IT1206469B - Procedimento per fabbricare un dispositivo a circuito integrato a semiconduttori. - Google Patents

Procedimento per fabbricare un dispositivo a circuito integrato a semiconduttori.

Info

Publication number
IT1206469B
IT1206469B IT8423631A IT2363184A IT1206469B IT 1206469 B IT1206469 B IT 1206469B IT 8423631 A IT8423631 A IT 8423631A IT 2363184 A IT2363184 A IT 2363184A IT 1206469 B IT1206469 B IT 1206469B
Authority
IT
Italy
Prior art keywords
procedure
manufacturing
integrated circuit
semiconductor integrated
circuit device
Prior art date
Application number
IT8423631A
Other languages
English (en)
Other versions
IT8423631A0 (it
Inventor
Akihiro Tomozawa
Yoku Kaino
Shigeru Shimada
Nozomi Horino
Yoshiaki Yoshiura
Osamu Tsuchiya
Shozo Hosoda
Original Assignee
Hitachi Ltd
Hitachi Microcumputer Eng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcumputer Eng filed Critical Hitachi Ltd
Publication of IT8423631A0 publication Critical patent/IT8423631A0/it
Application granted granted Critical
Publication of IT1206469B publication Critical patent/IT1206469B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/5329Insulating materials
    • H01L23/53295Stacked insulating layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
IT8423631A 1983-11-18 1984-11-16 Procedimento per fabbricare un dispositivo a circuito integrato a semiconduttori. IT1206469B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216319A JPS60109250A (ja) 1983-11-18 1983-11-18 半導体集積回路装置

Publications (2)

Publication Number Publication Date
IT8423631A0 IT8423631A0 (it) 1984-11-16
IT1206469B true IT1206469B (it) 1989-04-27

Family

ID=16686661

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8423631A IT1206469B (it) 1983-11-18 1984-11-16 Procedimento per fabbricare un dispositivo a circuito integrato a semiconduttori.

Country Status (2)

Country Link
JP (1) JPS60109250A (it)
IT (1) IT1206469B (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0828419B2 (ja) * 1986-02-20 1996-03-21 富士通株式会社 配線構造

Also Published As

Publication number Publication date
IT8423631A0 (it) 1984-11-16
JPS60109250A (ja) 1985-06-14

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19951128