IT1162272B - Perfezionamento nei sistemi di esame di microcircuiti ed in particolare nei dispositivi di rivelazione di posizionamento dei singoli componenti - Google Patents

Perfezionamento nei sistemi di esame di microcircuiti ed in particolare nei dispositivi di rivelazione di posizionamento dei singoli componenti

Info

Publication number
IT1162272B
IT1162272B IT48061/79A IT4806179A IT1162272B IT 1162272 B IT1162272 B IT 1162272B IT 48061/79 A IT48061/79 A IT 48061/79A IT 4806179 A IT4806179 A IT 4806179A IT 1162272 B IT1162272 B IT 1162272B
Authority
IT
Italy
Prior art keywords
improvement
individual components
detection devices
positioning detection
micro circuit
Prior art date
Application number
IT48061/79A
Other languages
English (en)
Italian (it)
Other versions
IT7948061A0 (it
Inventor
Lee R Reid
Charles R Ratliff
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of IT7948061A0 publication Critical patent/IT7948061A0/it
Application granted granted Critical
Publication of IT1162272B publication Critical patent/IT1162272B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
IT48061/79A 1978-02-21 1979-02-20 Perfezionamento nei sistemi di esame di microcircuiti ed in particolare nei dispositivi di rivelazione di posizionamento dei singoli componenti IT1162272B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/879,038 US4219771A (en) 1978-02-21 1978-02-21 Four-quadrant, multiprobe-edge sensor for semiconductor wafer probing

Publications (2)

Publication Number Publication Date
IT7948061A0 IT7948061A0 (it) 1979-02-20
IT1162272B true IT1162272B (it) 1987-03-25

Family

ID=25373314

Family Applications (1)

Application Number Title Priority Date Filing Date
IT48061/79A IT1162272B (it) 1978-02-21 1979-02-20 Perfezionamento nei sistemi di esame di microcircuiti ed in particolare nei dispositivi di rivelazione di posizionamento dei singoli componenti

Country Status (7)

Country Link
US (1) US4219771A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS54158175A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2906041A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2417778A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2014743B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1162272B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL7901287A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951370A (en) * 1979-11-05 1990-08-28 Texas Instruments Incorporated Method of making an intelligent multiprobe tip
DE3068052D1 (en) * 1979-11-05 1984-07-05 Texas Instruments Inc Probe assembly for testing integrated circuits
US4390885A (en) * 1981-06-26 1983-06-28 Texas Instruments Incorporated Apparatus and method for fluid transfer
US4888550A (en) * 1981-09-14 1989-12-19 Texas Instruments Incorporated Intelligent multiprobe tip
US4780670A (en) * 1985-03-04 1988-10-25 Xerox Corporation Active probe card for high resolution/low noise wafer level testing
US4749942A (en) * 1985-09-26 1988-06-07 Tektronix, Inc. Wafer probe head
IL79820A0 (en) * 1985-09-26 1986-11-30 Tektronix Inc Wafer probe head,and method of assembling same
JPS62134243U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-02-14 1987-08-24
JPH0342682Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-02-18 1991-09-06
DE3628104A1 (de) * 1986-08-19 1988-02-25 Feinmetall Gmbh Kontaktelement fuer pruefkarten
US4758785A (en) * 1986-09-03 1988-07-19 Tektronix, Inc. Pressure control apparatus for use in an integrated circuit testing station
USD320361S (en) 1989-06-02 1991-10-01 Tokyo Electron Limited Wafer probe plate holder
US5331275A (en) * 1991-12-09 1994-07-19 Fujitsu Limited Probing device and system for testing an integrated circuit
US5608172A (en) * 1995-03-16 1997-03-04 Texas Instruments Incorporated Die bond touch down detector
US5883519A (en) * 1996-02-23 1999-03-16 Kinetic Probe, Llc Deflection device
US6252414B1 (en) * 1998-08-26 2001-06-26 International Business Machines Corporation Method and apparatus for testing circuits having different configurations with a single test fixture
DE102004027886A1 (de) * 2004-05-28 2005-12-22 Feinmetall Gmbh Prüfeinrichtung zur elektrischen Prüfung eines Prüflings sowie Verfahren zur Herstellung einer Prüfeinrichtung
KR101061593B1 (ko) * 2008-04-21 2011-09-01 윌테크놀러지(주) 프로브 카드
US8963567B2 (en) 2011-10-31 2015-02-24 International Business Machines Corporation Pressure sensing and control for semiconductor wafer probing
CN109427923B (zh) * 2017-08-25 2020-06-16 中国科学院大连化学物理研究所 一种半导体薄膜四象限光照传感器及其制备方法
JP7714392B2 (ja) * 2021-07-01 2025-07-29 株式会社日本マイクロニクス 検査装置、位置調整ユニット及び位置調整方法
CN114252753B (zh) * 2021-12-24 2022-08-19 中国科学院长春光学精密机械与物理研究所 一种用于筛选四象限探测器的方法和系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2558563A (en) * 1948-10-29 1951-06-26 Gen Electric Piezoelectric strain gauge
US2782636A (en) * 1950-08-21 1957-02-26 Max P Peucker Internal balances for wind force measurements on aerodynamic objects
US3093710A (en) * 1959-07-06 1963-06-11 Gulton Ind Inc Piezoelectric electromechanical transducer
GB1063381A (en) * 1963-01-18 1967-03-30 Wilmot Breeden Ltd Improvements in or relating to surface testing apparatus
US3446065A (en) * 1965-08-11 1969-05-27 Transistor Automation Corp Automatic probing apparatus
US3810017A (en) * 1972-05-15 1974-05-07 Teledyne Inc Precision probe for testing micro-electronic units
US3849728A (en) * 1973-08-21 1974-11-19 Wentworth Labor Inc Fixed point probe card and an assembly and repair fixture therefor

Also Published As

Publication number Publication date
FR2417778A1 (fr) 1979-09-14
JPS54158175A (en) 1979-12-13
IT7948061A0 (it) 1979-02-20
GB2014743A (en) 1979-08-30
DE2906041A1 (de) 1979-10-11
FR2417778B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1983-06-03
GB2014743B (en) 1982-08-04
US4219771A (en) 1980-08-26
JPS6330585B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-06-20
NL7901287A (nl) 1979-08-23

Similar Documents

Publication Publication Date Title
IT1162272B (it) Perfezionamento nei sistemi di esame di microcircuiti ed in particolare nei dispositivi di rivelazione di posizionamento dei singoli componenti
MX160043A (es) Mejoras en dispositivo para anilisis inmonologicos y procedimiento para su obtencion
IT7948677A0 (it) Procedimento e dispositivo per la sinterizzazione
ES511400A0 (es) Procedimiento y dispositivo para optimizar la relacion resistencia mecanica-peso en sistema de fijacion de piezas de dos componentes.
IT1054025B (it) Dispositivo alimentatore di fluido complesso filtrante impiegato nello stesso e metodo di montaggio
AT386158B (de) Dokument und pruefvorrichtung
BR7900663A (pt) Dispositivo e conjunto ministradores
IT1145650B (it) Procedimento per la preparazione di tessere e simili e dispositivo per l attuazione del procedimento
ES505588A0 (es) Dispositivo indicador electronico y metodo de fabricacion del mismo
DE3485280D1 (de) Hochdurchsatz-schaltkreispruefgeraet und prueftechnik zur vermeidung von uebersteuerungsschaden.
AR216150A1 (es) Procedimiento y dispositivo de filtracion
IT1113297B (it) Sistema e procedimento per collaudare circuiti integrati
IT7950675A0 (it) Procedimento ed apparecchio di separazione liquido-solidi
IT1156877B (it) Procedimento ed apparecchio di registrazione magnetofluidica
ES508739A0 (es) Metodo y su correspondiente aparato analizador de particulas.
MX150342A (es) Mejoras en sistema de prueba de integridad de botellas y similares
TR20606A (tr) Kati likid ekstraksiyon safhalari icin usul ve cihaz
ATA133782A (de) Fluessigkeits- und/oder gasuntersuchungsvorrichtung
DK353883D0 (da) Stanse- og vikleapparat
IT7969490A0 (it) Dispositivo per stabilire la posizione e le dimensioni di oggetti
AR223857A1 (es) Sistema y aparato perchador
SE8008091L (sv) Anordning for uppmetning av orienteringen i vertikal- och vridningsled av borrkernor
ATA583180A (de) Nachmelk- und melkzeugabnahmevorrichtung
IT7969416A0 (it) Procedimento ed apparecchio avvisatore
DK579781A (da) Indretning til markering paa landkort og lignende grafiske produkter

Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19950111