IT1399906B1 - Metodo per la pulitura di una piazzola di contatto di una microstruttura e relative sonda di contatto a sbalzo e testa di misura a sonde a sbalzo [cantilever]. - Google Patents
Metodo per la pulitura di una piazzola di contatto di una microstruttura e relative sonda di contatto a sbalzo e testa di misura a sonde a sbalzo [cantilever].Info
- Publication number
- IT1399906B1 IT1399906B1 ITMI2010A000724A ITMI20100724A IT1399906B1 IT 1399906 B1 IT1399906 B1 IT 1399906B1 IT MI2010A000724 A ITMI2010A000724 A IT MI2010A000724A IT MI20100724 A ITMI20100724 A IT MI20100724A IT 1399906 B1 IT1399906 B1 IT 1399906B1
- Authority
- IT
- Italy
- Prior art keywords
- microstructure
- cantilever
- cleaning
- head
- contact
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2898—Sample preparation, e.g. removing encapsulation, etching
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI2010A000724A IT1399906B1 (it) | 2010-04-28 | 2010-04-28 | Metodo per la pulitura di una piazzola di contatto di una microstruttura e relative sonda di contatto a sbalzo e testa di misura a sonde a sbalzo [cantilever]. |
PCT/EP2011/002096 WO2011134645A1 (en) | 2010-04-28 | 2011-04-27 | Method for cleaning a contact pad of a microstructure and corresponding cantilever contact probe |
US13/661,980 US8981803B2 (en) | 2010-04-28 | 2012-10-26 | Method for cleaning a contact pad of a microstructure and corresponding cantilever contact probe and probe testing head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI2010A000724A IT1399906B1 (it) | 2010-04-28 | 2010-04-28 | Metodo per la pulitura di una piazzola di contatto di una microstruttura e relative sonda di contatto a sbalzo e testa di misura a sonde a sbalzo [cantilever]. |
Publications (2)
Publication Number | Publication Date |
---|---|
ITMI20100724A1 ITMI20100724A1 (it) | 2011-10-29 |
IT1399906B1 true IT1399906B1 (it) | 2013-05-09 |
Family
ID=43417084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI2010A000724A IT1399906B1 (it) | 2010-04-28 | 2010-04-28 | Metodo per la pulitura di una piazzola di contatto di una microstruttura e relative sonda di contatto a sbalzo e testa di misura a sonde a sbalzo [cantilever]. |
Country Status (3)
Country | Link |
---|---|
US (1) | US8981803B2 (it) |
IT (1) | IT1399906B1 (it) |
WO (1) | WO2011134645A1 (it) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2725363B9 (de) * | 2012-10-24 | 2015-03-25 | Multitest elektronische Systeme GmbH | Kontaktfeder für einen Prüfsockel für die Hochstrom-Prüfung eines elektronischen Bauteils |
JP6407672B2 (ja) * | 2014-11-18 | 2018-10-17 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
CN112797922B (zh) * | 2019-11-13 | 2024-03-19 | 中国航发南方工业有限公司 | 用于叶片小微孔角度测量的测量针的使用方法 |
JP2021117085A (ja) * | 2020-01-24 | 2021-08-10 | ミネベアミツミ株式会社 | プローブ、測定装置、及び測定方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01219566A (ja) * | 1988-02-26 | 1989-09-01 | Nec Corp | プローブ・カード |
US5763879A (en) * | 1996-09-16 | 1998-06-09 | Pacific Western Systems | Diamond probe tip |
US20030102878A1 (en) * | 2001-10-24 | 2003-06-05 | Montoya Thomas T. | Bore probe card and method of testing |
US7759949B2 (en) * | 2004-05-21 | 2010-07-20 | Microprobe, Inc. | Probes with self-cleaning blunt skates for contacting conductive pads |
JP2007218840A (ja) * | 2006-02-20 | 2007-08-30 | Fujitsu Ltd | プローブ、プローブカード及び検査装置 |
WO2007133585A2 (en) * | 2006-05-11 | 2007-11-22 | Anasys Instruments | Quantitative calorimetry signal for sub-micron scale thermal analysis |
-
2010
- 2010-04-28 IT ITMI2010A000724A patent/IT1399906B1/it active
-
2011
- 2011-04-27 WO PCT/EP2011/002096 patent/WO2011134645A1/en active Application Filing
-
2012
- 2012-10-26 US US13/661,980 patent/US8981803B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8981803B2 (en) | 2015-03-17 |
US20130049782A1 (en) | 2013-02-28 |
WO2011134645A1 (en) | 2011-11-03 |
ITMI20100724A1 (it) | 2011-10-29 |
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