IT1165082B - Processo perfezionato per la produzione di depositi epitassiali - Google Patents

Processo perfezionato per la produzione di depositi epitassiali

Info

Publication number
IT1165082B
IT1165082B IT23198/79A IT2319879A IT1165082B IT 1165082 B IT1165082 B IT 1165082B IT 23198/79 A IT23198/79 A IT 23198/79A IT 2319879 A IT2319879 A IT 2319879A IT 1165082 B IT1165082 B IT 1165082B
Authority
IT
Italy
Prior art keywords
production
epitaxial deposits
process perfected
perfected
epitaxial
Prior art date
Application number
IT23198/79A
Other languages
English (en)
Other versions
IT7923198A0 (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT7923198A0 publication Critical patent/IT7923198A0/it
Application granted granted Critical
Publication of IT1165082B publication Critical patent/IT1165082B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/916—Autodoping control or utilization
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/974—Substrate surface preparation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT23198/79A 1978-06-05 1979-06-01 Processo perfezionato per la produzione di depositi epitassiali IT1165082B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/912,660 US4153486A (en) 1978-06-05 1978-06-05 Silicon tetrachloride epitaxial process for producing very sharp autodoping profiles and very low defect densities on substrates with high concentration buried impurity layers utilizing a preheating in hydrogen

Publications (2)

Publication Number Publication Date
IT7923198A0 IT7923198A0 (it) 1979-06-01
IT1165082B true IT1165082B (it) 1987-04-22

Family

ID=25432242

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23198/79A IT1165082B (it) 1978-06-05 1979-06-01 Processo perfezionato per la produzione di depositi epitassiali

Country Status (6)

Country Link
US (1) US4153486A (it)
EP (1) EP0005744B1 (it)
JP (1) JPS54159171A (it)
CA (1) CA1118536A (it)
DE (1) DE2960880D1 (it)
IT (1) IT1165082B (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479845A (en) * 1979-11-20 1984-10-30 Semiconductor Research Foundation Vapor growth with monitoring
EP0093848A3 (en) * 1982-05-12 1986-03-26 International Business Machines Corporation Semiconductor device fabrication process utilizing an added annealing step
US4548654A (en) * 1983-06-03 1985-10-22 Motorola, Inc. Surface denuding of silicon wafer
US4504330A (en) * 1983-10-19 1985-03-12 International Business Machines Corporation Optimum reduced pressure epitaxial growth process to prevent autodoping
US4859626A (en) * 1988-06-03 1989-08-22 Texas Instruments Incorporated Method of forming thin epitaxial layers using multistep growth for autodoping control
US5312764A (en) * 1993-05-28 1994-05-17 Motorola, Inc. Method of doping a semiconductor substrate
FR2766845B1 (fr) * 1997-07-31 1999-10-15 Sgs Thomson Microelectronics Procede d'epitaxie sur un substrat de silicium comprenant des zones fortement dopees a l'arsenic
US6274464B2 (en) 1998-02-06 2001-08-14 Texas Instruments Incorporated Epitaxial cleaning process using HCL and N-type dopant gas to reduce defect density and auto doping effects
US6080644A (en) * 1998-02-06 2000-06-27 Burr-Brown Corporation Complementary bipolar/CMOS epitaxial structure and process
KR20020028488A (ko) * 2000-10-10 2002-04-17 박종섭 에피층 성장 방법 및 이를 이용한 트랜지스터 제조 방법
JP2010098284A (ja) * 2008-09-19 2010-04-30 Covalent Materials Corp エピタキシャル基板用シリコンウェハの製造方法及びエピタキシャル基板の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE625516A (it) *
DE1414717A1 (de) * 1961-06-13 1968-12-12 Basf Ag Verfahren zur Herstellung magnetisierbarer Schichten auf Metalltrommeln
BE650116A (it) * 1963-07-05 1900-01-01
DE1225617B (de) * 1963-08-22 1966-09-29 Texas Instruments Inc Verfahren zum Herstellen epitaktisch gewachsener Halbleiterkristalle
DE1244224B (de) * 1965-12-03 1967-07-13 Knorr Bremse Gmbh Ausloeseeinrichtung fuer die Druckluftbremse von Lokomotiven
US3404450A (en) * 1966-01-26 1968-10-08 Westinghouse Electric Corp Method of fabricating an integrated circuit structure including unipolar transistor and bipolar transistor portions
US3501336A (en) * 1967-12-11 1970-03-17 Texas Instruments Inc Method for etching single crystal silicon substrates and depositing silicon thereon
US3847686A (en) * 1970-05-27 1974-11-12 Gen Electric Method of forming silicon epitaxial layers
JPS5322029B2 (it) * 1973-12-26 1978-07-06

Also Published As

Publication number Publication date
EP0005744A1 (de) 1979-12-12
JPS54159171A (en) 1979-12-15
CA1118536A (en) 1982-02-16
IT7923198A0 (it) 1979-06-01
JPS5612010B2 (it) 1981-03-18
DE2960880D1 (en) 1981-12-10
US4153486A (en) 1979-05-08
EP0005744B1 (de) 1981-09-23

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