 A1 IT 201600098502A1
Authority
IT
Italy
Prior art keywords
relation
temperature
high stability
mems gyroscope
humidity changes
Prior art date
Application number
IT102016000098502A
Other languages
English (en)
Inventor
Gabriele Gattere
Alessandro Tocchio
Carlo Valzasina
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102016000098502A priority Critical patent/IT201600098502A1/it
Priority to US15/466,722 priority patent/US10488200B2/en
Priority to EP17162662.5A priority patent/EP3301398B1/en
Publication of IT201600098502A1 publication Critical patent/IT201600098502A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
IT102016000098502A 2016-09-30 2016-09-30 Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita' IT201600098502A1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT102016000098502A IT201600098502A1 (it) 2016-09-30 2016-09-30 Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'
US15/466,722 US10488200B2 (en) 2016-09-30 2017-03-22 MEMS gyroscope having a high stability with respect to temperature and humidity variations
EP17162662.5A EP3301398B1 (en) 2016-09-30 2017-03-23 A mems gyroscope having a high stability with respect to temperature and humidity variations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102016000098502A IT201600098502A1 (it) 2016-09-30 2016-09-30 Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'

Publications (1)

Publication Number Publication Date
IT201600098502A1 true IT201600098502A1 (it) 2018-03-30

Family

ID=58410211

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102016000098502A IT201600098502A1 (it) 2016-09-30 2016-09-30 Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'

Country Status (3)

Country Link
US (1) US10488200B2 (it)
EP (1) EP3301398B1 (it)
IT (1) IT201600098502A1 (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201600098502A1 (it) * 2016-09-30 2018-03-30 St Microelectronics Srl Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'
EP3882571B1 (en) * 2020-03-16 2022-08-24 Murata Manufacturing Co., Ltd. Gyroscope with locked secondary oscillation frequency
FR3108897B1 (fr) * 2020-04-03 2022-04-08 Commissariat Energie Atomique Procédé de commande d’un capteur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050022596A1 (en) * 2003-06-27 2005-02-03 Jean-Claude Lehureau Vibrating mass gyro
US20110041609A1 (en) * 2009-08-21 2011-02-24 Analog Devices, Inc. Offset Detection and Compensation for Micromachined Inertial Sensors
JP2012255668A (ja) * 2011-06-07 2012-12-27 Denso Corp 角速度センサ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2023082B1 (en) * 2007-07-05 2010-09-08 STMicroelectronics Srl Micro-electro-mechanical gyroscope with open-loop reading device and control method thereof
ITUA20162172A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
IT201600098502A1 (it) * 2016-09-30 2018-03-30 St Microelectronics Srl Giroscopio mems avente elevata stabilita' nei confronti delle variazioni di temperatura e di umidita'

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050022596A1 (en) * 2003-06-27 2005-02-03 Jean-Claude Lehureau Vibrating mass gyro
US20110041609A1 (en) * 2009-08-21 2011-02-24 Analog Devices, Inc. Offset Detection and Compensation for Micromachined Inertial Sensors
JP2012255668A (ja) * 2011-06-07 2012-12-27 Denso Corp 角速度センサ

Also Published As

Publication number Publication date
EP3301398B1 (en) 2019-10-16
US20180094929A1 (en) 2018-04-05
US10488200B2 (en) 2019-11-26
EP3301398A1 (en) 2018-04-04

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