IT1393026B1 - Metodo e strumento per la misura ottica di spessore di materiali trasparenti o semi-trasparenti - Google Patents

Metodo e strumento per la misura ottica di spessore di materiali trasparenti o semi-trasparenti

Info

Publication number
IT1393026B1
IT1393026B1 ITBS2009A000020A ITBS20090020A IT1393026B1 IT 1393026 B1 IT1393026 B1 IT 1393026B1 IT BS2009A000020 A ITBS2009A000020 A IT BS2009A000020A IT BS20090020 A ITBS20090020 A IT BS20090020A IT 1393026 B1 IT1393026 B1 IT 1393026B1
Authority
IT
Italy
Prior art keywords
transparent
semi
instrument
thickness
optical measurement
Prior art date
Application number
ITBS2009A000020A
Other languages
English (en)
Inventor
Maurizio Donini
Andrea Pasquali
Andrea Bandera
Original Assignee
Nirox Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nirox Srl filed Critical Nirox Srl
Priority to ITBS2009A000020A priority Critical patent/IT1393026B1/it
Priority to PCT/IT2010/000035 priority patent/WO2010089793A2/en
Priority to EP10711724.4A priority patent/EP2394135B1/en
Publication of ITBS20090020A1 publication Critical patent/ITBS20090020A1/it
Application granted granted Critical
Publication of IT1393026B1 publication Critical patent/IT1393026B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
ITBS2009A000020A 2009-02-09 2009-02-09 Metodo e strumento per la misura ottica di spessore di materiali trasparenti o semi-trasparenti IT1393026B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
ITBS2009A000020A IT1393026B1 (it) 2009-02-09 2009-02-09 Metodo e strumento per la misura ottica di spessore di materiali trasparenti o semi-trasparenti
PCT/IT2010/000035 WO2010089793A2 (en) 2009-02-09 2010-02-04 Method and instrument for optical thickness measurement of transparent or semitransparent materials
EP10711724.4A EP2394135B1 (en) 2009-02-09 2010-02-04 Method and instrument for optical thickness measurement of transparent or semitransparent materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITBS2009A000020A IT1393026B1 (it) 2009-02-09 2009-02-09 Metodo e strumento per la misura ottica di spessore di materiali trasparenti o semi-trasparenti

Publications (2)

Publication Number Publication Date
ITBS20090020A1 ITBS20090020A1 (it) 2010-08-10
IT1393026B1 true IT1393026B1 (it) 2012-04-11

Family

ID=41305828

Family Applications (1)

Application Number Title Priority Date Filing Date
ITBS2009A000020A IT1393026B1 (it) 2009-02-09 2009-02-09 Metodo e strumento per la misura ottica di spessore di materiali trasparenti o semi-trasparenti

Country Status (3)

Country Link
EP (1) EP2394135B1 (it)
IT (1) IT1393026B1 (it)
WO (1) WO2010089793A2 (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201319559D0 (en) * 2013-11-06 2013-12-18 Pilkington Group Ltd In-process monitoring of coatings on glass articles
CN111426273A (zh) * 2019-01-29 2020-07-17 法国圣戈班玻璃公司 用于测量基质的厚度的测量方法和测量装置
DE102020104243A1 (de) * 2020-02-18 2021-08-19 Research Center Pharmaceutical Engineering Gmbh Interferometrie mit niedriger Kohärenz an mit thermischen Herstellungsverfahren hergestellten Zusammensetzungen
WO2023089496A1 (en) * 2021-11-19 2023-05-25 Syncro S.R.L. Method and apparatus for measuring the thickness of one or more layers of a multi-layer film obtained by blow extrusion process
CN115077401B (zh) * 2022-07-27 2022-12-02 深圳市深视智能科技有限公司 测厚探头、测厚装置及测厚方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5850287A (en) * 1997-07-11 1998-12-15 Hewlett-Packard Company Roller assembly having pre-aligned for on-line thickness measurements
US7206076B2 (en) * 2003-11-04 2007-04-17 Lumetrics, Inc. Thickness measurement of moving webs and seal integrity system using dual interferometer
EP1596157A1 (fr) * 2004-05-06 2005-11-16 Edye Thomas Dispositif de mesure par interférométrie de l' épaisseur de couches transparentes minces sur un substrat en défilement

Also Published As

Publication number Publication date
EP2394135B1 (en) 2013-11-27
ITBS20090020A1 (it) 2010-08-10
EP2394135A2 (en) 2011-12-14
WO2010089793A2 (en) 2010-08-12
WO2010089793A3 (en) 2010-09-30

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