IT1229314B - Dispositivo per la misura non distruttiva della resistenza ohmica di strati sottili. - Google Patents

Dispositivo per la misura non distruttiva della resistenza ohmica di strati sottili.

Info

Publication number
IT1229314B
IT1229314B IT8920335A IT2033589A IT1229314B IT 1229314 B IT1229314 B IT 1229314B IT 8920335 A IT8920335 A IT 8920335A IT 2033589 A IT2033589 A IT 2033589A IT 1229314 B IT1229314 B IT 1229314B
Authority
IT
Italy
Prior art keywords
thin layers
ohmic resistance
destructive measurement
destructive
measurement
Prior art date
Application number
IT8920335A
Other languages
English (en)
Other versions
IT8920335A0 (it
Inventor
Gernot Thorn
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of IT8920335A0 publication Critical patent/IT8920335A0/it
Application granted granted Critical
Publication of IT1229314B publication Critical patent/IT1229314B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
IT8920335A 1988-04-30 1989-04-28 Dispositivo per la misura non distruttiva della resistenza ohmica di strati sottili. IT1229314B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3815011A DE3815011A1 (de) 1988-04-30 1988-04-30 Einrichtung zum zerstoerungsfreien messen des ohmschen widerstands duenner schichten

Publications (2)

Publication Number Publication Date
IT8920335A0 IT8920335A0 (it) 1989-04-28
IT1229314B true IT1229314B (it) 1991-08-08

Family

ID=6353500

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8920335A IT1229314B (it) 1988-04-30 1989-04-28 Dispositivo per la misura non distruttiva della resistenza ohmica di strati sottili.

Country Status (5)

Country Link
US (1) US4968947A (it)
JP (1) JPH01318975A (it)
DE (1) DE3815011A1 (it)
GB (1) GB2217858B (it)
IT (1) IT1229314B (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022563A1 (de) * 1990-04-11 1991-10-17 Flachglas Ag Verfahren zur kontaktlosen messung des elektrischen widerstands eines untersuchungsmaterials
US5140274A (en) * 1990-06-13 1992-08-18 Ball Corporation Apparatus for non-destructively measuring internal coating thickness and exposed metal area in containers and method therefor
US5223797A (en) * 1991-09-24 1993-06-29 Modern Controls, Inc. Rotatable capacitance sensor
US5212452A (en) * 1991-09-24 1993-05-18 Modern Controls, Inc. Rotatable capacitance sensor
US5225785A (en) * 1991-09-24 1993-07-06 Modern Controls, Inc. Apparatus for sensing the thickness of a moving sheet of film
DE4227734C2 (de) * 1992-08-21 1996-05-15 Leybold Ag Anordnung und Verfahren zum Messen der Dicke einer Schicht
DE4227735C2 (de) * 1992-08-21 1995-10-12 Leybold Ag Anordnung zum berührungslosen Messen der Dicke von Schichten
JP2922376B2 (ja) * 1992-12-26 1999-07-19 キヤノン株式会社 シート厚測定装置
US5602486A (en) * 1994-03-14 1997-02-11 Sandia Corporation Impedance sensing of flaws in non-homogenous materials
US5537048A (en) * 1994-03-14 1996-07-16 Sandia Corporation Sensing roller for in-process thickness measurement
FR2745912B1 (fr) * 1996-03-08 1998-05-29 Lorraine Laminage Procede et dispositif de controle de la soudabilite de toles sandwich
US6198290B1 (en) 1997-07-18 2001-03-06 Mark Krinker Method to detect defective capacitors in circuit and meters for that
DE19949977B4 (de) * 1999-10-13 2005-01-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Bestimmung des Vorhandenseins von anorganischen, organischen oder Oxidschichten auf metallischen Substraten oder der Messung von Oberflächentemperaturen von Kunststoffsubstraten
EP1182423B1 (de) * 2000-08-24 2004-01-07 Plast-Control Gerätebau GmbH Sensor zur kapazitiven Messung von Foliendicken
US8289031B1 (en) * 2011-05-16 2012-10-16 Rao Dantam K Apparatus for measuring insulation characteristics of coated steel sheet

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE842676C (de) * 1949-06-30 1952-06-30 Draegerwerk Ag Verfahren zur Bestimmung der elektrischen Leitfaehigkeit
DE1191591B (de) * 1958-01-17 1965-04-22 Licentia Gmbh Verfahren zum fotoelektrischen Bestimmen der relativen Lage wenigstens einer Kante eines Objektes
GB1291154A (en) * 1970-06-17 1972-10-04 William Robert Urmenyi Capacitance proximity switch
CH568569A5 (it) * 1974-02-06 1975-10-31 Bbc Brown Boveri & Cie
US4000458A (en) * 1975-08-21 1976-12-28 Bell Telephone Laboratories, Incorporated Method for the noncontacting measurement of the electrical conductivity of a lamella
US4208625A (en) * 1976-02-23 1980-06-17 Micro Sensors, Inc. Capacitive measuring system with automatic calibration
US4152767A (en) * 1976-09-27 1979-05-01 Atmospheric Sciences, Inc. Method and apparatus for measuring dimensions
JPS54133170A (en) * 1978-04-05 1979-10-16 Shionogi Seiyaku Kk Method and device for selectively measuring various electric constants
US4208624A (en) * 1978-08-09 1980-06-17 Bell Telephone Laboratories, Incorporated Method and apparatus for investigating dielectric semiconductor materials
US4210029A (en) * 1979-05-04 1980-07-01 Lad Research Industries, Inc. Differential fiber optic differential pressure sensor
CH645462A5 (de) * 1980-03-25 1984-09-28 Zumbach Electronic Ag Verfahren und vorrichtung zur beruehrungslosen messung einer dimension mindestens eines objekts.
US4394683A (en) * 1980-06-26 1983-07-19 Diffracto Ltd. New photodetector array based optical measurement systems
DE3335766A1 (de) * 1983-10-01 1985-04-11 Leybold-Heraeus GmbH, 5000 Köln Anordnung zur elektrischen messung von schichtdicken an laufenden baendern
US4569445A (en) * 1983-10-19 1986-02-11 At&T Technologies, Inc. Apparatus for measuring the thickness of disc-like articles
IE55213B1 (en) * 1984-05-02 1990-07-04 Wardell Gerald Edward A method for measuring the homogeneity of dispersion of a filler in a polymeric composite
DE3443967A1 (de) * 1984-12-01 1986-06-05 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur pruefung von bauelementen
JPS62298701A (ja) * 1986-06-18 1987-12-25 Ngk Insulators Ltd 非金属材料成形体の寸法測定法

Also Published As

Publication number Publication date
IT8920335A0 (it) 1989-04-28
DE3815011C2 (it) 1991-05-29
US4968947A (en) 1990-11-06
GB8909485D0 (en) 1989-06-14
GB2217858A (en) 1989-11-01
GB2217858B (en) 1992-08-19
JPH01318975A (ja) 1989-12-25
DE3815011A1 (de) 1989-11-16

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19960329