IT1160372B - Apparecchiatura per la generazione di particelle caricate - Google Patents

Apparecchiatura per la generazione di particelle caricate

Info

Publication number
IT1160372B
IT1160372B IT7831077A IT3107778A IT1160372B IT 1160372 B IT1160372 B IT 1160372B IT 7831077 A IT7831077 A IT 7831077A IT 3107778 A IT3107778 A IT 3107778A IT 1160372 B IT1160372 B IT 1160372B
Authority
IT
Italy
Prior art keywords
generation
equipment
loaded particles
loaded
particles
Prior art date
Application number
IT7831077A
Other languages
English (en)
Other versions
IT7831077A0 (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT7831077A0 publication Critical patent/IT7831077A0/it
Application granted granted Critical
Publication of IT1160372B publication Critical patent/IT1160372B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
IT7831077A 1977-12-29 1978-12-21 Apparecchiatura per la generazione di particelle caricate IT1160372B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/865,652 US4146810A (en) 1977-12-29 1977-12-29 Radiation heated acceleration

Publications (2)

Publication Number Publication Date
IT7831077A0 IT7831077A0 (it) 1978-12-21
IT1160372B true IT1160372B (it) 1987-03-11

Family

ID=25345962

Family Applications (1)

Application Number Title Priority Date Filing Date
IT7831077A IT1160372B (it) 1977-12-29 1978-12-21 Apparecchiatura per la generazione di particelle caricate

Country Status (6)

Country Link
US (1) US4146810A (it)
EP (1) EP0002688B1 (it)
JP (1) JPS5854461B2 (it)
CA (1) CA1091363A (it)
DE (1) DE2861299D1 (it)
IT (1) IT1160372B (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5852297B2 (ja) * 1979-06-04 1983-11-21 株式会社日立製作所 マイクロ波イオン源
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
JPH0719560B2 (ja) * 1983-08-15 1995-03-06 アプライド マテリアルズ インコーポレーテッド イオン打込み装置及び方法
JP2635028B2 (ja) * 1986-10-24 1997-07-30 株式会社日立製作所 マイクロ波イオン源
US5026997A (en) * 1989-11-13 1991-06-25 Eaton Corporation Elliptical ion beam distribution method and apparatus
AU655009B2 (en) * 1991-03-25 1994-12-01 Commonwealth Scientific And Industrial Research Organisation Arc source macroparticle filter
DE69226360T2 (de) * 1991-03-25 1999-02-25 Commw Scient Ind Res Org Makroteilchenfilter in lichtbogenquelle
CN1311508C (zh) * 2000-11-20 2007-04-18 瓦里安半导体设备联合公司 用于产生低能量离子束的离子光学装置和方法
US7435971B2 (en) * 2006-05-19 2008-10-14 Axcelis Technologies, Inc. Ion source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631282A (en) * 1969-01-23 1971-12-28 Nat Electrostatics Corp Accelerating tube with heating means
JPS5142269B2 (it) * 1973-05-18 1976-11-15
US4011449A (en) * 1975-11-05 1977-03-08 Ibm Corporation Apparatus for measuring the beam current of charged particle beam

Also Published As

Publication number Publication date
JPS5494198A (en) 1979-07-25
JPS5854461B2 (ja) 1983-12-05
CA1091363A (en) 1980-12-09
IT7831077A0 (it) 1978-12-21
EP0002688B1 (de) 1981-11-04
DE2861299D1 (en) 1982-01-14
EP0002688A1 (de) 1979-07-11
US4146810A (en) 1979-03-27

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